AC Servo Motor Driver (CC-Link Type ）

1 A Q a q 0 0 1 0 2 STX DC2 2 B R b r 0 0 1 1 3 ETX DC3 # 3 C S c s 0 1 0 0 4 $ 4 D T d t 0 1 0 1 5 % 5 E U e u 0 1 1 0 6 & 6 F V f v 0 1 1 1 7 7 G W g w 1 0 0 0 8 ( 8 H X h x 1 0 0 1 9 ) 9 I Y i y 1 0 1 0 10 : J Z j z 1 0 1 1 11 ; K [ k { 1 1 0 0 12 , L l | 1 1 0 1 13 M ] m } 1 1 1 0 14 . N ^ n 1 1 1 1 15 / ?

Basic type / Direct mount type Series CY3B/CY3R

Series CY1S 6, 10, 15, 20, 25, 32, 40 How to Order CY1S 25 H 300 CDY1S 25 H 300 J79W With auto switch With switch rail Made to Order Refer to page 1195 for details.

Air Slide Table Series MXQ

F A F Lr 6 6 6 Lr=40 mm MXQ6-30 0.03 0.015 0.05 MXQ6-10 MXQ6-20 MXQ6-30 MXQ6-50 MXQ6-40 MXQ6-10 MXQ6-20 MXQ6-30 MXQ6-50 MXQ6-40 Table displacement amount (mm) Table displacement amount (mm) Table displacement amount (mm) MXQ6-30 MXQ6-50 MXQ6-50 0.04 MXQ6-20 0.02 0.010 MXQ6-20 MXQ6-40 0.03 MXQ6-40 0.02 MXQ6-10 0.01 0.005 MXQ6-10 0.01 0 0 10 20 30 40 80 120 0 10 20 30 Load (N) Load (N) Load

SYJ300/500/700

DO Without connector Do not replace V111 (G, H, L, M, W) to V115 (DIN terminal) and vice versa when replacing pilot valve assembly only. 4-4-21 Series SYJ500 Body Ported [ ] for AC Grommet (G), (H): SYJ52G H -M5 With bracket: SYJ52G H -M5-F G: Approx. 300 H: Approx. 600 (Lead wire length) 55.6 [57.8] 37 M5 x 0.8 (A port) 33.5 2-3.5 (For mounting) 30 3.5 15.5 2.5 15 11 A 18 25 + Manual override

Air Slide Table Series MXS

Refer to the Specific Product Precautions. 40 ZZ Z G H (NN 1) x H 10.5 24 10.5 24 A B 10.5 10.5 5.1 9.5 26 1 6 NN x M6 x 1 thread depth 12 B A 5H9 depth 4 +0.030 0 Section AA Section BB 5H9 depth 4 +0.030 0 GA HA (mm) Model F 35 35 35 40 30 55 65 70 N 4 4 4 4 6 6 6 8 G 16 16 16 16 21 26 39 19 H 40 40 40 50 30 35 35 35 NN 2 2 2 2 3 4 5 7 GA 16 16 16 16 51 61 109 159 HA 40 40 40 50 30 70 70

AC

Model Port size M B B A B C D P E F G H J K L 8, 1 4 1 40 53 70 75 97.5 129 165 169 11 14 18 20 40 53 70 70 40 56 73 73 17 16 17 14 30 41 50 50 27 40 54 54 22 23 26 25 5.4 6.5 8.5 8.5 8.4 8 10.5 10.5 40 53 70 70 2.3 2.3 2.3 2.3 120.5 AFD2000 AFD3000 AFD4000 AFD4000-06 4, 1 8 3 170 206 210 4 3 2 1 4, 1 8, 3 AFD2000 AFD3000 SAC2000, #1 SAC2503, #1 AFD4000 AFD4000-06 SAC4000, #1 SAC4006,

SYJ3000/5000/7000

Note) Do not replace SV111 (G, H, L, M, W) to SV115 (DIN terminal) and vice versa when replacing pilot valve assembly only. 1-5-30 31 5 Port Solenoid Valve Rubber Seal Series SYJ5000 2 Position Single [ ]: AC G H Grommet (G), (H): SYJ5120-M5 With bracket SYJ5120-M5-F G H 37 30 3.5 G: Approx. 300 H: Approx. 600 (Lead wire length) 2-3.5 (For mounting) 63.1 [65.3] 41 19.5 18 25 + SV 19.7 11

