IDX-OM-W022

. 13 1 13 3 Remote operation . 13 2 13 4 How to connect the power and signal cable . 13 2 13 5 How to re-start the operation . 13 3 13 6 Electric circuit . 13 4 Chapter 14 Specification for Option V 14 1 Safety instructions . 14 1 14 2 Specifications . 14 1 14 3 How to perform maintenance . 14 2 14 4 Electric circuit . 14 2 Chapter 14 Service Record 15 1 Service Record . 15 1 Table of Contents

VZ3000

blanking plate assembly DXT192-13-3A Applicable connector assembly DXT192-52-1-A (For 2 position single) DXT192-52-2-A (For 2 position double, 3 position) Refer to the page 3-10-33 regarding how to order applicable connector assemblies. (1: 100 VAC, 3: 110 VAC, 4: DC).

Pin Clamp Cylinders

Type Auto switch model Applicable magnetic field Electrical entry Indicator light Wiring (Pin no. in use) Load voltage Lead wire length Applicable load D-P3DWASC 2-wire (34) Pre-wired connector 0.3 m Relay, PLC Note 1) D-P3DWASE 2-wire (14) D-P3DWA Grommet 2-wire 0.5 m D-P3DWAL 3 m D-P3DWAZ 5 m AC magnetic field (Single-phase AC welding magnetic field) Solid state auto switch 2-color indicator

C95

123.5 157 177 45.5 52.5 58.5 68 81 96 13 13 14 14 20 20 7.5 10 11.5 17.5 22 25 22 24 32 32 40 40 30 35 40 45 45 55 G1/8 G1/8 G1/4 G1/4 G1/4 G1/4 83 91 104.5 119.5 150 170 32 40 50 63 80 100 12 12 15 12 18 20 27 27 31.5 31.5 38 38 54 63 75 90 102 116 13 16.5 19 23 33 37.5 46 52 65 75 95 114 G1/8 G1/4 G1/4 G3/8 G3/8 G1/2 CA1 CS1 Bore size (mm) I 8 I KK I 9 I12 SW1 PL Q R VD WH ZY 2 SW WA WB

Floating Joint

36 4.5 5 5 6 6 6 7.5 7.5 9.5 11.5 11.5 13 16 21 24 24 31 31 31 41 41 50 59.5 59.5 66 96 30 35 38 42 17.5 19.5 19.5 20 20 20 22 22 27 32 35 34 38 0.05 0.07 0.07 0.16 0.16 0.16 0.3 0.3 0.6 1.05 1.08 1.5 4.5 44 49.5 49.5 60 60 60 71.5 71.5 90.5 110 110 123 165 0.5 0.5 0.5 0.75 0.75 0.75 1 1 1.25 2 2 2 3 1 1.5 1 1.25 1.5 1.75 1.5 2 2.5 3 1.5 2 2 8 9 9 13 13 13 15 15 18 24 24 24 42 8 10 10 12

How to Order Series ZM Vacuum Ejector With Valve and Switch For details about certified products conforming to international standards, visit us at www.smcworld.com. 1

Check valve 13-4-17 17 Series ZM Made to Order Specifications: Please consult with SMC for detailed specifications, dimensions, and delivery. 2.

HRX-OM-M005

Pump ECO Limit 5.3 Operation Screen HRZD Series 5-6 HRX-OM-M005 Chapter 5 Product Operation 5.3.4 CH1(2) setting data screen 1, 2 1 2 Figure 5-7 CH1(2) Setting Data Screen 1 3 4 5 6 Figure 5-8 CH1(2) Setting Data Screen 2 Table 5-6 CH1(2) Setting Data Screen 1, 2 No.

OMU0023

of alarm history 8 D0608 2 Alarm number of alarm history 9 D0609 2 Alarm number of alarm history 10 D060A 2 Alarm number of alarm history 11 D060B 2 Alarm number of alarm history 12 D060C 2 Alarm number of alarm history 13 D060D 2 Alarm number of alarm history 14 D060E 2 Alarm number of alarm history 15 D060F 2 Alarm number of alarm history 16 D0610 2 Alarm number of alarm history 17 D0611

IDX-OM-W023

. 10-1 10-2 . 10-2 10-3 . 10-3 10-4 . 10-3 11 R 11-1 . 11-1 11-2 . 11-1 11-3 . 11-1 11-4 . 11-2 11-5 . 11-2 12 S 12-1 . 12-1 12-2 . 12-2 12-3 . 12-2 2 13 T 13-1 . 13-1 13-2 . 13-1 13-3 . 13-1 13-4 . 13-2 13-5 . 13-3 14 V 14-1 . 14-1 14-2 . 14-1 14-3 . 14-2 14-4 . 14-2 15 15-1 . 15-1 3 IDX-OM-W023 i i i-1 () 3 i 1 1 3 IDU Series i-1 i-1 IDX-OM-W023 i

Stability of suction position,

2 !2 !3 !4 !3 !4 !0 !0 o i !1 o !1 i Component Parts r r No.

