Compact Cylinder with Air Cushion and Lock Series RLQ

force N (Maximum static load) 402 629 982 1559 Standard Strokes Bore size (mm) 32, 40 50, 63 Standard strokes (mm) 20, 25, 30, 40, 50, 75, 100 30, 40, 50, 75, 100 Manufacture of intermediate strokes Method Ordering Description Special body type Please refer to How to Order for the standard part numbers (page 1).

Single Axis Electric Actuator Series LJ1H

8 12 24 5 10 5 10 Vertical 32 10 12 10 20 10 12 10 20 40 High rigidity direct acting guide LJ1H 20 20 40 44 Horizontal 50 25 25 60 Non-standard motor 8 12 8 12 66 5 10 5 10 Vertical 74 10 10 82 Options Page 100 Made to Order 101 Clean room specification 104 Dust seal specification 110 TSUBAKI CABLEVEYOR specification 122 Construction 134 Mounting 140 Non-standard Motor Mounting

Industrial Filters

65 (2 1/2B) 80 (3B) 100 (4B) 40 (1 1/2B) 40 (1 1/2B) 720 18 500 24 260 103 560 400 270 710 1045 1445 100 150 65 (2 1/2B) 80 (3B) 100 (4B) 40 (1 1/2B) 40 (1 1/2B) 720 18 750 24 295 137 560 400 270 710 1305 1705 100 150 65 (2 1/2B) 80 (3B) 100 (4B) 40 (1 1/2B) 40 (1 1/2B) 720 18 1000 24 340 171 560 400 270 710 1570 1970 100 150 FGAC FGAS 65 (2 1/2B) 80 (3B) 100 (4B) 40 (1 1/2B) 40 (1 1/2B)

AC

Model Port size M B B A B C D P E F G H J K L 8, 1 4 1 40 53 70 75 97.5 129 165 169 11 14 18 20 40 53 70 70 40 56 73 73 17 16 17 14 30 41 50 50 27 40 54 54 22 23 26 25 5.4 6.5 8.5 8.5 8.4 8 10.5 10.5 40 53 70 70 2.3 2.3 2.3 2.3 120.5 AFD2000 AFD3000 AFD4000 AFD4000-06 4, 1 8 3 170 206 210 4 3 2 1 4, 1 8, 3 AFD2000 AFD3000 SAC2000, #1 SAC2503, #1 AFD4000 AFD4000-06 SAC4000, #1 SAC4006,

240

Dimensions [mm] Model L1 L2 A B C D E F G J LEPY10-25 138 150 20 22 30 29 20 29 39 LEPY10-50 163 175 24 43 34 50 24 50 60 LEPY10-75 198 210 30 72 40 79 30 79 89 LEPY10L-25 124 136 61.8 20 22 30 29 20 29 39 LEPY10L-50 149 161 24 43 34 50 24 50 60 LEPY10L-75 184 196 30 72 40 79 30 79 89 47.8 382 Step Motor (Servo/24 VDC) Electric Actuator/Miniature Slide Table Type LEPS Series Model Selection

CNG

P K KA MM NA PG PH PL S FD FT FX FY FZ XA XB J l ZZ H e f h ZZ 35 182 30 16 55 202 5 6 M8 x 1.25 24 1/8 21.5 2 65 141 5.5 6 52 25 65 3 12 M4 x 0.7 0.25 x Stroke 40 198 30 17 62 220 5.5 8 M10 x 1.25 29 1/8 26.5 2.5 73 151 5.5 7 60 30 75 3 12 M5 x 0.8 40 201 35 17 62 223 5.5 10 M10 x 1.25 35.5 1/8 26.5 2.5 73 154 6.6 7 60 30 75 3 12 M5 x 0.8 50 227 (236) 35 17 70 247 (256) 6 14 M14 x 1.5 44

CV/MVGQ

(n 2) 2 n = 4, 8, 12, 16 80 + 40 (n 4) 2 n = 4, 8, 12, 16 85 + 40 (n 4) 2 n = 4, 8, 12, 16 90 + 40 (n 4) 2 n = 4, 8, 12, 16 95 + 40 (n 4) 2 105 + 40 (n 4) 2 n n = 4, 8, 12, 16 2 (Different sides, Same side), 1 75 80 90 10 65 D-Y69/Y7PV D-Y7WV n n = 4, 8, 12, 16 80 + 30 (n 4) 2 n = 2, 4, 6, 8 10 + 30 (n 2) 2 n = 4, 8, 12, 16 65 + 30 (n 4) 2 n = 4, 8, 12, 16 75 + 30 (n 4) 2 90 +

CJ2X/CUX/CQSX/CQ2X/CM2X

Standard stroke (mm) Bore size (mm) CEP1 5, 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 32, 40 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 CE1 50, 63 80, 100 CE2 Precautions ML2B Be sure to read before handling. For Safety Instructions and Actuator Precautions, refer to pages 10-24-3 to 10-24-6. C J G5-S CV Snap Ring Installation/Removal Maintenance Caution Caution MVGQ 1.

