Compact Cylinder

L x 100 L 100 100 (mm) (mm) Cylinder model C D Mounting bolt size Cylinder model C D Mounting bolt size CQUB32-5 CQUB40-5 M5 x 65 L M5 x 65 L 65 65 -10 -10 x 70 L x 70 L 70 70 -15 -15 x 75 L x 75 L 75 75 -20 -20 x 80 L x 80 L 80 80 -25 -25 x 85 L x 85 L 85 85 -30 -30 x 90 L x 90 L 90 90 10.5 10.5 -35 -35 x 95 L x 95 L 95 95 -40 -40 x 100 L x 100 L 100 100 -45 -45 x 105 L x 105 L 105 105

CXS

Bore size/Stroke (mm) Bore size (mm) 6 10 15 20 25 32 Standard stroke 10, 20, 30, 40, 50 10, 20, 30, 40, 50, 75 10, 20, 30, 40, 50, 75, 100 Applicable Auto Switch/Refer to page 8-30-1 for further information on auto switches.

High Vacuum Angle Valve

Table 1: Suffix Symbol for Seal Material Symbol -XN1 -XP1 -XQ1 -XR1 -XR2 -XR3 -XS1 -XT1 Seal material EPDM Barrel Perfluoro Kalrez Chemraz VMQ FKM for Plasma Compound no. 2101-80*1 70W 4079 SS592 SS630 SSE38 1232-70*1 3310-75*1 *1 Produced by Mitsubishi Cable Industries, Ltd.

XM, XY

flange) (mm) Model A 75.8 102.5 119 B 48 66 79 C 1 2 2 D 23.5 38 53 E 40 55 75 Fn 26 41 52 G 40.5 57 70 H 21.5 30 35 J XYH-25 XYH-40 XYH-50 100.2 130 178 494 XMH, XYH Series Glossary 2 Shaft Sealing Method 1 Seal Materials Bellows Bellows offer cleaner sealing with reduced particle generation and less outgassing.

CJ5-S

ML2B C J G5-S CV MVGQ CC RB J D-X 20Data 10-14-3 4 Stainless Steel Cylinder Series CJ5-S 10, 16 How to Order Bore size Standard stroke (mm) 10 16 10 16 10 mm 16 mm 15, 30, 45, 60, 75, 100, 125, 150 15, 30, 45, 60, 75, 100, 125, 150, 175, 200 Intermediate strokes by the 1 mm interval are available without using spacers for stroke adjustment.

CXS

Bore size/Stroke (mm) Bore size (mm) 6 10 15 20 25 32 Standard stroke 10, 20, 30, 40, 50 10, 20, 30, 40, 50, 75 10, 20, 30, 40, 50, 75, 100 Applicable Auto Switch/Refer to page 8-30-1 for further information on auto switches.

MLGP

, 100, 125, 150, 175, 200, 250, 300, 350 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350 50, 75, 100, 125, 150, 175, 200, 250, 300, 350 RLQ Manufacture of Intermediate Stroke MLU ML1C Spacer installation type Spacers are installed in the standard stroke cylinders. 20 to 32: Stroke can be modified by the 1 mm interval. 40 to 100: Stroke can be modified by the 5 mm interval.

MLGP

, 100, 125, 150, 175, 200, 250, 300, 350 W 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350 50, 75, 100, 125, 150, 175, 200, 250, 300, 350 Minimum Auto Switch Mounting Stroke Manufacture of Intermediate Strokes (mm) Spacers installed Spacers are installed in standard stroke cylinders. 20 to 32: Stroke can be modified in 1mm increments. 40 to 100: Stroke can be modified in 5mm increments

MLGP

, 100, 125, 150, 175, 200, 250, 300, 350 W 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350 50, 75, 100, 125, 150, 175, 200, 250, 300, 350 Minimum Auto Switch Mounting Stroke Manufacture of Intermediate Strokes (mm) Spacers installed Spacers are installed in standard stroke cylinders. 20 to 32: Stroke can be modified in 1mm increments. 40 to 100: Stroke can be modified in 5mm increments

FQ1

EJ202S-075X11 30 1, 3, 5, 10 25, 50, 75 1 EJ302S-001X11 3 EJ302S-003X11 Pressure loss: 0.01 to 0.02MPa Operating temperature: 0 to 60C Differential pressure resistance: 0.2MPa 5 EJ302S-005X11 10 EJ302S-010X11 65 x 250 25 EJ302S-025X11 50 EJ302S-050X11 75 EJ302S-075X11 1 EJ402S-001X11 3 EJ402S-003X11 5 EJ402S-005X11 10 EJ402S-010X11 65 x 500 25 EJ402S-025X11 50 EJ402S-050X11 75 EJ402S-

ø6, ø8, ø12, ø16, ø20, ø25 Series MXQR Air Slide Table/Reversible Type

Bore size (Stroke (mm)) 6 8 12 16 20 25 10, 20, 30, 40, 50 10, 20, 30, 40, 50, 75 10, 20, 30, 40, 50, 75, 100 10, 20, 30, 40, 50, 75, 100, 125 10, 20, 30, 40, 50, 75, 100, 125, 150 10, 20, 30, 40, 50, 75, 100, 125, 150 Applicable Auto Switches/Refer to Best Pneumatics No. 3 for further information on auto switches.

