Series 10-SQ1000 5 Port Solenoid Valve Plug-in Unit

DC (17 mA), 0.95 W DC (40 mA) Note 3) Power consumption (Current) 12 VDC 0.4 W DC (34 mA), 0.95 W DC (80 mA) Note 3) Note 1) Use dry air to prevent condensation when operating at low temperatures.

Series AP3100

q e r q e r q e r q e r w w w w 125 Process Gas Equipment / Diaphragm Valve Specific Product Precautions Be sure to read before handling.

V

Light & Surge Suppressor (SY5000, 7000 Only) LZ Lead Wire w/Light & Surge Suppressor G Grommett (Lead Wire Length: 300mm) H Grommett (Lead Wire Length: 600mm) L L Type Plug with Lead Wire LO L Type Plug without Connector LOZ W/O Lead Wire, w/Light & Surge Suppressor M M Type Plug with Lead Wire MO M Type Plug without Connector MZ M Type Lead Wire w/Light & Surge Suppressor M A N U A L O V

Air cylinder

Construction A In the case of 125 Fig 16. Standard product: Double acting/single rod Table 12 Parts list No.

AC

Note 2) Without valve mechanism. q 00 10 20 30 40 e w w q w q q w e q w (1) Numbers in K indicate the constructing order from the left hand side (upper stream) with a view from front. Ex.) Symbol 00 AF+AR+AL 10 AW+AL (Available only for AC1010 to 4010.) 20 AF+AR 30 AF+AFM+AR (Available only for AC2030 to 4030.)

VZ3000

Caution Mounting Screw Tightening Torques M2.5: 0.32 Nm (For stacking type manifold) 3-3-41 Series VZ3000 Exploded View/DIN Rail Manifold Type 45 Manifold r w U side r q e w (b) Lever (a) Bolt (Both sides) e (a) Bolt (Both sides) Replacement Parts No. Part no.

Series CQ2

C A D Model D C Model D C Mounting bolt (mm) Mounting bolt (mm) M18 x 125 l M18 x 135 l 125 135 C (D) Q2WB18010DC C (D) Q2WB20010DC M18 x 135 l M18 x 145 l 135 145 C (D) Q2WB18020DC C (D) Q2WB20020DC M18 x 145 l M18 x 155 l 145 155 C (D) Q2WB18030DC C (D) Q2WB20030DC M18 x 155 l M18 x 165 l 155 165 36 39 C (D) Q2WB18040DC C (D) Q2WB20040DC M18 x 165 l M18 x 175 l 165 175 C (D) Q2WB18050DC

Single Axis Electric Actuator Series LJ1H

Nil W Axial Right Left Top Bottom F R L T B Cable length Motor specification 2m 3m 4m 5m 2 3 4 5 Motor output Standard motor Matsushita Electric Industrial Co., Ltd.

Digital Flow Switch (Integrated display type) ( compatible)

U8 0 Y 1820 0x071C 0 R/W 1821 0x071D 0 R/W Line name 2nd letter U8 0 Y Refer to "Line name: communication data".

Digital Flow Switch (Integrated display type) ( compatible)

0 Y 1820 0x071C 0 R/W 1821 0x071D 0 R/W Line name 2nd letter U8 0 Y Refer to "Line name: communication data".

Fieldbus System

1 (R1) 5 3(R2) (P) Nil R Y Note 2) Standard (1 W) External pilot Low wattage type (0.5 W) 2-position double (Metal) 2(B) (A) 4 Note 1) When two or more symbols are specified, indicate them alphabetically.

CNA

Standard Strokes/ MXW Bore size (mm) 40 50, 63 80, 100 Standard stroke (mm) MXP 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 MG 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700 MGP Stopping Accuracy MGQ Unit: mm MGG Operating piston speed (mm/s) Style of locking MGC 100 300

0.4

W) High-pressure type (1.0 MPa, 0.95 W) Negative common External pilot Nil (R1)5 1 (P) 3(R2) 1(P) 5(R1) 3(R2) N.C.

CNA

W SOL.C SOL.C SOL.B SOL.A SOL.B SOL.A W 9-7-4 5 Series CNA Specific Product Precautions 4 Be sure to read before handling. Maintenance Caution 1. Replacement of lock unit for Series CNA is possible.

CNA

W SOL.C SOL.C SOL.B SOL.A SOL.B SOL.A W 9-7-4 5 Series CNA Specific Product Precautions 4 Be sure to read before handling. Maintenance Caution 1. Replacement of lock unit for Series CNA is possible.

Step Motor Driver （ Pulse input type ）

500 250 125 500 250 125 300 150 75 Maximum acceleration/ deceleration 3000 3000 3000 3000 Basic parameter default Default In position 0.50 0.50 0.50 0.50 ORIG offset 0.00 0.00 0.00 0.00 Max force 85 65 85 65 Para protect 1 1 1 1 Enable SW 2 2 2 2 Unit name Part no. of each product W-AREA1 0.00 0.00 0.00 0.00 W-AREA2 0.00 0.00 0.00 0.00 ORG Correct 0.00 0.00 0.00 0.00 Sensor type 1 1 1 1

SYJ300/500/700

(For details, refer to page 4-4-25.) 4-4-20 21 3 Port Pilot Operated Solenoid Valve Rubber Seal Series SYJ500 Construction q e r t w y q e r t w y N.C. N.O.

ZP

Description Material Surface treatment ZR t NBR, Silicone rubber, Urethane rubber, Fluoro rubber, EPR u o Pad q ZM r e w Adapter plate Aluminum w ZH w Hard chrome plated Piston rod Carbon steel e w Spring Stainless steel r ZU Buffer body Aluminum t Electroless nickel plated Buffer adaptor Brass y q q q ZL Electroless nickel plated Adaptor A Brass u Electroless nickel plated X type adaptor

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SY3000/5000/7000

(g) Note 3) W = 65.4n + m + 128.2 W = 13n + m + 36 W = 41.2n + m + 77.6 (n: Number of SUP/EXH blocks, m: DIN rail weight) Note 1) In cases such as when many valves are operated simultaneously, supply pressure to port P on both sides and exhaust from port R on both sides, using "stations B (SUP/EXH block both sides)".

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

Note 3) Weight without sub-plate 1.12-7 VQZ1000/2000/3000 Body Ported Construction: VQZ1000/2000/3000 Metal seal Rubber seal e w q r e w q r 2 position single 2 position single (A) 4 (B) 2 (A) 4 (B) 2 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) e w q r e w q r 2 position double 2 position double (A) 4 (B) 2 (A) 4 (B) 2 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) e w q e w q 4 r 3 position pressure