Compact Rotary Actuator Series CRQ2

Positioning pin hole Counter-clockwise A port 5 Adjustment bolt A (For counter-clockwise rotation end adjustment) 95 22 .5 ge an Adjustment bolt B t r (For clockwise rotation end adjustment) en m e s st wi ju ck ad lo d -c B port en er Clockwise nt on Cl u o ti 0 o ad C ta se ck 19 ro wi ju wi k c st lo s C ge e m ro With Adjustment Bolt en an ta t r ti o n n r an e n d ge tio Size Adjustment

Parallel Style Air Gripper/2 Finger, 3 Finger, 4 Finger Series MHS

Bore size 32 to 125 M9BW MHS3 D 50 3 fingers Number of fingers 3 Bore size Action Number of auto switch D Double acting 2 pcs. 1 pc. n pcs. Nil S n 32 40 50 63 80 100 125 32 mm 40 mm 50 mm 63 mm 80 mm 100 mm 125 mm Made to Order Refer to page 553 for details.

Rotary Actuator: Free Mount Type/Vane Style Series CRBU2

CDRBU2W10-D CDRBU2W15, 20, 30-D (Figures below show size 20 actuators.) 2 x M3 x 0.5 through 2 x 3.5 through 2 x 3.5 through 17 2 x S2 2 x S1 10.5 B port A port 0.5 9 2 x S1 2 x S1 3 2 x M5 x 0.8 (Connection port) 10.5 2 x 3.5 through A port B port 2 x R D-90 ,D-S99 D-90A ,D-T99 3 D-97 D-93A (3m) 0.5m 18.5 2 2 15 20.5 CDRBU2W15-D (Approx. 26.5 for connector type) CDRBU2W20/30-D 1.

IDU/IDF

37 5200 R 1 1/2 9000 IDU55C 55 7650 50C R 2 12400 IDU75C 75 10500 35C 0.75 100 IDF1D 120 Series IDF Standard inlet air temperature type Rated temperature of 35 to 40C 1.5 200 IDF2D 235 Rc 3/8 2.2 300 IDF3D 350 R134a 9 to 12 40C 3.7 430 IDF4D 500 R 1/2 5.5 640 IDF6D 750 R 3/4 7.5 850 IDF8D 1000 1300 IDF11D R134a 11 R 3/4 1500 1300 IDF11C 15 2400 2050 IDF15C/15C1 R 1 22 3700 3150 IDF22C/22C1

ISO Cylinder ISO Standard (15552) CP96 Series ø32, ø40, ø50, ø63, ø80, ø100 C85 15% Weight reduced C85W Up Lightweight C85-S/T to C85K * Compared with the previous CP96 series (ø40, 100 mm stroke) C85K-S/T By adopting a new cushion method (Air cushion

D H11 FB TG 0.2 E R MF TF UF L4 Screw size L4 32 F5032 30 7 32.5 50 32 10 64 79 5 M6 x 20L 40 F5040 35 9 38 55 36 10 72 90 5 M6 x 20L 50 F5050 40 9 46.5 70 45 12 90 110 6.5 M8 x 20L 63 F5063 45 9 56.5 80 50 12 100 120 6.5 M8 x 20L 80 F5080 45 12 72 100 63 16 126 153 9 M10 x 25L 100 F5100 55 14 89 120 75 16 150 178 9 M10 x 25L D TG R E FB * Supplied with 4 mounting screws.

High Vacuum Angle Valve

1.3 x 108 1.3 x 109 B w, e 1.3 x 108 1.3 x 109 C r 1.3 x 1010 (FKM) 1.3 x 109 D w 1.3 x 108 1.3 x 1011 (FKM) E w, r 1.3 x 108 1.3 x 109 Seal material Symbol Seal material Compound no.

LEC-OM02904

4() 85MR-RB54-4() FA11k22kWUP 00 100W 200W/400W 02LEC-MR-RB-032 03LEC-MR-RB-12 () 11 14 11 (3) 11.5 100 5m (a) LECSSP-DP-CG3G4 G3-G4 P-D P-D P P C C G3 D (2) G4 5m 5m (1) 1.

REA/REB

D-F7NV, D-F7PV, D-F7BV D-J79C D-F79W, D-F7PW, D-J79W D-F7NWV, D-F7BWV Note 1) Note 1) D-F9N, D-F9P, D-F9B Note 2) Note 2) D-Y59A, D-Y7P, D-Y59B D-Y69A, D-Y7PV, D-Y69B Note 2) Note 2) D-Y7NW, D-Y7PW, D-Y7BW D-Y7NWV, D-Y7PWV, D-Y7BWV D-F7BA D-F7NT D-F79F D-F7LF Note 1) Indicates auto switches for REAR10/15/20 and REBR15.

C95

0 28 1.5 31 CS1 80 2.5 28 6 21.5 14 29.5 9 24.5 6.5 22 2.5 28 5.5 31 100 2.5 28 6 31.5 14 39.5 9 34.5 6.5 32 2.2 28 5.5 31 C76 C85 Auto Switch Mounting Height C95 D-F5, D-J5 D-F5W, D-J59W D-F5BAL, D-F5NTL D-F59F D-A3, D-K39 D-G39 D-A44 D-Z7, D-Z80 D-Y59, Y7P D-Y7W D-A5 D-A6 D-A59W D-Y69, D-Y7PV D-Y7WV D-Y7BAL D-P5DWL Bore size (mm) CP95 Hs Ht Hs Ht Hs Ht Hs Ht Hs Ht Hs Ht Hs Ht Hs Ht NCM

MY1

(except for 50) MY1MW16, 20, 50, 63 MY1CW16, 20, 50, 63 L L L L L L R R R R R R R L L R R R L L L R Slide table operating direction MY1MW25, 32, 40 MY1CW25, 32, 40 L L This port is not available for use. (except for 32, 40) L L L L L L L L R R R R R R R R L L R R L L L R Slide table operating direction 39 Series MY1W Specific Product Precautions 2 Be sure to read before handling.

