5 Port Pilot Operated Solenoid Valve VFS1000/2000/3000/4000/5000/6000 Series

/60 Hz 200 VAC, 50/60 Hz 110 to 120 VAC, 50/60 Hz 220 VAC, 50/60 Hz 24 VDC 12 VDC 240 VAC, 50/60 Hz 9 Other VFS VFR 4 5 6 VQ7 7 Option Body Option Pilot type 0 1 Standard Direct manual override Nil R Internal pilot External pilot Option Option How to Order Pilot Valve Assembly SF4 F 1 22 Coil rated voltage 1 100 VAC, 50/60 Hz 2 200 VAC, 50/60 Hz 3 110 to 120 VAC, 50/60 Hz 4 220 VAC, 50

CNA

100 100 100 MGF 50 50 50 40 40 40 200 200 80 80 80 63 63 63 100 100 CY1 50 50 50 Load weight m(kg) Load weight m(kg) 50 40 30 50 40 30 40 40 40 MY1 20 20 10 10 5 4 3 5 4 3 2 2 1 100 200 300 400 500 1000 1 100 200 300 400 500 1000 Max. speed V(mm/s) Max. speed V(mm/s) 3.3-7 Cylinder with Lock/Double Acting Single Rod Series CNA 45, 50, 63, 80, 100 How to Order CNA L N 50 100 JN D Standard

0.4

/60 Hz) 200 VAC (50/60 Hz) 110 VAC (50/60 Hz) 220 VAC (50/60 Hz) 24 VDC 12 VDC Note 1) Refer to page 16 for power consumption of AC type.

Non-rotating Double Power Cylinder/ Double Power Cylinder (without non-rotating mechanism) Series MGZ/MGZR ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

(mm) Stroke range Bore size (mm) I J K M B D C E KA GA GB H 51 57 66 78 92 110 144 M5 x 0.8 M5 x 0.8 M6 x 1 M6 x 1 M8 x 1.25 M8 x 1.25 M12 x 1.75 8 8 10 10 14 14 20 11 12 22 25 25 25 25 25 30 36 45 55 68 87 11 12 16 21 26 32 36 21 24 30 36 46 53 65 16 26 28.5 34.5 40 46.5 54 20 21 35 40 45 50 50 29 33 38 46 55 66 86 39 43 49 59 71 82 106 20 25 32 40 50 63 80 12.5 18 19.5 23.5 28 34.5 36 Up

3 Port Air Operated Valve Series SYJA300 1

VV3ZA2-50-031-01 1 pc. VV3ZA4-50-031-021 pc. VZA214-P2 pcs. VZA414-2P2 pcs. VVZ200-31A-11 pc.

Non-rotating Double Double Power Power Cylinder Cylinder (without Series MGZ Series MGZR non-rotating mechanism)

10.5 10.5 12.5 12.5 13 62 62 81 81 111 111 136 42 42 53 53 73 73 90 32 32 43 43 64 64 78 39 43 49 59 71 82 106 +0.058 0 +0.058 0 129 151 185 208 237 263 298 10 10 14 14 22 22 25 33 33 45 45 65 65 75 MB-B03 +0.070 0 MB-B05 +0.070 0 +0.084 0 +0.084 0 +0.084 0 MB-B08 MB-B12 B Rotation 90 Bore size (mm) A B A + B + 90 20 25 32, 40 50, 63 80 35 30 30 35 30 50 50 50 50 35 175 170 170 175 155 A

VQ4000

Nil W 2-5-5 Base Mounted 6 Series VQ4000 Plug-in Type Conduit terminal 2 position single: VQ410 0 1 23.5 23.5 50 158 50 90 108 158 Indicator light 11(12.5) 11(12.5) 5 3 2(B) port 4(A) port 9 4 2 38 48 10.5 1 11 A B 38 24.6 48 4 2 A 13.5 13.5 30 45 2-5.6 Mounting hole 14 5 1 3 12 30 45 2-5.6 Mounting hole 5-Rc 1/4, 3/8 (5(R1), 3(R2) port Rc 1/4) Manual override Courtesy of Steven Engineering

