Aluminum High Vacuum Angle Valve

, 160 XLG q t y w e r u e Pilot port direction w Flange type q Flange size Symbol Nil K L M Pilot port direction Flange side Left flange surface Rear flange surface Right flange surface Size 16 25 40 50 63 80 100 160 Symbol Applicable flange 16, 25, 40, 50 63, 80, 100, 160 63, 80, 100, 160 Type Rear flange surface Nil KF (NW) Right flange surface Left flange surface D K (DN) E H V I G L H

LEC-OM02704CN

5000.0 PB33 VRF1B 100.0 Hz 0.1 PB022 PB261 100.0 PB34 VRF2B 100.0 Hz 0.1 PB022 PB261 100.0 PB35 0.00 PB36 0.00 PB37 100 PB38 0 PB39 0 PB40 0 PB41 1125 PB42 1125 PB43 0004h PB44 0h PB45 0h 15 86 15 15.11.3 (PC) (1) PC01 0h PC02 *ZTY 0h PC03 *ZDIR 0001h PC04 ZRF 500 r/min PC05 CRF 10 r/min PC06 ZST 0 m PC07 0 PC08 1000 PC09 100 PC10 15.0 PC11 CRP 0 pulse PC12 JOG JOG 100 r

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

A + Stroke 7-6-17 18 Series CQ2/CDQ2 Dimensions: 63 to 100 Both Ends Tapped Style Basic style (Through-hole) Both ends tapped style: CQ2A/CDQ2A R R O1 thread Bore size (mm) R O1 63 80 100 M10 x 1.5 18 22 22 M12 x 1.75 M12 x 1.75 H thread effective depth C Q F 2-P 4-N Through-hole 8-O counterbore U (Port size) I D 22 11 M E Z Minimum lead wire bending radius 10 Auto switch D-A7, A8 With Boss

SYJ300/500/700

R port.

MGG

9 is type L only. r!1!6!7!8!9@0@1@2@3@6@9#0#1#3#4#5#6#7 -XC6A 63, 80, 100 !7 is type L only, #1 is type B only, #9 and $0 are type F only. r!0!5!6!7!8!9@0@1@3@4@7@8@9#1#2#3#4#5#9$0 20, 25, 32, 40, 50 #1 is rod side only. r!1!7@0@1@2@3#1#5 -XC6B 63, 80, 100 @9 is rod side only. r!0!5!8!9@0@1@9#3 20, 25, 32, 40,50 r!1@0 -XC6C 63, 80, 100 r!0!

Stability of suction position,

ZP3EA-P2 [Weight: 7.6 g] 10.3 27.4 10.3 20.3 R R 20 20 2.9 4.9 2.9 4.9 R R R R R R 23.5 19.5 31.6 26.5 Applicable pad part no. ZP3E-32UM ZP3E-40UM ZP3E-32BM ZP3E-40BM Applicable pad part no. ZP3E-50UM ZP3E-50BM Part no. ZP3EA-P3 [Weight: 17.7 g] Part no. ZP3EA-P4 [Weight: 31.1 g] 16.3 34.5 16.3 43.6 R R 4.9 7.9 4.9 7.9 15 15 R R R R R R R 50.5 41 39.8 32 Applicable pad part no.

LJ1H

Mitsubishi Electric Corporation Yaskawa Electric Corporation Nil W F R L T B None Axial Right Left Top Bottom 100/115VAC (50/60Hz) G 1 N.C. (B contact) 2 pcs.

SMC Basic Pneumatics

l . t ) J 63 |.235 t.542 r.850 2.158 2.465 EO t.93 2.487 2.983 3.4't9 3.975 100 3 .

%silltr

l . t ) J 63 |.235 t.542 r.850 2.158 2.465 EO t.93 2.487 2.983 3.4't9 3.975 100 3 .

Compact 5-Port Solenoid Valve

to 100 N Without pressure switch for vacuum/pressure sensor 100 to 100 i Option4 (For details on the Function/Application, refer to page 121.)

Table of Contents

r r u u u Drain Drain Drain Component Parts Material No.