Single Axis Electric Actuator Series LJ1H

Mitsubishi Electric Corporation Yaskawa Electric Corporation Nil G R Y Brake 50W 100W 200W 1 2 3 None With brake Nil K Power supply voltage Stroke 100/110VAC 50/60Hz 100/115VAC 50/60Hz 200/220VAC 50/60Hz 200/230VAC 50/60Hz Without motor Lead screw lead 1 H B C F A D E 8mm 12mm 20mm 5mm 10mm 25mm 40mm 2 0 Lead screw type The tables above show the definition for each symbol only and cannot

Table of Contents

-FPGDouble Check block P R PR VQ0 4 -Block valve 1 2 0 1 P R PR Blocking indication label Cylinder parts C4: With One-touch fitting for 4 C4 (SUP) port One-touch fitting for 4 VV5Q04-08FU2-D Manifold base (8 stations) VV5Q04-08FU2-D 1 set (F kit 8 station manifold base no.)

Series VQ Base Mounted Metal Seal/Rubber Seal

R port. 2.

Compact Cylinder with Air Cushion Series RQ

x 140L Mounting bolt size M5 x 65L x 70L x 75L x 85L x 95L x 120L x 145L M6 x 85L x 95L x 105L x 130L x 155L M8 x 90L x 100L x 110L x 135L x 160L M10 x 105L x 115L x 140L x 165L M10 x 120L x 130L x 155L x 180L R(D)QB20-15 -20 -25 -30 -40 -50 R(D)QB25-15 -20 -25 -30 -40 -50 R(D)QB32-20 -25 -30 -40 -50 -75 -100 R(D)QB40-20 -25 -30 -40 -50 -75 -100 R(D)QB50-30 -40 -50 -75 -100 R(D)QB63-30 -

Electric Actuator

Example) S2S2: Standard cable (2 m) + Driver (LECSS2) S2 : Standard cable (2 m) Nil : Without cable and driver Stroke (mm) Model 200 300 400 500 700 600 800 900 1000 1200 1500 2000 3000 LEJB40 LEJB63 D ) D D D ) ) D D D D ) ) D D ) ) D ) D D D D D 3: Strokes other than those shown above are produced as special order (1 mm increments). For auto switches, refer to pages 19, 20.

•

~me~~'U~ rl ~a~ca"--L_ ___'~O~O '--__-r_ -c~-c~c-~__ r -D-A30 ti I Different surfaces 35 + 30~n _ 2) 110 + 3O(n 2) DG39 ~ 1" =2.4. 6.8"-) D-K39 ~ Same surface 100 + 1oo(n _ 2) 110 + 100{n 2) 1-"->-"-==::---+-,,;---+-_--"'1 "-= = -= 27 .4"',6"'."

CHKD/CHKG

Auto Switch Mounting Heights (mm) D-Y59 D-Y7P D-Y7W D-Y7BA D-Z7 D-Z80 D-M9 D-M9W D-M9A D-A9 D-M9V D-M9WV D-M9AV D-A9V D-Y69 D-Y7PV D-Y7WV Bore size (mm) U 22 24.5 31.5 35.5 40.5 50 60.5 73 U 28 30 34.5 39 45 53.5 64 76.5 U 25.5 27.5 U 31.5 35.5 40.5 50 60.5 73 U 31.5 36 42 50.5 61 73.5 20 25 32 40 50 63 80 100 D-A9/A9V models cannot be mounted on 32 to 100. 287 CHKG Series Auto Switch

VZ5000

Note Manifold block assembly C6: A, B port with One-touch fitting for 6 C8: A, B port with One-touch fitting for 8 C6 C8 VQ7 VZ5000-50A-1q (a) Bolt (Both sides) For D side, With D-sub connector and P/R port with One-touch fitting for 10 For U side, With D-sub connector and P/R port with One-touch fitting for 10 SUP/EXH block assembly VZ5000-51A-1D w EVS D side SUP/EXH block assembly End block

Mechanically Jointed Rodless Cylinder MY1H Series Linear Guide Type: ø25, ø32, ø40  Piping can be connected from 4 directions on the head cover.  Allows on-site piping to suit the MY1B installation MY1H MY1H conditions. MY1B MY1M MY1C MY

Standard piping type Centralized piping type Operating direction Operating direction Side Front Side Front L R L R L L L R L R R R R R R R L L L L L R L L L Back New Back R R R Bottom Bottom Port variation Port variation R and L can be mounted in any desired position.

Vacuum

rcbs6 .upe@r l ffi-q"q!rgEee!e' reE wt' lsd/$r! w[6a. tup@s' EB wd. tc'/!'! "orbrgpss (d+d., rpe) l Elccdcdl druy Nd 1)rrl ub4di2vDcmv M 2) srE eu'!. ldbF k pcd by 6 Edd h with integral with integral vacuumgauge digitalswitch 56 IllL $enie Schematic Symbol NZLr12-EE NZLl12 NZLl12-Efl s1.2mm 100!