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The basic parameter is not correct for the following condition: (Assignable value range) (1) Stroke (-) < Stroke (+) (2) W-Area 1 < W-Area2 (If both W-Area1 and W-Area2 is 0, the alarm will not be activated.) (3) Maximum pushing force < Maximum pushing force of The Parameter value is incorrect (01-049) System B RESET the electric actuator parameter input error

NPN open collector 1 output, Lead wire with connector (Length 2 m) PNP open collector 1 output , Lead wire with connector (Length 2 m) NPN open collector 2 outputs, Lead wire with connector (Length 2 m) PNP open collector 2 outputs, Lead wire with connector (Length 2 m) Digital pressure switch specifications ZSE30A-01-N-ML ZSE30A-01-P-ML ZSE30A-01-A-ML ZSE30A-01-B-ML 1 to 3 are assembled

Construction Component Parts Description No. q w e r t y u i o !0 !1 !

thread u r y e w e y q y u r y e w u i t q i t q i t q r y e w AS e w q w ASP o Free flow Female thread Male thread ASN Free flow One-touch fitting Male thread AQ ASV AK Component Parts ASS Description Material Note No.

The basic parameter is not correct for the following condition: (Assignable value range) (1) Stroke (-) < Stroke (+) (2) W-Area 1 < W-Area2 (If both W-Area1 and W-Area2 is 0, the alarm will not be activated.) (3) Maximum pushing force < Maximum pushing force of The Parameter value is incorrect (01-049) System B RESET the electric actuator parameter input error

1/2 VQC 4/5 VQZ SQ VFS VFR VQ7 537 Connector Type Manifold VQC1000/2000 Series IP67 enclosure compatible Dust-tight, Immersion-proof (Based on IEC60529) (S/T/L/M kit) Power saving Standard: 0.4 W (Reduced by 60% compared to current model) High-pressure (1 MPa, Metal seal): 0.95 W Accommodates gateway-type serial wiring.

Contents Series Bore size (mm) Kit no. 20 25 32 40 50 63 80 100 20 25 32 40 50 63 80 100 CBG1N20-PS-W CBG1N25-PS-W CBG1N32-PS-W CBG1N40-PS-W CBG1N50-PS-W CBG1N63-PS-W CBG1N80-PS-W CBG1N100-PS-W Order seal kit in accordance with the bore size. Order seal kit in accordance with the bore size.

AW-OMS0038-C PRODUCT NAME FILTER REGULATOR MODEL/ Series AW20-(F,N)01(F,N)02(B,C,E,G,H,M)(-1,2,6,C,J,N,R,Z)-B AW30-(F,N)02(F,N)03(B,C,D,E,G,H,M)(-1,2,6,8,J,N,R,W,Z)-B AW40-(F,N)02(F,N)04(B,C,D,E,G,H,M)(-1,2,6,8,J,N,R,W,Z)-B AW40-(F,N)06(B,C,D,E,G,H,M)(-1,2,6,8,J,N,R,W,Z)-B AW60-(F,N)06(F,N)10(B,C,D,E,G,M)(-1,2,6,8,J,N,R,W,Z)-B Contents PAGE 1. SAFETY INSTRUCTIONS 16 2. APPLICATION 7 3.

AW-OMT0013-B PRODUCT NAME FILTER REGULATOR MODEL/ Series AW20K-(F,N)01(F,N)02(B,C,E,G,H,M)(-1,2,6,C,J,N,R,Z)-B AW30K-(F,N)02(F,N)03(B,C,D,E,G,H,M)(-1,2,6,8,J,N,R,W,Z)-B AW40K-(F,N)02(F,N)04(B,C,D,E,G,H,M)(-1,2,6,8,J,N,R,W,Z)-B AW40K-(F,N)06(B,C,D,E,G,H,M)(-1,2,6,8,J,N,R,W,Z)-B AW60K-(F,N)06(F,N)10(B,C,D,E,G,M)(-1,2,6,8,J,N,R,W,Z)-B Contents PAGE 1. SAFETY INSTRUCTIONS 16 2.

Application 2 port 3 port 2 port 3 port VM120-01-00 VM121-01-00 VM130-01-00 VM131-01-00 VM122-M5-00 VM123-M5-00 VM132-M5-00 VM133-M5-00 Basic Mechanical operation Manual operation Roller lever VM121-01-01 VM121-01-01S VM131-01-01 VM131-01-01S VM123-M5-01 VM123-M5-01S VM133-M5-01 VM133-M5-01S Polyacetal roller Hard steel roller VM121-01-02 VM121-01-02S VM131-01-02 VM131-01-02S VM123-M5-

