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Pertormance Prechion and slrengh in conliguralions to meel nost appljcations Plcision vs, Moment loading Unmatched Versatility from The leader in Pneumatics SLIDE TABLE Technology Work Table ' I cytinder , , I Conventional Syslem Linear Bearing univcEal lilourl Slide table MuHiple moLrnting opions Standard Stroke (mm) 25 30 40 50 60 75 100 sffi 125 150 '175 200 225 250 275 300 350 400 L I

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Momnt loading Conventional Systetn lHvatal ou dldebL Multipl mounting optims 30 Standard Strcke (mml 125 150 175 200 225 250 275 300 350 400 I ffi75 100 60 I s OF so 'a so =ooi ;slisawl[soww so I T sow lsawjl:ew11 a a a a a a a a a a a a a a a a a a a a a a a a a a a a a t a a a a a a a a a a a a a a a a a a a a a a a a a a '"?FF_PryFry4F!

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l b --" ,m'i$;:f, 4ra 20 Standard Stroke lmm) 30 40 50 60 75 100 125 175 200 225 250 275 300 350 400 150 Y f r N t * w -l Yw Y Ns a a a a a a a a a a a a a o a a a a a a a a a a a a a a a a a '*?

REA/REB

Load Center Offset in Operating Direction (Lo) 25 144 9 + Lo 32 275 11 + Lo 40 520 13 + Lo Bore size (mm) RB Allowable load weight WA (kg) J DBore size (mm) Allowable load weight WA (kg) 5.6 Lo + 2.8 13.34 Lo + 2.9 10 -X 15 Lo: Distance from center of slide block to loads center of gravity (cm) 2043.2 Lo + 6 20 46.15 Lo + 3.55 Data 25 80 Lo + 4 32 188.1 Lo + 5.7 40 10-2-41 41 Series REAL

NARM Series

6.61 8.27 9.92 11.57 13.23 14.88 16.54 (84) (126) (168) (210) (252) (294) (336) (378) (420) NARM3000 L1 5.98 8.15 10.31 12.48 14.65 16.81 18.98 21.14 23.31 (152) (207) (262) (317) (372) (427) (482) (537) (592) L2 5.43 7.60 9.76 11.93 14.10 16.26 18.43 20.59 22.76 (138) (193) (248) (303) (358) (413) (468) (523) (578) L3 4.33 6.50 8.66 10.83 12.99 15.16 17.32 19.49 21.65 (110) (165) (220) (275

Valve Single Unit

EXH port Rc 1/4 SUP port 67.6 50.5 P E 18.5 18.5 9.5 9.5 58.2 60 1 1 26 L plug connector (L) M plug connector (M) 115.6 (Single, Double) 128.1 (Single, Double) 128.6 (3 position) 141.1 (3 position) 16.7 (Lead wire length) 300 300 (Lead wire length) 33.4 Stations n n: Stations (n1 + n2) 3 85 65 4 104 84 5 123 103 6 142 122 7 161 141 8 180 160 9 199 179 10 218 198 11 237 217 12 256 236 13 275

C92

single clevis C Rear double clevis D Bore (mm) FB AB TD E1 R W MF ZF CD EB L XD UB CB EW MR TR AO AT XA SA AH L1 XV TL TM UW TF UF E2 46 60 70 85 102 116 140 180 32 36 45 50 63 75 90 115 16 20 25 25 30 35 45 60 12,5 12 15 16 20,5 20,5 20 20 130 145 155 170 190 205 245 280 7 9 9 9 12 14 16 18 10 12 12 16 16 20 25 30 65 75 80 90 110 140 164 204 15 18 18 23 23 28 30 35 142 160 170 190 210 230 275

VQ20/30

mounting (-D) 1 2 3 4 5 6 7 8 9 10 Dimensions n: Station (Max. 20) L n 11 12 13 14 15 16 17 18 19 20 600 590 625 635.5 588.8 571 561 587.5 598 559.8 542 532 562.5 573 530.8 513 503 537.5 548 501.8 484 474 500 510.5 472.8 455 445 475 485.5 443.8 426 416 450 460.5 414.8 397 387 425 435.5 385.8 368 358 387.5 398 356.8 339 329 362.5 373 327.8 281 271 300 310.5 269.8 310 300 337.5 348 298.8 252 242 275

