Escapements Series MIW/MIS

0.5 MPa 0.6 MPa 0.7 MPa 0.6 MPa 0.6 MPa 160 0.5 MPa 240 0.5 MPa 400 0.4 MPa 0.4 MPa 0.3 MPa Lateral load F (N) Lateral load F (N) Lateral load F (N) 200 0.3 MPa 120 0.2 MPa 300 0.2 MPa 160 80 120 200 80 40 100 40 40 120 100 80 60 180 140 100 60 240 200 160 120 80 Point of application L (mm) Point of application L (mm) Point of application L (mm) D-X Individual -X 1421 Escapements Series

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

320 0.7 MPa 500 CEP1 0.7 MPa 280 0.2 MPa 0.3 MPa 0.4 MPa 0.5 MPa 0.6 MPa 0.7 MPa 0.6 MPa 0.6 MPa 160 CE1 0.5 MPa 240 0.5 MPa 400 0.4 MPa 0.4 MPa CE2 0.3 MPa Lateral load F (N) Lateral load F (N) Lateral load F (N) 200 0.3 MPa 120 0.2 MPa ML2B 300 0.2 MPa 160 C J G5-S 80 120 200 CV 80 40 MVGQ 100 40 CC 40 120 100 80 60 180 140 100 60 240 200 160 120 80 RB Point of application L (mm) Point

IDU/IDF

Model Capacity Secondary voltage Dryer Primary voltage 25 IDF22C1-3 IDF37C1-3 IDU22C1-3 IDU37C1-3 Three phase Single turn 200V (50Hz) 200 to 220V (60Hz) 220V (50Hz) 220 to 240V (60Hz) 9 1.5kVA IDF-TR1500-5 210 4-11 160 IDF-TR -5, 6, 7 Weight (kg) Part No.

Compact 5-Port Solenoid Valve

CA2 series Pressure: 0.5 MPa Load ratio: 50% Stroke: 500 mm 80 100 125 140 CS1 series Pressure: 0.5 MPa Load ratio: 50% Stroke: 1000 mm 160 180 200 0 100 200 300 400 500 600 700 800 900 1000 Average speed [mm/s] ZK2 Combination Manifold Fittings, Replacement Parts, Tools Manifold Options Specific Product Precautions * Values at extension of a directly coupled cylinder when meter-out speed

PFxx-OMA1007

to 4200 L/min 80 to 2100 L/min 40 to 1050 L/min 20 to 525 L/min (Displays 0 when the value is below 160 L/min) (Displays 0 when the value is below 80 L/min) (Displays 0 when the value is below 40 L/min) (Displays 0 when the value is below 20 L/min) 4.0 0 to 4%F.S. 200 to 4200 L/min 100 to 2100 L/min 50 to 1050 L/min 25 to 525 L/min (Displays 0 when the value is below 200 L/min) (Displays

Industrial Filters

840 21 35 37 41 38 44 04 FGDTB 210 1200 23 46 50 56 50 63 06 FGDFB FGESA Note 2) 410 3000 45 90 120 140 100 160 10 FGELA Note 2) 410 3600 50 120 140 170 110 210 20 FGETA FGESB Note 2) 800 3300 70 140 150 160 120 170 10 FGELB Note 2) 800 4200 90 170 180 210 140 230 20 FGETB FGESC Note 2) 1100 3400 83 150 160 170 120 170 10 FGELC Note 2) 1200 4400 120 190 200 220 150 230 20 FGETC FGGSB 160

XLDV Series

Specifications Model XLDV-25 XLDV-40 XLDV-50 XLDV-63 XLDV-80 XLDV-100 XLDV-160 Flange (valve) size 25 40 50 63 80 100 160 Actuating type Normally closed Fluid Vacuum of inert gas Operating temperature oC 5 to 60 Operating pressure Pa Atmospheric pressure to 1 x 10-6 Main pumping 14 45 80 160 200 300 800 Conductance l/s Note 1 Initial pumping 0.53 28 2.511 48 418 6.531.5 6.531.5 Internal 1.3

EXxx-OMV0017-D

bytes) in 128point (16-byte) units 1280 points/160 byte System output size 16, 128 to 1280 points (2 bytes to 160 bytes) in 128point (16-byte) units 1280 points/160 byte Diagnostic allocation None / Simple / Advanced Advanced Max.

c

20 0 20 40 60 80 100 120 140 160 180 200 220 240 260 B above, as the tubing length differs depending on each size.