Rotary Actuator/Vane Style Series CRB2

Applicable shaft type: W (mm) L2 L4 max Y Size (mm) E3= E1= Y= 10 5-( 8-Y) to (Y-1 ) X L1 L3 max Size 3 to 8 Y-1 10 L2= 9-(14-X) to (X-3) 15 6-( 2-Y) to (Y-1.5) 5 to 14 X-3 3 to 9 Y-1.5 L4= L1= L3= 15 10-(18-X) to (X-4) 20 7-(10-Y) to (Y-1.5) 8 to 18 X-4 3 to 10 Y-1.5 20 10-(20-X) to (X-4.5) 30 8-(13-Y) to (Y-2 ) 10 to 20 X-4.5 5 to 13 Y-2 X= 30 12-(22-X) to (X-5) 40 9-(15-Y) to (Y-4.5) 10

Speed Controller with One-touch Fitting

2 1/2 4 Fluororesin (TLM, TILM Series) (TH, TIH Series) 1/8 2 R 1/4 3/8 3 NPT 1/2 4 2 1/8 2 2 2 1/4 Gasket seal Uni Brass/Steel wire 1/4 3 3/8 2 1/2 4 1 Without sealant type can be selected as a standard option. 2 Universal type is not available.

5 Port Air Operated Valve Series SYA3000/5000/7000 1

VFRA4111-04 VFRA4211-03 VFRA4211-04 VFRA4311-03 VFRA4311-04 VFRA4411-03 VFRA4411-04 VFRA4511-03 VFRA4511-04 3/8 1/2 3/8 1/2 3/8 1/2 3/8 1/2 3/8 1/2 13 15 14 15 13 14 13 14 13 (5.0) 15 (5.3) 0.30 0.30 0.31 0.30 0.32 0.28 0.31 0.30 0.27 (0.42) 0.22 (0.42) 3.2 3.8 3.4 4.0 3.2 3.5 3.2 3.7 3.2 (1.3) 3.7 (1.5) 1.1 1/8 Single 2 position 1.2 1/8 Double Closed center 1.2 1/8 Exhaust center 1.2 1/

SYJ3000/5000/7000

position single 2 position single Allowable voltage fluctuation (B) 2 (A) 4 (A) 4 (B) 2 Standard DC Power consumption (W) With power saving circuit 100V 110V [115V] 200V 220V [230V] 1 (P) 1 (P) 5 (R1) 3 (R2) 3 (R) Apparent power VA 2 position double 2 position double AC (B) 2 (A) 4 (A) 4 (B) 2 Surge voltage suppressor Indicator light 1 (P) 5 (R1) 3 (R2) 1 (P) 3 (R) In common between 110 VAC

Plate Cylinder

Series MU Accessory Bracket Dimensions Single Clevis (Double clevis pivot bracket) Double Clevis (Single clevis pivot bracket) 2 x 2 x 2 x 2 x CDH10 (mm) (mm) CA 53 67 85 103 122 CB 23 27 31 37 48 CE 3.5 3.5 3.5 5.5 6 CF 4 7 10 12 14 CH 11 13 13 17 19 CI 17 22 27 32 38 CJ 7 10 10 14 16 DA 53 67 85 103 122 DB 23 27 31 37 48 DDH10 DE 3.5 3.5 3.5 5.5 6 DF 4 7 10 12 14 DH 11 13 13 17 19 DI

HRX-OM-X071

Facility water outlet (For water-cooled type) HRR Series 2.3 Function of Parts 2-5 HRX-OM-X071 Chapter 2 Name and Function of Parts 2.4 Operation display panel The operation panel on the front of the product controls the basic operation of the product 1 3 2-5 RUN 8 MPa 4 ALM 9 WRN 10 LPM 5 11 2 12 RMT 13 6 H 7 SEC 14 16 18 15 MENU RUN/ STOP 17 19 20 ENT RESET Table 2-4 Operation display

High Purity Chemical Valve

LVD LVQ How to Order Manifold Base LQ1 LLC 2 A 02 11 S LVN Tubing size for P port and R side connection Body class Tubing size for P port and L side connection TL/TIL Body class Symbol Nil 00 06 07 08 10 11 10 11 12 13 12 13 19 12 13 19 Tubing size Tubing size Plug Symbol 00 06 07 08 10 11 10 11 12 13 12 13 19 12 13 19 Body class Symbol 2 3 4 5 Body class 2 3 4 5 2 to 5 L side, R side same

Prevents Micro-Bubbles

Symbol 00 06 07 08 10 11 10 11 12 13 12 13 19 12 13 19 Tubing size Plug Tubing size Plug Body class Body class Symbol 2 3 4 5 Body class 2 3 4 5 2 to 5 2 to 5 LVC 6 1/4" 6 1/4" LVA 2 2 8 8 10 3/8" 10 3/8" Base type LVH A Stacking type 10 3/8" 10 3/8" Manifold stations LVD 3 3 12 1/2" 12 1/2" 02 2 stations LVQ 12 1/2" 12 1/2" 05 5 stations 4 4 LQ 19, 3/4" 19, 3/4" 12 1/2" 12 1/2" LVN 5

2-Color Display Digital Flow Switch Series PFM

Dimensions PFM -C4/C6/C8/N7--X693 7 5 PFM -C4/C6/C8/N7--X694 7 5 10.2 10.2 1 43 A 43 1 IN OUT (34.2) 3 (34.2) 13 3 13 A 18 OUT 2 x 3.4 18 IN B B 48 20 48 20 2 x 3.4 One-touch fitting Applicable tube O.D.

SYJ300/500/700

(Pitch) P=10.5 12.5 5 M5 x 0.8 (P, R port) Approx. 300 (Lead wire length) 2-3.5 (For mounting) 48.8 [51] P R 26.6 P R 13 22 (Station n) (Station 1) 11 (Pitch) P=10.5 12.5 4.5 41.5 [48.5] + + + + + (Station 1) (Station n) 26.1 A A 13 10 41.5 [48.5] (Pitch) P=10.5 13.5 M3 x 0.5 (A port) A A 13 10 (Pitch) P=10.5 11.5 M3 x 0.5 (A port) L plug connector (L) M plug connector (M) M8 connector (