High Purity Chemical Valve

Symbol Nil U Single type Unit type with 2 way valve Metric sizes 03 04 06 3 4 6 LQ2 integral fitting Inch sizes 03 05 07 1/8 3/16 1/4 Options Basic size With reducer M With flow rate adjustment The flow rate is adjusted by controlling the diaphragm stroke.

HRX-OM-R016

If foreign objects with a size of 20 m or more are likely to enter, install the particle filter. 6 Filter Rc1/2 20m Note FQ1011N-04-T020-B-X61 Note) The filter shown above cannot be directly connected to the thermo-chiller.

HRX-OM-W038

If foreign objects with a size of 20 m or more are likely to enter, install the particle filter. 6 Filter Rc1/2 20m Note FQ1011N-04-T020-B-X61 Note) The filter shown above cannot be directly connected to the thermo-chiller.

KJ

(mm) 2 Applicable fitting size d 4 Effective area (mm2) Weight (g) D L M Model KJR02-04 0.9 0.7 6 28.3 15.6 8.8 Applicable tubing Applicable fitting M D d A L Bulkhead union: KJE H Effective area (mm2) Weight (g) Applicable tubing O.D.

IDU/IDF

Note 4) Combinations of M and H, H and M, R and S, S and T, L and M are not available.

Soft Start-up Valve

-1 to 4G(Z)-A 1/2 1/2 1/2 98 56 39.5 26 26 49 Width across flats 30 33 AV4000-04-5 to 6G(Z)-A 1/2 1/2 1/2 AV5000-06,10-1 to 4G(Z)-A 3/4,1 3/4,1 3/4 128 59 53 37 37 53 Width across flats 36 52 AV5000-06,10-5 to 6G(Z)-A 3/4,1 3/4,1 3/4 Optional specifications With bracket With built-in silencer Model K L M N P Q R S T U V W X Y AV2000-02-1 to 4G(Z)-A 30 50 51.5 44 5.5 10 66 2.3 33.5 54 M4

HRX-OM-R005

If foreign objects with a size of 20 m or more are likely to enter, install the particle filter. 6 Filter Rc1/2 20m Note FQ1011N-04-T020-B-X61 Note) The filter shown above cannot be directly connected to the thermo-chiller.

HRX-OM-O021

If foreign objects with a size of 20 m or more are likely to enter, install the particle filter. 6 Filter Rc1/2 20m Note FQ1011N-04-T020-B-X61 Note) The filter shown above cannot be directly connected to the thermo-chiller.

Basic type / Direct mount type Series CY3B/CY3R

0.1 x mcos + msin P m P 0.1 x m + m P D 1.6 x D 5.0 x D 5.0 x m m mv P Pv m > mv P > Pv Determination of allowable load mass & pressure Inclined operation (Refer to page 1236

SQ1000/2000

Nil M MB Note 1) For the double solenoid specification, the symbol for Function is "D". Note 2) Only rubber seal types are applicable.

125

. * The load ratio is obtained by the following formula: ((Load mass x 9.8)/Theoretical output) x 100% VEX VEX Conditions System Solenoid valve Speed controller Silencer Tubing diameter x Length A VEX31 22-02 AS4000-02 AN20-02 10 x 1 m B 12 x 1 m C VEX33 42-03 04 AS420-03 AN30-03 12 x 1 m D AS420-04 AN40-04 SGP15A x 1 m 1723 3 Port 3 Position Valve Body Ported VEX3 Series How to Order Air

Digital Flow Switches

How to Order Integrated Display Type PF2W7 20 03 27 M Flow rate range Thread type 0.5 to 4 l/min 2 to 16 l/min 5 to 40 l/min 10 to 100 l/min 04 20 40 11 Unit specification Nil N F Rc NPT G Nil M With unit switching function Fixed SI unit Note) Port size Lead wire (Refer to page 35.)

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type

L3 L1 T L2 ASG32F-01 ASG42F-02 ASG52F-03 ASG62F-04 H (Width across flats) L4 Applicable tubing O.D. d L6 A D L5 M T L1 L3 L2 Max.

Combination Cylinder

(mm) L L Dd9 d l l d m t Used snap ring t m Used snap ring Part No.

CL

(mm) L L Dd9 d l l d m t Used snap ring t m Used snap ring Part No.

Compressed Air Cleaning Filter Series

0.3 + 0.01 m (Filtration efficiency: 99.9%) Series AMH P.36 Super Mist Separator Captures foreign matter sized 0.01 m or more and adsorbs oil particles in an aerosol state.

New

AN40-04 AN40-04 AN40-04 AN40-04 AN40-04 Air operated type AN40-04 AN40-04 AN40-04 AN40-04 AN40-04 AN40-04 VXF(A)25BA(B) VXF(A)26BA(B) VXF(A)26CA(B) VXF(A)26DA(B) VXF(A)27BA(B) VXF(A)28BA(B) Note) Spring is shipped together with the product, but not assembled. 10 Series VXF2 Dimensions: Direct piping type VXF21A<<

VQ7-6/7-8

Load factor: ((Load weight x 9.8)/Theoretical force) x 100% VS4 VQ7 EVS Conditions VFN Base mounted Series MB Series CS1 6A x 1 m AS4000-02 AN200-02 10A x 1 m AS420-03 AN300-03 6A x 1 m AS4000-02 AN200-02 10A x 1 m AS420-03 AN300-03 Base mounted Series MB Series CS1 10A x 1 m AS4000-03 AN300-03 15A x 1 m AS420-04 AN400-04 10A x 1 m AS4000-03 AN300-03 15A x 1 m AS420-04 AN400-04 SGP (Steel

VQ7-6/7-8

Load factor: ((Load weight x 9.8)/Theoretical force) x 100% VS4 VQ7 EVS Conditions VFN Base mounted Series MB Series CS1 6A x 1 m AS4000-02 AN200-02 10A x 1 m AS420-03 AN300-03 6A x 1 m AS4000-02 AN200-02 10A x 1 m AS420-03 AN300-03 Base mounted Series MB Series CS1 10A x 1 m AS4000-03 AN300-03 15A x 1 m AS420-04 AN400-04 10A x 1 m AS4000-03 AN300-03 15A x 1 m AS420-04 AN400-04 SGP (Steel

Vacuum Ejector Box Type (Built-in Silencer)/Body Ported Type Series ZH 1

type: White color L type: Black color (Mounting hole) B C D E F G H Model A 3 8 Rc3 8 Rc3 8 Rc3 8 ZH18DS-03-03-03 ZH18DL-03-03-03 ZH20DS-03-04-04 ZH20DL-03-04-04 Rc 133 52.45 42 19 3.5 19 20.95 20.95 133 52.45 42 19 3.5 19 151.1 60.95 47.7 19 3.5 24 26.75 151.1 60.95 47.7 19 3.5 24 26.75 I J K L M N O Model 3 8 Rc3 8 Rc3 8 Rc1 2 Rc1 2 ZH18DS-03-03-03 ZH18DL-03-03-03 ZH20DS-03-04-04 ZH20DL