20

2.5 3 3.5 2.5 3 3.5 2.5 3 3.5 2.5 3 3.5 100 100 106 150 150 156 6 12 300 300 306 600 600 606 100 100 106 150 150 156 8 14 300 300 306 600 600 606 Note 1) Reference dimensions after installation Note 2) Copper extension nozzle and self-align fitting are included in the same package, (but unassembled).

Series VQ Base Mounted Metal Seal/Rubber Seal

Description Material Note q w e No.

Direct Operated, 2 Port Solenoid Valve, For Water, Oil, Steam, Air, Series VX

Direct Operated 2 Port Solenoid Valve For Water, Oil, Steam, Air New Series VX21/22/23 Reduction of power consumption Reduction of power consumption (DC specification) (DC specification) 6 W 4.5 W 6 W 4.5 W 8 W 7 W 8 W 7 W 11.5 W 10.5 W 11.5 W 10.5 W Low power consumption type: Low power consumption type: 0.8 W 0.8 W (Held at 24 VDC) VX Series New VX Series now on sale!

Membrane Air Dryer

0 r w i Purge air for dehumidification Purge air for dehumidification Component Parts Material Description No.

A_HEC-OM-K001

flow rate: 5L/min, Ambient temp.: 25oC 1) Cooling capacity 1200 1000 Facility water 25oC Cooling capacity W Facility water 10oC 800 Facility water 35oC 600 400 200 0 0 10 20 30 40 50 60 70 Recirculating fluid temp. oC Fig.9-9 Cooling capacity (HED005) 2) Heating capacity 1400 1200 Heating capacity W 1000 Facility water 35oC 800 Facility water 10oC 600 Facility water 25oC 400 200 0 0 10 20

Magnetically Coupled Rodless Cylinder

determination F3 D 1.6 x P WB Inclined operation W + WB WV P PV W + WB WV P PV Allowable driving force table (Fn) (n=1,2,3) Determination of allowable load weight & pressure F1 = x (W + WB) x 9.8 Horizontal F2 = (W + WB) x 9.8 x (COS + SIN) Inclined (Refer to page 5 for vertical operation.)

CXS

7 Piston rod A Piston seal w Note) Hard chromium electroplated Carbon steel NBR !8 Piston rod B Rod seal e Aluminum bearing alloy NBR !

CXS

7 Piston rod A Piston seal w Note) Hard chromium electroplated Carbon steel NBR !8 Piston rod B Rod seal e Aluminum bearing alloy NBR !

Magnetically Coupled Rodless Cylinder Series CY3B/CY3R

determination F3 D 1.6 x P WB Inclined operation W + WB WV P PV W + WB WV P PV Allowable driving force table (Fn) (n=1,2,3) Determination of allowable load weight & pressure F1 = x (W + WB) x 9.8 Horizontal F2 = (W + WB) x 9.8 x (COS + SIN) Inclined (Refer to page 5 for vertical operation.)

Basic Type/Direct Mount Type

9 w !4 CY3B10, 15 !4 !8 !7 !6 !5 !0 i o q u y t r !2 w !1 The above drawing is 15. (3 magnets are used in 10.) CY3B20 to 40 !3 !4 !1 !8 !6 !5 !7 !0 i q o u t y r e w !2 CY3B50, 63 !4 !8 !6 !5 !0 !7 i o q u y t !3 r !2 w !1 Component Parts Replacement Parts/Seal Kit Bore size (mm) 6 10 15 20 25 32 40 50 63 Kit no.

Power Valve: Economy Valve Series VEX5

900 1000 700 600 500 400 300 200 100 0 E 800 900 1000 700 600 500 400 300 200 100 0 F 800 900 1000 700 600 500 400 300 200 100 0 G When the cylinder is extended, the speed controller is metered-out, is connected with the cylinder directly, and its needle is fully open.

CLS

9 w %7 $1 $2 $3 $6 $8 $9 $0 #3 #0 @5 #2 $5 $4 %0 %1 t y !2 !1 !3 CL u !4 !6 CL1 !7 !5 MLGC CNG e ^0 ^2 !

PF2A/PF2W

PF2A703H--28 PF2A703H--68 PF2A706H--28 PF2A706H--68 PF2A703H--29 PF2A703H--69 PF2A706H--29 PF2A706H--69 3000 150 3000 150 6000 300 6000 300 PF2A712H--28 PF2A712H--68 PF2A712H--29 PF2A712H--69 12000 600 12000 600 16-11-16 13 For details about certified products conforming to international standards, visit us at www.smcworld.com.

High Vacuum Angle Valve, XL Series

Item XL -25 XL -40 XL -50 XL -63 XL -80 Rated heater voltage 90 to 125VAC 200/10 200/20 400/40 400/60 600/100 Heater power W (nominal value) In-rush/Normal (Option symbol) H1 80C (176F) 200/40 200/60 400/100 600/150 H2 100C (212F) 200/30 400/70 400/80 600/130 800/180 H3 120C (248F) Note) In-rush current will flow to the heater for approximately 30 seconds and will then subside.

Digital Flow Switches Series PF2A

PF2A703H--28 PF2A703H--68 PF2A706H--28 PF2A706H--68 PF2A703H--29 PF2A703H--69 PF2A706H--29 PF2A706H--69 3000 150 3000 150 6000 300 6000 300 PF2A712H--28 PF2A712H--68 PF2A712H--29 PF2A712H--69 12000 600 12000 600 13

0.4

Connector for unit (Plug) 6 y t y t EX600-DXlB EX600-DYlB EX600-DXlCl q w q w e q w er e y t y t y t EX600-DXlD EX600-DXlE EX600-DYlE EX600-DMlE EX600-DXlF EX600-DYlF EX600-DMlF Analog Unit q w e q w e No.

LEYx-OMZ0015

500 250 305 to 400 600 300 150 Maximum Speed Range 405 to 500 800 400 200 640 320 160 of 70 Note3) [mm/s] 505 to 600 800 400 200 stroke 605 to 700 600 300 150 705 to 800 500 250 125 Pushing speed [mm/s] Note4) 35 or less 30 or less 30 or less acceleration/deceleration [mm/s2] 5,000 5,000 5,000 3,000 Positioning repeatability [mm] 0.02[Basic type] / 0.01[High precision type] Lost motion[mm

Vacuum System Peripherals:

Nil DC: 1 W (With indicator light: 1.05 W) None With light/surge voltage suppressor (Possible only solenoid valve connector type.)

5

96 83 106 0.5 71 61 76 W W 0.7 59 50 62 0.3 135 119 147 T 0.5 101 89 111 0.7 84 74 91 Foot: L Rod flange: F Head flange: G L, F 0.3 301 267 330 0.5 231 207 253 W W W 0.7 193 172 212 0.3 144 126 156 G 0.5 109 94 118 0.7 90 78 97 Foot: L Rod flange: F Head flange: G L, F 0.3 433 386 476 0.5 334 297 367 W W W 0.7 281 250 309 0.3 210 185 229 G 0.5 160 141 175 0.7 134 117 129 D-X 215 CS2Y Series

1

MY1M(W) MB 8 Mechanically jointed rodless cylinder MY1 Cam follower guide type With cover (W) is also available.