JA/JAH/JB/JS

19.5 19.5 20 20 20 22 22 27 32 35 34 38 30.5 34 34 38 38 38 44.5 44.5 57.5 68 68 77 99 1 1.5 1 1.25 1.5 1.75 1.5 2 2.5 3 1.5 2 2 30 35 38 42 21 24 24 31 31 31 41 41 50 59.5 59.5 66 96 4.5 5 5 6 6 6 7.5 7.5 9.5 11.5 11.5 13 16 8 9 9 13 13 13 15 15 18 24 24 24 42 0.5 0.5 0.5 0.75 0.75 0.75 1 1 1.25 2 2 2 3 1100 2500 2500 4400 4400 4400 11000 11000 18000 28000 28000 28000 71000 7 8 8 11 11

ZP

13.9 SNJ-015A 16.2 14 3 M10 x 1 M14 x 1 SN-015A 21.9 19 5 Pad diameter: 10 to 50 ZP10B to 50B Model Size B06 A 6 ZP06B B 7 C 2.5 D 7 E F 13 G 3.3 H 9.1 Y 4 B08 8 ZP08B 9 2.5 7 13 4.7 10.1 4 B10 10 ZP10B 12 4 13 11.7 16 5.5 13.8 5.5 B13 13 ZP13B 15 4 13 14.2 18.5 8.7 19 7.5 B16 16 ZP16B 18 4 13 15.7 20 9.9 21 8.5 B20 20 ZP20B 22 4 15 19 23.5 12.4 25 10.5 B25 25 ZP25B 27 4 15 19.5 24 15.6

HRX-OM-M005

7 1.5 Safety Measures . 1-8 1.5.1 Safety Precautions . 1-8 1.5.2 Safety Interlock system . 1-9 1.5.3 Lockout/Tagout . 1-10 1.5.4 Protective equipment . 1-12 1.6 Emergency Measures . 1-13 1.6.1 Emergency off [EMO] switch . 1-13 1.7 Waste Disposal . 1-15 1.7.1 Disposal of refrigerant and compressor oil. 1-15 1.7.2 Disposal of circulating fluid . 1-16 1.7.3 Disposal of product . 1-16 1.7.4 Battery

MXS Series Air Slide Table

adjuster at extension end) 30 30 76 46 58 FF 22.5 F 25 5H9 5 deep +0.030 0 N -1 x F 2 5H9 5 deep +0.030 0 27 2-M6 X 1 thread 13 deep 13 M 0.5 45.5 50 Z ZZ (NN-1) X H G H 29 11.5 29 11.5 A B 9.5 5.1 11 11 30 1.5 A B 5H9 5 deep +0.030 0 6 NN-M6 X 1 thread 12 deep 5H9 5 deep +0.030 0 HA GA Cross section AA Cross section BB (mm) Model F 50 50 50 60 35 60 70 70 80 FF 40 40 40 50 35 60 70 70 80

Floating Joint

11 14 14 19 24 24 24 36 4.5 5 5 6 6 6 7.5 7.5 9.5 11.5 11.5 13 16 21 24 24 31 31 31 41 41 50 59.5 59.5 66 96 30 35 38 42 17.5 19.5 19.5 20 20 20 22 22 27 32 35 34 38 0.05 0.07 0.07 0.16 0.16 0.16 0.3 0.3 0.6 1.05 1.08 1.5 4.5 44 49.5 49.5 60 60 60 71.5 71.5 90.5 110 110 123 165 0.5 0.5 0.5 0.75 0.75 0.75 1 1 1.25 2 2 2 3 1 1.5 1 1.25 1.5 1.75 1.5 2 2.5 3 1.5 2 2 8 9 9 13 13 13 15 15 18

Stability of suction position,

1 o !1 i Component Parts r r No.

Speed Controller with One-touch Fitting

Meter-out: Gray Meter-in: Light blue 23 3.2 Note 2) 01 1/8" 03 5/32" 07 1/4" 09 5/16" 11 3/8" 13 1/2" ASR ASQ 04 4 06 6 08 8 10 10 12 12 16 16 Thread type Nil R N NPT Note 1) For selecting applicable tubing O.D., refer to the Model on page 554. Note 2) Use 1/8" tube. Port size 01 1/8 02 1/4 03 3/8 04 1/2 Made to Order (For details, refer to page 562.)

