4/5 Port Solenoid Valve

: 8, 5/16" (4.9) 35 2-3.2 (For mounting) (Light/surge voltage suppressor) 36 + 28 18 25 16.1 21 31.5 [38.5] 1.6 P R2 R1 1.6 (PE port) 1/8 (P, R1, R2 port) 27.2 L plug connector (L): SYJ7 20-L-01 3 4 5 M plug connector (M): SYJ7 20-M-01 3 4 5 DIN terminal (D): SYJ7 20-D-01 3 4 5 M8 connector (WO): SYJ7 20-WO-01 3 4 5 Approx. 300 (Lead wire length) 65 57.5 31.5 [38.5] Max. 10 16.1 46.2 M8

Basic type / Direct mount type Series CY3B/CY3R

Bore size 6, 10, 15 Symbol Type M thread Rc NPT G 15 15 mm 20 Nil 20 mm 20, 25, 32, 40 25 25 mm TN TF Switch rail 50, 63 32 32 mm Nil 40 With switch rail 40 mm N 50 Without switch rail 50 mm Note 1) A type with switch rail has built-in auto switch magnets.

MGP

40 stroke 20 30 100 P=0.5MPa P=0.5MPa 200 80 100 25 10 20 50 50 40 Load weight m (kg) 3 4 5 16 40 20 30 32 12 2 Load weight m (kg) 1 25 20 10 0.3 0.4 0.5 5 4 16 12 3 0.2 2 0.1 10 100 50 200 40 30 20 1 Eccentric distance l (mm) 0.5 0.3 0.4 40 to 124 stroke 0.2 30 20 0.1 P=0.5MPa 10 100 50 20 30 40 200 25 20 10 Eccentric distance l (mm) Load weight m (kg) 2 3 4 5 16 12 Over 75 stroke 1 100

MY1

to 40) (25 to 40) Hard anodized (63) (50 to 63) (16 to 20) (25 to 40) (16 to 20) Seal List MY1C16 MY1C20 MY1C25 MY1C32 MY1C40 MY1C50 MY1C63 Qty.

ZP

8, 10, 13, 16, 20, 25, 32, 40, 50 2, 4, 6, 8, 2 x 4, 3.5 x 7, Pad dia.

Table of Contents

O.D. 1 8 1 4 1 8 1 4 3 8 1 8 1 4 3 8 1 8 1 4 3 8 1 4 3 8 1 2 1 4 3 8 1 2 1 4 3 8 1 2 1 4 3 8 1 2 21 25 22 27 38 30 32 39 31 32 37 38 44 66 38 43 65 53 53 68 51 52 67 10 17 19 17 19 20 18 21 20 18 21 20 22 21 25 22 21 25 23 22 25 23 22 25 KFL04-01 KFL04-02 KFL06-01 KFL06-02 KFL06-03 KFL08U-01 KFL08U-02 KFL08U-03 KFL08N-01 KFL08N-02 KFL08N-03 KFL10U-02 KFL10U-03 KFL10U-04 KFL10N-02 KFL10N-03

Air Cylinder Series MB

(n 2) n MB 2 (Different surfaces, Same surface) 20 25 D-Y7W D-Y7WV 1 20 25 20 + 10 (n 2) 20 + 15 (n 2) 25 + 10 (n 2) MB1 n 2 (Different surfaces, Same surface) 20 30 D-Y7BAL CA2 1 20 30 20 + 10 (n 2) 20 + 15 (n 2) 30 + 10 (n 2) n CS1 Note 1) n = 3, 4, 5 Note 2) Center trunnion type is not included.

ZP

Buffer body Bellows 20, 25, 32 Bellows 40, 50 Applicable tubing O.D.

CQS

12 16 5, 10, 15, 20 25, 30 2.2-10 20 25 5, 10, 15, 20 25, 30, 35, 40 45, 50 Series CQS 12, 16 20, 25 12 16 20 25 5, 10 2.2-16 Solid state switch D-F9N, F9NV D-F9P, F9PV D-F9B, F9BV D-F9NW, F9NWV D-F9PW, F9PWV D-F9BW, F9BWV Series CQSK 12 16 5, 10, 15, 20 25, 30 20 25 5, 10, 15, 20 25, 30, 35, 40 45, 50 2.2-24 Series CQSlS 12 16 5, 10, 15, 20 25, 30 20 25 5, 10, 15, 20 25, 30, 35, 40 45,

CM2

28.5 32.5 25 27.5 31 35 60 62.5 66 70 69.5 72 75.5 79.5 20 25 32 40 20 25 32 40 20 25 32 40 20 25 32 40 20 25 32 40 20 25 32 40 20 25 32 40 20 25 32 40 20 25 32 40 20 25 32 40 20 25 32 40 20 25 32 40 0 0 1 6 6 6 7 12 3 3 4 9 0 0 0.5 5.5 5 5 6 11 3.5 3.5 4.5 9.5 1.5 1.5 2.5 7.5 D-B5 D-B6 D-B59W D-G5NTL D-B5 D-B6 D-C7 D-C8 D-C73C D-C80C D-C7/C8 D-H7l D-H7lW D-H7BAL D-H7lF D-C73C D-C80C D-H7C

