Series 10-SYJ300/500/700 Rubber Seal 3 Port Solenoid Valve

Without light SY100-61-1 With light Rated voltage 24 VDC 12 VDC 100 VAC 200 VAC 110 VAC 220 VAC Voltage symbol 24 V 12 V 100 V 200 V 110 V 220 V Part no.

Series SYJ3000/5000/7000 4, 5 Port Solenoid Valve Rubber Seal

[ ] for AC Other dimensions are the same as the grommet style. 3 98 70 6 158 130 8 198 170 10 238 210 20 438 410 2 78 50 4 118 90 5 138 110 7 178 150 9 218 190 11 258 230 12 278 250 13 298 270 14 318 290 15 338 310 16 358 330 17 378 350 18 398 370 19 418 390 Station L1 L2 1.2-69 Series SYJ7000 42 Type Manifold: Side Ported/SS5YJ7-42Station -C6, C8 Grommet(G), (H) 4-4.5 (Mounting holes)

High Vacuum Angle Valve

Model XL-25-2 XL-40-2 XL-50-2 XL-63-2 XL-80-2 Rated voltage for heater 90 to 240 VAC Heater assembly quantity 1 1 1 1 H4 100C 100 V 200/40 200/50 400/100 600/150 Heater assembly quantity used Heater power W (Nominal value) Inrush/Power consumption (Option symbol, Operating voltage) 200 V 800/40 800/50 1600/100 2400/150 Heater assembly quantity 1 1 1 1 2 H5 120C 100 V 200/40 400/70 400/

Large Size Vacuum Module: Series ZR

Note 2) Fixed unit: kPa Note) Air operated, 100 VAC, and 110 VAC type are not CE-compliant. Refer to Table (2) on page 941 for part no. of lead wire with connector.

XM, XY

Fd 52 70 83 G 104 126 150 H J K M XYC-50 XYC-63 XYC-80 178 209 268 29 36 44 10.5 9 9 78 99 116 487 Stainless steel High Vacuum Angle/In-line Valve 2 Stage Control, Single Acting/Bellows, O-ring Seal XMD, XYD Series PAT.

CS1

Bore (mm) 125 140 160 180 200 250 300 H A H1 L1 H A I type single knuckle Y type double knuckle 125 65 125 140 160 180 / 200 250 300 100 156.5 I-12 Y-12 125 3.5 65 50 110 105 161.5 I-14 Y-14 140 3.5 76 50 110 110 170.5 I-16 Y-16 155 3.5 83 56 120 125 193.5 I-18, I-20 Y-18, Y-20 160 3.5 88 63 135 160 245.5 I-25 Y-25 195 3.5 106 71 160 175 266.5 I-30 Y-30 210 3.5 115 80 175 Accessory SCS1

CLA

DIHerMI 15 90 ,00 11 0 With 2 surface D-85 sWitches Same 75 90 '00 surface 110 D-B6 DiHerem jS+5~ go+l ~ D-GS l DO+'~r" 110... 10~ D-KS With n surface .1'1::1 .2,3,4 ... nz4.8.12. n= ...,e.l :t: n=o4,a .I 2..18. swifches Same 75..SO(~) 90+50/11-2) HlOo..so;.21 110+50 (n-2) I surface n",2,3,4, .. ~, "' .S.8 1"O:2.4,6.L n--2,4 ,6.8 ...

Rotary Actuator/Vane Type

Weight [g] Vane type Single vane Double vane Size 10 15 20 30 40 10 15 20 30 40 Rotating angle 90 180 270 90 180 270 90 180 270 90 180 270 90 180 270 90 100 90 100 90 100 90 100 90 100 Rotary actuator body 42 42 42 64 63 62 130 129 127 248 243 238 465 454 443 58 59 71 74 145 168 268 288 478 524 Auto switch unit 15 20 28 38 43 15 20 28 38 43 Angle adjuster unit 30 47 90 150 203 30 47 90 150

Valve Mounted Guide Cylinder Series MVGQ ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 Valve, Speed Controller, and Cylinder are formed into one unit. Easy piping wiring work for Valve, Speed Controller and Cylinder can be formed into one unit, furthe

light only) With energy saving circuit MVGQ 12/16 10, 20, 30, 40, 50, 75, 100 100 V 0.78 (With indicator light: 0.81) M L 20, 30, 40, 50, 75, 100 125, 150, 175, 200 110 V [115 V] 0.86 (With indicator light: 0.89) [0.94 (With indicator light: 0.97)] MVGQ 20 CV Apparent power (2) AC (VA) Intermediate stroke (mm) 200 V 1.18 (With indicator light: 1.22) MVGQ As for the intermediate strokes (by

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

(mm) MM U 114 136 165 190 H 39 45 55 60 FY 50 59 76 92 FD 9 11.5 13.5 13.5 FX 90 105 130 150 Model F 4 5 5 5 FT 13 15 18 18 ZY 81 101 119 133 ZX 110 130 160 180 20CRA1F U50 CRA1F U63 CRA1F U80 CRA1F U100 M6 x 1.0 depth 12 M6 x 1.0 depth 12 M8 x 1.25 depth 16 M 10 x 1.5 depth 20 Flange style Double shaft: CRA1FWU Flange style Single shaft with four chamfers: CRA1FXU Flange style Double shaft