Table of Contents

160, 180, 200, 250 0.7 AS800-12 1 4 35,400 1 540 38,500 586 1.4 AS900-14 1 2 52,000 1 792 47,500 724 300 3.3 AS900-20 57,800 2 880 60,800 926 3.3 Note) Flow rate values are measured at 0.5 MPa and 20C.

Electric Grippers

Basic Compact LEHZ25 LEHZ25L 250 250 200 200 Overhang H [mm] Overhang H [mm] 70%, 40% 150 150 40% Pushing force 100% Pushing force 100% 100 100 70% 50 50 0 0 50 100 150 200 250 0 0 50 100 150 200 250 Gripping point L [mm] Gripping point L [mm] LEHZ32 250 200 Overhang H [mm] 150 40% 100 Pushing force 100% 70% 50 0 0 50 100 150 200 250 Gripping point L [mm] LEHZ40 250 200 Overhang H [mm] 150

Mechanically Jointed Rodless Cylinder Series MY2H/HT ø16, ø25, ø40

Piston speed mm/s Piston speed mm/s Features 6 Series MY2H Maximum Allowable Moment/Maximum Allowable Load Moment/MY2HT (Double axis) MY2HT/M3 MY2HT/M1 MY2HT/M2 300 300 300 200 200 200 100 100 100 Moment Nm Moment Nm Moment Nm 50 50 50 MY2H40 40 40 40 MY2H40 MY2H40 30 30 30 MY2H25 20 20 20 MY2H25 MY2H25 MY2H16 10 10 10 MY2H16 MY2H16 8 8 8 5 5 5 100 200 300 400500 1000 1500 100 200 300 400500

Air Slide Table Series MXP

16 16 16 L = 120 mm L = 120 mm L = 120 mm MXP16-20 MXP16-30 MXP16-20 MXP16-30 Table displacement amount (mm) Table displacement amount (mm) Table displacement amount (mm) 0.08 0.12 0.06 MXP16-20 MXP16-30 MXP16-20 MXP16-30 MXP16-20 MXP16-30 MXP16-20 MXP16-30 0.10 0.06 0.04 0.08 0.04 0.06 0.04 0.02 0.02 0.02 0 0 0 50 200 250 Load (N) 150 100 50 200 250 Load (N) 150 100 100 400 500 Load (N)

3 Position Cylinder Series RZQ

Model RZQ32 RZQ40,50 RZQ63 Applicable floating joint JB40-8-125 Graph 1 JB63-10-150 200 JB80-16-200 63 100 Guide Shock absorber 50 Load weight (kg) 50 40 40 32 30 Floating joint 3 position cylinder 20 10 Maintenance Caution 5 150 100 200 300 1.

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

Light weight & compact Series XMA with KF(NW) flange Model Weight kg A mm B mm Conductance l/s XMA-16 5 0.33 40 103 XMA-25 XMA-40 XMA-50 14 0.61 50 113 B 45 1.40 65 158 80 2.00 70 170 A 160 XMA-63 XMA-80 3.60 196 88 200 6.20 90 235 : Common to all series.

RZQ

Caution 5 150 100 200 300 1.

Thermo-con

Contents D A A 200 to 220 VAC B 200 to 220 VAC C Unused C B D PE Other connectors are the same as those for the HEC006-W2l. 155 Series HEC-W Alarm This unit is equipped as standard with a function allowing 15 kinds of alarms to display on the LCD and can be read out by serial communication.

Air Slide Table Series MXW

S n Auto switch Without auto switch (Built-in magnet) Nil Bore size (Stroke (mm)) For the applicable auto switch model, refer to the table below. 8 12 16 20 25 25, 50, 75, 100, 125, 150 50, 75, 100, 125, 150 75, 100, 125, 150, 175, 200 100, 125, 150, 175, 200, 225, 250 100, 125, 150, 175, 200, 225, 250, 275, 300 Option Nil Standard (with urethane bumper) With shock absorbers 2 pcs.

Compact Rotary Actuator Series CRQ2

300 30 25 20 15 10 5 0 40 30 20 10 0 Load (N) Load (N) MSQXB30A MSQXB50A 350 300 300 250 Displacement (m) Displacement (m) 250 200 200 150 150 D100 100 100 80 60 40 20 0 50 40 30 20 10 0 Load (N) Load (N) 329 Series MSQX Construction o i w@3 r !

39

Description Bore size (mm) Tightening torque (Nm) 50 63 130 to 150 160 to 200 Head cover Stopper bolt Angle display Seal washer Stopper bolt 135 6 Vertical clamping (CKZ3T only) When mounting the clamping arm in a vertical clamping position, note that the maximum angle will change.