High Vacuum L Type Valve

) KF (NW) , K (DN) Main material Body: aluminum alloy, Bellows: SUS316L, Main part: SUS304 and FKM (standard sealing material) Note 2) Surface treatment for body Outside: hard anodized Inside: basis material Actuation pressure MPa(G) 0.4 to 0.7 Air consumption cm3 for 0.5MPa Note 3) Main pumping 46 200 360 660 1350 3000 5150 Initial pumping 3.5 12 15.5 30 42 54 54 Port size M5 Rc 1/8 Rc 1

XLG Series

) KF(NW),K(DN) Main material Body : Aluminum alloy, critical part : SUS304, FKM (standard seal material) Note 2 Surface treatment for body Outside: hard anodized Inside: basis material Pilot pressure MPa(G) 0.3 to 0.6 0.4 to 0.6 Air consumption cm3 Note 3 0.5MPa 38 91 430 280 500 1000 2300 3700 Port size M5 Rc 1/8 Weight kg 0.28 0.46 1.1 1.4 2.3 4.1 7.6 14.9 8 XL*-OMI0010-E 3-2.

17

O-ring MY1B25-PS MY1B32-PS MY1B40-PS Note) For the replacement procedure of replacement parts/seals, refer to the Operation Manual. 1192 MY1B Series Mechanically Jointed Rodless Cylinder Basic Type Standard/Centralized Piping Type 25, 32, 40 MY1B25 /32 /40 Z Stroke (LL) L 2 x 2 x B counterbore depth C LD through-hole 4 x MM depth M P(MY1BG) (Hexagon socket head taper plug) PA YW PP QQ RR QW NW

Stainless steel High Vacuum Angle/In-line Valve Normally Closed/Bellows Seal XMA, XYA Series

XMA XYA M9N 16 A A M9N 25 Angle type In-line type q w e r t y u w Flange type q Flange size XMA Type KF (NW) K (DN) CF Symbol Nil D C Applicable flange size 16, 25, 40, 50, 63, 80 63, 80 16 (034), 40 (070), 63 (114) XMA XYA Size 16 25 40 50 63 80 XYA Nil D K (DN) KF (NW) 25, 40, 50, 63, 80 63, 80 e Indicator/Pilot port direction XMA Rear flange surface XYA Symbol Rear flange surface Right

High Vacuum L Type Valve

) KF (NW), K (DN) Main material Note 2) Body: aluminum alloy, Main part: SUS304 and FKM (standard sealant material) Surface treatment for body Outside: hard anodized Inside: basis material Actuation pressure MPa(G) 0.4 to 0.7 Air consumption cm3 Note 3) for 0.5MPa 31 61 220 390 680 1420 Solenoid valve SYJ319 SYJ519 Port size M5: Port1(P), 3(R) Rc1/8: Port1(P), M5: Port3(R) Weight kg 0.34

High Vacuum L Type Valve

oC 5 to 60 (5 to 150 for high temperature type) Operating pressure Pa(abs) Atmospheric pressure to 1 x 10-5 Conductance l/s Note 1) 5 14 45 80 160 200 Internal 1.3 x 10-10 for the standard material (FKM) at ambient temperatures , excluding gas permeation Leakage Pam3/s External 1.3 x 10-10 for the standard material (FKM) at ambient temperatures , excluding gas permeation Flange type KF (NW

Cylinder with Lock

100, 125, 160, 200, 250, 320, 400, 500 2000 50 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600 2000 63 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600 2000 80 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600, 700, 800 2000 100 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600, 700, 800 2000 Ordering Example of Cylinder Assembly Cylinder model: CP96NDD50-100C-NW-M9BW

XLAQ/XLDQ

Normally closed (Pressurize to open, Spring seal) Fluid Inert gas under vacuum Operating temperature (C) 5 to 60 (High-temperature type: 5 to 150) Atmospheric pressure to 1 x 10-6 Operating pressure (Pa) (abs) Conductance (L/s) Note 1) 5 14 45 80 Internal 1.3 x 10-10 at normal temperatures (in case of standard material, FKM), excluding gas permeation Leakage (Pam3/s) External Flange type KF (NW

Magnet: D (Built-in Magnet), Mounting: D (Double Clevis), Bore Size: 100mm, Thread: Rc, Stroke: 250mm, Rod Boot: None, Cushion: Air Cushion, Pivot Bracket: No Bracket, Rod End Bracket: W (Double Knuckle Joint), Auto Switch: M9BW--Solid State, 2-color Indication, 2 Wire, Horizontal, Lead Wire or Prewired Connector: SDPC (0.5m Cord Length, M12-4 Pin Connector)

