Compact Cylinder

(mm) (mm) Cylinder model C D Mounting bolt size Cylinder model C D Mounting bolt size CVQB5010 CVQB325 M6 x 60L M5 x 45L 60 45 15 10 x 60L x 45L 60 45 20 15 x 65L x 50L 65 50 25 20 x 70L x 55L 70 55 30 25 x 75L x 60L 75 60 35 30 12.5 x 80L x 65L 80 65 9 40 35 x 85L x 70L 85 70 45 40 x 90L x 75L 90 75 50 45 x 95L x 80L 95 80 75 50 x 120L x 85L 120 85 -100 75 x 145L x 110L 145 110 CVQB6310

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Q R R 53.5 56.5 56.5 59 59 R 69.5 72.5 72.5 75 75 M 12.8 19 23 19 23 Q 42 52 55 58 61 S Q 41 51 54 57 60 S K 6 8 8 8 8 J M4 M5 M5 M5 M5 2, 3, 4.5 3, 4.5, 6 8, 10 3, 4.5, 6 8, 10 1/8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 1/4, 3/8 1/4, 3/8, 1/2 46 56 59 62 65 30 40 45 50 45 50 18 22 30 22 30 68 78 85 85.5 92 9 10.5 14 10.5 14 19.5 27 30 33 33 36 36 48.5 51.5 51.5 54 54 41 51 54 57 60 65.5 68.5 68.5 71

REC

75 10 41 20 RS Q G FX 25 Up to 700 22 19.5 40 17 32 10 13 4 60 75 10 45 26 32 Up to 1000 22 19.5 40 17 32 12 13 4 60 75 11 45 26 20, 25, 32 RS H A 40 Up to 1000 24 21 52 22 41 14 16 5 66 36 82 12.5 50 32 NA NN P S Z ZZ H1 H2 I K MM N RZQ Bore (mm) Stroke range 20 30 M20 x 1.5 Up to 700 1/8 146 37 200 M8 x 1.25 5 8 33.5 5 20 25 MI W S 34.5 M26 x 1.5 Up to 700 1/8 146 41 204 M10 x 1.25

e

2-5H7 depth 5 (96.7) (49.6) 60 132.2 100 110.8 35.5 (60) 94 96.7 35.5 D-m D-m 71.5 43.5 Motor 60 102 60 42 E-MY E-MY (60) 60 128 7.5 8.2 60 60 5.5 2 x 9.5 counterbore depth 5.4 7.5 50 5 71.7 17.5 7.1 (Max. 10.1) 4 x M5 x 0.8 depth 9 37 6 9.5 5H7 Long hole depth 5 T-slot section for mounting 6 198 + Stroke 2 x 2 x 5.5 through hole Encoder cable on actuator side (4 wires) Noise filter Note

AZ1000

65 70 75 0.00 0.03 0.07 0.10 0.14 0.17 0.21 0.24 0.28 0.31 0.34 0.38 0.41 0.45 0.48 0.52 316L SS 316L SS Hastelloy C-22 Hastelloy C-22 Delivery pressure (MPa) Delivery pressure (psig) 316L SS PCTFE (Option: Vespel, PTFE) PCTFE (Option: PTFE) Dimensions inch (mm) AZ1000 2.12 (53.8) Max. 5.0 (127.0) Max. 5.6 (142.2) (When selecting option code P) 0 20 40 60 80 100 120 140 160 180 200 Flow

Electric Grippers

Basic Compact LEHZ10 LEHZ10L 100 100 80 80 Overhang H [mm] Overhang H [mm] 60 60 70%, 40% 40% Pushing force 100% 40 40 70% Pushing force 100% 20 20 0 0 20 40 60 80 100 0 0 20 40 60 100 80 Gripping point L [mm] Gripping point L [mm] LEHZ16 LEHZ16L 140 140 120 120 Overhang H [mm] Overhang H [mm] 100 100 Pushing force 100%, 70%, 40% 70%, 40% 80 80 Pushing force 100% 60 60 40 40 20 20 0 0 20

CV/MVGQ

(Example) CDV3LN50-100-1 2 position single 2 position double Solenoid valve voltage Nil W 1 2 5 9 100 VAC (50/60 Hz) 200 VAC (50/60 Hz) 24 VDC Other Cylinder stroke (mm) (Refer to Standard Stroke on page 10-15-51.)

