Vacuum System Peripherals:

(mm ) 0 2 4 M V VX311 -01 1.5 ZCU 0.29 0 2 4 M V VX312 -01 2.2 1 8 0.60 AMJ 0 2 4 M V VX313 -01 3 0.82 Misc. 0 2 4 M V VX311 -02 1.5 0.29 0 2 4 M V VX312 -02 0.60 M V VX3224 -02 2.2 0.64 M V VX3324 -02 0 2 4 M V 0.82 VX313 -02 1 4 Series VX31 Series VX32 Series VX33 M V 3 VX3234 -02 1.1 M V VX3334 -02 M V 4 VX3244 -02 1.6 M V VX3344 -02 M V VX3224 -03 2.2 0.64 M V VX3324 -03 M V VX3234 -03

KJ

-01 KDM20S-03 KDM20S-07 KDM20P-01 20 KDM20P-03 KDM20P-07 KDM20S-09 KDM20P-09 Clamp bolt Panel mounting Loosen (4) screws for bracket on the socket side using a Phillips screwdriver (JIS nominal No. 2) until the bracket touches the stop ring.

Remote Type Pressure Sensors/Pressure Sensor Controllers Series PSE

Front protective cover (ZS-26-01) Panel mount (ZS-26-B) Claw Claw 2 x M3 x 8L Tighten screws 1/4 to 1/2 turn after the heads are flush with the panel. When using 48 conversion adapter 48 conversion adapter (ZS-26-D) (PSE300T) Figure (b) Figure (a) 1.

VEX1

Proof pressure Max. operating pressure Set press. range Air operated Solenoid Ambient and fluid temperature Hysteresis Repeatability Sensitivity Mounting Lubrication Port 01 P A R mm2 02 01 02 03 04 04 06 10 10 12 14 20 02 Port size Rc(PT) 1 11 2 1 4 11 4 1 2 1 8 1 4 1 8 1 4 1 4 3 8 1 2 1 2 3 4 590 2 1 300 17 25 1.4 16 0.9 25 1.4 60 3.3 70 3.9 330 18 36 2.0 Cv 16 0.9 130 7.2 160 8.9 180 10

Power Valve Precision Regulator

VBA VBAT AP100 841 VEX13 Series 0 3 Specifications VEX1A33 VEX1B33 VEX113 0 3 VEX123 0 3 VEX133 0 3 VEX153 0 3 VEX173 0 3 VEX193 0 3 Model Port 1(P) 2(A) 3(R) M5 01 M5 01 01 02 01 02 03 02 04 04 06 10 12 14 10 20 1 8 1 8 1 8 1 4 1 8 1 4 1 4 3 8 1 2 1 2 3 4 2 1 1 1 1 1 Port size M5 M5 1 2 4 1 4 1 2 Operation Manual knob (Push locking slotted type) and Air operated type Manual knob (Push locking

Table of Contents

2 2 2 2 4 2 2 1 1 6 2 No. !

VK3000

Mounting hole ( ) 63.4 50.4 VQD-V (Bleathing hole) 24 21 VK VK 2.3 68.1 VT 3R2 5R1 1P Refer to grommet type for other dimensions. 2 x M5 x 0.8 (R1, R2 port) 1423 VK3000 Series Dimensions: Base Mounted Grommet: VK3140-G-01 DIN terminal: VK3140-D-01 2 x 4.3 (Mounting hole) 32 4 B A 26 23 74.1 Max.10 2 x 4.3 (Mounting hole) Applicable cable O.D.: 3.5 to 7 Manual override (Non-locking) Pg7 ~

Check Valve Series AK

NPT thread Model Model 10-32 UNF M5 3/8 1/8 1/4 1/2 3/8 1/8 1/4 1/2 AKH04 AKH06 AKH08 AKH10 AKH12 AKH03 AKH07 AKH09 AKH11 AKH13 4 6 8 10 12 5/32 1/4 5/16 3/8 1/2 From One-touch fitting to male thread B Bushing type AKB 01 A 01 S With seal (Standard) Body size Port size 01 1/8 01 1/8 Thread type 02 1/4 02 1/4 03 3/8 Nil R 03 3/8 04 1/2 N NPT 04 1/2 Check valve free flow direction Female/Male