Magnet: D (Built-in Magnet), Mounting: D (Double Clevis), Bore Size: 100mm, Thread: Rc, Stroke: 600mm, Rod Boot: None, Cushion: Air Cushion, Pivot Bracket: No Bracket, Rod End Bracket: W (Double Knuckle Joint), Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal, Lead Wire or Prewired Connector: Z (5m)

Cylinder (Tube) Inner Diameter(φ): 100, Stroke(mm): 600, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Standard, Additional Function: With rod detent function, Environment, Applications: Standard, End Locking: [Included] Presence (Only Rod Side), Valves: No, Operating Pressure(MPa): 0.08～1, Cushion: Air cushion, Port thread type

Magnet: Built-in Magnet, Mounting: Double Clevis, Bore Size: 100mm, Thread: Rc, Stroke: 250mm, Rod Boot: None, Cushion: Air Cushion, Pivot Bracket: No Bracket, Rod End Bracket: Double Knuckle Joint, Auto Switch: M9BW--Solid State, 2-color Indication, 2 Wire, Horizontal, Lead Wire or Prewired Connector: 0.5m Cord Length, M12-4 Pin Connector, Number: -, Made to Order: -

Cylinder (Tube) Inner Diameter(φ): 100, Stroke(mm): 600, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Standard, Additional Function: With rod detent function, Environment, Applications: Standard, End Locking: [Included] Presence (Only Rod Side), Valves: No, Operating Pressure(MPa): 0.08～1, Cushion: Air cushion, Port thread type

Electric Actuator / High Rigidity Slider Type 《 AC servo motor ・ Motorless 》

special orders. -6- 1.2.2 Specification Model LEJS100NH LEJS100NA LEJS100NB Stroke [mm] *1 200300400500600800100012001500 3000(mm/s2) 60 150 400 5000(mm/s2) 43 93 150 Horizontal 9800(mm/s2) 22 36 Work load [kg] *2 3000(mm/s2) 14 29 80 5000(mm/s2) 12 29 30 Vertical 9800(mm/s2) 8 9 to 500 2300 1250 500 Max. speed *3 Actuator specifications 501 to 1000 1600 800 320 [mm/s] 1001 to 1500 900 450

Air Combination

[AW/AFM] 0.1 MPa drain Set pressure range [AW] 0.05 to 0.85 MPa Max. air flow capacity Note 3) [AFM] 200 L/min(ANR) 450 L/min(ANR) 1,100 L/min(ANR) [AW] 5 m Filtration rating [AFM] 0.3 m (99.9% filtered particle size) MAX. 1.0mg/m30.8ppm Outlet oil mist concentration [AFM] Compressed air quality class Note 4) ISO8573-1:2010 [3:4:3] Drain capacity [AW/AFM] 8 cm3 25 cm3 45 cm3 Bowl material

AIR COMBINATION

450 AC**C-A 150 330 800 800 L/min(ANR)AC**D-A Class 1 turbine oil (ISO VG32) Recommended lubricant Bowl material Polycarbonate Semi-standard Bowl guard Steel plate Standard Polycarbonate Relieving type Construction / Regulator Note1 Conditions: Mist separator inlet pressure: 0.7MPa(AC**C-A), 0.5MPa(AC**D-A).

AIR COMBINATION

port size Note 1) 1/16 1/8 Fluid Air Ambient and fluid -5 to 60 (Should be no freezing) temperature Note 2) Proof pressure 1.5 MPa Max. operating pressure 1.0 MPa Set pressure range 0.05 to 0.7 MPa 0.05 to 0.85 MPa Filtration / Air filter 5 m Filtration / Mist separator 0.3 m Filtration efficiency 99.9 Oil mist density on the secondary side Max 1.0mg/m3 (ANR) (0.8ppm) Note3) Note4) 200 450

CM2

1500 25, 50, 75, 100, 125, 150 200, 250, 300 32 450 2000 CS1 Order Made 40 500 2000 Made to Order Note 1) Other intermediate strokes can be manufactured upon receipt of order.

Low Friction: Double Acting Single Rod Series CM2Q ø20, ø25, ø32, ø40

25 25, 50, 75, 100, 125, 150 200, 250, 300 450 32 500 40 Note 1) Any intermediate stroke that is not indicated above will be produced on order.

CYV

excluding gas permeation) Leakage Maximum baking temperature 150C -10 to 60C Ambient and fluid temperature Piston speed 50 to 300mm/s -2 to 0mm on each side (-4 to 0mm total) Stroke adjustment Cushion Sine cushion (Air cushion) Port size 5/16-24UNF 7/16-20UNF Vacuum grease for linear guide unit and inside the cylinder tube Lubrication Weights (kg) Standard stroke (mm) Model 700 600 500 450