Prevents Micro-Bubbles

129 84 26 154 68 27.5 8 56 71 6.5 62 58 75 138 84 32 165 77 27.5 8 56 71 6.5 71 17-5-11 9 Series LVC Dimensions With flow rate adjustment With by-pass (Max.

Electric Actuator

The above graphs show examples of when the duty ratio is 75% and 50%. 4 Series LEJ Work LoadAcceleration/Deceleration Graph (Guide) LEJS63/Ball Screw Drive: Horizontal 1 Kg = 2.2 lb LEJS63;A LEJS63;B 20 20 Acceleration/Deceleration [mm/s2] Acceleration/Deceleration [mm/s2] 15000 15000 Duty ratio: 50% Duty ratio: 50% 10 10 5000 5000 Duty ratio: 75% Duty ratio: 75% 0 0 0 40 10 20 30 0 30 40

Sine Cylinder Series REC

+ 55 (n 2) 10 15 75 (n = 2, 4, 6, ) (n 2) 2 20 + 50 D-B59W 75 + 55 (n 2) 15 20 75 (n = 2, 4, 6, ) D-A3 D-A44 D-G39 D-K39 100 + 100 (n 2) 35 + 30 (n 2) 10 35 100 Note) For cylinders with two D-A93/M9/M9W auto switches.

Modular F.R.L. Units

40 50 75 75 30 41 50 50 AFM20-A/AFD20-A AFM30-A/AFD30-A AFM40-A/AFD40-A AFM40-06-A/AFD40-06-A Model Semi-standard specifications With barb fitting With drain guide B 123.6 155.6 157.6 B 91.4 121.9 153.9 155.9 AFM20-A/AFD20-A AFM30-A/AFD30-A AFM40-A/AFD40-A AFM40-06-A/AFD40-06-A 42 Modular Type Regulators Series AR AC AFARAL AWAL AFAR AFAFMAR AWAFM AF AFM / AFD AR AL AW Attachment Regulator

17

Standard Strokes Bore size (mm) Standard stroke (mm) 10, 20, 30, 40, 50, 75, 100, 125, 150, 175, 200, 250 20, 30, 40, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400 12, 16 20, 25 32 to 100 Manufacture of Intermediate Strokes Spacer installation Spacers are installed in the standard stroke cylinder. 12 to 32: Available by the 1

Modular Type Filter Regulator Series AW

75 75 B 108 160 201 239 242 E 28 40 57 73 73 P 30 44 46 54 56 K 0 5 3.5 1.5 1.2 M 25 30 41 50 50 N 28 34 40 54 54 Q 4.5 5.4 6.5 8.5 8.5 H 26 63 66 76 76 G 25 40 55 80 80 Y 14 19 21 21 U 2 2.3 2.3 2.3 2.3 T 40 55 53 70 70 Z 6 7 7 7 W 18.5 28.5 38.5 42.5 42.5 B 125 177 242 278 278 V 18 30 31 35.5 37 J 27 30.5 38.5 38.5 S 6.5 15.4 8 10.5 10.5 AW10 AW20 AW30 AW40 AW40-06 M5 x 0.8 1/8, 1/4

Filter for Cleaning Solvent Quick Change Filter Series FQ1

EJ202S-075X11 30 1, 3, 5, 10 25, 50, 75 1 EJ302S-001X11 3 EJ302S-003X11 Pressure loss: 0.01 to 0.02MPa Operating temperature: 0 to 60C Differential pressure resistance: 0.2MPa 5 EJ302S-005X11 10 EJ302S-010X11 65 x 250 25 EJ302S-025X11 50 EJ302S-050X11 75 EJ302S-075X11 1 EJ402S-001X11 3 EJ402S-003X11 5 EJ402S-005X11 10 EJ402S-010X11 65 x 500 25 EJ402S-025X11 50 EJ402S-050X11 75 EJ402S-

Single Axis Electric Actuator Series LJ1H

Model Regenerative Absorption Unit Selection Guide Allowable Moment (Nm) LJ1H2021PF-K (Power supply voltage 100VAC) LJ1H2022PF-K (Power supply voltage 200VAC) Allowable static moment Pitching Yawing m : Transfer load (kg) a : Work piece acceleration (mm/s) Me: Dynamic moment L : Overhang to work piece center of gravity (mm) Allowable dynamic moment 71 75 25 50 75 100 125 150 175 200 225 250

Shock Absorbers and Rate Controls

UN .75 1.98 5.50 |,l/A 1.50 1.15 N/A N/A Pn?r 00rt t2.9 rI.) 2.48tln ?Yr-l? ul .75 L98 2.257.50 [/A 1.503.75NlA r{/A Pl 2t 50tt t, -2, .3 t7.9i18.62 2.48{ln 2Y2'12 UN .75 2.38 2.38 9.50 N/A t.50 4.15 N/A N/A All dimensions in nches. Sh*ck Absorbens Non-Adjustable Hydraulic Series qigfE.