EX120/121/122

external terminals and FE Insulation resistance 10 to 57 Hz with constant amplitude of 0.75 mm p-p 57 to 150 Hz with constant acceleration of 49 m/s2 for 2 hours in each direction of X, Y and Z direction (During de-energizing) Vibration resistance Impact resistance 147 m/s2 3 times in each direction of X, Y and Z (During de-energizing) Standards CE marking, UL (CSA) recognition Mass 300 g 275

LX

1 1 10 10 10.1 10.1 15.1 15.1 5.1 5.1 1.1 1.1 0.2 0.2 Speed (mm/s) Speed (mm/s) 20 20 5.1 5.1 7.6 7.6 2.6 2.6 0.6 0.6 0.1 0.1 30 30 3.4 3.4 5.1 5.1 1.7 1.7 0.4 0.4 0.1 0.1 For transfer load of 2.5kg Positioning time (sec) Positioning distance (mm) 100 150 50 10 1 10 10.1 15.1 5.1 1.1 0.2 Speed (mm/s) 20 5.1 7.6 2.6 0.6 0.1 30 3.4 5.1 1.7 0.4 0.1 Refer to page 303 for acceleration time. 275

Fieldbus System

input terminal and supplied voltage of +24 V) (At PNP input, between the pin for input terminal and supplied voltage of 0 V) Open circuit detection current 2 wires 0.5 mA/Input Note 2) 3 wires 0.5 mA/Connector Note 2) Current consumption 50 mA or less 55 mA or less 70 mA or less Enclosure IP67 (Manifold assembly) Standards CE Marking, UL (CSA), RoHS compliant EX600-DXlCl Weight 300 g 275

Thermo-chiller Series HRZ Fluorinated Fluid Type

Mass Note 10) (kg) Safety standards 170 175 275 145 170 UL, CE marking, SEMI (S2-0703, S8-0701, F47-0200), SEMATECH (S2-93, S8-95) Note 1) It should have no condensation. Note 2) FluorinertTM is a trademark of 3M and GALDEN is a registered trademark of Solvay Solexis, Inc. Regarding the fluid other than the above, please contact SMC.

Part Number Description: SOL 24VDC CL2 3-POS   Product Line: V   Product Line Description: VALVE   Family Code: 275   Family Description: VS4 (CLASS 2) SOL 4/5 PORT   Class Code: 21   Part Code: 2   Reference Code:  K   PDF Documentation: PDF   Click here to report information errorImage shown may not match exact part number

Part Number Description: JCT CVR-DIN SGL) CL2   Product Line: V   Product Line Description: VALVE   Family Code: 275   Family Description: VS4 CLASS 2) SOL 4/5 PORT   Class Code: 21   Part Code: 2   Reference Code:  K   Click here to report information errorImage shown may not match exact part number

Part Number Description: JCT CVR-DIN DBL) CL2   Product Line: V   Product Line Description: VALVE   Family Code: 275   Family Description: VS4 CLASS 2) SOL 4/5 PORT   Class Code: 21   Part Code: 2   Reference Code:  K   Click here to report information errorImage shown may not match exact part number

Part Number Description: JCT CVR W/LITES 110VAC   Product Line: V   Product Line Description: VALVE   Family Code: 275   Family Description: VS4 CLASS 2) SOL 4/5 PORT   Class Code: 21   Part Code: 2   Reference Code:  K   Click here to report information errorImage shown may not match exact part number

Part Number Description: PLUG-PIPE 1/8BSP   Product Line: V   Product Line Description: VALVE   Family Code: 275   Family Description: VS4 (CLASS 2) SOL 4/5 PORT   Class Code: 21   Part Code: 2   Reference Code:  K   Click here to report information errorImage shown may not match exact part number

Part Number Description: SHCS M4X0.7X26   Product Line: V   Product Line Description: VALVE   Family Code: 275   Family Description: VS4 (CLASS 2) SOL 4/5 PORT   Class Code: 21   Part Code: 2   Reference Code:  K   Click here to report information errorImage shown may not match exact part number

Part Number Description: GASKET-SUBPLATE CL2   Product Line: V   Product Line Description: VALVE   Family Code: 275   Family Description: VS4 (CLASS 2) SOL 4/5 PORT   Class Code: 21   Part Code: 2   Reference Code:  K   Click here to report information errorImage shown may not match exact part number

Part Number Description: GASKET-JCT CVR-CL2   Product Line: V   Product Line Description: VALVE   Family Code: 275   Family Description: VS4 (CLASS 2) SOL 4/5 PORT   Class Code: 21   Part Code: 2   Reference Code:  K   Click here to report information errorImage shown may not match exact part number