2/3 Port Valve

Note 3) Value on option "V", "M" (Non-leak, vacuum).

Integrated Controller

Weight [g] Auto switch model D-M9NE(V) D-M9PE(V) D-M9BE(V) 0.5 m (Nil) 8 7 1 m (M)1 14 13 Lead wire length 3 m (L) 41 38 5 m (Z)1 68 63 1 The 1 m and 5 m options are produced upon receipt of order.

Pin Clamp Cylinder Series C(L)KQG/C(L)KQP

CLKQ M G P G P Table 2.

7

A filtration degree of 5 m or less should be selected.

Conforming to ISO Standard Solenoid Valve (with M12 Connector) Series EVS7-6/7-8/7-10 (Size 1) (Size 2) (Size 3) 1

650 666 120 136 146 162 L1 = 56n + 64 L2 = 56n + 80 139 Rc 1/2 14 PA P 14 PA 80.5 4-1/8 12, 14 port R1 R1 67 L1 = 56n + 90 L2 = 56n + 106 40 (41.5) 38 (27) Rc 3/4 1 3 5 SMC Dimensions inside ( ) are for Rc 3/4.

ISA2

2.5 10 m 1.2 Response time (sec) Response time (sec) 8 m 2 0.9 5 m 8 m 1.5 0.6 5 m 1 3 m 3 m 0.3 0.5 1 m 0 0.02 0.04 0.06 0.08 0.1 0.12 0.14 0.16 1 m 0 0 0 0.05 0.1 0.15 0.2 0.25 0.3 0.35 Detection distance (mm) Detection distance (mm) Piping tubing lengthResponse time Piping tubing lengthResponse time Nozzle Shape Please keep the nozzle shape as illustrated below.

Space Saving Vacuum Ejector/Vacuum Pump System Series ZQ

Note 2) Including a 0.3 m connector for supply valve and vacuum release valve and a 2 m connector for vacuum pressure switch.

Uniaxial Electric Actuator Series LJ1

10 0 10 20 30 0 20 40 60 Work load (W) kg Work load (W) kg Work load (W) kg 600 600 600 L2 M2 400 400 400 L2 mm L2 mm L2 mm Rolling Yawing W 200 200 200 L2 M2 0 10 20 30 0 20 40 60 0 2 4 6 8 10 Work load (W) kg Work load (W) kg Work load (W) kg W 3000 2000 2000 a=1000 a=1000 a=1000 2000 L3 mm L3 mm L3 mm L3 1000 1000 1000 a=2000 a=2000 W a=2000 a=3000 a=3000 a=3000 M3 a 0 20 40 60 0 2 4

Short Stroke Electric Actuator Series LX

L2 (mm) L2 a = 2000 200 a = 3000 100 Mer m 3 0 1 2 Transfer load m (kg) a = 1000 a 2000 a = 2000 Mey L3 (mm) a = 3000 m 1000 L3 3 0 2 1 Transfer load m (kg) Refer to page 304 for deflection data. 212 5 Phase Stepper Motor/Without Motor Brake Series LXF Dimensions/LXFH5BD Scale: 35% (5) 2-M2.5 x 0.45 depth 2 5 Stroke + 113 10.5 2.5 2-M4 x 0.7 thread depth 9 31 28 G 58 5H9 +0.030 0 depth

Transfer

Pitch moment Yaw moment : Collision speed (mm/s) L1 : Distance to the center of load gravity (m) ME : Dynamic moment (Nm) g : Gravitational acceleration (9.8 m/s2) m : Load mass (kg) F : Load (N) FE : Load equivalent to impact (at impact with stopper) (N) a : Average speed (mm/s) M : Static moment (Nm) M1e = We x L3 x 1 3 M3e = We x L2 x 1 3 M1e M3e We We L3 At collision: = 1.4a a L2

VCW

R C R C (44) G1/2 E A H 2-P Port size B (S) E G1/2 2-M Thread depth N D A H B 2-P Port size 2-M Thread depth N D L L K K N.O.