4/5 Port Air Operated Valve Series SYJA3000 1

P 45.5 24 32 1.8 (Bleed port) With fiflter (80 mesh) R2 21 2 position double: SYJA5220-M5 2 position double: SYJA5240-01 2-4.3 44 2-M5 x 0.8 (Pilot port) 2-M5 x 0.8 (Pilot port) (For mounting) A B 1 11 1 5 A B 1 24 A B 1 2-2.6 10 R P (For manifold mounting) 19 4 2 37.5 47 42 15 54 54 Manual override 24.5 23 20 11.5 3 2-2.6 (For mounting) 11 Manual override 2-1.8 (Bleed port) 46.5 1/8 33.5

Series SYJ500 Rubber seal 3 Port Pilot Solenoid Valve

1/8 (A port) 18 8.5 2-4.5 (For mounting) 4 34 Manual override A 24 P R 33.5 G: Approx. 300 H: Approx. 600 (Lead wire length) 55.6 [57.8] (Light/surge voltage suppressor) M5 x 0.8 (X port) 49.6 [56.6] + 34.2 8.5 16.5 21 X 6 32 24 15 17 9 1/8 (P, R port) 42 L plug connector (L): SYJ54-L-01 M plug connector (M): SYJ54-M-01 DIN terminal (D): SYJ54-D-01 M8 connector (W0): SYJ54-W0-01 Approx.

4/5 Port Air Operated Valve SYJA3000 Series

*The bracket cannot be retrofitted later. *2 position single only SYJA7 20 1 01 Body ported SYJA7 40 2 Base mounted Symbol Body ported Port size Thread type Type of actuation Nil Rc G NPT NPTF Without sub-plate Nil 2 position single 2 position double 4 3 2 position double 2 position single 2 1 1/8 With sub-plate 01 F N T 2(B) (A)4 2(B) (A)4 3 position closed center 1/4 With sub-plate 02 3

CLA

With 1 switch 10 75 80 90 Wrth 1 switCh 10 75 80 90 0-8586 OGSKS Different 35 75 80 90 With 2 surface sWitches Same Surface 35 75 80 90 Av ro SWitch ~'B5 '86 D-GSoK5 '" " .J ~ ~ D-A4 Different SS.. 3O(n-2} 75+JO2) With n surface "= 1.2.3,4 , n=2,4,6,8 ... n=2.4.5.e .. 1'1 =2 .4 ,6 ,8 ... switches Same 5.S+~1'l2) 7S+,5O(n-2) ao. 5O(1l-2} 90+50(n-2) ""F ttl surface

PSxx-OMM0006CN

D ZS-24-D X X X ZS-35-C X X X X X E ZS-35-D X X ZS-35-F X X X X X + F ZS-35-G X X 1/ 1 ZS-24-A A M35 L,M45 L 2 ZS-24-B B M45 L, 2 ZS-24-D D M35 L,M45 L 2 ZS-35-C (01,N01) ZS-35-D (W1,WF1,M5,C4,C6) ZS-35-F +(01,N01) ZS-35-G +(W1,WF1,M5,C4,C6) -10No.PS-OMM0006CN-E M8(3 ) 01 N M L ISE40A 1/ 2 ISE40A -0.11.000 MPa Y ZSE40A 0.0-101.3 kPa K + T + 1 01 R1/8(M5) N01 NPT1/8(M5) A A

VKF300

VKF300-11A-2 For VKF334: VKF300-11A-1 8 3 4 For VKF33 : VKF300-6A-1 2 sets per unit required Bushing assembly 9 Resin 2 3 Port Direct Operated Poppet Series VKF300 Dimensions/Single Type Grommet: VKF332-GM5 01 DIN terminal: VKF332-DM5 01 Body ported type 17 Rc(PT) 1/8, M5 x 0.8 (port A) Manual override (non-locking) A A 18.5 20.5 1 Approx. 300 (lead wire length) 28.5 32 2.3 32 2.3 Max. 10