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

(mm) MM U 114 136 165 190 H 39 45 55 60 FY 50 59 76 92 FD 9 11.5 13.5 13.5 FX 90 105 130 150 Model F 4 5 5 5 FT 13 15 18 18 ZY 81 101 119 133 ZX 110 130 160 180 20CRA1F U50 CRA1F U63 CRA1F U80 CRA1F U100 M6 x 1.0 depth 12 M6 x 1.0 depth 12 M8 x 1.25 depth 16 M 10 x 1.5 depth 20 Flange style Double shaft: CRA1FWU Flange style Single shaft with four chamfers: CRA1FXU Flange style Double shaft

VFR

or less 4.72 (4.55) VFR631 VFR630 39 0.17 9.3 39 0.15 9.3 3 4 (B) (A) 4 2 (B) (A) 4 2 42 [40] 0.12 [0.15] 9.6 [9.4] Exhaust center 4.72 (4.55) VFR641 VFR640 38 0.14 8.9 1 3 4 150 or less Pressure center 38 [20] 0.10 [0.44] 8.7 [5.7] 9.3 150 or less 4.72 (4.55) VFR651 VFR650 3 4 1 40 0.16 (EA)(P)(EB) 5 1 3 (EA) (P) (EB) 5 1 3 Pressure center Model Port size Type of actuation Effective area

JA/JAH/JB/JS

JA63-18-150 JA80-22-150 JA100-26-150 JA140-30-150 JA160-36-150 3 4 5 6 8 10 14 18 22 26 30 36 23.2 26 34.5 34.5 44 49.5 60 74.5 89.5 110 152 178 7 9 12.5 12.5 17.5 19.5 20 25 29 35 42 52 15 17 23 23 30.5 34 38 47.5 56.5 68 94.5 112 0.5 0.7 0.8 1 1.25 1.25 1.5 1.5 1.5 1.5 1.5 1.5 8 10 14 14 45 55 12 12 16 16 21 24 31 41 50 59.5 79 96 1.5 1.5 2 2 4.5 5 6 7.5 9.5 11.5 14 16 4 4 6 6 7 8 11 14

JA/JAH/JB/JS

24-150 30-150 39-150 48-150 40 50 63 80 100 40 50 63 80 100 CV Heavy load type MVGQ CC Precautions 2.

CJ2

Standard Stroke Bore size (mm) Standard stroke 15, 30, 45, 60, 75, 100, 125, 150 10 15, 30, 45, 60, 75, 100, 125, 150, 175, 200 16 Intermediate stroke length is available by the 1 mm interval with no stroke adjustment by spacer.

Refrigerated Air Dryer

IDF-BP303 IDF-BP311 IDF4E IDF4E 531 560 595 110 2.3 595 110 2.4 175 175 1/2 1/2 I D F I D F IDF6E IDF6E 555 587 617 617 IDF-BP304 IDF-BP312 IDF8E IDF8E 129 3.3 129 3.4 187 182 3/4 3/4 627 659 647 647 31 31 IDF11E IDF11E IDU-BP305 IDU-BP306 IDU-BP307 IDU-BP313 IDU-BP314 IDU-BP315 506 530 572 572 100 1.6 100 1.7 202 192 IDU3E IDU3E 3/8 3/8 I D U I D U 603 632 625 625 110 2.3 110 2.4 175 175

0.5

mm x 150 mm, capacitance: 20 pF) as defined in the U.S.

Process Valve Series VNA

VO307 00 Q CE compliant VO301 00 X302 Coil rated voltage 1 2 3 100 VAC 50/60 Hz 200 VAC 50/60 Hz 110 VAC 50/60 Hz 220 VAC 50/60 Hz 24 VDC 12 VDC 240 VAC 50/60 Hz Other Component Parts No.

Series SYJ300/500/700 3 Port Solenoid Valve Rubber Seal

[ ] for AC Other dimensions are the same as the grommet. 3 78 69 63 80 71 65 6 126 117 111 131 122 116 8 158 149 143 165 156 150 10 190 181 175 199 190 184 2 62 53 47 63 54 48 20 350 341 335 369 360 354 4 94 85 79 97 88 82 5 110 101 95 114 105 99 7 142 133 127 148 139 133 9 174 165 159 182 173 167 11 206 197 191 216 207 201 12 222 213 207 233 224 218 13 238 229 223 250 241 235 14 254 245

Process Pump

SUP = 0.4 MPa SUP = 0.4 MPa 200 SUP = 0.3 MPa SUP = 0.3 MPa 100 SUP = 0.2 MPa SUP = 0.2 MPa 100 50 0 5 0 0 10 0 10 15 20 25 20 30 40 50 Discharge rate (L/min) Discharge rate (L/min) PAF3413 Air Consumption (3 Hz) PAF5413 Air Consumption (2 Hz) 200 Air consumption (L/min [ANR]) Air consumption (L/min [ANR]) 300 150 SUP = 0.5 MPa SUP = 0.5 MPa SUP = 0.4 MPa 200 SUP = 0.4 MPa 100 SUP = 0.3