Compact Cylinder

D Bore size (mm) A Piping port (1) (2) (2) (2) (2) (2) (2) (2) (2) (2) (2) (2) (2) (2) (2) (2) (2) (2) 20 25 B D 32 View from piston rod end 40 (2) (2) (2) (2) (2) (2) C 50 63 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Operating Range

Vacuum System Peripherals:

Port size P, A port R port Model Effective area (mm2) (Cv) Flow characteristics C (dm 3/(sbar)) to VEX3 20 1 3 1 8 1 2 160 to 670 160 to 670 160 to 670 2.4 to 9.8 Air operated 1 2 24 VEX3 00 5 7 9 3 4 to 2 VEX3 21 1 3 to 1 8 1 2 2.4 to 9.8 Body ported External pilot solenoid valve 24 1 2 to 2 3 4 VEX3 01 5 7 9 VEX3 22 1 3 to 1 8 1 2 2.4 to 9.8 Internal pilot solenoid valve 24 1 2 to 2 3

Air Pilot Operated Series NVSA

OYTOT MSA 1010.02 Yes '/f t2) Yes MBA 10't r.02 11 Yes 't"et t ' l Z YE MAA 4210.02 t6 Y5 v." 11) v.' t2\ t " t2:l t ' l a STATX)flS 2 3 a 5 6 7 I t t0 -1 nm) 5 .

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'i,-.1-)^' l z N F Noz l!

NVZ1000//3000/5000 4,5 Port Solenoid Valve/Rubber Seal Type

'i,-.1-)^' l z N F Noz l!

Ejector Valve Unit Series ZYY/ZYX 1

Silencer (AN203-KM81 pc) 51 26 16 2.

Flow Rate Range: 25 [0.5 to 25 (12.5 for CO2) â„“/min], Flow Adjustment Valve: None, Port Size: N7 (ø1/4 One-touch Fitting), Piping Entry Direction: Straight, Output Specification: 1 [Analog Output (1 to 5 V)], Instruction Manual: N (None), Calibration Certificate: None, Connector: Z (w/o Lead Wire w/Connector)

Flow Rate Range: 25 [0.5 to 25 (12.5 for CO2) â„“/min], Flow Adjustment Valve: None, Port Size: ø1/4 One-touch Fitting, Piping Entry Direction: Straight, Output Specification: 1 [Analog Output (1 to 5 V)], Instruction Manual: None, Calibration Certificate: None, Connector: w/o Lead Wire w/Connector, Option: -

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

mounting thread 2-LA Mounting hole EA C D 2-P Attachment mounting thread 2-FD through Supply port (2 pcs.)

Low Friction: Double Acting Single Rod Series CM2Q ø20, ø25, ø32, ø40

(2color) 3 wire(PNP) 12V 2 wire Water resistant (2 color) With timer Grommet 3 wire(NPN) 5V, 12V IC Diagnostic output (2 color) 4 wire (NPN) Latch with diagnostic output (2 color) * Lead wire length 0.5m : 3m : L 5m : Z None: N e.g.)

CJ2Q

) Relay PLC 3 wire (PNP) 24V Yes H7BWV 2 wire 12V Water resistant (2 color) Grommet F7BA H7BA 3 wire (NPN) With timer With diagnostic output (2 color) F7NT F79F H7NF IC 5V, 12V 4 wire (NPN) Latch with diagnostic output (2 color) F7LF H7LF Lead wire length 0.5m e.g.)

Flow Rate Range: 25 [0.5 to 25 (12.5 for CO2) â„“/min], Flow Adjustment Valve: None, Port Size: N7 (ø1/4 One-touch Fitting), Piping Entry Direction: Straight, Output Specification: 1 [Analog Output (1 to 5 V)]

[Separate Type Connector Connection] Separated sensor, Output Method: Analog, Analog Output Specification: Voltage, Pipe Port Type: [One-Touch Couplings] One-Touch Couplings (Straight), Plumbing Thread Type: -, Plumbing Thread Nominal: -, Pressure Resistance(MPa): 1, Flow Rate Type: Standard, Operating Temperature Range(°C): -10～60, Operating Humidity Range(%): 35～85, Number of Inputs: 2,

EXxx-OMZ0016

Wireless Wireless Communication channel WEB distance Protocol Base Remote select function function (F.C.S.) 1 EXW1 EXW1 Up to 100 m V.1.0/V.2.0*1 Available*2 2 EXW1 EXW1+EX600 *3 V.1.0 NA 3 EXW1 EX600 Up to 10 m V.1.0 NA 4 EX600 EXW1 Up to 10 m V.1.0 NA Available*4 5 EX600 EXW1+EX600 Up to 10 m V.1.0 NA Available*4 6*5 EX600 EX600 Up to 10 m V.1.0 NA Available *1: For more details, check

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

Exhaust center: 4/2 5/3, Pressure center: 1 4/2 Note 2) ( ): Without sub-plate Note 3) For DC voltages.

Series 10-SYJ3000/5000/7000 Rubber Seal 4/5 Port Solenoid Valve

) 10-SS5YJ5-20SA-05(-Q) Z With light/surge voltage suppressor With light/surge voltage suppressor (Non-polar type) R P R U 1 2 3 Stations Power saving circuit is only available for the Z type.

Flow Rate Range: 25 [0.5 to 25 (12.5 for CO2) â„“/min], Flow Adjustment Valve: None, Port Size: N01 (NPT1/8), Piping Entry Direction: Straight, Output Specification: 2 [Analog Output (4 to 20 mA)], Instruction Manual: N (None), Calibration Certificate: None, Connector: Z (w/o Lead Wire w/Connector)

Flow Rate Range: 25 [0.5 to 25 (12.5 for CO2) â„“/min], Flow Adjustment Valve: None, Port Size: C8 (ø8 (5/16") one-touch fitting), Piping Entry Direction: Straight, Output Specification: 2 [Analog Output (4 to 20 mA)], Instruction Manual: N (None), Calibration Certificate: None, Connector: Z (w/o Lead Wire w/Connector)

Flow Rate Range: 25 [0.5 to 25 (12.5 for CO2) â„“/min], Flow Adjustment Valve: None, Port Size: F01 (G1/8), Piping Entry Direction: Straight, Output Specification: 2 [Analog Output (4 to 20 mA)], Instruction Manual: N (None), Calibration Certificate: None, Connector: Z (w/o Lead Wire w/Connector)

Flow Rate Range: 25 [0.5 to 25 (12.5 for CO2) â„“/min], Flow Adjustment Valve: None, Port Size: NPT1/8, Piping Entry Direction: Straight, Output Specification: 2 [Analog Output (4 to 20 mA)], Instruction Manual: None, Calibration Certificate: None, Connector: w/o Lead Wire w/Connector, Option: -