reduces flow setting time

16.6 10.4 21.8 32.1 28.7 55.4 54 50.2 48.8 13.3 24.5 28.5 9.3 19.2 38 (39) AS321FS-03-08 (S) 8 13.2 22.7 33 14.2 AS321FS-03-10 (S) 10 15.9 26.7 37 28 15.6 29 (40) AS321FS-03-12 (S) 12 18.5 29.7 40 26.8 17 41 (42) AS421FS-04-10 (S) 10 1/2 24 (23.8) 3/8 19 16.6 15.9 18.8 27.4 40.3 (40.2) 36.2 64.1 62.5 57 55.4 15.6 26 29 10 19 62 (61) AS421FS-04-12 (S) 12 18.5 30.8 43.7 (43.6) 35.1 17 64 (

Speed Controller with Indicator Stainless Steel Type Elbow Type/Universal Type AS-FSG Series

16.6 10.4 21.8 32.1 28.7 55.4 54 50.2 48.8 13.3 24.5 28.5 9.3 19.2 38 (39) AS321FSG-03-08 (S) 8 13.2 22.7 33 14.2 AS321FSG-03-10 (S) 10 15.9 26.7 37 28 15.6 39 (40) AS321FSG-03-12 (S) 12 18.5 29.7 40 26.8 17 41 (42) AS421FSG-04-10 (S) 10 1/2 24 (23.8) 3/8 19 16.6 15.9 18.8 27.4 40.3 (40.2) 36.2 64.1 62.5 57 55.4 15.6 26 29 10 19 62 (61) AS421FSG-04-12 (S) 12 18.5 30.8 43.7 (43.6) 35.1 17

0.4

Lead wire color Dot marking 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 The D-sub connector cable assembly can be ordered individually or included in a specific manifold model no. Refer to How to Order Manifold.

42

Maximum stations are 18. 18 6 19 7 20 8 21 9 22 10 23 11 24 1.

Vacuum Pad: Ball Joint Type

Q Hexagon width across flats P Rc 1/8 Hexagon width across flats P Rc 1/8 M14 x 1 M14 x 1 Hexagon width across flats 19 Hexagon width across flats 19 5 5 I I 5 D C K K 5 D C J J Hexagon width across flats 12 Hexagon width across flats 12 M8 x 1.25 M8 x 1.25 H F Hexagon width across flats 12 H F Hexagon width across flats 3 3 Y 2.5 2 A B A B Stroke: 10 mm Stroke: 10 mm Applicable tubing O.D

ARM10/11

19.5 22 X 5 5 5.5 5 X 19 20 22 19 Y 20 23 26 20.5 Fitting size 4, 5/32 6 1/4 Fitting size 4, 5/32 6 1/4 Fitting size 6 8, 5/16 10, 3/8 1/4 Fitting size 6 8, 5/16 10, 3/8 1/4 14-4-37 20 Series ARM11A/B End Block Pressure Gauge ARM11E L Indication unit Part no.

HRX-OM-X071

Required facility water system (for water cooled type) Table 3-2 Facility water source to be prepared Required facility water flow rate Heat Facility water temp. l/min range Model Radiated Facility water temprature oC kW 25 32 35 40 5 to 40 16 19 27 HRR050-W-20(Rating 25) Approx.10 HRR050-W-405 to 35 16 19 22 (Rating 25) HRR Series 3.2 Installation 3-5 HRX-OM-X071 Chapter 3 Transport and

JXCx-OMT0005CN

No.JXC-OMT0005CN-A DeviceNet (DC24V) // JXCD1 1. . 4 2 . 6 2.1. . 6 2.2. . 7 2.3 . 8 2.4 () . 9 1 . 9 2 . 9 3 . 9 4PLC . 9 5 . 9 6 . 10 7 . 10 8() . 11 9 . 11 3 . 12 3.1. . 12 3.2 . 13 3.3. . 14 3.4. . 16 (1) . 16 (2) . 16 (3) . 17 4 . 18 4.1 Node Address/Data Rate . 18 4.2 . 19 4.3 DeviceNet . 19 1Step Data Class 67h . 19 2IO Class 68h . 20 3IO . 21 4IO . 21 5 . 23 5.1 PWR

CQS

D-A9l D-A9lV D-F9N/D-F9B D-F9P/D-F9lW D-F9lV/D-F9lWV Symbol A B W A B W A B W A B HS Double acting: single rod, Single acting: single rod/spring return, spring extend 4.5 (3.5) 5.5 (6.5) 1.5 (2.5) 1.5[4] (2.5[5]) 2[4.5] 1.5[1] 3.5[-1] 1.5 (2.5) 12 19 5.5 4.5 5.5 17 0 0 Bore size (mm) 16 20 25 21 24.5 26.5 4 7.5 9.5 6 10 11 6 2.5 0.5 4 7.5 9.5 6 10 11 19 22.5 24.5 0 3.5 5.5 2 6 7 0 3.5 5.5

AS-FG/ASD-FG

-07 67 21 31.8 43.3 18.5 10 13.2 1/4" 17 60 NPT 1/4 19 21.8 29.5 41 AS321FG-02-12 AS321FG-N02-09 69 22 32.8 44.3 20.9 12 15.2 5/16" 48.8 43.8 42.8 37.8 18.5 63 23 31.8 43.3 AS321FG-03-06 AS321FG-N02-11 55 17 27.8 39.3 12.8 6 17.9 3/8" 21 67 27.8 39.3 AS321FG-03-08 AS321FG-N03-07 57 18.5 29.5 41 15.2 8 13.2 1/4" 17 55 R(PT) 3/8 23 41.5 46.5 20.9 19 40.2 35.2 NPT 3/8 19 20.9 29.5 41 AS321FG