SX

SX3000-75-2A SX5000-76-2A SX3000 SX5000 Note) When mounting blanking plate, be sure to mount a short cap. Series SX3000 (8) Model AN203-KM8 AN200-KM10 AN300-KM10 Effective area 14 mm2 A 16 22 25 B 26 53.8 70 C Series Part no.

CP95

52 28 36 11 4.5 163 161 36 12 10 72 90 55 50 45 25 12 155 12 15 170 32 68 9 80 60 32 45 12 5.5 175 170 45 12 10 90 110 70 40 50 12 5.5 190 185 50 63 50 25 12 170 16 20 190 40 80 9 90 70 16 10 100 120 80 50 63 14 6.5 215 210 63 80 63 30 16 190 16 20 210 50 100 12 110 90 16 12 126 153 100 60 100 120 75 35 16 205 14 20 140 25 230 110 60 20 75 16 6.5 230 220 71 14.5 150 178 120 6-13-10 10 Series

CP95

52 55 28 36 11 4.5 163 161 36 12 10 72 90 50 45 25 12 155 12 15 170 32 68 9 80 60 70 32 45 12 5.5 175 170 45 12 10 90 110 40 50 12 5.5 190 185 50 63 50 25 12 170 16 20 190 40 80 9 90 70 80 16 10 100 120 50 63 14 6.5 215 210 63 80 63 30 16 190 16 20 210 50 100 12 110 90 100 16 12 126 153 60 100 120 75 35 16 205 14 20 140 25 230 110 60 120 20 75 16 6.5 230 220 71 14.5 150 178 6-13-10 10 Series

Non-standard Motor/Horizontal Mount Specification Series LJ1H10

Transfer load m (kg) 600 L2 400 Mer L2 (mm) Rolling Yawing m 200 L2 Mer 0 20 40 60 m Transfer load m (kg) 2000 a = 1000 L3 (mm) L3 1000 a = 2000 m a = 3000 Mey a 0 20 40 60 Transfer load m (kg) Refer to page 145 for deflection data. 60 Non-standard Motor/Horizontal Mount Specification Series LJ1H30 Dimensions/LJ1H303PD(X10) Scale: 10% 8H10 depth 10 4-M8 x 1.25 thread depth 10 120 4-M12

SYJ3000/5000/7000

Rated voltage 5 6 V S R 1 2 24 VDC 12 VDC 6 VDC 5 VDC 3 VDC 100 VAC 50/60 Hz 200 VAC 50/60 Hz 110 VAC 50/60 Hz [115 VAC 50/60 Hz] 220 VAC 50/60 Hz [230 VAC 50/60 Hz] Electrical entry G H L LN LO M MN MO W0 Grommet (300 mm lead wire) Grommet (600 mm lead wire) With lead wire Without lead wire Without connector With lead wire Without lead wire Without connector Without connector cable Electrical

13

38.5 75 15.3 4.2 28 7.5 3 38.5 57 12.8 3.2 24 6 6 6 6 6 6 10 10 One-touch and screw-in connection Applicable tubing diameter B Model A 60 6 29.5 16 12.8 28 5 47 60 6 29.5 16 12.8 28 5 47 60 6 29.5 16 12.8 28 5 47 60 6 29.5 16 12.8 28 5 47 63 6 30.5 18 12.8 29 5 50 63 6 30.5 18 12.8 29 5 50 78 8 39 23 13.7 35 7 61 78 8 39 23 13.7 35 7 61 B C D E F G H (Mounting hole) ZH05BS-06-01 ZH05BL-06

Series AP500

80 Flow rate (slpm, N2) 2 x 10-32 UNF depth 0.3 (7.6) (Mounting hole) AP1000HF 100 psig (0.69 MPa) 30 psig (0.21 MPa) Inlet pressure: 50 psig (0.34 MPa) 70 0.48 60 0.41 Delivery pressure (MPa) Delivery pressure (psig) 50 0.34 Connections A 40 0.28 (mm) inch FV4 MV4 TW4 FV6 MV6 TW6 (94.0) 3.70 30 0.21 2.96 (75.2) 20 0.14 4.70 (119.4) 10 0.07 2.96 (75.2) 0 0.00 0 20 40 60 80 100 120 140 160

NCM

0.7 and the operating pressure of 75 PSI.

