VS7-6

side L R Side Bottom A B Ordering source area code Cylinder port size Code Japan, Asia Australia areas Ordering source area code 3/8 1/2 03 04 Code Japan, Asia Australia areas E Europe N North America E Europe N North America < Manifold block replacement parts> Part No.

Suction Guard (Produced upon receipt of order) FHG Series

Y Y (mm) (mm) Port size Weight (kg) d N P Q Y (mm) Port size Weight (kg) d 25 25 25 28 28 28 28 28 Port size Weight (kg) E 47 47 52 58 58 63 G 9 9 9 9 9 9 9 9 Z 2.8 2.8 2.8 5.3 5.3 5.4 1/2B (04) 3/4B (06) 1B (08) 1 1/4B (10) 1 1/2B (12) 2B (16) 2 1/2B (20) 3B (24) 1/2B (04) 3/4B (06) 1B (08) 1 1/4B (10) 1 1/2B (12) 2B (16) 1/2 3/4 1 1 1/4 1 1/2 2 22.2 27.7 34.5 43.9 49.1 61.1 77.1 90.0 2.7

4-channel Flow Monitor ( compatible)

) 0x1F88 (8072) 1 R Rated range lower limit N S16 2 R Rated range upper limit N S16 3 R Measurable range lower limit N S16 0x1F9A (8090) 0x1F9B (8091) 0x1F9C (8092) 0x1F9D (8093) 4 R Measurable range upper limit N S16 5 R Settable range lower limit N S16 6 R Settable range upper limit N S16 1: "R" means Read and "W" means Write.

VFRA3000

VFRA4211-03 VFRA4211-04 VFRA4311-03 VFRA4311-04 VFRA4411-03 VFRA4411-04 VFRA4511-03 VFRA4511-04 3/8 1/2 3/8 1/2 3/8 1/2 3/8 1/2 3/8 1/2 13 15 14 15 13 14 13 14 13 (5.0) 15 (5.3) 0.30 0.30 0.31 0.30 0.32 0.28 0.31 0.30 0.27 (0.42) 0.22 (0.42) 3.2 3.8 3.4 4.0 3.2 3.5 3.2 3.7 3.2 (1.3) 3.7 (1.5) 1.1 1/8 Single 2 position 1.2 1/8 Double Closed center 1.2 1/8 Exhaust center 1.2 1/8 3 position

Vacuum System Peripherals:

D 6 N ZX ZR ZM ZH ZU Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com r Stations ZL Indicate ejector/valve, etc for X. (When port sizes for A, B ports are mixed, indicate C4 or C6 in cell .)

Modular Type Regulator Series AR

X425 03 Regulator Regulator For high/low temperature For high pressure 25 30 40 50 60 Body size Body size X430 X440 Low temperature 20 25 30 40 50 60 High temperature Thread type Thread type Rc NPT G Nil N F Rc NPT G Nil N F Port size Port size Body size Port size Body size Symbol Port size 25 30 40 50 60 Symbol 20 25 30 40 50 60 02 03 04 06 10 1/4 01 02 03 04 06 10 1/8 3/8 1/4 1/2 3/8 3/

VPA4

VVPA4 5 0 04 04 1 Thread type Nil Rc G NPT NPTF VP 5 port Air operated manifold F N T 5 Base size Rc A, B Port size Rc 3 4 6 1 VVPA450 Symbol 04 Port size VVPA460 1 2 3 4 Mixed 1 06 10 M (2) Piping Note 2) In the case of mixed specifications, indicate M and specify port location sparately on a manifold specification sheet.

Speed Controller for Low Speed Operation with One-touch Fitting Elbow Type/Universal Type (Resin Body) AS-FM Series

AS2001FM-04-X12 Ex.) AS2001FM-04-X21 AQ Note 1) Not particle-free ASV Throttle Valve (Without Check Valve) X214 AK Ex.) AS2001FM-04-X214 VCHC ASR ASQ Needle Valve/Flow Rate Characteristics Note) The flow rate characteristics are representative values.

Hydraulic Filters

-10 -06 -24 -28 -12 -16 -08 10 Pressure drop (kPa) -30 10 100 1000 1 Flow rate (L/min) Conditions Fluid: Turbine oil Class 2 VG56 Viscosity: 45 mm2/s Filter material: Micromesh Nominal filtration: 74 m to 149 m 498 Vertical Suction Filter FHIA Series How to Order FH I A N 04 M M R 074 Vertical suction filter Relief valve Hydraulic fluid R D N W V With relief valve None (Blanking plate) Petroleum

AC

Residual Pressure Relief Valve How To Order Series VHS 20 to 40 VHS 30 N 03 Z X513 Residual Pressure Relief Valve With External Epoxy Coating Stainless Fasteners Body Size Symbol 20 30 40 Applicable Model AC21 AC31 AC41 Name Plate in imperial Units (psi, F) Thread Type Body Size Port Size N NPT Port Size Symbol 20 30 40 1/4 3/8 1/2 02 03 04 Note: Other sizes, thread forms, options, etc. may

Series AC Epoxy Coated F.R.L.

