High Purity Fluoropolymer

Applicable tubing size Connection tubing size Class 1 2 3 4 5 6 Symbol Connection tubing size Class 1 2 3 4 5 6 Symbol Inch sizes Metric sizes Class 03 05 07 11 13 19 25 03 04 06 08 10 12 19 25 1/8" x 0.086" 3/16" x 0.127" 1/4" x 5/32" 3/8" x 1/4" 1/2" x 3/8" 3/4" x 5/8" 1" x 0.886" 3 x 2 4 x 3 6 x 4 8 x 6 10 x 8 12 x 10 19 x 16 25 x 22.5 Symbol 1 2 3 4 5 6 LQ2 2 3 4 5 LQ1 11 12 13 14 15

JXCx-OMX0009

Red 4 Lock (+) B-1 order Black 5 Lock (-) A-1 Brown 1 Sensor (+) B-3 Blue 2 Sensor (-) A-3 Actuator side Controller side (b) (17.7) 6.7) 5.7) (10.2) (14.2) 5.5) (d) (a) A B 1 3 1 2 14) 1 4 5 6 (13.5) 1 3 2 1 18) 1 (c) 16 15 (e) (10.2) (11) (10) (14.7) (30.7) L 11 - (2) Incremental Encoder compatible [1] Actuator cable [5m or less] LE CP Signal name Terminal No. (1) (2) Cable color Terminal

CRB2/CRBU2/CRB1

Inertial moment . 3.5 x 10-6 kgm2 2 t E = I 2, = 1 2 Rotation time . 0.12s/90 CRB2BW, CRBU2W20 are selected in this case. 2.

JXCx-OMT0005CN

mm *1 (mm/s) *1 mm/s 2 *1 INP mm mm 0mm 100mm M (0mm) *1 M (100mm) (+) (-) *1 45 - 13 1+(++ 2(+) SW SW 12 SW 1 2 (-) (+) WAREA ON mm W 1W 2 WAREA ON W 1 W 1 *W 1W 2 PARA W 1=W 2=0 WAREA OFF (-) (+) W 2 W 2 * * 1 1 * 11 11 * 12 12 * *1 46 - 11.3 12 1CW [CW] 2CCW [CCW] 12 1[] 2[SW] *1 * *1 *1 * 0[] 1a [a ] 2b [b ] 02 SW * 21 21 * *1 47 - 12 12.1 (

Compact and Lightweight

Applicable model t ZH15DA-09-N03-11 ZH15DA-N02-N03-N03 2 Minimum C Factor of a Supply Valve Model C[dm3/(sbar)] ZH05A 0.12 ZH07A 0.23 ZH10A 0.47 ZH13A 0.80 ZH15A 1.06 ZH18A 1.53 ZH20A 1.88 ZH18DA-11-N03-13 ZH18DA-N03-N03-N03 1 ZH20DA-10-04-12 ZH20DA-03-04-04 ZH20DA-11-N04-13 ZH20DA-N03-N04-N04 t 2.

MG

2 !0 r o @2 e !

NCA1

1 1/8 1/2 7/8 5/16-24 3 0 3/8 3/8 1.30 1.06 2 1/4 1 3/8 2.13 2.48 3 3/4 6 1/8 6 1/8 6 11/16 325 (3.25) 1 3/8 1-14 1 5/8 3.9 1/2 3 13/16 1 15/16 1 1/4 3/4 11/64 2 1 1/2 5/8 1 1/4 3/8-24 3 3/4 0 1/2 5/8 1.57 1.18 2 3/4 1 5/8 2.59 2.72 4 1/4 7 3/8 7 3/8 7 7/8 400 (4) 1 3/8 1-14 1 5/8 4.7 1/2 4 1/2 2 1/4 1 1/4 3/4 11/64 2 1 1/2 5/8 1 1/4 3/8-24 4 1/2 0 1/2 5/8 1.57 1.18 3 1/2 1 5/8 2.59 2.72

3 Port Air Operated Valve Series SYJA300 1

Effective area (mm2) Valve model 1 (IN), 2 (OUT) 3 (EXH) Weight (kg) 2 3 (OUT EXH) 280 280 310 310 330 570 650 650 670 650 670 2 2 1 2 (IN OUT) 230 3 4 1.5 VPA3165 1 11 4 11 4 11 4 11 2 VPA3185 2.3 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Dimensions 3-

7.5

One-touch fitting 11 Clip 12 SJ2000-CL-1 (10 pcs.) 5 Series SJ2000/3000 Construction: SJ3000 2 position single JIS symbol 2 position single 2 position single with back pressure check valve o t r e w y q !1 u !

Compact Cylinder Series CQS

2 (4.5) 2 25 7.5 7.5 2.5 10 10 6 3.5 1.5 (1) 6 3.5 22.5 9.5 27 11 11 9.5 0.5 24.5 7 5.5 3.5 (1) 7 5.5 ( ): Denotes the values of D-A93.