VFR

100 VAC, 50/60 Hz 2 200 VAC, 50/60 Hz 3 110 to 120 VAC, 50/60 Hz 4 220 VAC, 50/60 Hz 5 24 VDC 6 12 VDC 7 240 VAC, 50/60 Hz 9 Other Option 3-5-94 95 5 Port Pilot Operated Solenoid Valve Rubber Seal, Plug-in/Non Plug-in Series VFR6000 Cylinder Speed Chart Use as a guide for selection.

HRX-OM-Y098

S/ cm 0.5 to 45 9 0.5 to 45 0.5 to 45 9 0.5 to 45 0.5 to 45 9 0.5 to 45 Particle filter filtration accuracy (Accessory) m 5 5 5 5 5 5 CH1 : Rc1 (Symbol FG1,Symbol NNPT1) Circulating fluid outlet, Circulating fluid return port CH2 : Rc1/2 (Symbol FG1/2,Symbol NNPT1/2) Tank drain port CH1 : Rc3/4 (Symbol FG3/4,Symbol NNPT3/4 CH2 : Rc1/2 (Symbol FG1/2,Symbol NNPT1/2 CH1 : Stainless steel, Copper

Series CQS 10-/21- 11-/22- ø12, ø16, ø20, ø25 Compact Cylinder

50 55 60 35 40 45 50 55 60 35 40 45 50 55 60 65 70 75 80 40 45 50 55 60 65 70 75 80 85 25 30 35 40 45 50 25 30 35 40 45 50 25 30 35 40 45 50 55 60 65 70 30 35 40 45 50 55 60 65 70 75 CQ-M3 x 35L x 40L x 45L x 50L x 55L x 60L CQ-M3 x 35L x 40L x 45L x 50L x 55L x 60L CQ-M5 x 35L x 40L x 45L x 50L x 55L x 60L x 65L x 70L x 75L x 80L CQ-M5 x 40L x 45L x 50L x 55L x 60L x 65L x 70L x 75L x 80L

Sine Rodless Cylinder Series REA/REB

Stroke (mm) Bore size 25 25 mm Port thread type 32 32 mm Bore size 25, 32, 40 50, 63 32, 50, 63 Type Rc NPT G Symbol Nil TN TF 40 40 mm 50 50 mm 63 63 mm Specifications 25 32 40 50 63 Bore size (mm) Fluid Air Proof pressure 1.05 MPa Maximum operating pressure 0.7 MPa Minimum operating pressure 0.18 MPa 10 to 60C (No freezing) Ambient and fluid temperature Piston speed (Max.)

SYJ3000/5000/7000

/60 Hz L plug 25 2500 mm LN Without lead wire 2 200 VAC 50/60 Hz connector 30 3000 mm LO Without connector 110 VAC 50/60 Hz 50 5000 mm 3 M With lead wire [115 VAC 50/60 Hz] M plug MN Without lead wire 220 VAC 50/60 Hz connector 4 MO Without connector [230 VAC 50/60 Hz] W0 Without connector cable M8 connector For type W, DC voltage is only available.

Air Slide Table

50 50 56 48 56 112 118 124 Model F 45 40 48 58 42 55 50 55 62 GA 18 18 18 22 48 73 74 96 118 KA 126 183 211 239 NA 4 4 4 4 4 8 8 8 8 MXQR2010 MXQR2020 MXQR2030 MXQR2040 MXQR2050 MXQR2075 MXQR20-100 MXQR20-125 MXQR20-150 Note) Note) Note) Refer to the bottom view of the MXQR20-50. 16 Air Slide Table/Reversible Type Series MXQR Note 1)If long bolts are used, they can touch the guide block

