Magnetically Coupled Rodless Cylinder

6@4 @6!0i q !4 !2 r @3 @7 o u y t @8 !8 !9 @2 CY3R10 2a 3a @0 !5 !6 @4 @9 @6 !0 i q !1 !4 !2 r @3 @7 @8 @5 o u y t @0 !8 !9 @2 CY3R15 to 63 2a 3a @0 @4 @9 @6 !5 !6 !3 !0 !1 !4 !2 y r i q !9 !8 @2 @0 @3 @5 @8 @7 o u !

ZP

P Q R 6 6 8 24.3 26.2 16.8 18.7 S 12.8 15.2 8 Applicable tubing O.D.

4 Way • 4 and 5 Port, Rubber Seal • Solenoid Pilot Valve, Series SYJ3000

Q Diode LED Coil Timer circuit How to Order Q SYJ 3 T Z 1 2 Black (--) Q 1: Starting current 2: Holding currect Q Applied voltage Q Rated voltage 24V 5 6 24VDC 12VDC 0V Q Standard Specify the same as standard 0.55W Q Power saving type 0.22W 0W Q 62ms Q Q Q Q Q Q Q Q Q Q Q Q Q 20 Q Q Q Q Drawings Series

Rotary Actuator/Vane Type

6 q w !4 !2 w !4 o !0 !7 !1 q !5 !1 Double shaft type Single shaft type Single shaft type Component Parts Double shaft type DNo. Description Material Note No.

LVQ

Size Symbol 2 2 2 3 3 4 4 5 5 6 6 A B C A B A B A B A B 2 2 3 3 3 4 4 5 5 6 6 1 2 1 2 3 1 2 1 2 1 2 6 x 4 4 x 3 10 x 8 8 x 6 6 x 4 12 x 10 10 x 8 19 x 16 12 x 10 25 x 22 19 x 16 1/4" x 5/32" 3/16" x 1/8" 1/8" x 0.086" 3/8" x 1/4" 1/4" x 5/32" 1/2" x 3/8" 3/8" x 1/4" 3/4" x 5/8" 1/2" x 3/8" 1" x 7/8" 3/4" x 5/8" LVC LVA LVH LVD With reducer Basic size LVQ Note 1) Select a fitting the same

Electric Actuator

1 @6 @7 o @4 !5 !0 !6 @0 B A !9 !8 y q w t !7 r e i u !3 @3 !4 D 25 32 In-line motor type/LEY !6 u @3 #4 #3 When rod end male thread selected !0 #0 #1 #2 #1 @9 Component Parts No. Description Material Note No.

Vacuum Unit

Symbol Type Note Nil Without option Symbol Vacuum (V) port 06 6 08 8 07 1/4" 09 5/16" When R is selected for q, P needs to be selected.

Vacuum System Peripherals:

Connection 3.2, 4 6, 8, 10, 12, 16 KQ2 Nylon, Soft nylon, Polyurethane M5, M6, R 1/8 to 1/2 From 100 kPa One-touch fittings One-touch fittings/Manifold Series KM Applicable tubing: Nylon, Soft nylon, Polyurethane Tubing O.D.: 4, 6, 8, 10, 12 Port A piping port Port B port size No. of port A Piping specifications Port A Port B Model Model 4 6 8 8 10 12 Rc Rc 6 8 10 6, R 6, R 6, R 8, R 8, R

Step Motor Controller

Mounting hole 2 x 6 Mounting hole 50 (Bearing surface thickness 5) CNP1 CNP1 CNP2 CNP2 130 120 130 120 CN1 CN1 CN3 CN3 CN2 CN2 6 6 5 5 6 5.5 LECSAm-S4 40 6 Mounting hole (Bearing surface thickness 4) 6 135 (170: LECSBm-S8) LECSBm 156 6 6 CN6 CN5 CNP1 CN3 CNP2 161 168 CN1 CNP3 CN2 CN4 6 Battery1 (14) 57 1 Battery included.

EX510

0 For output 0 V For output +24 V PNP output q w Functions 1 0 4 1 2 3 8 5 6 7 9 Description CN3 No.

Table of Contents

(Because barrel nipples are used for equipment connections.) 100 Standard dew point temperature and air flow rate Outlet air flow rate Purge air flow rate (l/min(ANR)) Flow rate by size Symbol Standard dew point (C) 5 50/12 50/6 3 25/6 25/3 10 100/2 20 200/5 30 300/7 50 60 75 100 Nil H 20 15 500/12 600/12 750/15 1000/19 Drain discharge method 500/6 600/6 750/8 100/1 200/2 300/3 1000/11

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

7-6-20.

ZP

P Q R 6 6 8 24.3 26.2 16.8 18.7 S 12.8 15.2 8 Applicable tubing O.D.

MY1

@7 @8 @9 #0 #1 #2 #3 #4 #5 #6 #7 No. q w e r t y u i o !

New

Step 1 Item Selection item Symbol Page VX2 Air Page 2 2 Water VXN 3 2 q C A Select the fluid. q Medium vacuum Page 4 3 Page 6 Oil 4 Select Body material, Port size and Orifice diameter from Flow rate Pressure of each fluid.

High Vacuum Angle Valve

0 o 102 0.2 2-1 132 q 134 O-ring Part No.

Rotary Actuator

4 w q !2 !6 !0 !4 !7 !1 o q !5 !1 Component Parts Description Material Note Description Material Note No. No.

Basic type / Direct mount type Series CY3B/CY3R

6@4 @6!0i q !4 !2 r CY3R6 @3 @7 o u y t @8 !8 !9 @2 CY3R10 2a 3a @0 !5 !6 @4 @9 @6 !0 i q !1 !4 !2 r @3 @7 @8 @5 o u y t @0 !8 !9 @2 CY3R15 to 63 !3 !0 !1 !4 !2 y r i q 2a 3a @0 @4 @9 @6 !5 !6 !9 !8 @2 @0 @3 @5 @8 @7 o u !7 t CY3R15, 20 CY3R15 No. Description Material Note Component Parts No.

VS7-6

VQC VS7-6-FHG--Q VS7-6-FJG--Q VS7-6-FPG--Q SQ VQ VQ4 VQ5 VQZ VQD VFS VS VS7 VQ7 ( ): In case of direct manual override style. 1.19-5 VS7-6 With Sub-plate/Dimensions VS7-6-FG-SPort size of sub-plate -Q VS7-6-FG-DPort size of sub-plate -Q VS7-6-FHGPort size of sub-plate -Q VS7-6-FJGPort size of sub-plate -Q VS7-6-FPGPort size of sub-plate -Q ( ): In case of direct manual override style. 1.19

New

q VXF2 A<6 VXFA2 A<6 t t y r r w w e e q q Component Parts Component Parts No.