Round Type Hydraulic Cylinder

81 M22 x 1.5 13 26 19 15 138 25 Up to 800 19.5 M10 x 1.25 22 17 32 12 16 12 8 46 6 8 32 25 f8 5.5 1/8 81 M24 x 1.5 13 28 19 15 143 32 Up to 800 21 M14 x 1.5 24 22 38 16 19 12 8 53 8 9 40 31 f8 7.5 1/8 87 M30 x 1.5 13 36 19 15 159 40 Up to 800 21 M33 x 2 M16 x 1.5 24 24 41 18 21 14 11 54 10 11 48 34 f8 7.5 1/4 108 19 44 24 21 183 Axial foot type: CHML Width across flats B2 H N GA F N GB F

IDX-OM-W023

. 10-1 10-2 . 10-2 10-3 . 10-3 10-4 . 10-3 11 R 11-1 . 11-1 11-2 . 11-1 11-3 . 11-1 11-4 . 11-2 11-5 . 11-2 12 S 12-1 . 12-1 12-2 . 12-2 12-3 . 12-2 2 13 T 13-1 . 13-1 13-2 . 13-1 13-3 . 13-1 13-4 . 13-2 13-5 . 13-3 14 V 14-1 . 14-1 14-2 . 14-1 14-3 . 14-2 14-4 . 14-2 15 15-1 . 15-1 3 IDX-OM-W023 i i i-1 () 3 i 1 1 3 IDU Series i-1 i-1 IDX-OM-W023 i

reduces flow setting time

Inch Size [mm] Model d T (R, NPT) H D1 D3 L1 L2 L3 L4 Note 1) A Note 2) M W1 W2 X Y Weight [g] Unlocked Locked Unlocked Locked AS221FS-01-01 (S) 1/8" 7.2 12 19.1 26.2 19.1 43.9 42.4 40.8 39.3 13.3 20 21.5 6.5 15 13 (13) AS221FS-01-03 (S) 5/32" 8.2 AS221FS-01-07 (S) 1/4" 11.2 20.8 27.9 14 (13) AS221FS-01-09 (S) 5/16" 13.2 22.4 29.5 14.2 15 (14) AS221FS-02-01 (S) 1/8" 1/8 13 (12.7) 7.2 20.9

C95

R 1 GL WB T BG VD 4xRT I 9 H1 Q V VB 4xRT BG GF G I12 F GE BN 1 + Stroke 8 ZZ + Stroke AM WH H VA Be 11 46 52 65 75 95 114 Bore size (mm) B AM BP BN D EE GE BG GL 1 H 2 E1 GF H F GL E G GA GC GD 1 18.3 19.5 22.4 20.7 26 26 6 8 11 11 13 16 48 54 69 69 86 91 97 104 120.5 134.5 169 189 12 16 20 20 25 30 16 16 16 16 16 16 88.5 96.5 111.2 123.5 157 177 45.5 52.5 58.5 68 81 96 13 13 14 14 20 20

SYJ3000/5000/7000

0.25 0.26 0.24 0.20 0.23 0.30 0.23 0.26 0.55 0.49 0.51 0.54 0.50 0.50 0.59 0.55 0.52 0.53 1/8 1/8 1/8 1/4 1/4 1/4 1/4 1/4 1/4 1/4 1/8 C6 C8 1/8 C6 C8 1/8 1/8 C6 C8 SS5YJ7-20 Body ported SYJ72 for internal pilot SS5YJ7-21 SS5YJ7-40 SS5YJ7-41 SS5YJ7-42-C6 SS5YJ7-42-C8 Base mounted SYJ74 for internal pilot Note) Value at manifold base mounted, 2 position single operating How to Order Manifold

5 Port Air Operated Valve Series SYA3000/5000/7000 1

VFRA4111-04 VFRA4211-03 VFRA4211-04 VFRA4311-03 VFRA4311-04 VFRA4411-03 VFRA4411-04 VFRA4511-03 VFRA4511-04 3/8 1/2 3/8 1/2 3/8 1/2 3/8 1/2 3/8 1/2 13 15 14 15 13 14 13 14 13 (5.0) 15 (5.3) 0.30 0.30 0.31 0.30 0.32 0.28 0.31 0.30 0.27 (0.42) 0.22 (0.42) 3.2 3.8 3.4 4.0 3.2 3.5 3.2 3.7 3.2 (1.3) 3.7 (1.5) 1.1 1/8 Single 2 position 1.2 1/8 Double Closed center 1.2 1/8 Exhaust center 1.2 1/