MXS

(NN-1) X H G Cross section AA Cross section BB (mm) Model F 35 35 35 40 30 55 65 70 ZZ 87 87 87 97 112 162 210 260 M 76 76 76 86 101 151 199 249 Z 75 75 75 85 100 150 198 248 K 29 39 49 59 69 94 119 144 J 40 40 40 50 60 85 118 155 I 10 10 10 10 15 40 55 68 NN 2 2 2 2 3 4 5 7 H 40 40 40 50 30 35 35 35 G 16 16 16 16 21 26 39 19 N 4 4 4 4 6 6 6 8 HA 40 40 40 50 30 70 70 70 GA 16 16 16 16 51

Vacuum Pad: Large/Heavy Duty Type Series ZPT/ZPX

across flats 24 28 4 x M4 x 0.7 H 3 x M3 x 0.5 H 10 10 G G F F E E Y Y 3 4 18 34 C C A A B D B D Dimensions Model Dimensions (mm) (mm) A B C D E G H I Y A B C D E G H I Y F F Model ZPX40HB-01-B 8 ZPX63HB-01-B10 M8 x 1.25 M10 x 1.5 40 41 28 43 20.5 47 69 13 63 65 46 68 31.5 58 80 21.5 32 43 -B10 -B12 M10 x 1.5 M12 x 1.75 ZPX50HB-01-B 8 ZPX80HB-01-B10 M8 x 1.25 M10 x 1.5 50 52 36 54 24 50.5

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Without auto switch With auto switch Stroke range (mm) Bore size (mm) J K D L C E M I H P M5 x 0.8 A A B F 5.5 Q 11.5 B P F Q 5 10 to 50 75, 100 5 to 50 75, 100 10 to 50 75, 100 30 23 32 40 M8 x 1.25 4.5 33 7.5 Rc 1/8 14 10.5 16 7 13 45 34 60 Rc 1/8 10.5 7.5 40 36.5 46.5 38.5 48.5 33 29.5 39.5 30.5 40.5 40 Rc 1/8 46.5 39.5 M8 x 1.25 5 8 Rc 1/8 14 11 16 7 13 52 40 69 11 8 M10 x 1.5 50 Rc 1

SMC Pneumatic Clean Series

S + Stroke Relief port M5 x 0.8 1.5 (20, 25) FZ Z N N F H 20 to 32 Standard port ZZ + Stroke 4-FD F Y 45 Relief port (32, 40) 40 (mm) K I HC H FY D B2 A F FD 10.5 7.5 7.5 7.5 DL Bore size FT 22 17 17 13 B1 66 52 40 40 34 B FX AL FZ G H1 H2 E C2 MM 0 41 32 32 26 20-0.033 16 13 13 13 7 7 7 4 4 4 60 60 60 21 19.5 19.5 15.5 24 22 22 18 40 32 25 20 5 24 46.5 37.5 33.5 28 11 8 8 8 82 75 75 75 36

Compressed Air Cleaning Filter Series

10 54 63 7.5 63 10 1/8, 1/4 83 14 73 76 5 76 10 121 66 24 8 6 6 12 6 10 40 80 28 66 5 2 1/4, 3/8 103 18 98 90 5 90 10 150 80 28 8 7 7 14 7 12 50 95 34 80 5 2.3 3/8, 1/2 132 49 Super Mist Separator Series AME Dimensions AME450C/550C P D Q T R E D N F L U Bracket (Accessory) O J K M V W B IN OUT C I A G Maintenance space H (mm) A Model Port size Bracket related dimensions B C D E F G H I 172

