XL

1200 1200 1000 1000 800 800 Smooth exhaust valve T msec 600 600 400 400 200 200 0 0 25 40 50 63 80 25 40 50 63 80 Size Size Response time when closed (including pneumatic valve) Operation time when closed (vacuum valve only) Response time when open (including pneumatic valve) Operation time when open (vacuum valve only) 35 Series XL High Vacuum Angle Valve 2 As a function of pilot pressure

RSH/RS1H

CE2 ML2B Graph (1) Graph (2) RSA50, 63, 80 Bore size 50, 63, 80/ = 0 Bore size 50, 63, 80/ = 0.1 C J G5-S 1.0 1300 1300 RSH80 RSA80 RSH63 RSA63 RSH50 RSH50 RSA50 80 0.9 Operating pressure P [MPa] 1200 1200 CV 0.8 1100 1100 0.7 MVGQ 1000 1000 0.6 900 900 0.5 CC 63 80 Load weight m [kg] Load weight m [kg] 800 800 0.4 50 0.3 RB 700 700 0.2 600 600 J 0.1 63 500 500 50 1000 2000 3000 4000 5000

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL Locking of door Prevention of dropping at the rising end MLG With front lock With rear lock CNA CNG MNB CNS Maintains the cylinder’s CLS original position even if t

) MGF 81 (88) 12 (20) 90 (120) 50 (58) 110 (144) 46 (47) 159 (163) 0.032 0.059 50 1200 600 600 600 15 30 76 38 103 9.0 144 3.2 27 13 31 188 9.0 35 19 183 195 127 154 45 50 70 30 12 22 74 12 80 76 18 95 160 1000 (1001 to 1200) 170 (179) 101 (105) 15 (23) 105 (140) 59 (64) 130 (170) 43 (48) 0.032 0.059 63 1200 600 600 600 18 11.5 11.5 110 40 92 49 107 166 3.2 34 16 24 206 40 23 196 212 148

e

1600 2000 LC6m LC6m 0.5 0.5 LZm LZm LC3F2 LC3F2 0 0 500 1000 0 0 500 1000 Xm Xm Stroke (mm) Stroke (mm) D-m D-m Medium Load (9.80 m/s2) Light Load (19.60 m/s2) 4.0 4.0 E-MY E-MY 300 mm/s 300 mm/s 3.5 3.5 400 400 3.0 3.0 500 500 600 600 2.5 2.5 800 800 Tact time (sec) Tact time (sec) 1000 1000 2.0 2.0 1.5 1.5 1.0 1.0 1600 2000 1600 2000 1200 1200 0.5 0.5 0 0 500 1000 1000 0 0 500 Stroke (

5 Port Solenoid Valve Series SV1000/2000/3000/4000

200 CM2 20 10% 30% 50% 70% 150 Stroke (mm) Stroke (mm) Stroke (mm) Stroke (mm) AS2201F -01-06 AS2200-01 70% 100 50 10% 30% 50% 0 CM2 25 200 150 AS2201F -01-06 AS2200-01 100 50 0 SV100 ANA1 -C08 T0604 CM2 32 200 150 AS2201F -01-06 AS2200-01 100 50 0 200 CM2 40 150 AS2201F -02-06 AS2200-02 100 50 0 Solenoid valve Silencer Tubing Speed controller 200 300 400 500 600 700 800 900 1000 1100 1200

2/3 Port Valve for Various

550 740 1200 12 23 31 49 23 31 49 215 415 560 880 415 560 880 1850 3300 4200 5400 5900 7300 9200 1 4 1 2 0.7 0.7 0.7 0.7 0.7 0.7 Water, Air, Oil 1.5 Steam 1.0 32A 40A 50A Note) Weight of grommet type.

Mechanically Jointed Rodless Cylinders

Guide for Using MY3M Side Support 200 (1200) 180 160 m 140 Weight W (kg) 120 MY3M63 l 100 (800) 80 MY3M40 60 (700) m l 40 MY3M25 (600) m 20 MY3M16 0 1000 2000 3000 4000 0 l l Support spacing l1 (mm) Note) A side support must be used to keep the spacing from exceeding the value inside the parentheses.

Pilot Operated

2 1 Max. operating pressure differential (MPa) Min. operating pressure differential (MPa) Max. system pressure (MPa) Note) Flow characteristics Port size Model Orifice size (mm) AC, DC Weight (g) Av x 10-6m2 Cv converted VXD2142-03 VXD2142-04 VXD2152-06 VXD2262-10 VXD2272-32 VXD2382-40 VXD2392-50 (10A) (15A) (20A) 1 (25A) 32A 40A 50A 3 8 4.5 5.5 9.5 13 23 31 49 110 130 230 310 550 740 1200

AC Servo Motor Driver (CC-Link Type ）

Use the acceleration time constant of Point table No.1 as the acceleration time constant (msec) of Home 1200 for LEJS40 H Lead position return. Set the recommended value in the above figure. Refer to "LECSC2-T Operation Manual ", section 5.4.2 for how to set the Point table. App. 32 APPENDIX LEJS100 Series Lead symbol H A B Lead 50 25 10 Parameter *1,*2 Para.

PSxx-PSV0007

ISE20B : 0x02440x1450 ZSE20B P_2(n_2) (5805200) 0x03FE (1022) 0 R/W (Setting of switch U16 ZSE20B : 0x02580x1450 (6005200) ZSE20BF : 0x03840x13EC (9005100) 0x0BB8 (3000) point of OUT2) ZSE20BF 0x0FA0 (4000) ISE20B 0x04B0 (1200) Setting of OUT2 hysteresis.

