Flow Rate Range: 11 [2 to 100 (50 for CO2) â„“/min], Flow Adjustment Valve: S (Yes), Port Size: 02 (Rc1/4), Piping Entry Direction: Straight, Output Specification: 1 [Analog Output (1 to 5 V)], Instruction Manual: With Instruction Manual, Calibration Certificate: A (w/Calibration Certificate), Connector: Lead Wire w/Connector (2 m), Option: S (Bracket for w/Flow Adjustment Valve)

(MPa): 1, Flow Rate Type: Standard, Operating Temperature Range(°C): -10～60, Operating Humidity Range(%): 35～85, Number of Inputs: 2, Number of Outputs: 1, Analog Voltage Output(V): [DC1-5V] 1-5V, Power Supply Type: DC, Power Supply Voltage(V): [24] 24±10%, Pipe Connection Direction: 2-way, Connecting Tube Diameter: -, Liquid contact parts material: Resin + Metal, Mounting Hole: Presence,

Flow Rate Range: 50 [1 to 50 (25 for CO2) â„“/min], Flow Adjustment Valve: S (Yes), Port Size: C6 (ø6 One-touch Fitting), Piping Entry Direction: Straight, Output Specification: 1 [Analog Output (1 to 5 V)], Instruction Manual: N (None)

Flow Rate Range: 10 [0.2 to 10 (5 for CO2) â„“/min], Flow Adjustment Valve: None, Port Size: C6 (ø6 One-touch Fitting), Piping Entry Direction: Straight, Output Specification: 1 [Analog Output (1 to 5 V)], Instruction Manual: N (None)

Flow Rate Range: 10 [0.2 to 10 (5 for CO2) â„“/min], Flow Adjustment Valve: S (Yes), Port Size: C6 (ø6 One-touch Fitting), Piping Entry Direction: Straight, Output Specification: 1 [Analog Output (1 to 5 V)], Instruction Manual: N (None)

Flow Rate Range: 50 [1 to 50 (25 for CO2) â„“/min], Flow Adjustment Valve: Yes, Port Size: ø6 One-touch Fitting, Piping Entry Direction: Straight, Output Specification: 1 [Analog Output (1 to 5 V)], Instruction Manual: None, Calibration Certificate: -, Connector: -, Option: -

Flow Rate Range: 10 [0.2 to 10 (5 for CO2) â„“/min], Flow Adjustment Valve: None, Port Size: ø6 One-touch Fitting, Piping Entry Direction: Straight, Output Specification: 1 [Analog Output (1 to 5 V)], Instruction Manual: None, Calibration Certificate: -, Connector: -, Option: -

Flow Rate Range: 10 [0.2 to 10 (5 for CO2) â„“/min], Flow Adjustment Valve: Yes, Port Size: ø6 One-touch Fitting, Piping Entry Direction: Straight, Output Specification: 1 [Analog Output (1 to 5 V)], Instruction Manual: None, Calibration Certificate: -, Connector: -, Option: -

Mechanically jointed rodless cylinder Basic type With Slide bearing guide type With cam follower guide type With linear guide type With High rigidity/ Linear guide type With Protective Cover type

1-2.

Intrinsically Safe Valve 5 Port Solenoid Valve Single Unit Body Ported Series 53-SY5000/7000/9000 Electrical Entry TT Hazardous Location Class I, II, III Division 1 Groups A, B, C, D, E, F, G Electrical Entry L and LL Hazardous Location Class I Division 1

(Refer to page 40 for details) How to Order SY 53 20 01 5 1 LL 3 Bracket UL/CSA compliant 5 7 9 Series Nil: Without bracket F1: With foot bracket 53-SY5000 Thread type 53-SY7000 Nil F N T Rc Thread piping A, B port size 2-position single only 53-SY9000 G NPT Symbol Port size Applicable series Type of actuation NPTF 01 02 02 03 53-SY5000 1/8 2-position single (A) 4 2 (B) 1/4 53-SY7000 1 1/

S

S07 1 1 5 Serial transmission kit 1 set Manifold base part no. 3 sets Valve part no. (Stations 1 to 3) 2 sets Valve part no. (Stations 4 to 5) 2 sets Valve part no. (Stations 6 to 7) 1 sets Blanking plate part no.

Stations: 5 Stations, Port Size: C6 (ø6 One-touch Fitting), SI Unit: ZENN (EtherNet/IP, -COM), Number of Input Blocks: 5 (Input Block 5 pcs.), Input Block: 2 (M12, 4 Inputs), Input Block COM: N [NPN (-)], Option 1: N (Name Plate), Option 2: S (Built-in Silencer, Direct Exhaust)

Stations: 3 Stations, Port Size: C6 (ø6 One-touch Fitting), S Kit: SEA (EtherNet/IPâ„¢ - 32 Outputs - Connector M12), SI Unit Polarity: N (Negative Common), Option 1: D0 (DIN Rail Mounting, w/o DIN Rail), DIN Rail Length: Standard (or None if w/o DIN Rail), Option 2: N (Name Plate)

Stations: 6 Stations, Port Size: C6 (ø6 One-touch Fitting), S Kit: SKA (IO-Link - 32 Outputs - Connector M12), SI Unit Polarity: N (Negative Common), Option 1: D0 (DIN Rail Mounting, w/o DIN Rail), DIN Rail Length: 8 Stations (for 8 Stations; Longer Rail than Total Length of Specified Valve Stations), Option 2: NS (N + S)

Stations: 12 Stations, Port Size: C6 (ø6 One-touch Fitting), S Kit: SNA (PROFIBUS DP - 32 Outputs - Connector M12), SI Unit Polarity: N (Negative Common), Option 1: D (DIN Rail), DIN Rail Length: Standard (or None if w/o DIN Rail), Option 2: NS (N + S)

Stations: 12 Stations, Port Size: C6 (ø6 One-touch Fitting), S Kit: SEA (EtherNet/IPâ„¢ - 32 Outputs - Connector M12), SI Unit Polarity: N (Negative Common), Option 1: D (DIN Rail), DIN Rail Length: Standard (or None if w/o DIN Rail), Option 2: NS (N + S)

Stations: 3 Stations, Port Size: C6 (ø6 One-touch Fitting), S Kit: SNB (PROFIBUS DP - 16 Outputs - Connector M12), SI Unit Polarity: N (Negative Common), Option 1: None, DIN Rail Length: Standard (or None if w/o DIN Rail), Option 2: NS (N + S)

Stations: 5 Stations, Port Size: C6 (ø6 One-touch Fitting), S Kit: SVA (CC-Link - 32 Outputs - Connector M12), SI Unit Polarity: N (Negative Common), Option 1: None, DIN Rail Length: Standard (or None if w/o DIN Rail), Option 2: N (Name Plate)

Stations: 6 Stations, Port Size: C6 (ø6 One-touch Fitting), S Kit: SVA (CC-Link - 32 Outputs - Connector M12), SI Unit Polarity: N (Negative Common), Option 1: None, DIN Rail Length: Standard (or None if w/o DIN Rail), Option 2: N (Name Plate)

Stations: 7 Stations, Port Size: C6 (ø6 One-touch Fitting), S Kit: SVA (CC-Link - 32 Outputs - Connector M12), SI Unit Polarity: N (Negative Common), Option 1: None, DIN Rail Length: Standard (or None if w/o DIN Rail), Option 2: N (Name Plate)