CP95

36 20 10 145 12 15 160 28 55 9 75 52 28 36 11 4.5 163 161 36 12 10 72 90 55 50 45 25 12 155 12 15 170 32 68 9 80 60 32 45 12 5.5 175 170 45 12 10 90 110 70 40 50 12 5.5 190 185 50 63 50 25 12 170 16 20 190 40 80 9 90 70 16 10 100 120 80 50 63 14 6.5 215 210 63 80 63 30 16 190 16 20 210 50 100 12 110 90 16 12 126 153 100 60 100 120 75 35 16 205 14 20 140 25 230 110 60 20 75 16 6.5 230 220

CP95

36 20 10 145 12 15 160 28 55 9 75 52 55 28 36 11 4.5 163 161 36 12 10 72 90 50 45 25 12 155 12 15 170 32 68 9 80 60 70 32 45 12 5.5 175 170 45 12 10 90 110 40 50 12 5.5 190 185 50 63 50 25 12 170 16 20 190 40 80 9 90 70 80 16 10 100 120 50 63 14 6.5 215 210 63 80 63 30 16 190 16 20 210 50 100 12 110 90 100 16 12 126 153 60 100 120 75 35 16 205 14 20 140 25 230 110 60 120 20 75 16 6.5 230

MXW Series Long Stroke Slide Table

40 40 Y Y 10 6H9 +0.03 depth 5.5 0 41 160 Taper thread plug with hexagonal hole 10.5 Operation direction B A 9.5 11 24 24 16 12.5 A 30.5 60 50 32.5 A Cross section AA (scale 40%) Z 5-M6 x 1 thread depth 12 4 x H G H 7 depth 5.5 6H9 +0.03 Bottom through hole 5.1 0 F E 6H9 +0.03depth 5.5 0 Model E F G H Z 87 168 75 48 337 MXW20-100 91 185 79.5 52 362 MXW20-125 Note) Adjuster bolt Y shown in

Rotary Cylinder Series MRQ

Graph (2) Cylinder Output on the Retracting Side (Double acting) 1500 150 Tube bore size [mm] 1000 100 40 Side load Balance weight 400 500 40 50 32 200 250 300 20 25 30 Operating pressure [MPa] Cylinder output F[N] Load weight [kg] 150 15 Allowable Side Load on the Piston End (Nm) 100 10 Stroke of linear part Size 40 40 50 4 5 100 75 50 40 30 25 20 15 10 5 32 32 40 9 10 11 12 12 13 13 13

Compact Low Friction Cylinder Series MQQ ø10, ø16, ø20, ø25, ø30, ø40

. 30 10, 20, 30, 40, 50, 75, 100 40 10, 20, 30, 40, 50, 75, 100 Bore size Strokes are available in 1 mm increments by installing spacers in standard stroke cylinders. 10 16 20 25 30 40 10 mm 16 mm 20 mm 25 mm 30 mm 40 mm Port thread type M thread Rc NPT G 10 to 20 Nil 25 to 40 TN TF Series MQQ is not auto switch capable.

Air Cylinder

Standard Strokes Bore size [mm] Standard stroke [mm] Max. manufacturable stroke 32 25, 50, 75, 100, 125, 150, 175, 200, 250, 300 300 40 25, 50, 75, 100, 125, 150, 175, 200, 250, 300 300 45 25, 50, 75, 100, 125, 150, 175, 200, 250, 300 300 50 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400 400 56 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400 400 63 25, 50, 75, 100, 125, 150

Rotary Cylinder Series MRQ Size: 32, 40 1

CRQ2 MSQ Linear Motion Parts/Standard Stroke 32, 40 Standard stroke (mm) Size MRQ 5, 10, 15, 20, 25, 30, 40, 50, 75, 100 Refer to page 11-10-18 for other intermediate strokes.

REC

Stroke H FT In the case of 40 Z + Stroke RB ZZ + Stroke 2-7 Standard port Mounting hole J DB (mm) -X A AL B B1 B2 D F FT FX FY FZ G H E Bore (mm) Stroke range 0 0.033 0 0.033 0 0.033 0 0.039 20 FX Up to 700 18 15.5 34 13 26 8 13 4 60 75 10 41 20 2025 Up to 700 22 19.5 40 17 32 10 13 4 60 75 10 45 26 20, 25, 32 32 Up to 1000 22 19.5 40 17 32 12 13 4 60 75 11 45 26 Data 40 Up to 1000 24

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

69 96 H P.C.D L1 6-4.4 6-6.6 8-8.4 L2 XMA-16 XMA-25 XMA-40 XMA-50 XMA-63 XMA-80 40 50 65 70 88 90 P.C.D 27 P.C.D 58.7 P.C.D 92.1 XYA/In-line type C D G Fd C (K flange) B H 45 A E Fn (KF flange) (mm) Model A 79.5 106 119 149 178 B 48 66 79 100 117 C 1 2 2 3 3 D 23.5 38 53 61 80 E 40 55 75 87 114 Fn 95 110 Fd 26 41 52 70 83 G 64 84 95 118 142 H XYA-25 XYA-40 XYA-50 XYA-63 XYA-80 100.2

MRQ

Linear Motion/Standard Motion Size Standard stroke (mm) 32/40 5, 10, 15, 20, 25, 30, 40, 50, 75, 100 Refer to p.1.5-18 for other intermediate strokes.

Hydraulic Filters

22 65 75 125 145 260 435 87 94 347 455 50 0 19.8 29 40 (1 1/2B) 50 (2B) 200 361 545 60 0 4 x M12 x 1.75 22 Note) Tapered female thread conforming to JIS B 0203 is compatible.

Compact Cylinder

10 -15 -20 -25 -30 -35 -40 -45 -50 -60 -80 -100 -125 -150 C(D)55B40-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 -60 -80 -100 -125 -150 55 60 65 70 75 80 85 90 95 100 110 130 150 55 60 65 70 75 80 85 90 95 100 110 130 150 M6 x 55 l x 60 l x 65 l x 70 l x 75 l x 80 l x 85 l x 90 l x 95 l x 100 l x 110 l x 130 l x 150 l M5 x 55 l x 60 l x 65 l x 70 l x 75 l x 80 l x 85 l x 90 l x 95 l x 100 l x 110