IDX-OM-W031

T 11 1 Safety instructions . 11 1 11 2 Specifications . 11 1 11 3 Remote operation . 11 1 11 4 How to connect the power supply and signal cable . 11 2 11 5 How to re-start the operation . 11 2 11 6 Electric circuit . 11 3 Chapter 12 Specification for Option V 12 1 Safety instructions . 12 1 12 2 Specifications . 12 2 12 3 How to perform maintenance . 12 3 12 4 Electric circuit . 12 3 Chapter

IDX-OM-W032

1 . 4-1 4-2 . 4-1 4-2-1 . 4-1 4-2-2 . 4-1 4-2-3 . 4-2 5 5-1 . 5-1 5-2 . 5-3 1 6 6-1 . 6-1 6-2 GWP . 6-1 6-3 . 6-2 6-4 . 6-3 6-5 . 6-4 7 C 7-1 . 7-1 7-2 . 7-1 8 K 8-1 . 8-1 8-2 . 8-1 9 L 9-1 . 9-1 9-2 . 9-1 9-3 (ADH4000-04) . 9-2 9-4 . 9-2 10 R 10-1 . 10-1 10-2 . 10-1 10-3 . 10-1 10-4 . 10-2 10-5 . 10-2 11 T 11-1 . 11-1 11-2 . 11-1 11-3 . 11-1 11-4

•

(Different surlaces., P-Z1O 15 ' OS 11 0 11 5 ~~ Stune sulface) With 1 pc. 2 l'O+40~ 11 5 +40 ) o.Y7.P With n pcs. 15 + 401 n 221 , , D-Y590 105+40(0 4) , 1n 4 (n =4, 8, 12. 16) .Y7OW r D'-''-'=~__'_-r_' (,,"~=_=2 . 4. 6. 8..) (n = 4. 8. '2" ,-,-'6 ",.","),-__",( " :..: = ",4 ",.-,, 8!

CV/MVGQ

n 2) n = 2, 4, 6, 8 80 + 30 (n 2) n = 2, 4, 6, 8 100 + 30 (n 2) n = 2, 4, 6, 8 90 + 50 (n 2) n = 2, 4, 6, 8 55 + 50 (n 2) n = 2, 3, 4 75 + 50 (n 2) n = 2, 4, 6, 8 80 + 50 (n 2) n = 2, 4, 6, 8 Different sides CE2 D-A44 n Same side ML2B 10 20 100 75 80 90 100 100 100 100 100 100 1 Different sides C J G5-S 2 Same side D-A3C D-G39C D-K39C 20 + 35 (n 2) n = 2, 3, 4 100 + 35 (n 2) n = 2

ISO Cylinder ISO Standard (15552) CP96 Series ø32, ø40, ø50, ø63, ø80, ø100 C85 15% Weight reduced C85W Up Lightweight C85-S/T to C85K * Compared with the previous CP96 series (ø40, 100 mm stroke) C85K-S/T By adopting a new cushion method (Air cushion

2 (Different surfaces) 10 n 10 + 30 (n 2) 2 (Same surface) 50 D-A9l 1, 2 (Different surfaces) 10 n 10 + 40 (n 2) 2 (Same surface) 40 D-A9lV 1, 2 (Different surfaces) 10 n 10 + 30 (n 2) * n = 3, 4, 5 * The D-M9lV/M9lWV/M9lAV/A9lV are mountable on 32 to 63.

JXCx-OMT0062

Red 4 Lock B-1 Black 5 Lock A-1 Brown 1 Sensor B-3 Blue 2 Sensor A-3 Electric Actuator side Controller side 11 - (5) Communication plug connector -5 4 Correspondence network Type 3 2 CC-Link MJ Straight type S 1 T T-Branched Straight type type 5 No.

C95

R GL WB C85 GL 1 T BG 4 x RT 4 x RT C76 VA I9 VD V H1 VB BG H1 Q GF GE CG1 I12 F AM I12 AM BN 2 G WH 18 H + Stroke H + Stroke ZY + Stroke MB MB1 CP95 C95 C92 Be 11 46 52 65 75 95 114 Bore size (mm) B AM BP BN D EE GE BG GL 1 H 2 E1 GF H F GL E G GA GC GD 1 18.3 19.5 22.4 20.7 26 26 6 8 11 11 13 16 48 54 69 69 86 91 97 104 120.5 134.5 169 189 12 16 20 20 25 30 16 16 16 16 16 16 88.5 96.5 111.2

JXCx-OMU0026

Procedures to Trial run . 10 3.1 Checking the contents of the package . 10 3.2 Mounting the controller . 11 3.3 Install the setting software and the driver . 11 3.4 Wiring and connection . 11 3.5 Power supply, Start-up of controller setting software, setting date and time, Alarm and error check . 11 (1) Supplying power . 11 (2) Start-up of controller setting software . 12 (3) Setting date

JXCx-OMY0008

B A-6 Black 8 3 Actuator side Controller side (14.2) (2) 2 1 (5.5) (14) (1) B1 A1 5 6 (17.7) (3) 2 1 A6 B6 (18) (6.3) 16 15 L (11) (30.7) -55No. JXC-OMY0008-A 14.3 Actuator cable for with lock [5m or less] (1) (2) LE-CPBSignal name Terminal No. Cable color Terminal No.

Series SYJ300/500/700 3 Port Solenoid Valve Rubber Seal

[ ] for AC VZ L plug connector (L): SYJ7l2-lLll-01 M plug connector (M): SYJ7l2-lMll-01 VS 11 23.5 11 23.5 13 1.5 13 1.5 A A 25.5 49.7 25.5 49.7 66.9 70.9 [72.2] 300 80.5 (Lead wire length) (Lead wire length) 2-3.2 (Mounting holes) 300 2-3.2 11 23.5 (Mounting holes) 11 23.5 45.1 [51.6] 34 [40.5] 31.1 31.1 21.6 21 28 25 28 21 25 15 15 65.7 10 18 65.7 10 18 [ ] for AC Other dimensions are