Residual Pressure Relief Valve How To Order Series VHS 20 to 40 VHS 30 N 03 Z X513 Residual Pressure Relief Valve With External Epoxy Coating Stainless Fasteners Body Size Symbol 20 30 40 Applicable Model AC21 AC31 AC41 Name Plate in imperial Units (psi, F) Thread Type Body Size Port Size N NPT Port Size Symbol 20 30 40 1/4 3/8 1/2 02 03 04 Note: Other sizes, thread forms, options, etc. may

Series IDG

Port size Thread type Symbol Bore Size Nil N F Rc NPT G 1 5 10 20 30 3 50 60 75 100 01 1/8 02 1/4 04 1/2 03 3/8 Standard Specifications/Single Style (Standard Dew Point 20C [4F]) Standard dew point 20C (4F) Model IDG1 IDG5 IDG10 IDG20 IDG30 IDG50 IDG60 IDG75 IDG100 IDG3 IDG1 Fluid Compressed air Range of operating conditions Standard performance conditions Standard performance Inlet air

IDG

Symbol L Standard dew point (N) 40 Port size Symbol Bore Size Thread type 30 50 60 75 100 Rc NPT G Nil N F 02 1/4 03 3/8 04 1/2 Standard Specifications/Single Unit Type (Standard dew point: 40C) Model Standard dew point: 40C IDG30L IDG50L IDG60L IDG75L IDG100L Compressed air Fluid Range of operating conditions Standard performance conditions Inlet air pressure (MPa) 0.3 to 1.0 IDG30L

Speed Controller for Low Speed Operation with One-touch Fitting Series AS-FM Elbow Type/Universal Type (Resin Body) 1

AS121FM-M5-23 AS121FM-M5-04 AS121FM-M5-06 AS221FM-01-23 AS221FM-01-04 AS221FM-01-06 AS221FM-01-08 AS221FM-02-04 AS221FM-02-06 AS221FM-02-08 AS221FM-02-10 3.2 4 6 3.2 4 6 8 4 6 8 10 22.1 22.1 22.9 27.5 27.5 27.5 32.4 34.4 34.4 36.4 43.2 8.4 9.3 11.6 9.3 9.3 11.6 15.2 10.4 12.8 15.2 18.5 17.3 17.3 18.1 20.4 20.4 20.4 25.3 25.2 25.2 27.2 33.9 12.7 12.3 7 25.1 28.8 30.1 9.6 33.8 M5 x 0.8 8 13.5

Speed Controller with Residual Pressure Release Valve with One-touch Fitting Series AS



FE Elbow Type/Universal Type

(mm) 4 6 8 10 12 (1) AS221FE-01 AS231FE-01 20, 25, 32 R 1/8 AS221FE-02 AS231FE-02 20, 25, 32, 40 R 1/4 AS321FE-03 AS331FE-03 40, 50, 63 R 3/8 AS421FE-04 AS431FE-04 63, 80, 100 R 1/2 Note 1) Elbow type only Note 2) Distinction between meter-out/meter-in types by appearance Those are distinguished by the lock nut.

Miniature Regulator Series ARJ210

With One-touch fitting Thread type 1/8 (Male thread), M5 x 0.8 (Female thread) 01 Port size (IN) R, Rc NPT Nil N Accessory None Bracket Pressure gauge Nil B G Applicable tubing O.D. (OUT) Metric size ARJ310-01 4 mm 6 mm 04 06 Note 2) For products with pressure gauge, pressure gauge is shipped together with product.

Series AS-FM/AS-M/ASD-FM

Max. 3.2 4 6 3.2 4 6 8 4 6 8 10 22.1 22.1 22.9 27.5 27.5 27.5 32.4 34.4 34.4 36.4 43.2 8.4 9.3 11.6 9.3 9.3 11.6 15.2 10.4 12.8 15.2 18.5 17.3 17.3 18.1 20.4 20.4 20.4 25.3 25.2 25.2 27.2 33.9 AS121FM-M5-23 AS121FM-M5-04 AS121FM-M5-06 AS221FM-01-23 AS221FM-01-04 AS221FM-01-06 AS221FM-01-08 AS221FM-02-04 AS221FM-02-06 AS221FM-02-08 AS221FM-02-10 12.7 12.3 7 25 25.8 22.2 9.6 28.6 M5 x 0.8 8

Speed Controller with

+ L17 x 2 L8 x n + L16 x 2 L8 x n + L25 x 2 L8 L8 Note 1) Refer to page 3 for L8.

IDX-OM-W028

P IDU22E R1 325 775 1153 93 445 123 5 279 46 50 13 353 85 600 379 1258 64 550 135 0 290 388 680 414 IDU37E R11/2 360 855 IDU55E R2 470 1345 53 530 1440 360 30 500 75 700 526 IDU75E 1480 1575 70 IDU Series 6-3 External Dimentions 6 3 IDX-OM-W028 Air Dryer 6 References 6-4 Electrical Circuit IDU22E-23 IDU37E-23 GFCI For Option R GFCI For Option R L N PE L N PE TB TB THR MC1 OLP THR MC1 C01

AIR COMBINATION

25-MLAISE35-N-25-M (Switch body only)] Note 3 NPN output Wiring top entry ISE35-R-25-MLAISE35-R-25-M (Switch body only)] Note 3 Digital pressure switch PNP output Wiring bottom entry ISE35-N-65-MLAISE35-N-65-M (Switch body only)] Note 3 PNP output Wiring top entry ISE35-R-65-MLAISE35-R-65-M (Switch body only)] Note 3 N.C.