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

The load factor for each direction can be obtained as follows. x = 0/250 = 0 y = 50/180 = 0.27 z = 200/1000 = 0.2 5. x + y + z = 0.47 1 LER LEH LEY -X5 1000 1500 1500 11LEFS 800 11LEJS 1000 1000 Lz 600 L2 [mm] L1 [mm] L3 [mm] 25A400 500 500 LEC 200 Ly Lx LEC S 0 5 10 15 20 25 0 0 5 10 15 20 25 0 0 5 10 15 20 25 0 LEC SS-T Work load [kg] Work load [kg] Work load [kg] LEC Y LEC Y Motorless

Electric Actuator

LEY ll -lB 16 25 32 A B C With motor cover/LEY ll -lC 16 25 32 Motor cable Motor cable Motor cable (2 x 5) Step motor Servo motor Step motor Servo motor 15 15 Lock cable (3.5) 20 24 Lock cable 20 20 20 20 24 Cable length 400 Motor cable Cable length 250 65 24 65 20 24 Motor cable (2 x 5) W X X2 [mm] [mm] T2 X2 Size T2 Step motor Servo motor Size W X W X 16 25 32 7.5 83 16 25 32 105.8 124.3

Electric Actuators

8 25 25 18 Standard motor 8 12 8 12 24 5 10 5 10 Vertical 32 10 12 10 20 10 12 10 20 40 High rigidity direct acting guide LJ1H 20 20 40 44 Horizontal 50 25 25 60 Non-standard motor 8 12 8 12 66 5 10 5 10 Vertical 74 10 10 82 Options Page 100 Made to Order 101 Clean room specification 104 Dust seal specification 110 TSUBAKI CABLEVEYOR specification 122 Construction 134 Mounting

Sine Rodless Cylinder Series REA/REB

0 Moment (Nm) 25 5 10 15 20 0 Moment (Nm) 5 10 15 20 0 25 25 Moment (Nm) REAHT25,32 REAHT25,32 REAHT25,32 REA 0.05 REAHT25 REAHT25 REAHT32 REAHT25 REAHT32 REB Deflection (mm) Deflection (mm) 0.03 0.04 0.02 REC 0.03 REAHT32 0.02 0.02 0.01 CY 0.01 0.01 CX 20 40 0 60 20 40 0 60 80 20 40 0 60 Moment (Nm) Moment (Nm) Moment (Nm) MQ Note) Deflection when a moment other than the above is applied

AC Servo Motor Driver (Pulse input type/Positioning type ）

B1 AWG 20 B2 Note.

CY1

25 32 40 50 63 CY1B Basic type Non-integrated guide 6 10 15 20 25 32 40 50 63 Basic type Direct mount CY1R Magnetic rodless cylinder 6 10 15 20 25 32 40 Slide bearing type CY1S 6 10 15 20 25 32 40 Ball bushing type CY1L Integrated guide 10 15 20 High precision guide type CY1H 25 (1 shaft) 25 (2 shafts) 32 Bilateral piping Centralized piping The piping type for CY1R6 is bilateral piping only

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

/25 CY1H15/20/25 CY1H15/20/25 CY1H15/20 CY1H15/20 CY1H25 CY1H15/20 CY1H25 0.08 0.03 CY1H25 Deflection (mm) Deflection (mm) Deflection (mm) Deflection (mm) 0.02 0.06 0.02 0.04 0.01 0.01 0.02 25 25 25 5 10 15 20 0 Moment (Nm) 5 10 15 20 0 Moment (Nm) 5 10 15 20 0 Moment (Nm) CY1HT25/32 CY1HT25/32 CY1HT25/32 0.05 CY1HT25 CY1HT25 CY1HT32 CY1HT25 CY1HT32 0.03 Deflection (mm) Deflection (mm) 0.04

15

The load factor for each direction can be obtained as follows. x = 0/250 = 0 y = 50/180 = 0.27 z = 200/1000 = 0.2 5. x + y + z = 0.47 1 1000 1500 1500 800 1000 1000 Lz 600 L2 [mm] L1 [mm] L3 [mm] 400 500 500 200 Ly Lx 0 5 10 15 20 25 0 0 5 10 15 20 25 0 0 5 10 15 20 25 0 Work load [kg] Work load [kg] Work load [kg] 808 A Model Selection LEFB Series Motorless Type Table Accuracy (Reference

CXS

400mm/s 2 20 50 CXSM CXSL CXSM CXSL 10 Weight m (kg) Weight m (kg) 10 32 32 25 25 1 1 20 20 0.6 10 20 30 40 50 100 5 0.6 10 20 30 40 50 100 5 Overhang L (mm) Overhang L (mm) Graph V = up to 800mm/s 4 Graph V = up to 600mm/s 3 6 5 3 32 2 Weight m (kg) Weight m (kg) 32 25 25 1 1 20 20 CXSM CXSL CXSM CXSL 0.6 10 20 30 40 50 100 5 0.6 10 20 30 40 50 100 5 Overhang L (mm) Overhang L (mm) Graph

Table of Contents

20 20 74.5 90 98 30 35 40 19 25 25 20 23 25.5 29 32 32 VX31 VX32 VX33 1 4 1 8 3 8 1 4 27.5 27.5 3 8 1 4 17-3-85 6 The models VX31/32/33 have been revised.