Manifold Specifications Applicable cable O.D. 3.5 to 7 : With light/surge voltage suppressor 3-3-63 Series VZ5000 Type 21 Manifold VV5Z5-21Station 1 (4(A), 2(B) port) 2n-Rc 1/8 Grommet (G), (H) (Pitch) (Mounting hole) 6-Rc 1/4 (1(P), 3/5(R) port) PE port G: 300 mm H: 600 mm Manual override (Non-locking) (Lead wire length) (mm) Stations 2 3 66 46 85 65 20 408 388 L1 L2 4 104 84 5 123 103 6 142 122 7 161 141 8 180 160
Pad typePad diameter Pad diameter (Symbol) Pad type 150 32 250 300 340 H (Flat with rib) HT (Thin flat with rib) Dimensions: Pad Unit ZP2-32H 26 2.5 2 8 2 5 32 34 14 3 x 3 3 x 5 ZP2-300H ZP2-340H 240 4 x M8 x 1.25 276 160 11 10 13 10 50 45 23 52 52 19 340 298 301 344 88 88 4 x 9 4 x 14 4 x 14 4 x 9 33 Series ZP2 Heavy-duty Pad Dimensions ZP2-150HT ZP2-250HT 150 4 x M8 x 1.25 103 124 11 10
Bore size Stroke Max. stroke (mm) Bore size (mm) Standard stroke (mm) Standard Non-rotating Double rod 8 10 12 16 20 25 10, 25, 40, 50, 80, 100 100 100 400 10, 25, 40, 50, 80, 100, 125, 160, 200 10, 25, 40, 50, 80, 100, 125, 160, 200, 250, 300 200 200 1000 500 1000 Not available with air cushion. Other strokes available on request.
LG1H21PA-100-F LG1H21PA-200-F LG1H21PA-300-F LG1H21PA-400-F 100 200 300 400 60 80 160 260 180 280 Dimenstions inside ( ) are for a 100 mm stroke. Positioning Time Guide Positioning time Positioning time (sec.) A: Acceleration time B: Constant velocity time C: Deceleration time D: Resting time (0.4 sec.)
Bore size Stroke Max. stroke (mm) Bore size (mm) Standard stroke (mm) Standard Non-rotating Double rod 8 10 12 16 20 25 10, 25, 40, 50, 80, 100 100 100 400 10, 25, 40, 50, 80, 100, 125, 160, 200 10, 25, 40, 50, 80, 100, 125, 160, 200, 250, 300 200 200 1000 1000 500 Not available with air cushion. Other strokes available on request.
cylinder body Can be mounted on four sides CS1 1in = 25.4mm CQ2 Overall length mm Weight kg (lb) Series 180 219 16.6 (36.6) CQ2 200 226 20.6 (45.4) 180 30.4 (67.0) 385 CS1 200 39.5 (87.1) 390 Comparison with 100mm stroke and rod end male threads Variations Applicable auto switch models Rod end configuration Standard strokes Size Type Action Series 10 20 30 40 50 75 100 125 150 175 200 250
Exploded View: VQ1000-Plug Lead Unit (F, P, T, S kit) . 115 115 116 121 122 122 123 126 126 127 130 131 132 136 140 144 148 152 156 160 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 164 167 168 172 174 176 177 179 184 184 185 186 186 187 188 188 190 194 198 202
A Series XLA (mm) B mm Model Weight kg (lb) A mm Conductance l/s 40 XLA-16 XLA-25 XLA-40 XLA-50 Little heavy metal contamination The valve does not contain heavy metals such as Ni (nickel) or Cr (chrome) and a low sputtering yield also helps to minimize heavy metal contamination of semiconductor wafers. 103 0.25 (0.55) 5 50 113 0.45 (0.99) 14 65 158 1.1 (2.43) 45 70 170 1.6 (3.53) 80 160
With barb fitting With drain guide Metal bowl Metal bowl with level gauge Model B B 107 160 214 251 255 B B AC10A AC20A AC30A AC40A 208 246 249 234 272 275 209 247 250 AC40A-06 6 F.R.L.