Compact Type

22 11 50 29 6 12 4.5 25 10 12 45 67.5 9 2-M5 0.8 with depth 7.5 25 2-M6 1.0 73 29 87 71 27 13.5 60 35 6 12 4.5 30 12 14.5 46 70.5 9 2-M5 0.8 with depth 7.5 32 2-M6 1.0 94 37 100.5 92 35 17.5 75 45 8 16 4 30 16 18.5 56 80.5 10 Symbol Z Stroke 10.20 30.40.50 Bore size (mm) 75 100 15 20 25 32 25 35 45 55 30 40 60 60 30 40 60 60 40 50 70 70 13 Compact Type Dual-Rod Cylinder Series CXSJ Proper

Compact Type Dual-Rod Cylinder Series CXSJ

22 11 50 29 6 12 4.5 25 10 12 45 67.5 9 2-M5 0.8 with depth 7.5 25 2-M6 1.0 73 29 87 71 27 13.5 60 35 6 12 4.5 30 12 14.5 46 70.5 9 2-M5 0.8 with depth 7.5 32 2-M6 1.0 94 37 100.5 92 35 17.5 75 45 8 16 4 30 16 18.5 56 80.5 10 Symbol Z Stroke 10.20 30.40.50 Bore size (mm) 75 100 15 20 25 32 25 35 45 55 30 40 60 60 30 40 60 60 40 50 70 70 13 Compact Type Dual-Rod Cylinder Series CXSJ

Compact Cylinder with Air Cushion Series RQ

Material: Chromium molybdenum steel Surface treatment: Nickel plated Cylinder model C D 50 55 60 65 75 85 55 60 65 70 80 90 60 65 70 80 90 115 140 Cylinder model C D 65 70 75 85 95 120 145 85 95 105 130 155 90 100 110 135 160 105 115 140 165 120 130 155 180 Mounting bolt size M5 x 50L x 55L x 60L x 65L x 75L x 85L M5 x 55L x 60L x 65L x 70L x 80L x 90L M5 x 60L x 65L x 70L x 80L x 90L x 115L

VZ100/300/500

(V) 24, 6, 12, 48 15 to +10% of rated voltage 1.8 (With indicator light 2.1) [24 VDC: 75 (With indicator light 87.5)] Body ported Allowable voltage fluctuation (%) Power consumption (W) [Current mA] DC Note) 4.5/50 Hz, 4.2/60 Hz 100 VAC: 45/50 Hz, 42/60 Hz 200 VAC: 22.5/50 Hz, 21/60 Hz Note) Inrush Apparent power (VA) [Current mA] AC Holding 3.5/50 Hz, 3/60 Hz 100 VAC: 35/50 Hz, 30/60 Hz

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

GE H Size 10 20 30 50 55.4 50 9.5 34.5 27.8 60 4.5 28.5 45 46 20H9 5 15H9 52.9 44.3 33.5 14 97.2 80 8 4 3 4.5 20 15.6 11 7.5 45.2 13 70.8 65 12 46 30 76 6 30.5 60 61 28H9 9 17H9 61.8 55.3 43 18 117.1 100 10 6 2.5 6.5 25 19.5 14 9.5 56.4 17 75.4 70 12 50 32 84 6.5 33.5 65 67 32H9 9 22H9 63.1 60.3 46 19.5 123.4 110 10 4.5 3 6.5 27 21.5 14 9.5 61.5 17 85.4 80 15.5 63 37.5 100 10 37.5 75 77