Electric Actuator / Low profile slider type

Note 10) A reference value for correcting an error in reciprocal operation. -10- (3) LEMH (Linear guide single axis type) / LEMHT (Linear guide double axis type) Model LEMH25/LEMHT25 LEMH32/LEMHT32 50, 100, 150, 100, 150, 200, 250, 300, Stroke (mm) Note 1) 50, 100, 150, 200, 250, 300, 350, 400, 450, 500, 550, 600, (700), (800), (900), (1000) 350, 400, 450, 500, 550, 600, (700), (800), (900

Blow Gun Series VMG

VMG1-06-150-300 VMG1-06-200-300 VMG1-06-150-600 VMG1-06-200-600 VMG1-06-150-100 VMG1-06-200-100 VMG1-06-150-150 VMG1-06-200-150 VMG1-08-250-100 VMG1-08-300-100 VMG1-08-350-100 VMG1-08-250-150 VMG1-08-300-150 VMG1-08-350-150 VMG1-08-250-300 VMG1-08-300-300 VMG1-08-350-300 VMG1-08-250-600 VMG1-08-300-600 VMG1-08-350-600 Nozzle size Nozzle length 1.5 2 1.5 2 1.5 2 1.5 2 2.5 3 3.5 2.5 3 3.5 2.5

48

Cylinder stroke [mm] Bore size Standard stroke [mm] 12 (10 x 2) 16 (12 x 2) 10, 20, 30, 50, 100 20 (16 x 2) 25 (20 x 2) 20, 30, 50, 100, 150 Port thread type Nil M thread 12 to 32 Rc 32 (25 x 2) 40 (32 x 2) 50 (40 x 2) 63 (45 x 2) 80 (56 x 2) 100 (71 x 2) 40 to 100 TN NPT TF G 25, 50, 100, 150, 200 Refer to page 4 for intermediate strokes.

C95

12 16 16 20 20 25 50 63 75 90 110 132 49 58 71 87 110 136 64 72 90 100 126 150 79 90 110 120 153 178 50 55 70 80 100 120 32 40 50 63 80 100 Rod boot (gaiter) e max f I h Bore (mm) Hub 101-150 Hub 51-100 Hub 1-50 Hub 151-200 Hub 201-300 Hub 101-150 Hub 51-100 Hub 1-50 Hub 151-200 Hub 201-300 42 43 52 52 58 65 23 23 25 25 29 29 12.5 12.5 12.5 12.5 12.5 12.5 25 25 25 25 25 25 37.5 37.5 37.5

Air Cylinder/End Lock Series MBB ø32, ø40, ø50, ø63, ø80, ø100

Rod end nut 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 Clevis pin 50 Standard Locking release bolt (N type only) 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 63 Single knuckle joint 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 80 Double knuckle joint (with pin) Option 100 25, 50, 75, 100, 125, 150,

DOC1023125

Applicable stroke table Size Stroke [mm] 50 100 150 200 250 300 350 400 450 500 550 600 650 700 750 800 850 900 950 1000 1100 1200 25 32 40 25 - .

DOC1023126

(Unit: %) H 150 100 Sets the position loop P constant. *Please perform the actuator operation after changing this parameter setting under the responsibility of the user. Position loop P constant A 150 100 1 to 200 B 150 100 C 90 100 H 130 140 Sets the speed loop P constant.

Air Cylinder Double Acting, Single Rod JMB Series ø 32, ø 40, ø 45, ø 50, ø 56, ø 63, ø 67, ø 80, ø 85, ø 100

Standard Strokes Bore size [mm] Standard stroke [mm] Max. manufacturable stroke 32 25, 50, 75, 100, 125, 150, 175, 200, 250, 300 300 40 25, 50, 75, 100, 125, 150, 175, 200, 250, 300 300 45 25, 50, 75, 100, 125, 150, 175, 200, 250, 300 300 50 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400 400 56 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400 400 63 25, 50, 75, 100, 125, 150

Air Cylinder

Standard Strokes Bore size [mm] Standard stroke [mm] Max. manufacturable stroke 32 25, 50, 75, 100, 125, 150, 175, 200, 250, 300 300 40 25, 50, 75, 100, 125, 150, 175, 200, 250, 300 300 45 25, 50, 75, 100, 125, 150, 175, 200, 250, 300 300 50 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400 400 56 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400 400 63 25, 50, 75, 100, 125, 150

Air Cylinder/Low Friction Series MB l Q ø32, ø40, ø50, ø63, ø80, ø100

, 175, 200, 250, 300, 350, 400, 450, 500 C95 40 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 50 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 CA1 63 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 CS1 80 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 100 25, 50, 75, 100, 125, 150, 175, 200

