LEC-OM07605CN

PA02] 0 0 00: 100W 200W, 400W, 750W 02:LEC-MR-RB-032 03:LEC-MR-RB-12 11.2.3 11.5 100 5m 11 9 11. (1) LECSS2-T P+DP+CG3G4 G3G4 P+D P+D P P+ C C G3 D (3) (1) G4 5m 5 m (12) 1.

P

Adaptor connection thread Symbol Pad dia. 1 02 to 08 B5 2 10 to 16 3 20 to 32 B8 4 40, 50 T 2 ZP B5 [qAdaptor] R S ZP 04 A5 [wR type adaptor] Symbol S Pad dia. 02 to 16 L 20 to 50 With Buffer ZP R 16 K20 A10 06 UGN [Pad model no.]

Thermo-chiller/Rack Mount Type

2 [ ] lamp Lights up when AL.01 Low level in tank abnormal or AL.02 Low level in tank alarm is generated !3 Digital display (11-segment, 1 digit) X is displayed when maintenance notification is generated. !4 [RMT] lamp Lights up during remote operation by communication function !5 [KEYLOCK] lamp Lights up when key lock setting is active !

Modular Type Lubricators Series AL

(This is not applicable to VHS40) Body Size Symbol Port Size Body Size 20 30 40 02 03 04 1/4 3/8 1/2 Effective area (mm2) 5 5 Model VHS20 VHS30 Note: Other sizes, thread forms, options, etc. may be possible, please contact SMC for availability.

Speed Exhaust Controller Series ASV Size: M3, M5, 1/8, 1/4, 3/8 1

M1 M2 Weight (g) ASV310F-01-06S ASV310F-01-08S ASV310F-02-06S ASV310F-02-08S ASV410F-01-08S ASV410F-01-10S ASV410F-02-08S ASV410F-02-10S ASV410F-03-08S ASV410F-03-10S ASV510F-02-10S ASV510F-02-12S ASV510F-03-10S ASV510F-03-12S ASV510F-04-10S ASV510F-04-12S 71.9 73.8 71.9 73.8 83.1 85.2 83.1 85.2 83.1 85.2 90.2 91.8 90.2 91.8 90.2 91.8 16.8 19.3 16.8 19.3 19.3 23.3 19.3 23.3 19.3 23.3 23.3

Ozone Resistant

220-02-F 320-03 (02) 320-03-F (02) 420-04 420-04-F 121F-M3 131F-M3 121F-M5 (U10, 32) 131F-M5 (U10, 32) 221F-01 231F-01 2211F-01-06 221F-02 231F-02 321F-03 (02) 331F-03 (02) 421F-04 431F-04 1000F 2000F 2050F 3000F 4000F 1001F 2001F 2051F 3001F 4001F 230F 330F 430F 530F 630F 330F 430F 530F 630F Manifold regulator 4-, 5-port solenoid valve VQ Directional control valves 0 1000 2000 4000 5000

PA300/500/700

Note Symbol 1P Common Common 3R Common Individual 1 Type 41 Type 42 VHS 3 VV3PA3-42-053-02 Stations 02 2 stations ... ... 20 20 stations To order valves and blank plate assembly mounted onto the manifold, list valves and blanking plate assembly with manifold base part number.

Booster Regulator Series VBA1110 to 4200 1

Pressure gauge Lubrication Not required ITV Installation Horizontal AN200-02 AN400-04 AN300-03 AN300-03 AN400-04 Silencer Pressure adjustable mechanism Relieving type IC How to Order Pressure VBA Pressure increase ratio 2.0 MPa 1 Twice 4 times 0 1 VE Pressure setting Handle operated type 1 Port size VBA1110-02 VY1 Body size Port size Rc 1/4 Symbol 02 1/4 1 VBA1-02 G VBA 1 1 02 1 0 GN Series

VXA21/22

Valve (Port size) VQ 1 (1.5mm) 2 (2.2mm) 3 (3mm) 4 (4mm) VXA31 VXA32 01 ( ) 1 8 02 ( ) 1 4 03 ( ) 3 8 02 ( ) 1 4 Ordering Example (Example) Series VXA31, Orifice size 1.5mm, Rc(PT)1/8 (Part number) VXA3114-01 4.1-69 VXA31/32 Air How to Read the Graph In the sonic flow region: For a flow of 100 l/min.

This is a legacy product. Please contact us for the latest version.sales@ocaire.com, INTEGRATED SENSOR and DISPLAY, INSTRUMENTATION, IF/PFA 3/8 INCH NPT VERSION, 1.22506 lb, ModelMeasured fluidFlow rate measurement rangeSet flow rate rangeRated flow rangeMinimum set unitAccumulated pulse flow rate exchange value (Pulse width: 50 ms)Note 1, 2)Display unitsOperating fluid temperatureLinearityRepeatabilityTemperature

This is a legacy product. Please contact us for the latest version.sales@ocaire.com, INTEGRATED SENSOR and DISPLAY, INSTRUMENTATION, IF/PFA 1/2 INCH ALL OTHERS, .63966 lb, ModelMeasured fluidFlow rate measurement rangeSet flow rate rangeRated flow rangeMinimum set unitAccumulated pulse flow rate exchange value (Pulse width: 50 ms)Note 1, 2)Display unitsOperating fluid temperatureLinearityRepeatabilityTemperature

