Table of Contents

Refer to pages 14-19-28 to 29. Construction Refer to pages 14-19-30 to 31.

•

ZP'f40 28 30 28 30 30 32 28 30 ' (26) (2S) (231 (26) (25) (16) (28) (26) (20) (26) (25) (23) ZP'[SIl 30 32 32 34 -1 30 32 How To Order ZPT(02~~5) Symbd Thread dja I 1 Mate,ial Pad type' AS M5xO.8 N NBR (Application: Refer to liS10) 066 .!1:,'j '" M6xl A6 S Silic on rubber .. ~ U Flattype Pad dia.(mm) Vacuum entry (also mounting thread dia) 088 :!

Modular F.R.L. Units

Outlet pressure MPa Existing model New Conditions AR20-02-A AR20-02-A AR20-02 New New 0.3 Inlet pressure: 0.5 MPa Outlet pressure: 0.3 MPa Flow rate: 500 L/min (ANR) New New AR20-02-A AR20-02 500 Flow rate L/min (ANR) Replacement in hand!

AC Servo Motor Driver (Network card type ）

When the movement is returned at the stroke end 18 70 18EtherCAT COMMUNICATION 8) Method 24 and Method 28 (Homing without index pulse) The following figure shows the operation of Homing method 24. The operation direction of Homing method 28 is opposite to that of Homing method 24.

Valve Single Unit

13.6 28 B A 13.6 28 A COM B + B A Manual override 2-4.2 42 18.4 (A, B port) 2-One-touch fittings (Press and turn for the locking type.)

LEC-OM02704CN

C 1. ##0064 ## 00 01 1 02 2 03 3 62 62 63 63 64 64 2. $$$0255 3. ** 4.

ZP

ZP3-T13UM;-A12-02 ZP3-T16UM;-A12-02 Mounting Adapter Part No.

0.55

398.5 441 426 468.5 453.5 496 481 523.5 508.5 551 536 578.5 563.5 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 stations Station n L1 L2 Type 42/Individual exhaust: VV3PA3-423-02 Stations (Pitch) P = 27.5 1/4 3(R) port 28 18.5 3R 3R 12 72.5 2 x 6.5 (For mounting) N.C.

Stainless Steel One-touch Fittings Series KG

Mounting hole T(M) L1 L2 Nylon Urethane 1 8 KGE04-01 16 35 25 40 29 14 16 27.5 31 28 31.5 33.5 27.5 33 11 15 11 15 17 7.5 13 4 M12 1 13 5.6 5.6 14 1 4 KGE04-02 17 1 8 1 4 3 8 1 8 KGE06-01 KGE06-02 KGE06-03 KGE08-01 17 6 M14 1 13.1 13.1 17 15 17 19 26.1 18.0 28 27 48 17 1 4 KGE08-02 M16 1 8 18.5 17 19 3 8 KGE08-03 15 19 35 1 4 KGE10-02 34.5 36.5 41.5 29.5 53 67 12.5 14 10 21 M20 1 21 22 24

Series KG Stainless Steel One-touch Fittings

Mounting hole T(M) L1 L2 Nylon Urethane 1 8 KGE04-01 16 35 25 40 29 14 16 27.5 31 28 31.5 33.5 27.5 33 11 15 11 15 17 7.5 13 4 M12 1 13 5.6 5.6 14 1 4 KGE04-02 17 1 8 1 4 3 8 1 8 KGE06-01 KGE06-02 KGE06-03 KGE08-01 17 6 M14 1 13.1 13.1 17 15 17 19 26.1 18.0 28 27 48 17 1 4 KGE08-02 M16 1 8 18.5 17 19 3 8 KGE08-03 19 15 35 1 4 KGE10-02 34.5 36.5 12.5 14 41.5 29.5 53 67 10 21 21 M20 1 22 24

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

Number of pages has been increased from 20 to 28. YU A flow adjustment valve (0.05 to 5 L/min) has been added. A 2 to 200 L/min flow range option has been added. A rear ported type has been added. Number of pages has been increased from 28 to 32.