End Lock Cylinder Series CBG1

I J to 350 20 18 15.5 13 14 8 12.5 12 2 12 12 35 5 25.3 37 26 M4 x 0.7 depth 7 to 400 25 22 19.5 17 16.5 10 12.5 14 2 12 12 40 6 28.3 40 31 M5 x 0.8 depth 7.5 to 450 32 22 19.5 17 20 12 12 18 2 12 12 40 6 31.3 43 38 M5 x 0.8 depth 8 to 800 40 30 27 19 26 16 15 25 2 13 13 50 8 38.3 52.5 47 M6 x 1 depth 12 to 1200 50 35 32 27 32 20 16.5 30 2 14 14 58 11 44.5 58.5 58 M8 x 1.25 depth 16 to 1200

Profile Design ISO/VDMA Air Cylinder Series CP95

Bore stroke 32 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 450, 500 700 40 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 450, 500 800 50 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 450, 500, 600 1200 63 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 450, 500, 600 1200 80 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 450, 500, 600, 700, 800 1400 100 25, 50, 80, 100, 125, 160, 200,

Non-standard Motor/Horizontal Mount Specification Series LJ1H10

R 200/230VAC (50/60Hz) 2 Axial entry Right entry Y 0 Without motor Bottom entry Specifications 100 7.5 200 8.5 300 9.6 400 10.8 500 12.3 600 13.8 5 to 40 (with no condensation) 15 500 700 16.3 900 18.6 1000 20.4 1200 24.2 800 16.8 Standard stroke mm kg C kg mm/s mm Body weight (without motor) Operating temperature range Work load Maximum speed Positioning repeatability Motor Encoder Lead

Guide Cylinder Series MGG

100 350, 400, 450, 500, 600, 700, 800, 900, 1000, 1100, 1200, 1300 Intermediate strokes and short strokes other than the above are produced upon receipt of order.

5 Port Solenoid Valve Series SV

0.7 0.8 0.9 1.0 200 CM2 20 50% 70% 10% 30% 150 Stroke mm AS2201F -01-06 AS2200-01 70% 100 50 10% 30% 50% 0 200 CM2 25 150 Stroke mm AS2201F -01-06 AS2200-01 100 50 0 ANA1 -C08 T0604 200 CM2 32 150 Stroke mm AS2201F -01-06 AS2200-01 100 50 0 200 CM2 40 150 Stroke mm AS2201F -02-06 AS2200-02 100 50 0 Solenoid valve Silencer Tubing Speed controller 200 300 400 500 600 700 800 900 1000 1100 1200

High Vacuum Angle Valve, XL Series

1200 1200 1000 1000 800 800 Smooth exhaust valve T msec 600 600 400 400 200 200 0 0 25 40 50 63 80 25 40 50 63 80 Size Size Response time when closed (including pneumatic valve) Operation time when closed (vacuum valve only) Response time when open (including pneumatic valve) Operation time when open (vacuum valve only) 35 Series XL High Vacuum Angle Valve 2 As a function of pilot pressure

Digital Pressure Switch ( compatible)

) 0x03F5 (1013) 0 R/W ZSE20B: 0x04B0 (1000 ~ 5620) Y U16 (1200) ZSE20B: 0x03E8 ~ 0x15E0 ZSE20BF: 0x0C1C (1000 ~ 5600) (3100) ZSE20BF: 0x0BB8 ~ 0x1C20 (3000 ~ 7200) Setting of OUT1 output set value (lower limit of window comparator) Setting range ISE20B: 0x0244 ~ 0x1450 P1L(n1L) (Setting of OUT1 output set value _ Lower limit of window comparator) ISE20B: 0x0898 (2200) 0x03F6 (1014) 0 R/W

LG1H

Refer to pages starting with 181 for mounting. 30 100 95 95 B 8(4)-6.2 (160) () () 110 95 20 95 A () () (140) A B 100 200 300 400 500 600 700 800 900 1000 1200 Stroke Model LG1H202SC-100-F LG1H202SC-200-F LG1H202SC-300-F LG1H202SC-400-F LG1H202SC-500-F LG1H202SC-600-F LG1H202SC-700-F LG1H202SC-800-F LG1H202SC-900-F LG1H202SC-1000-F LG1H202SC-1200-F 50 150 250 350 450 550 650 750 850 1050

ChemicalThermo-con

: 95F (35C) Facility water: 95F (35C) 400 400 200 0 0 0 10 20 30 40 50 60 70 Circulating fluid temperature (C) 0 10 20 30 40 50 60 70 Circulating fluid temperature (C) HED007 60 80 100 120 140 F 40 1600 Facility water: 50F (10C) Facility water: 77F (25C) Cooling capacity (W) 1200 Facility water: 95F (35C) 800 400 0 0 10 20 30 40 50 60 70 Circulating fluid temperature (C) Heating Capacity

Compressed Air Preparation Filter

Inlet pressure 0.3 MPa 14 12 10 Inlet pressure 0.5 MPa 12 Inlet pressure 0.5 MPa 10 Inlet pressure 0.5 MPa 8 Pressure drop [kPa] Pressure drop [kPa] Pressure drop [kPa] 10 Max. flow capacity line 8 Max. flow capacity line Max. flow capacity line 8 6 6 6 4 4 4 2 2 Inlet pressure 0.7 MPa 2 Inlet pressure 0.7 MPa Inlet pressure 0.7 MPa 0 150 0 0 300 50 250 200 150 100 300 600 450 300 750 1200