Description Body Material Body Zinc die-cast Zinc die-cast q q Spool valve Spool/Sleeve Aluminum/NBR Stainless steel w w Piston Piston Resin Resin e e rPilot Valve Assembly rPilot Valve Assembly (1) (1) L M G L M G VQ111P (H) (Y) VQ111P (H) (Y) 2 2 Single Single Voltage 1 to 6 Voltage 1 to 6 L M L M VQ110L VQ110L 2 2 Double (latching) Double (latching) Voltage 1 to 6 Voltage 1 to 6 The

Inch size (mm) T D1 H D3 L1 L2 L3 M L4 Note 1) A Note 2) d Model Weight (g) Lock Unlock Lock Unlock AS22;1F-01-01(S)A 1/8" 7.2 19.1 26.1 (26) 9 (9) AS22;1F-01-03(S)A 5/32" 8.2 13.3 13 1/8 11.6 30.6 29.2 27.5 26.1 19.1 (12.7) AS22;1F-01-07(S)A 1/4" 11.2 20.8 27.8 (27.7) 10 (9) AS22;1F-01-09(S)A 5/16" 13.2 22.4 29.4 (29.3) 14.2 11 (10) AS22;1F-02-01(S)A 1/8" 7.2 20.9 30 (30.3) 18 (19) AS22;

Example) If P = 0.6 MPa, a max. stroke = the respective stroke in the graph x 0.6 0.5 49 45 39 30 0.7 Rod side flange style: F Head side flange style: G CY 259 237 211 168 Foot style: L L 0.3 199 183 162 129 0.5 CX W W W F Figure (1) 168 154 136 109 0.7 Load factor MQ 119 110 97 76 0.3 m RHC 90 83 73 56 0.5 G 74 68 60 46 0.7 RZQ 1) = 0.7 or less m D2) = 0.5 or less -X m Individual -X

Example) If P = 0.6 MPa, a max. stroke = the respective stroke in the graph x 0.6 0.5 49 45 39 30 0.7 Rod side flange style: F Head side flange style: G CY 259 237 211 168 Foot style: L L 0.3 199 183 162 129 0.5 CX W W W F Figure (1) 168 154 136 109 0.7 Load factor MQ 119 110 97 76 0.3 m RHC 90 83 73 56 0.5 G 74 68 60 46 0.7 RZQ 1) = 0.7 or less m D2) = 0.5 or less -X m Individual -X

Example) If P = 0.6 MPa, a max. stroke = the respective stroke in the graph x 0.6 0.5 49 45 39 30 0.7 Rod side flange style: F Head side flange style: G CY 259 237 211 168 Foot style: L L 0.3 199 183 162 129 0.5 CX W W W F Figure (1) 168 154 136 109 0.7 Load factor MQ 119 110 97 76 0.3 m RHC 90 83 73 56 0.5 G 74 68 60 46 0.7 RZQ 1) = 0.7 or less m D2) = 0.5 or less -X m Individual -X

AW-OMZ0061 PRODUCT NAME Mist Separator Regulator MODEL / Series / Product Number AWM20-(F,N)01(F,N)02(B,C,E,E1,E2,E3,E4,G,H,M)(-1,2,6,C,J,N,R,Z,ZA)-D AWM30-(F,N)02(F,N)03(B,C,D,E,E1,E2,E3,E4,G,H,M)(-1,2,6,8,J,N,R,W,Z,ZA)-D AWM40-(F,N)02(F,N)04(B,C,D,E,E1,E2,E3,E4,G,H,M)(-1,2,6,8,J,N,R,W,Z,ZA)-D Contents Page 1. Safety Instructions 2-8 2. Application 9 3. Standard Specifications 9 4.

AW-OMZ0062 PRODUCT NAME icro Mist Separator Regulator MODEL / Series / Product Number AWD20-(F,N)01(F,N)02(B,C,E,E1,E2,E3,E4,G,H,M)(-1,2,6,C,J,N,R,Z,ZA)-D AWD30-(F,N)02(F,N)03(B,C,D,E,E1,E2,E3,E4,G,H,M)(-1,2,6,8,J,N,R,W,Z,ZA)-D AWD40-(F,N)02(F,N)04(B,C,D,E,E1,E2,E3,E4,G,H,M)(-1,2,6,8,J,N,R,W,Z,ZA)-D Contents Page 1. Safety Instructions 2-8 2. Application 9 3.

..3/8 U04 ..1/2 U32 ..10-32UNF 01 ... 1/8 02 ... 1/4 03 ... 3/8 04 ... 1/2 W I T H O N E-T O U C H F I T T I N G S T Y P E 2 Elbow 3 Universal C O N T R O L M E T H O D 0 Meter Out 1 Meter In Courtesy of Steven Engineering, Inc. !

(g) n: Stations W = 100n + 151 W = 79n + 127 W = 61n + 101 Note 1) For 10 stations or more (5 stations or more for the 53-SS5Y7), supply pressure to P port on both sides and exhaust from EA/EB port on both sides.