51

) (n = 2, 4, 6) Note 3) D-H7 D-H7W D-H7BA D-H7NF (n 2) 2 70 + 45 (n 2) 25 + 45 70 25 10 (n = 2, 3, 4, 5) (n = 2, 4, 6) Note 3) D-C73C D-C80C D-H7C (n 2) 2 80 + 50 (n 2) 30 + 50 80 5 30 (n = 2, 3, 4, 5) (n = 2, 4, 6) Note 3) D-B5 D-B64 D-G5 D-K59 (n 2) 2 70 + 50 (n 2) 25 + 50 5 70 25 (n = 2, 3, 4, 5) (n = 2, 4, 6) Note 3) (n 2) 2 75 + 50 (n 2) 30 + 50 D-B59W 10 75 30 (n = 2, 3, 4,

C92

Counter pivot E Bore (mm) R1 d2 CK S5 K1 K2 L3 G1 L1 G2 EM G3 CA H6 10 11 13 15 15 18 22,5 31 10 10 11 11 15 15 18 20 10 12 12 16 16 20 25 32 5,5 5,5 6,6 6,6 9 9 11 14 38 41 50 52 66 76 94 118 51 54 65 67 86 96 124 156 10 10 14 14 18 20 28 34 21 24 33 37 47 55 70 97 4 4 6 6 6 6 18 23 18 22 30 35 40 50 60 88 26 28 32 40 50 60 70 90 31 35 45 50 60 70 90 126 32 36 45 50 63 71 90 115 8 10 12

45

for 1/4" (Inch size) N3: With One-touch fitting for 5/32" N7: With One-touch fitting for 1/4" N9: With One-touch fitting for 5/16" SX 000-50-3AP PG PH SX 000-50-4AFor 45(N) (Flat ribbon cable) SX 000-50-5ASX 000-50-6AT T1 For 45 (Terminal block) SX 000-50-7A1-6-110 Base Mounted Series SX3000/5000 How to Increase Manifold Bases (1) Loosen bolt (a) fixing the manifold base until it begins

Air Combination

40 55 9 18 7 50 65 1/4, 3/8, 1/2 AC40B-06-D 1/8 155.2 149.1 35.5 38.4 77.6 40 35.5 0 50 40 55 9 18 7 50 65 3/4 AC50B-D 1/8 186.2 220.1 43 38.4 93.1 30 45 0 70 50 70 11 20 8 60 80 3/4, 1 AC60B-D 1/8 196.2 234.1 45 38.4 98.1 30 45 0 70 50 70 11 20 8 60 80 1 Options Semi-standard specifications Metal bowl with Digital level gauge With PC/PA bowl Metal bowl Square Round type Round type Round

58

40 133 341 364 M30 x 1.5 30.5 1/2 98 45 30 1/ 5 stroke 120 346 75 40 141 367 388 M36 x 1.5 34.5 3/4 106 50 25 The minimum stroke with rod boot is 30 mm or more.

HRL

0.55 0.10 to 0.49 0.10 to 0.68 0.10 to 0.49 Minimum operating flow rate*6 L/min 20 2 25 2 40 2 Tank capacity L 42 7 42 7 60 7 Bypass circuit (With valve) Installed Electric conductivity setting range S/cm 0.5 to 45*9 0.5 to 45 0.5 to 45*9 0.5 to 45 0.5 to 45*9 0.5 to 45 Circulating fluid system Pump capacity Particle filter nominal filtration rating (Accessory) m 5 5 5 5 5 5 Circulating

VQZ1000/2000/3000

Yes Note) None Note) Yes Yes (W/o indicator light) Yes (W/o indicator light) Note) Note) Coil voltage Note) 1 2 3 4 5 6 9 100 VAC (50/60 Hz) 200 VAC (50/60 Hz) 110 VAC (50/60 Hz) 220 VAC (50/60 Hz) 24 VDC 12 VDC Note) DIN is applicable to VQZ2000/3000. Bracket Assembly Note) Part no.