MXS Series Air Slide Table

(NN-1) X H G Cross section AA Cross section BB (mm) Model F 35 35 35 40 30 55 65 70 GA 16 16 16 16 51 61 109 159 KA NA 2 2 2 2 2 4 4 4 N 4 4 4 4 6 6 6 8 HA 40 40 40 50 30 70 70 70 G 16 16 16 16 21 26 39 19 H 40 40 40 50 30 35 35 35 NN 2 2 2 2 3 4 5 7 I 10 10 10 10 15 40 55 68 J 40 40 40 50 60 85 118 155 K 29 39 49 59 69 94 119 144 Z 75 75 75 85 100 150 198 248 M 76 76 76 86 101 151 199 249

CL

1.25 M14 x 1.5 Up to 200 Up to 300 Up to 300 Up to 300 15.5 19.5 19.5 27 M4 x 0.7 depth 7 4 5 5.5 6 6 8 8 10 12 16 10 14 M5 x 0.8 depth 7.5 M5 x 0.8 depth 8 M6 x 1 depth 12 Without rod boot ZZ e f h l ZZ With rod boot Stroke range Bore size (mm) H1 WA WW WB WH H PG PH PL PW S TA TB P TC W 30 30 25 20 20 25 32 40 178 193 196 221 198 215 218 241 55 62 62 70 16 17 17 17 30 30 35 35 35 40 40

Modular F.R.L. Units

F G H SUP. 3 1 2 q Body size Description Symbol C D E 20 30 40 Key can be mounted when residual pressure is released.

ZP

N S NBR Silicon rubber 40 50 40 50 57 86 160 224 Pad type 63 63 80 80 U Urethane rubber H Heavy duty F Fluoro rubber 100 100 E EPR Add NBR weight to the table on the right for other materials. 125 125 Dimensions ZP H 40 50 ZP H 63 80 ZP H 100 125 (mm) (mm) (mm) Model A 63 ZP63H B 65 80 ZP80H 82 C 14.5 16.5 D 50 61 Y 3.5 4.5 Model A 40 ZP40H B 42 50 ZP50H 52 C 32 42 Model A 100 ZP100H B 103

ø 40, ø 50, ø 63, ø 80, ø 100 Series CLA2 Fine Lock Cylinder Double Acting, Single Rod

Up to 600 20 to 600 35 32 86 27 115 1/4 1/4 64 20 40 10 102 17 26 67 18 15 11 M10 x 1.25 80 Up to 750 20 to 750 40 37 102 32 129 1/4 1/4 78 25 52 14 113 21 30 72 23 17 13 M12 x 1.75 100 Up to 750 20 to 750 40 37 116 41 140 1/4 1/4 92 30 52 14 124 21 31 76 25 19 16 M12 x 1.75 Bore size [mm] K KA LZ M MM N P PG PH PL PW S Without rod boot With rod boot H ZZ e f h l ZZ 40 6 14 71 11 M14 x 1.5

C85

40) (100) 89 0.5 W W W F 10.0 (40) (40) (40) 74 36 0.7 93 (40) 54 37 26 33 0.3 69 G 41 27 39 19 25 0.5 52 C8525 33 22 32 15 20 0.7 C8520 43 1.0 Foot: L Rod side flange: F Head side flange: G (100) (40) (40) (40) (40) (100) 0.3 L (100) (40) (40) (40) (40) (100) 0.5 W W F W (100) (40) (40) (40) (40) (100) 0.7 (40) (40) (40) (100) 79 38 0.3 0.1 G (40) (40) 60 29 37 0.5 76 600 500 400 300 1000

C85

0.5 52 C8525 33 22 32 15 20 0.7 C8520 43 1.0 Foot: L Rod side flange: F Head side flange: G (100) (40) (40) (40) (40) (100) 0.3 L (100) (40) (40) (40) (40) (100) 0.5 W W F W (100) (40) (40) (40) (40) (100) 0.7 (40) (40) (40) (100) 79 38 0.3 0.1 G (40) (40) 60 29 37 0.5 76 600 500 400 300 1000 1100 900 800 700 200 100 0 Cylinder stroke (mm) (40) 50 34 23 30 0.7 63 6-11-5 ISO Cylinder: Standard

7

R CAC408 40 40A Flange P 110 VAC F N.O. Q 200 VAC 9 50A N.C. S CAC408 50 50A Flange R 230 VAC G N.O.