Series MSQ 11- Rack & Pinion Type Rotary Table 22- Size: 1, 2, 3, 7, 10, 20, 30, 50

x 0.5 M3 x 0.5 M3 x 0.5 M4 x 0.7 JK JU M3 x 0.5 M4 x 0.7 M5 x 0.8 M6 x 1 P M3 x 0.5 M3 x 0.5 M3 x 0.5 M5 x 0.8 PA M3 x 0.5 M3 x 0.5 M3 x 0.5 M5 x 0.8 Q S SD SF SU UU WA WB WC WD M3 x 0.5 M3 x 0.5 M3 x 0.5 M4 x 0.7 WE WF XA XB XC YA YB YC Size 3.5 16 50.5 10.8 24.4 9.4 25 9.5 2H9 2 4.8 20 22.5 2H9 2 11 2H9 2 1 3.5 18 56 13.4 26.2 11.3 28 10 2H9 2 5.3 21 24.5 2H9 2 11.5 2H9 2 2 3.5 20.5 60

CXS

) 5.5 2-M3 x 0.5 through M2.5 x 0.45 x 6l (Hexagon socket head cap screw) M3 x 0.5 x 12.5l (Hexagon head bolt) M3 x 0.5 (Hexagon nut) (12) (5 + Stroke) 2.75 2-M3 x 0.5 through 25 0.2 4 8-28-23 23 Series CXSJ Dimensions: 10 Standard Piping 4-M3 x 0.5 thread depth 4.5 16 12 + Stroke 3.5 8 7.5 2-M5 x 0.8 thread depth 4 (Piping port) 28.5 8 Stroke 15 56 + Stroke 8 3.5 13 1 44.5 + Stroke M5 x

MK

Operating range RB Model C 8 8 8 8 D 50 60 50 60 75 85 75 85 85 95 75 85 95 130 100 130 Mounting bolt M3 x 50l M3 x 60l M3 x 50l M3 x 60l M5 x 75l M5 x 85l M5 x 75l M5 x 85l M5 x 85l M5 x 95l M5 x 75l M5 x 85l M6 x 95l M6 x 130l M8 x 100l M8 x 130l MKB12-10 MKB12-20 MKB16-10 MKB16-20 MKB20-10 MKB20-20 MKB25-10 MKB25-20 MKB32-10 MKB32-20 MKB40-10 MKB40-20 MKB50-20 MKB50-50 MKB63-20 MKB63-50

CJP

Round type Flat type 5.5 NTP-006 CJ-CR006 CJ-CF006 6.4 1.8 M3 x 0.5 6 6 8 11 6 M3 x 0.5 5 6 8 7 NTP-010 CJ-CR010 CJ-CF010 8.1 2.4 M4 x 0.7 10 8 10 13 10 M4 x 0.7 6 8 10 8 NTP-015 CJ-CR016 CJ-CF016 9.2 3.2 M5 x 0.8 15 10 12 15 15 M5 x 0.8 7 10 12 6-2-13 8 Pin Cylinder Single Acting, Single Rod, Single Return Series CJP 6, 10, 15 How to Order A short stroke miniature cylinder with a shorter

CXS

head set screw) M8 x 1.25 x 7.5l (Bolt holder) CX 0.5 D-X 25 0.2 25 0.2 5.3 5.3 16 32 31 20Data 2-M3 x 0.5 through 3.4 through 6.5 counterbore with depth 5 (Opposite side: Same) 5.5 2-M3 x 0.5 through M2.5 x 0.45 x 6l (Hexagon socket head cap screw) M3 x 0.5 x 12.5l (Hexagon head bolt) M3 x 0.5 (Hexagon nut) (12) (5 + Stroke) 2.75 2-M3 x 0.5 through 25 0.2 4 8-28-23 23 Series CXSJ Dimensions

Clean Room Rodless Cylinder Series CYP ø15, ø32 1

Max. load mass 2 = M/Mmax MY Review M1, M2, M3 Mmax is the allowable moment 2. Static moment CY 3 = Me/Memax Review Me1, Me3 Memax is the allowable moment 3.

IDX-OM-W028

IDU22E75E-23 IDU22E75E-30 (1 phase AC230V) (3 phase AC200V) L N PE L1 L2 L3 PE Customer Connection Side Terminal connecting screw: M3 Crimping terminal width: 6.5mm and below Applicable electrical wire: 1.25mm2 or more Customer Connection Side Terminal connecting screw: M3 Crimping terminal width: 6.5mm and below Applicable electrical wire: 1.25mm2 or more IDU Series 1-1 Parts Name and

2–4

mounting nut Hexagon socket head cap bolt (M3 x 0.5 x 14 spring wasdher 2 pcs.)

Speed Exhaust Controller Series ASV Size: M3, M5, 1/8, 1/4, 3/8 1

steel/NBR POM/Stainless steel NBR NBR ASV Note) M3 type is made of stainless steel.