Modular F.R.L. Unit

E Port size Octagon C T-interface B Center of F.R.L. body A D Model Port size A B C D E Applicable model Y110-M5 M5 x 0.8 11 19 12 14 8 AC10, AC10B Y210-01 1/8 15 42 32 28 19 AC20, AC20B AC20C Y210-02 1/4 AC25, AC25B AC25C, AC30 AC30B, AC30C Y310-02 1/4 Y310-01 1/8 15 53 39 30 19 Y410-02 1/4 19 62 44 36 24 AC40, AC40B AC40C Y410-03 3/8 Caution in Mounting Y510-02 1/4 19 66 46 44 24 AC40-06

MHZ2/MHZJ2

MHZ2-10D MHZ2-16D MHZ2-20D MHZ2-25D Kits include items 19, 20 and 21 from the table above MHZ20-PS MHZ16-PS MHZ25-PS MHZ10-PS Seal kits consist of items 19, 20 and 21 contained in one kit, and can be ordered using the seal kit number for each cylinder bore size. 3 Parallel Type/Standard Type Series MHZ2 Dimensions MHZ2-10 Scale: 90% 27 11.4 2-M3 x 0.5 thread depth 6 (mounting thread) +0.025

3 Port Direct Operated Poppet Solenoid Valve Series VKF300 1

16 323 313 17 342 332 18 361 351 19 380 370 20 399 389 4-13-10

VQZ1000/2000/3000

L dimension 135.5 9 123 8 160.5 11 148 10 185.5 13 173 12 210.5 15 198 14 235.5 17 223 16 19 248 18 20 260.5 285.5 21 273 No.

Rotary Clamp Cylinders

17 11.5 4.5 5.5 7.5 0 1.5 (4) 12 16 21 19 12 4 6 8 0 2 (4.5) 16 Note 1) ( ): D-A93 Note 2) Size W is suitable for mounting models D-M9, D-M9W, D-M9AL, and D-A9.

Pin Clamp Cylinder Series C(L)KQG/C(L)KQP

CKQGD50-RLS Clamping height: LOW type With shims CKQGD50-RHS Clamping height: HIGH type With shims CKQGD50-RH Clamping height: HIGH type Without shims Component Parts Component Parts Note Note Description Material No. 1 Description Material No. 17 Body Shim A Aluminum alloy Stainless steel t = 1 mm Guide pin Shim B 2 18 Stainless steel Stainless steel t = 0.5 mm Clamp arm Cylinder tube 3 19

Clamp Cylinder with Lock

Press-fit spring pin hole 3 x 38 l Press-fit spring pin hole 3 x 38 l 19 17 30 30 17 20 20 2 x M6 thread depth 11 (for IA type) 2 x M6 thread depth 11 (for YA type) 15 15 35 18 15 2 x M6 thread depth 11 (for YA type) 2 x M6 thread depth 11 (for IA type) 20 20 17 17 40 A 20 20 19.5 0.2 0.5 15 45 60 25 45 60 A Part no.

VKF300

Light (DZtype only) 67.5 59 32 17 2 2-4.5 (mounting holes) P 19 35 P Pg.7 2-Rc(PT) 1/8 (ports P) A A A 11 20 26 49 Approx. 300 (lead wire length) 1 P = 19 13.5 L2 5.5 L1 47.5 11 5 n-Rc(PT) 1/8, M5 x 0.8 (port A) 19 35 n-Rc(PT) 1/8 (port R) 47.5 11 R R P = 19 19 L: Dimension table n: Stations n L 1 38 27 2 57 46 3 76 65 4 95 84 5 114 103 6 133 122 7 152 141 8 171 160 9 190 179 10 209 198

Vacuum Ejector Box Type (Built-in Silencer)/Body Ported Type Series ZH 1

C D E F G H Model A 3 8 Rc3 8 Rc3 8 Rc3 8 ZH18DS-03-03-03 ZH18DL-03-03-03 ZH20DS-03-04-04 ZH20DL-03-04-04 Rc 133 52.45 42 19 3.5 19 20.95 20.95 133 52.45 42 19 3.5 19 151.1 60.95 47.7 19 3.5 24 26.75 151.1 60.95 47.7 19 3.5 24 26.75 I J K L M N O Model 3 8 Rc3 8 Rc3 8 Rc1 2 Rc1 2 ZH18DS-03-03-03 ZH18DL-03-03-03 ZH20DS-03-04-04 ZH20DL-03-04-04 19 47 57.5 17 10 19 47 57.5 10 24 50 69.3 12 24

Vacuum Pad: Ball Joint Type Series ZPT/ZPR Pad Diameter: ø10, ø13, ø16, ø20, ø25, ø32, ø40, ø50 1

(mm) Stroke (mm) 20 40 50 30 +10.5 +12.5 +22.5 +24 10 to 16 +37.5 +40 +66.5 20 to 50 13-11-114 19 Series ZPR Vacuum Pad: Ball Joint Type Lateral Vacuum Entry with Buffer 20 25 32 ZPR F 10-0-A10 (With buffer) 10 13 16 J K J K ZPR F 10-0-A14 (With buffer) S S M10 x 1 M14 x 1 Hexagon width across flats 14 3 I Hexagon width across flats 19 3 5 Hexagon width across flats 10 J ZX Applicable tubing