Square Tube Type Air Cylinder Series MB1

135 139 156 156 190 190 22 30 35 35 40 40 to 500 to 500 to 600 to 600 to 800 to 800 10 14 18 18 22 26 With rod boot (mm) 151 to 200 l 151 to 200 h Bore size (mm) e f 1 to 50 25 25 25 25 25 25 51 to 100 37.5 37.5 37.5 37.5 37.5 37.5 101 to 150 50 50 50 50 50 50 201 to 300 100 100 100 100 100 100 301 to 400 125 125 125 125 125 125 401 to 500 150 150 150 150 501 to 600 175 175 601 to 700

Electric Actuators

Dimensions [mm] Model L1 L2 A B C D E F G J 138 LEPY10m-25m 29 39 30 29 20 150 20 22 LEPY10m-50m 24 50 60 175 61.8 24 43 34 50 163 LEPY10m-75m 89 72 40 79 30 79 198 210 30 LEPY10Lm-25m 29 20 29 39 20 22 30 124 136 LEPY10Lm-50m 60 34 50 24 50 149 161 47.8 24 43 LEPY10Lm-75m 30 79 89 30 72 40 79 184 196 9 Electric Actuator/Miniature Slide Table Type Step Motor (Servo/24 VDC) Series LEPS Model

39

63 92 48 12 13.7 95 166 10 12 55 376.6 155.5 78.4 M10 x 1.5 19 13 36.5 9.5 M8 x 1.25 10 95.5 110 54 12 16.6 99 10 12 55 391.6 161 78 M10 x 1.5 22 13 36.5 15 M8 x 1.25 10 171.5 100.5 Bore size (mm) PA PB PC PD R RB RR S V VA VB VC VD RA VE VF W XA XB XC 104.5 50 63 50 45 10 55 46 68 46 48 11 8 30 32 63.5 71.5 12 3.5 78.4 138.5 134 92 50 45 10 55 52 78 52 54 11 8 30 32 63.5 71.5 12 3.5 78

CJ2

Calculation example: CJ2ZWL10-45 Basic weight 50 (10) Additional weight 6/15 stroke Cylinder stroke 45 stroke Mounting bracket weight 16 (Axial foot) 50+6/15 X 45+16=84g CJ1 CJP CJ2 CM2 C85 Specifications CG1 Double acting/Double rod Action 10, 16 Bore size (mm) MB 0.7MPa Max. operating pressure 0.1MPa Min. operating pressure C95 Rubber bumper Cushion 15, 30, 45, 60 Standard stroke (mm

Compact Cylinder/Guide Rod Type Series CQM

-15 -20 -25 -30 CDQMB205 -10 -15 -20 -25 -30 -35 -40 -45 -50 CDQMB255 -10 -15 -20 -25 -30 -35 -40 -45 -50 CDQMB325 10 15 20 25 30 35 40 45 50 75 -100 CDQMB405 10 15 20 25 30 35 40 45 50 75 -100 CDQMB5010 15 20 25 30 35 40 45 50 75 -100 CDQMB6310 15 20 25 30 35 40 45 50 75 -100 CDQMB8010 15 20 25 30 35 40 45 50 75 -100 CDQMB10010 15 20 25 30 35 40 45 50 75 -100 M8 x 60L x 65L x 70L x 75L

Electric Actuator

40 50 0 10 20 30 40 60 70 80 50 Work load [kg] Work load [kg] 1,000 1,000 800 800 Overhang: L2 [mm] Overhang: L3 [mm] Overhang: L4 [mm] Overhang: L5 [mm] 600 600 Mey m 400 400 L2 200 200 0 0 0 10 20 30 40 60 70 80 50 0 10 20 30 40 50 Precautions LECS; Work load [kg] Work load [kg] 1,000 1,000 800 800 600 600 L3 m Mer 400 400 200 200 0 0 0 10 20 30 40 60 70 80 50 0 10 20 30 40 50 Work load

Modular F.R.L. Unit

2 Note 1) 65 29.5 5.5 3.2 50 2.5 132 143 28 50 110 7 14 55 35 41 28.5 64 13 7 4 71 0 184 146 31 50 110 7 14 35 55 41 30.5 10 66 7 4 71 187 3.5 183 36 75 145 18 9 40 50 72.5 35 74 12 9 4 88 222 3.5 185 36 75 155 9 18 40 77.5 50 74 35 9 4.6 88 12 224 3 264 43 20 186 11 20 93 50 70 44.5 84 16 11 6.4 115 3.3 303 277 43 20 191 11 20 50 98 70 44.5 16 84 11 6.4 117.5 316 3.3 280 46 20 196

SYJ3000/5000/7000

With light/surge voltage suppressor (Non-polar type) : SY100-30-A U Without lead wire (with connector and 2 of sockets only) Lead wire length Nil 6 10 15 20 25 30 50 300 mm 600 mm 1000 mm 1500 mm 2000 mm 2500 mm 3000 mm 5000 mm Rated voltage 5 6 V S R 1 2 Electrical entry 24 VDC 12 VDC 6 VDC 5 VDC 3 VDC 100 VAC 50/60 Hz 200 VAC 50/60 Hz 110 VAC 50/60 Hz [115 VAC 50/60 Hz] G H L LN LO M MN