3 Port Direct Operated Poppet Solenoid Valve Series VKF300 1

(With mounting screw) For VKF334: VKF300-S-01 For VKF332: VKF300-13A-2 For VKF333: VKF300-11A-2 For VKF334: VKF300-11A-1 i 3 4 For VKF33 : VKF300-6A-1 2 sets per unit required Bushing assembly o Resin 4-13-5 6 Series VKF300 Dimensions: Single Type M5 01 DIN terminal: VKF332-DM5 01 Body ported Grommet: VKF332-G17 Rc 1/8, M5 x 0.8 2(A) port Manual override (Non-locking) A A 18.5 20.5 300

Tamper Proof Speed Controller with One-touch Fitting Series AS


1F-T Elbow Type/Universal Type 1

M5 Port size M5 x 0.8 R 1/8 R 1/4 R 3/8 R 1/2 10-32 UNF NPT 1/8 NPT 1/4 NPT 3/8 NPT 1/2 Type 01 02 03 04 U10/32 N01 N02 N03 N04 Elbow Universal 2 3 Universal type Applicable tubing O.D.

Speed Controller Adjustable by Flat Head Screwdriver with One-touch Fitting Series AS


1F-D Elbow Type/Universal Type 1

Elbow Universal 2 3 Metric size Inch size 3.2 23 01 1/8" 04 06 08 10 12 03 05 07 09 11 13 4 5/32" 6 3/16" Control 8 1/4" Meter-out Meter-in 0 1 10 5/16" 12 3/8" Use 1/8" tube. 1/2" M5 Port size With One-touch fitting M5 x 0.8 R 1/8 R 1/4 R 3/8 R 1/2 10-32 UNF NPT 1/8 NPT 1/4 NPT 3/8 NPT 1/2 01 02 03 04 U10/32 N01 N02 N03 N04 Needle Valve/Flow Characteristics AS1201FG, AS1211FG AS2201FG-

Manifold Specifications

Non plug-in type Thread type 02 2 stations Standard Nil NPT Rc N T F Symbol 24 24 stations NPTF G Option VV5ZS2-51FD-091-01-MP5 VZS2150-5FZ VZS2250-5FZ 1 5 2 Note) Maximum stations 51F 16 stations 51G15 stations 51 24 stations Passage Porting specifications 4(A), 2(B) Side 5(R1), 3(R2) 1(P) Common Common Symbol Port size 1 1 8 01 Rc (Manifold base) (2 position single) VV5ZS2-51-071-01-M5

VK300

VK300-82-2-01 VK300-82-2-03 110 VAC 110V VK300-82-2-02 200 VAC 200V VK300-82-2-04 220 VAC 220V DIN terminal type VK300-82-2-07 VK300-82-4-51 VK300-82-4-06 VK300-82-3-05 VK300-82-3-53 240 VAC 240V 6 VDC 6V 12 VDC 12V 24 VDC 24VD 48 VDC 48VD Indicator light (Built-in connector) Marking Circuit with indicator light AC circuit diagram 12 VDC or less circuit diagram 24 VDC or more circuit diagram

Ionizer Nozzle type IZN10 Series IZS

Static Neutralization Characteristics (Discharge Time from 1000 V to 100 V) (1) Energy saving static neutralization nozzle/IZN10-01 (2) High flow rate nozzle/IZN10-02 5 5 0.1 MPa 0.05 MPa 4 4 0.3 MPa 0.05 MPa Discharge time [s] Discharge time [s] 3 3 0.1 MPa 2 2 0.7 MPa 0.3 MPa 1 1 0.5 MPa 0.5 MPa 0.7 MPa 0 0 200 400 0 0 400 200 Distance [mm] Distance [mm] (3) Female threads for piping/IZN10