S070

-www.stevenengineering.com VT 20.5 19 3 2 VP 1 9.5 6.5 5.5 4.5 VG 12.3 10 10 25 VP M3 x 0.5 3 (EXH) port M3 x 0.5 1 (SUP) port M3 x 0.5 2 (OUT) port S070 VQ VKF S070B-C-M3 Plug lead type VQZ VZ VS 0.1 W with power saving circuit 150 (Lead wire AWG#26) 3.5 27 6 VFN 26 23.5 20.5 3 9.5 28.5 3.5 4-11-5 6 Series S070 Dimensions Base mounted with screws S070B-G-M5 Grommet type 16.5 3 7 15 21 2-

S070

Note) Order is accepted in 10 units. 4-11-4 Series S070 3 Port Solenoid Valve Compact Direct Operated Dimensions Base mounted with screws S070B-G-M3 Grommet type 16 3 V100 7 SY 12 18 SYJ 2-3.4 mounting hole VK 150 (Lead wire AWG#26) 5 22 6 VZ VT 20.5 19 3 2 VP 1 9.5 6.5 5.5 4.5 VG 12.3 10 10 25 VP M3 x 0.5 3 (EXH) port M3 x 0.5 1 (SUP) port M3 x 0.5 2 (OUT) port S070 VQ VKF S070B-C-M3 Plug

V

2.a VALVES VALVES SERIES PAGE NUMBER SX3000 / SX5000 2.1 SOLENOID VALVE SY100 2.5 3/2 DIRECT ACTING / SOLENOID SPRING VALVE M3 PORTED SY3000/5000/7000 2.8 BODY PORTED SOLENOID VALVE SY3000/5000/7000 2.13 BASE MOUNTED SOLENOID VALVE VQ100 2.19 3/2 DIRECT ACTING / SOLENOID SPRING VALVE M3-M5 PORTED VQ0 2.21 5 PORT METAL/RUBBER SEAL ULTRA HIGH SPEED SOLENOID VALVE VQ1000 2.26 5 PORT METAL/RUBBER

Rotary Table/

x 0.5 3.5 M3 x 0.5 M3 x 0.5 16 50.5 10.8 24.4 9.4 25 9.5 2H9 2 M3 x 0.5 4.8 20 22.5 2H9 2 11 2H9 2 M3 x 0.5 3.5 M4 x 0.7 M3 x 0.5 18 56 13.4 26.2 11.3 28 10 2H9 2 M3 x 0.5 5.3 21 24.5 2H9 2 11.5 2H9 2 M3 x 0.5 3.5 M5 x 0.8 M3 x 0.5 20.5 60 15.2 31 11.8 30.5 12 2H9 2 M3 x 0.5 5.3 25 27 2H9 2 13.5 2H9 2 M4 x 0.7 4.5 M6 x 1 M5 x 0.8 23 73.5 15.4 37.4 14.9 34.5 14 3H9 3 M4 x 0.7 6.5 29 32.5

Electric Slide Tables

Use bolts that are between the maximum and minimum screw-in depths in length. 41 Electric Slide Table/High Rigidity Type Series LESH Model Selection Specific Product Precautions Dimensions: Symmetrical Type/L Type LESH8L 3 x M3 x 0.5 thread depth 5.5 depth 3 3 +0.03 +0.01 A-A 5 10 6 x M3 x 0.5 thread depth 5 Note 4) C C 11.5 G x M4 x 0.7 thread depth 8 26.5 32 6.5 A 7 6.5 3.2 2 Servo Motor

Low Profile Slide Table Series MXF

Model Bolt Maximum tightening torque (Nm) Maximum screw-in depth L (mm) Model Bolt Maximum tightening torque (Nm) Maximum screw-in depth L (mm) MXF8 MXF8 6 6.5 0.9 0.9 M3 x 0.5 M3 x 0.5 MXF12 MXF12 6 5.5 0.9 0.9 M3 x 0.5 M3 x 0.5 MXF16 MXF16 10 6.5 2.1 2.1 M4 x 0.7 M4 x 0.7 MXF20 MXF20 12 9.5 4.4 4.4 M5 x 0.8 M5 x 0.8 Caution To prevent the workpiece holding bolts from touching the guide

Flow Sensor Series PFMV

PF2A ZS-36-A1 ZS-36-A2 ZS-36-A3 ZS-36-A4 ZS-36-A5 2 L-type brackets, 2 mounting screws M3 x 15L For 1 station (for single unit) 2 L-type brackets, 2 mounting screws M3 x 25L For 2 stations PF2W 2 L-type brackets, 2 mounting screws M3 x 35L For 3 stations 2 L-type brackets, 2 mounting screws M3 x 45L For 4 stations PF2D 2 L-type brackets, 2 mounting screws M3 x 55L For 5 stations IF 951 Series

Modular Design with Uniform Body Style

( 0.8 ppm) [AFD] Max. 0.1 mg/m3 (Before saturated with oil 0.01 mg/m3 or less 0.008 ppm) Compressed air purity class*5 [AFM] ISO 8573-1:2010 [ 3 : 7 : 3 ]*6 [AFD] ISO 8573-1:2010 [ 1 : 7 : 2 ]*7 Drain capacity 8 cm3 25 cm3 45 cm3 Bowl material Polycarbonate Bowl guard Semi-standard (Steel) Standard (Polycarbonate) Weight 0.10 kg 0.18 kg 0.37 kg 0.40 kg *1 Inlet pressure: 0.7 MPa.

76

The intersection H is the amount of moisture included in the compressed air 1 m3 at 102 psi (0.7 MPa), and a pressure dew point 77F (25C). The amount of moisture is 3.0 g/m3. 10.

CQM

bracket Switch mounting nut Hexagon socket head cap bolt (M3 x 0.5 x 14 spring wasdher 2 pcs.)

MXF

Model Bolt Maximum tightening torque (Nm) Maximum tightening torque (Nm) Maximum screw-in depth L (mm) Maximum screw-in depth L (mm) Model Bolt Selection Caution MXF8 MXF8 6 6.5 M3 x 0.5 0.9 M3 x 0.5 0.9 MXF12 MXF12 6 5.5 M3 x 0.5 0.9 M3 x 0.5 0.9 1. If intermediate stop by external stopper is done, avoid ejection. If ejection occurs, it may cause damage.