This is a legacy product. Please contact us for the latest version.sales@ocaire.com, INTEGRATED SENSOR and DISPLAY, INSTRUMENTATION, IF/PFA 1/2 INCH NPT VERSION, 1.10127 lb, ModelMeasured fluidFlow rate measurement rangeSet flow rate rangeRated flow rangeMinimum set unitAccumulated pulse flow rate exchange value (Pulse width: 50 ms)Note 1, 2)Display unitsOperating fluid temperatureLinearityRepeatabilityTemperature

This is a legacy product. Please contact us for the latest version.sales@ocaire.com, INTEGRATED SENSOR and DISPLAY, INSTRUMENTATION, IF/PFA 3/8 INCH ALL OTHERS, .85980 lb, ModelMeasured fluidFlow rate measurement rangeSet flow rate rangeRated flow rangeMinimum set unitAccumulated pulse flow rate exchange value (Pulse width: 50 ms)Note 1, 2)Display unitsOperating fluid temperatureLinearityRepeatabilityTemperature

This is a legacy product. Please contact us for the latest version.sales@ocaire.com, INTEGRATED SENSOR and DISPLAY, INSTRUMENTATION, IF/PFA 3/8 INCH PT VERSION, 1.32277 lb, ModelMeasured fluidFlow rate measurement rangeSet flow rate rangeRated flow rangeMinimum set unitAccumulated pulse flow rate exchange value (Pulse width: 50 ms)Note 1, 2)Display unitsOperating fluid temperatureLinearityRepeatabilityTemperature

This is a legacy product. Please contact us for the latest version.sales@ocaire.com, INTEGRATED SENSOR and DISPLAY, INSTRUMENTATION, IF/PFA 3/8 INCH PT VERSION, .86487 lb, ModelMeasured fluidFlow rate measurement rangeSet flow rate rangeRated flow rangeMinimum set unitAccumulated pulse flow rate exchange value (Pulse width: 50 ms)Note 1, 2)Display unitsOperating fluid temperatureLinearityRepeatabilityTemperature

This is a legacy product. Please contact us for the latest version.sales@ocaire.com, INTEGRATED SENSOR and DISPLAY, INSTRUMENTATION, IF/PFA 3/8 INCH NPT VERSION, 1.10231 lb, ModelMeasured fluidFlow rate measurement rangeSet flow rate rangeRated flow rangeMinimum set unitAccumulated pulse flow rate exchange value (Pulse width: 50 ms)Note 1, 2)Display unitsOperating fluid temperatureLinearityRepeatabilityTemperature

This is a legacy product. Please contact us for the latest version.sales@ocaire.com, INTEGRATED SENSOR and DISPLAY, INSTRUMENTATION, IF/PFA 3/8 INCH ALL OTHERS, 1.01535 lb, ModelMeasured fluidFlow rate measurement rangeSet flow rate rangeRated flow rangeMinimum set unitAccumulated pulse flow rate exchange value (Pulse width: 50 ms)Note 1, 2)Display unitsOperating fluid temperatureLinearityRepeatabilityTemperature

AS-FPQ/AS-FPG

A (2) AS121FP-M5-04 AS121FP-M5-06 AS221FP-01-04 AS221FP-01-06 AS221FP-01-08 AS221FP-02-04 AS221FP-02-06 AS221FP-02-08 AS221FP-02-10 AS321FP-03-06 AS321FP-03-08 AS321FP-03-10 AS321FP-03-12 AS421FP-04-10 AS421FP-04-12 4 8 10.4 22.2 17 27 7 7 12.2 28.8 26 M5 x 0.8 9.6 25.2 22.4 6 12.8 23.2 18.5 8 8 28 (12.2) (28.8) (26) 4 10.4 24.3 17 17 17 31.4 13.4 35.5 30.5 6 R 1/8 12 14.2 32.4 27.4 12.8

Information

G Stainless steel Body material Applicable tubing O.D. 04 06 08 10 12 4 6 8 10 12 Body size 2 Elbow Type 2 3 4 5 6 M5 1/8 1/4 3/8 1/2 Control type Port size 0 1 Meter-out Meter-in M5 01 02 03 04 M5 x 0.8 R1/8 R1/4 R3/8 R1/2 With one-touch fitting 1 Series ASG Needle Valve: Flow Characteristics ASG220F-M5 ASG221F-M5 ASG320F-01 ASG321F-01 ASG420F-02 ASG421F-02 1.5 Inlet pressure: 0.5 MPa Inlet

Speed Controller with Residual Pressure Release Valve with One-touch Fitting Series AS



FE Elbow Type/Universal Type 1

(mm) 04 06 08 10 12 Type 4 6 8 10 12 Port size Elbow Universal 2 3 01 02 03 04 R 1/8 R 1/4 R 3/8 R 1/2 Control type Meter-out Meter-in 0 1 With residual pressure release valve With One-touch fitting 15-9-36 2 Speed Controller with Residual Pressure Release Valve with One-touch Fitting, Elbow Type/Universal Type Needle Valve/Flow Characteristics AS2201FE-02, AS2211FE-02 AS2301FE-02, AS2311FE