SMC Corporation of America
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Ion polarity Switch setting Positive ion emission 8 Negative ion emission 9 4) Wiring of power supply cable Connect the dedicated power supply cable.

(12 V ) 600 (24 V ) 50 3 ()Low 0.4 V 5 ms 3 1/2 7 LCD 2 (/) 2% F.S.1 digit(253 ) ON OUT1OUT2 1 2 3 -50No.PS-OMM0002CN-F ISE80() ISE80H() ZSE80() ZSE80F() IP65 050 -1060 () 3585RH AC250 V 1 2 M (DC50 V ) 3F.S.(25 ) 3 (N.P) 3.52 m 4 (A.B) 0.15 mm 2(AWG26) 5 (R.T.S.V) 0.95 mm CE UL/CSA RoHS 02 N02 F02 C01 A2 B2 R1/4 NPT1/4 G1/4 Rc1/8 URJ1/4 TSJ1/4 () 117 g 118 g 114 g

KBZ1-06 16 Rc 3 8 Applicable tubing Bulkhead Female Connector: KBE Female Connector Union: KBH T Connection thread Applicable tubing O.D. 4 Model Model KBH1-R1S KBH2-R1S KBH2-R2S KBE1-04 KBE1-06 KBE2-06 R 1 8 Air Supply Port: KBE, KBH, KBB, KBS, KBL (P. 15-3-114, 115) 6 KBH2-R3S KBH3-R2S KBH3-R3S KBH3-R4S KBH4-R3S KBH4-R4S R 1 2 R 3 8 R 1 2 R 3 8 R 1 4 R 3 8 R 1 4 KBE2-08 KBE2-10 KBE3-08

Piping in the backward direction Nil None TSJ 1/4, Piping in the backward direction Bracket A URJ 1/4 and TSJ 1/4 are special fittings for semiconductor manufacturing equipment.

Add/dEC OUT1 (29 ) OUT1 OUT1 ( [n2dH]) ( [n2AH]) 3 1 3 6 6 1 6 3 1 1 4. [F 2] OUT2 -37No.PF-OMN0011CN-C d. ([ tP]) 4. [F 2] OUT2 e. ([ tPL]) [ tPH] or [ tnH] ([ tPH]) 4.

Possible response time settings: 5 ms, 20 ms, 160 ms, 640 ms Pressure Switch output Maximum Minimum 0 OFF The controller equalizes the pressures measured during the specified response time. It then compares the equalized pressure and the set pressure to output switch signals accordingly.

Axial direction mounting Top face mounting body taps (4) Bottom mounting body taps (4) Table 8. Mounting dimension in axial directions Size Tap depth for the Tap depth for the top Bolt bottom mounting mounting 1 8 4 M4 3 8 7 M4 7 10 7 M5 20 11 7 M6 Vertical mounting body through hole Body side mounting body through hole Table 9.

PC-98 (MS-DOS) Edition Operating environment Model: LC1-1-S1 PC-9821, PC-98, PC-9801 with 80286 or higher CPU. PC-H98 series and compatible machines (except for high resolution mode) Computer MS-DOS Ver 3.3 or higher 640KB or more 1MB capacity 3.5 inch floppy disk drive OS Memory Disk drive MS-DOS is a registered trade mark of the Microsoft Corporation.

OFF Note 1: ON/OFF 50 ms flashing Note 2: ON 200 ms single flash, OFF 1 s Note 3: ON/OFF 200 ms double flash, OFF 1 s Note 4: ON/OFF 200 ms triple flash, OFF 1 s Note 5: ON/OFF 200 ms flashing -15No.EX-OMV0023-A Switch setting The switches should only be set with the power supply turned off.

Rc(PT)1 4 KBZ1-04 KBZ1-06 4 6 KBZ2-08 8 KBZ3-10 10 KBZ3-12 12 KBZ4-12 Rc(PT)3 8 16 Bulkhead female connector: KBE Female connector union: KBH T Connecting thread Tube O.D. Part No. Part No.

(mm 0.81.0 ZS-28-C 24-26 0.14-0.2 1.01.2 ZS-28-C-1 1.21.6 ZS-28-C-2 23 0.1-0.5 1.151.35 ZS-28-CA-4 1.01.2 ZS-28-C-3 20-22 0.3-0.5 1.21.6 ZS-28-C-4 1.62.0 ZS-28-C-5 SMC 3M ZS-28-C 37104-3101-000FL 1-1473562-4 ZS-28-C-1 37104-3122-000FL ZS-28-C-2 37104-3163-000FL ZS-28-CA-4 2-1473562-4 ZS-28-C-3 37104-3124-000FL ZS-28-C-4 37104-3165-000FL ZS-28-C-5 37104-2206-000FL -12No.PS-OMG0001CN-H

Note 1: ON/OFF 50 ms flashing Note 2: ON 200 ms single flash, OFF 1 s Note 3: ON/OFF 200 ms double flash, OFF 1 s Note 4: ON/OFF 200 ms triple flash, OFF 1 s Note 5: ON/OFF 200 ms flashing Safety Instructions Installation Setting Troubleshooting Warning General instructions on installation and maintenance Technical documentation giving detailed troubleshooting information can be found on

Designation Description 2 Fieldbus interface connector (BUS IN) EtherCAT connection (M12 4-pole socket, D-coded) 4 5 2 *1: Blinking pattern SV24 V +24 V for solenoid valve 1 Power supply connector Power supply with load voltage for valves and operating voltage for SI unit (M12 5-pole plug, A-coded) 3 2 SV0 V 0 V for solenoid valve 200 ms 200 ms 1 SI24 V +24 V for SI unit operation 3 4 Ground

[ms] 5 -21No.PS-OMH0005CN-D 1OUT1P_1 P_1n_1 2OUT1P_2 P_2n_2 3OUT2P_3P_4(CH1) 12 4 C_5(CH24 C_3) -22No.PS-OMH0005CN-D 1OUT1 AP1 2OUT1 OUT1 3OUT1 A1L (OUT1 1 AP2 4OUT2 (CH1) AP2 5OUT2 OUT2 OUT1 OUT2 A2L (OUT2 1 ) 6 ON A-(A-B)/4 A OFF B+(A-B)/4 B -23No.PS-OMH0005CN-D CH1CH4 5R.D. 2 FSt FSt FSt (5R.D.)

. 1/4 of the startup power by eliminating the need for electrical current for holding.