Rotary Actuator/Vane Type

Single vane Double vane 90, 100D 270S 180S 90S 0 5 g e n a 2 0 Note 1) r 7 +4 0 0 n Note 1) +4 0 o g n e 0 a ti r 1 0 Note 1) 8 n a 9 0 o 1 +4 0 t ti e o a e g Note 1) t R +4 0 n o g a R r n n ra 0 o 9 ti n a e t io o g R at n a ot r R n (90) (90) o ti a t o R Chamfer Chamfer (45) Chamfer (45) B port Chamfer Note 2) A port B port A port B port (40) B port A port A port * For size 40 actuators

MY1

MY1B16 to 100 MY1M16 to 63 MY1C16 to 63 MY1H16 to 40 L L R L L L L R R R R R L R R L Note 2) Note 2) R R L L O-ring L R Slide table operating direction Piping tube Note 2) Refer to the above diagram for bottom piping. MY1HT50, 63 R L L R L R L R L R Slide table operating direction 120 World Wide Support... Europe ENGLAND SMC Pneumatics (U.K.) Ltd.

CQ2

53.5 74.5 20 4.5 59 7 13 23.5 118 53.5 80 80 43.5 12 63 98 86 22 6 29 71 7 13 137 53.5 100 100 Double clevis (mm) Bore (mm) Stroke range (mm) 10 to 50 75, 100 10 to 50 75, 100 10 to 50 75, 100 Y LY LZ X W/o auto switch With auto switch A 88 98 109.5 119.5 132 142 Bore (mm) Stroke range (mm) 10 to 50 75, 100 10 to 50 75, 100 10 to 50 75, 100 CD CL CT CU CW CX CZ L 9 91.5 113 16.2 63 B 36 46

CJ2

Component Parts No. q w e r t y u i No. o !0 !1 !2 !3 !4 !

VQZ1000/2000/3000

AXT100-20-2-05 AXT100-20-2-06 AXT100-20-2-01 AXT100-20-2-02 AXT100-20-2-03 AXT100-20-2-04 Rated voltage 24 VDC 12 VDC 100 VAC 200 VAC 110 VAC 220 VAC Circuit with Indicator Light AC circuit DC circuit 1 2 1 2 NL R R LED NL: Neon light R: Resister LED: Emitting diode R: Resister 2-7-33 Base Mounted 34 34 Series VQZ1000/2000/3000 Be sure to read before handling.

VFS

2, Metal joint q, w, Gasket B r, Guard !3, Steel ball End plate (D side) assembly !2 AXT625-3A-20 End plate (D) !2, Metal joint q, w, Gasket B r, Guard !3, Steel ball End plate (D) !2, Metal joint q, w, Gasket B r, Guard !

Vacuum System Peripherals:

C1 Model (Stock item) Pressure range Note) Model Unit Connecting Note (kPa) GZ46-K-01 to 02 100 to 0 1 8 1 8 1 4 kPa R , kPa With covering assembly GZ46-K-01 to 02-C, C1 100 to 0 R ,1 4 1 8 1 4 kPa GZ46-K-01 to 02M 100 to 0 GZ46-K2K-01 to 02 100 to 200 R , M5 (Female thread) kPa GZ46E-K-01 to 02M 100 to 0 1 8 1 4 R , M5 (Female thread) R , 1 8 1 4 kPa Note) Do not apply pressure that exceeds

Vacuum Unit

V V F V None (SI unit only) H V V J V None (SI unit only) P Pressure sensor 0 to 101 Analog output 1 to 5 V T 100 to 100 N Without pressure switch for vacuum/pressure sensor 100 to 100 r Connector (Supply valve/Release valve/Pressure switch for vacuum) For supply valve/release valve: 300 mm (Connector assembly)4 For pressure switch for vacuum: 2 m (Lead wire with connector) Pressure

LEC-OM07605CN

[r/min] 100% [0.1%] [0.1%] (1 pulse) 1 [pulse] (100 pulses) 100 [100 pulses] [r/min] [V] 15 [0.1%] ABS [rev] 1 1 [16 pulses] 1 [] 2 1 [] UF/B U VF/B V % [0.1%] [1.125 kpps] () [r/min] (100 pulses) [100 pulses] [r/min] (100 pulses) [100 pulses] [] [] %[AL. 50 1][AL. 51 2]0% [0.1%] 0 pulse [pulse] 1 1INCZ 0ABS [pulse] 2 [pulse] 1 [] 2 1 [] 8 69 8.