A Series XLA (mm) B mm Model Weight kg (lb) A mm Conductance l/s 40 XLA-16 XLA-25 XLA-40 XLA-50 Little heavy metal contamination The valve does not contain heavy metals such as Ni (nickel) or Cr (chrome) and a low sputtering yield also helps to minimize heavy metal contamination of semiconductor wafers. 103 0.25 (0.55) 5 50 113 0.45 (0.99) 14 65 158 1.1 (2.43) 45 70 170 1.6 (3.53) 80 160
151 6 131 122 188 179 7 150 141 216 207 8 169 160 244 235 9 188 179 272 263 10 207 198 300 291 L1 L2 L1 L2 ARM1000 ARM2000 14-4-54 37 Manifold Regulator Modular Style Series ARM2500/3000 How to Order F.R.L.
Stations L1 L2 3 74 56 6 122 104 8 154 136 10 186 168 20 346 328 2 58 40 4 90 72 5 106 88 7 138 120 9 170 152 11 202 184 12 218 200 13 234 216 14 250 232 15 266 248 16 282 264 17 298 280 18 314 296 19 330 312 1.2-45 Series SYJ5000 40 Type Manifold: Bottom Ported/SS5YJ5-40Station -M5 Grommet (G), (H) (Lead wire length) G: 300 H: 600 4-4.5 (Mounting holes) 13 (Pitch) P=16 21 103.2 (GZ, GS
l b --" ,m'i$;:f, 4ra 20 Standard Stroke lmm) 30 40 50 60 75 100 125 175 200 225 250 275 300 350 400 150 Y f r N t * w -l Yw Y Ns a a a a a a a a a a a a a o a a a a a a a a a a a a a a a a a '*?
Pulling Strength Model Without inner sleeve With inner sleeve TU1208 140 N 500 N TU1065 140 N 450 N TU0805 110 N 250 N TU0604 80 N 180 N TU0425 50 N 160 N Reference: Thrust Force Occurring at 0.8 MPa Model Load TU0425 10 N TU0604 25 N TU0805 40 N TU1065 65 N TU1208 90 N Note 3) Please consult with SMC regarding applicable tube separately.
materials Pad diameter: 63, 80 Compared with the ZP series ( ) * The pad material when weight was measured is NBR. 8 16.4 ZP (Current model) ZP3E ZP2/Flat type ZP3E/Flat type with groove Pad diameter Suction port Area [mm2] Suction port Area [mm2] 32 8.4 55.4 40 6 28.3 50 63 8 50.2 16.4 211 80 100 10 78.52 125 Pad diameter Weight [g] Weight [g] 32 56 40 91 57 50 110 75 63 230 150 80 270 160
151 6 131 122 188 179 7 150 141 216 207 8 169 160 244 235 9 188 179 272 263 10 207 198 300 291 L1 L2 L1 L2 ARM1000 ARM2000 14-4-54 37 Manifold Regulator Modular Style Series ARM2500/3000 How to Order F.R.L.
Applicable stroke table Stroke [mm] Size 30 50 100 150 200 250 300 350 400 450 500 Manufacturable stroke range 25 15 to 400 32 20 to 500 25 - .
Station n L1 L2 L3 L4 Station 20 341 328 304 296 3 69 56 32 24 6 117 104 80 72 8 149 136 112 104 10 181 168 144 136 Station 2 53 40 16 8 4 85 72 48 40 5 101 88 64 56 7 133 120 96 88 9 165 152 128 120 11 197 184 160 152 12 213 200 176 168 13 229 216 192 184 14 245 232 208 200 15 261 248 224 216 16 277 264 240 232 17 293 280 256 248 18 309 296 272 264 19 325 312 288 280 4-4-27 Series SYJ500
Please consult with SMC. 10 9 8 25 7 6 5 20 4 16 3 2 12 1 0 50 100 200 150 250 300 Stroke ST (mm) 550 Compact Cylinder: Standard Type Double Acting, Single Rod Series CQS 12, 16, 20, 25 How to Order B 20 D 30 CQS M9BW B D 20 30 CDQS With auto switch Made to Order Refer to page 552 for details.
Standard Stroke Standard stroke (mm) Maximum manufacturable stroke (mm) Bore size (mm) 16 50, 100, 150, 200, 250, 300, 350, 400, 450, 500, 550, 600 1000 25, 40 1500 Strokes are manufacturable in 1 mm increments, up to the maximum stroke. However, add -XB10 to the end of the part number for non-standard strokes from 51 to 599.