New

Rated voltage Rated voltage Electrical option Electrical option GDM2A-G-S2 24 VDC 24 VDC 12 VDC 100 VAC 100 VAC 110 VAC 110 VAC 200 VAC 200 VAC 220 VAC None C18312G6GCU GDM2A-R None 220 VAC 230 VAC 230 VAC 240 VAC 240 VAC 24 VAC 24 VAC 48 VAC GDM2A-G-Z5 GDM2A-R-L1 GDM2A-R-L1 GDM2A-R-L2 GDM2A-R-L2 GDM2A-R-L2 GDM2A-R-L2 GDM2A-R-L5 GDM2A-R-L5 48 VAC 24 VDC

VCW

Grommet: G Conduit: C Approx. 300 Approx. 280 D D Q F Q F C C G (PF) 1/2 R R E E A H 2-P Port size 2-M B B A H 2-P Port size 2-M L L K K DIN connector: D Conduit terminal: T Cable 6.8 to 10 27.5 F F Q (Q) S 34 25 U R C R C (44) G (PF) 1/2 E B A H D 2-P Port size (S) E G (PF) 1/2 B A H D 2-M 2-P Port size 2-M L L K K N.C.

VCW

Grommet: G Conduit: C 2-M 2-M L L K Approx. 300 K Q F D Approx. 280 D Q F C R C G (PF) 1/2 R E B A H E 2-P Port size A H 2-P Port size B DIN connector: D Conduit terminal: T 2-M 2-M L L K Cable 6.8 to 10 K 27.5 F F Q (Q) 34 S 25 U R C R C G (PF) 1/2 (44) E B A H D (S) E G (PF) 1/2 B A H D 2-P Port size 2-P Port size N.C.

HRX-OM-I051

HRX-OM-I051 1stEditionJanuary.2005 Rev.May.2018 Operation Manual Original Instructions Thermo-Chiller HRZ001-L HRZ002-L HRZ004-L HRZ008-L HRZ001-L1 HRZ002-L1 HRZ004-L1 HRZ008-L1 HRZ001-L2 HRZ002-L2 HRZ004-L2 HRZ008-L2 HRZ001-H HRZ002-H HRZ004-H HRZ008-H HRZ001-H1 HRZ002-H1 HRZ004-H1 HRZ008-H1 HRZ002-W HRZ008-W HRZ002-W1 HRZ008-W1 HRZ010-WS HRZ010-W1S HRZ010-W2S Save This Manual Carefully

SMC Electronic Switch Series Variations

Hysteresis (m) Hysteresis (m) 0.1MPa 40 40 40 Supply pressure 30 30 30 0.1MPa 20 20 20 0.15MPa 0.15MPa 0.15MPa 10 10 10 0.2MPa 0.2MPa 0.2MPa 100 200 300 0 100 200 300 0 100 200 300 0 Detection distance (m) Detection distance (m) Detection distance (m) Example 1) When requiring 300m detection, select the detection nozzle of 1.0 with supply pressure 0.2MPa.

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

XMD/Angle type D C L2 (KF flange) Fn Fd Fc C (Fc) L1 (K flange) (CF flange) A B K S M J H G A (mm) Model A 123 170 183 217 256 B 48 66 79 100 117 C 1 2 2 3 3 D 40 55 75 87 114 Fn 95 110 Fd 70 114 Fc 26 41 52 70 83 G 41 63 68 72 98 H J K P.C.D L1 6-6.6 8-8.4 L2 XMD-25 XMD-40 XMD-50 XMD-63 XMD-80 50 65 70 88 90 16 20 20 20 20 7.5 15 17.5 19.5 26.5 P.C.D 58.7 P.C.D 92.1 C D XYD/In-line

VCL

2 x M Thread depth N 2 x M Thread depth N L L K K N.C.

Air Catch Sensor

Hysteresis (m) Hysteresis (m) 0.1MPa 40 40 40 Supply pressure 30 30 30 0.1MPa 20 20 20 0.15MPa 0.15MPa 0.15MPa 10 10 10 0.2MPa 0.2MPa 0.2MPa 100 200 300 0 100 200 300 0 100 200 300 0 Detection distance (m) Detection distance (m) Detection distance (m) Example 1) When requiring 300m detection, select the detection nozzle of 1.0 with supply pressure 0.2MPa.

KB

Removal is complete. 15-2-112 Piping Module Series KB Air Output Port 1 Elbow Module: KBV Applicable tubing O.D. 4 Weight (g) D1 D2 D3 L1 L2 A M L3 L4 Model KBV1-04 KBV1-06 KBV2-06 KBV2-08 KBV3-08 KBV3-10 KBV3-12 KBV4-12 KBV4-16 16.8 22.0 24.0 25.0 28.5 29.5 31.5 34.0 35.0 39.0 4.3 4.9 7.3 8.3 15.0 17.5 19.3 20.2 36.4 10.4 13.6 16.0 19.5 33.0 10.4 13.0 6 12.8 17.0 17.6 22.5 36.0 10.1 15.5