Hydraulic

17 17 13 M10 x 1.5 20 35 22 M16 x 1.5 30 26 3/8 43 18 112 50 63 16H9 28 8 80 60 28 21 22.4 30 17 17 13 M10 x 1.5 22 40 25 M18 x 1.5 30 26 3/8 47 20 116 55 80 18H9 32 8 100 75 32 26 28 32 22 20 15 M12 x 1.75 26 45 29 M22 x 1.5 35 30 1/2 57 22 127 65 100 20H9 38 6.5 118 90 36 34 35.5 35 27 19 16 M12 x 1.75 27 50 34 M27 x 2 35 32 1/2 66 24 137 80 125 22H9 38 6.5 140 112 42 34 35.5 35 27 19

AS

AS3301F-02 Meter-in type Meter-in type AS3211F-02 AS3311F-02 AS ASP ASN AQ ASV AK Component Parts Component Parts No.

Rubber seal 5 Port Solenoid Valve Series SYJ7000

28 28 Pg7 28 Applicable cable O.D. 3.5 to 7 Refer to the page 91 for dimentions with connector cable. 54 Series SYJ7000 2 Position Single [ ]: AC G H 01 02 Grommet (G), (H): SYJ714022 27 12 34 8.5 2-4.3 (For mounting) Manual override B A A B With interface regulator R1 R2 P 59.8 3.2 G: Approx. 300 H: Approx. 600 (Lead wire length) 85.2 [87.4] 128.8 [131] (Light/surge voltage suppressor)

Air Cylinder Series CG1 ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

28 28 30 36 46 Head side trunnion style: CG1TQ Bracket mounting range 2-TD8 (Pin O.D.)

CG1

3.2 35.8 42 16 28 47.6 Up to 125 8 C95 10 5.5 30 43 33 3.2 39.8 42 20 28 45.5 53 Up to 200 10 10 6.6 35 40 4.5 49.4 48 22 28 54 54.5 67.7 Up to 200 12 C92 10 6.6 40 49 4.5 58.4 56 30 30 65.5 78.7 63.5 Up to 200 14 Consists of pins, flat washer and hexagon socket head cap bolt.

Air Combination

AC-OMX0051-D PRODUCT NAME Air Combination MODEL / Series / Product Number AC20(A)-(F,N)01~(F,N)02(C,E,E1,E2,E3,E4,G,M)-(1,2,3,6,C,J,N,R,Z,ZA)-D AC20B,C,D -(F,N)01~(F,N)02(C,E,E1,E2,E3,E4,G,M)-(1,2,6,C,J,N,R,Z,ZA)-D AC30(A)-(F,N)02~(F,N)03(C,D,E,E1,E2,E3,E4,G,M)-(1,2,3,6,8,J,N,R,W,Z,ZA)-D AC30B,C,D -(F,N)02~(F,N)03(C,D,E,E1,E2,E3,E4,G,M)-(1,2,6,8,J,N,R,W,Z,ZA)-D AC40(A)-(F,N)02~(F,N)04(C,D

Series SYJ300/500/700 3 Port Solenoid Valve Rubber Seal

[ ] for AC L plug connector (L): SYJ3l2-lLll-M3 M plug connector (M): SYJ3l2-lMll-M3 44.9 28 12.7 28 12.7 A 8.2 2 A 8.2 2 2-1.8 7.4 7.1 (Mounting holes for manifold) 2-1.8 7.4 7.1 (Mounting holes for manifold) (Lead wire length) 300 300 (Lead wire length) 28 [34.5] 39.1 [45.6] 28 [34.5] 20 15.6 13.5 15 20 9 13.5 15 9 58.5 48.9 [50.2] [ ] for AC Other dimensions are the same as the grommet

AC Servo Motor Driver (CC-Link Type ）

14 28 14.

AC Servo Motor Driver (CC-Link Type ）

PC ) . 6 -21 6.3.1 Parameter list . 6 -21 6.3.2 Detail list . 6 -22 6.3.3 S-pattern acceleration/deceleration . 6 -28 6.3.4 Alarm history clear . 6 -28 6.3.5 Rough match output . 6 -28 6.3.6 Software limit . 6 -29 6.4 I/O setting parameters (No.