HRX-OM-X071

HRX-OM-X071 Contents Contents Chapter 1 Safety Instructions . 1-1 1.1 Before using the product . 1-1 1.2 Reading the Manual . 1-1 1.3 Hazards . 1-2 1.3.1 Level of hazards . 1-2 1.3.2 Definition of Serious injury and Minor injury . 1-2 1.4 Product Label . 1-3 1.5 Safety Measures . 1-4 1.5.1 Safety instructions for use . 1-4 1.5.2 Personal protective equipment . 1-4 1.6 Emergency Measures.

SYJ300/500/700

Type SS3YJ7-40 1/8 1/8 1/8 1/8 C6 C8 Type SS3YJ7-41 Base mounted for internal pilot Type SS3YJ7-42-01 SYJ74 1/4 1/4 Type SS3YJ7-42-C6 Type SS3YJ7-42-C8 1/4 Body ported for external pilot SYJ72R 1/4 1/8 2.2 0.34 0.55 2.4 0.32 0.62 Type SS3YJ7-21R Type SS3YJ7-41R 2.2 2.0 1.6 2.1 0.35 0.27 0.32 0.24 0.59 0.47 0.39 0.51 2.4 2.2 2.2 2.3 0.36 0.32 0.27 0.31 0.66 0.56 0.54 0.59 1/8 1/8 C6 1/4 1

High Purity Chemical Valve

S) (mm) Dimensions (mm) Dimensions W W Model LVA20 LVA30 LVA40 LVA50 LVA60 S Model LVA2m LVA3m LVA4m LVA5m LVA6m 66.5 12.5 89.5 24 110 29 A B A B 140.5 34.5 148 36 (mm) Dimensions A B Q R P C E F G H K L N Model LVA1m 20 33 49.5 10 M5 x 0.8 27.5 11 13 27.5 4.2 Rc 1/8, 1/4 NPT 1/8, 1/4 M5 x 0.8 LVA2m 30 33 57 10 M5 x 0.8 31 13 22 22 26 M3 x 0.5 Rc 1/4, 3/8 NPT 1/4, 3/8 LVA3m 36 47 78.5 13

2-Color Display Digital Flow Switch Series PFM

Port size Port size Rc 1/8, 1/4 NPT 1/8, 1/4 G 1/8 Rc 1/8, 1/4 NPT 1/8, 1/4 G 1/8 13 11 13 39 17 17 17 15 17 43 G 1/4 G 1/4 21 21 941 Series PFM7/PFM5 Made to Order 3 Please contact SMC for detailed specifications, lead times and prices.

Prevents Micro-Bubbles

Symbol 00 06 07 08 10 11 10 11 12 13 12 13 19 12 13 19 Tubing size Plug Tubing size Plug Body class Body class Symbol 2 3 4 5 Body class 2 3 4 5 2 to 5 2 to 5 LVC 6 1/4" 6 1/4" LVA 2 2 8 8 10 3/8" 10 3/8" Base type LVH A Stacking type 10 3/8" 10 3/8" Manifold stations LVD 3 3 12 1/2" 12 1/2" 02 2 stations LVQ 12 1/2" 12 1/2" 05 5 stations 4 4 LQ 19, 3/4" 19, 3/4" 12 1/2" 12 1/2" LVN 5

Rotary Actuator/Vane Style Series CRB2

P611070-1 P611090-1 P611060-1 P611080-1 P611010-1 P611070-1 P611090-1 P611060-1 P611080-1 P611010-1 P411020-1 P411030-1 P411040-1 P411050-1 Series Vane type Model CRB2BWU10 CRB2BWU15 CRB2BWU20 CRB2BWU30 CRB2BWU40 CRBU2WU10 CRBU2WU15 CRBU2WU20 CRBU2WU30 CRBU2WU40 Unit part no.

CV/MVGQ

Theoretical Output Refer to Theoretical Output Table 1 on page 10-23-1.