Precautions 1

151 to 200 201 to 300 101 to 150 151 to 200 201 to 300 20 25 32 40 81 93 106 131 25 37.5 50 75 23.5 10.5 12.5 36 30 68 18 85 97 110 135 25 37.5 50 75 23.5 10.5 12.5 36 32 72 18 85 97 110 135 25 37.5 50 75 23.5 10.5 36 12.5 32 72 18 102 27 46 90 115 140 25 37.5 50 75 10.5 12.5 41 77 20 D(mm) ZZ Bore size (mm) -X 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 20 25 32 40 143 156 168 181

HRX-OM-I051

Tap Water) Substance Facility water Circulating water spec. spec. pH (25C) 6.5 to 8.2 6.0 to 8.0 Electrical conductivity (25C) (s/cm) *Circulating fluid 1 to 500 100 to 800 0.5 to 300 Chloride ion (mgCl-/L) Max. 200 Max.50 2-/L) Max.200 Max.50 Sulfate ion (mgSO4 Acid consumption (pH4.8) (mgCaCO3/L) Max.100 Max.50 Total hardness (mgCaCO3/L) Max.200 Max.70 Calcium hardness (mgCaCO3/L) Max.150

Refrigerated Thermo-chiller

Mass Note 10) (kg) Safety standards 170 175 275 145 170 UL, CE marking, SEMI (S2-0703, S8-0701, F47-0200), SEMATECH (S2-93, S8-95) Note 1) It should have no condensation. Note 2) FluorinertTM is a trademark of 3M and GALDEN is a registered trademark of Solvay Solexis, Inc. Regarding the fluid other than the above, please contact SMC.

OMU0023

(1 bit) 145 20 10 85 15 10 Reading of internal parameters (7 words) 270 40 15 150 25 10 Operation mode selection 165 25 10 95 15 10 Commands for virtual I/O operation by serial communication 195 30 15 110 20 10 Reading of alarm history (4 words) 215 30 15 120 20 10 Clearing of alarm history 245 35 15 135 20 10 Confirmation of communication connection 165 25 10 95 15 10 The communication

SI Unit for Vacuum Manifold

Specifications Item Specification General Dimensions (W x L x H)mm 25.5 x 102.4 x 76.5 Weight 150 g Housing materials PBT Maximum number of ejectors 16 Maximum number of sensors 16 Applicable standard CE/UKCA Marked, RoHS directive Withstand voltage 500 VAC 1 min.

Hydraulic Cylinders

x 145l 40 (M) 150 x 150l 45 (M) 155 x 155l 50 (M) 180 x 180l 75 (M) 205 x 205l 100 (M) 4 Series CHKDB Water Resistant Type A special scraper is installed on the basic cylinder to prevent liquid in the surrounding area from entering the cylinder.

BP1000

Refer to back cover for Safety Instructions and P. 145 and 146 and the Operation Manual for common precautions. Operation manual is available from the SMC web site. http://www.smcworld.com Selection Warning Operation Warning 1. Confirm the specifications.

Electric Actuator / Guide rod Slider

Overhang direction:L3[mm] 250 250 600mm stroke L3 m 200 200 500mm or less 150 150 600mm stroke or less 100 100 50 50 0 0 0 1 2 3 4 5 0 1 2 3 4 5 Workload[kg] Workload[kg] 300 300 250 250 Overhang direction:L4[mm] L4 m Overhang direction:L4[mm] 600mm stroke 200 200 600mm stroke or less 500mm stroke or less 150 150 100 100 50 50 0 0 0 1 2 3 4 5 0 1 2 3 4 5 Workload[kg] Workload[kg] 500 500

Cylinder with Turntable Series MGT

, 175, 200 121.5 145 111.5 (mm) Bore size (mm) OB OL P PA PB PW Q RA RB RC S SA SB T U VA VB Nil TN TF NPT 1/4 117 128 168 58 74 89 54 56 71 100 125 150 24 24 35 188 225 272 Rc 1/4 Rc 3/8 Rc 3/8 9 8 8 14 17.5 20 124 156 188 148 198 236 39 41 51 70 80 100 14 14.5 17.5 G 1/4 G 3/8 G 3/8 63 80 100 110 140 166 142 180 210 28 25.5 32.5 NPT 3/8 NPT 3/8 (mm) 25st 50, 75, 100st Larger than 100st

A

E N S I O N S A I R P I L O T O P E R AT E D T Y P E (N)VBA2200-03, (N)VBA4200-04 mm Model Port Size A B C D E F G H J K L (N)VBA2200-(N)03 38 300 126.5 53 118 98 44 45 60.5 18 15 (N)VBA4200-(N)04 12 404 167 96 150 130 62.8 62 90 17 15 40 Courtesy of Steven Engineering, Inc. !