HRX-OM-X010

Table 3-5 Facility water temperature range Installation conditions Facility water temperature range(deg C) Ambient Relative temperature(deg C) humidity(%) 70 29 to 30 60 27 to 30 35 50 24 to 30 40 20 to 30 30 15 to 30 70 24 to 30 60 22 to 30 30 50 19 to 30 40 15 to 30 30 11 to 30 70 20 to 30 60 17 to 30 25 50 14 to 30 40 11 to 30 30 10 to 30 70 15 to 30 60 13 to 30 20 50 10 to 30 40 30 70

Low Friction Cylinders Series MQ

, but unassembled. 30 10, 20, 30, 40, 50, 75, 100 40 10, 20, 30, 40, 50, 75, 100 Bore size Strokes are available in 1 mm increments by installing a spacer in standard stroke cylinders. 10 16 20 25 30 40 10 mm 16 mm 20 mm 25 mm 30 mm 40 mm Port thread type M thread Rc NPT G 10 to 20 Nil 25 to 40 TN TF The MQQ series is not auto switch capable.

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40 133 341 364 M30 x 1.5 30.5 1/2 98 45 30 1/ 5 stroke 120 346 75 40 141 367 388 M36 x 1.5 34.5 3/4 106 50 25 The minimum stroke with rod boot is 30 mm or more.

AC Servo Motor Driver (CC-Link Type ）

4.0 10.0 Position loop gain 120 84 120 84 Speed loop gain 3000 4000 3000 4000 Speed integral compensation 20 50 20 50 9 16 10.

Series AP500

0.34 40 0.28 30 0.21 20 0.14 0 10 0.00 0.07 0 50 100 150 200 Flow rate (slpm, N2) Hastelloy is a registered trademark of Haynes International.

e

Switch no. 10 20 30 40 50 75 100 300 500 1000 Switch no.

LEC-OM07605CN

(b) OFF ON OFF 63.4% CDT = 100 ms 100 50 100 4.00 10.00 4.00 120 84 120 3000 4000 3000 20 50 20 1 50 60 50 1 50 60 50 1 0.20 0.15 0.20 1 0.20 0.15 0.20 2 20 30 20 2 20 30 20 2 0.10 0.05 0.10 2 0.10 0.05 0.10 (2) (a) PB06 GD2 4.00 [] PB08 PG2 120 [rad/s] PB09 VG2 3000 [rad/s] PB10 VIC 20 [ms] PB29 GD2B 10.00 [] PB30 PG2B 84 [rad/s] PB31 VG2B

JA/JAH/JB/JS

-150 36-150 Model Symbol Applicable bore size (mm) 6 10 10, 15 20 25, 30 40 50, 63 80 100 125, 140 160 6 10 15 20 30 40 63 80 100 140 160 Maintenance Standard Warning 1.

JA/JAH/JB/JS

-150 36-150 Model Symbol Applicable bore size (mm) 6 10 10, 15 20 25, 30 40 50, 63 80 100 125, 140 160 6 10 15 20 30 40 63 80 100 140 160 Maintenance Standard Warning 1.

Table of Contents

L1 L2 L3 L4 L5 L6 L7 L8 D Model Bore size ASS AS2000-01 AS2000-02 AS3000-02, 03 1 8 Rc Rc Rc , 40 40 56 30 30 45.5 5 5 5.25 17 23 25 10 11.5 13.2 15.5 17 20.6 54.5 56 68 50 51.5 61 16 20 26 4.5 4.5 5.5 1 4 1 4 ASR Effective thread depth 6 8 3 Dimensions: AS5000 ASF 2-1/4 to 1/2 2-M4 x 0.7 Effective thread depth 7 15-9-31 1 Speed Controller: Standard Type Series AS Large Flow In-line Type

Basic Type/Direct Mount Type

40 30 20 300 200 100 10 Usable range 20 30 40 50 Usable range 5 1 0 1 2 3 4 5 6 10 7 8 9 10 11 0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 Distance from cylinder shaft center Lo (cm) Distance from cylinder shaft center Lo (cm) CY3B CY3R CY3B CY3R CY3R20 CY3R63 1000 200 Allowable driving force Fn (N) Allowable driving force Fn (N) CY1S 100 500 400 50 300 30 200 CY1L 100 10 20 30 40 50 Usable range

25

IZS42 Frequency: 30 Hz IZN 1) Supply pressure: 0 MPa IZF Installation distance in height from ionizer to workpiece (Charged object location) [mm] Installation distance in height from ionizer to workpiece (Charged object location) [mm] Ionizer horizontal direction [mm] ZVB Ionizer front back direction [mm] 150 100 50 0 50 100 150 150 100 50 0 50 100 150 250 200 150 100 50 0 50 100 150 200