MY1

@7 @8 @9 #0 #1 #2 #3 #4 #5 #6 #7 No. q w e r t y u i o !

New

Step 1 Item Selection item Symbol Page VX2 Air Page 2 2 Water VXN 3 2 q C A Select the fluid. q Medium vacuum Page 4 3 Page 6 Oil 4 Select Body material, Port size and Orifice diameter from Flow rate Pressure of each fluid.

High Vacuum Angle Valve

0 o 102 0.2 2-1 132 q 134 O-ring Part No.

Rotary Actuator

4 w q !2 !6 !0 !4 !7 !1 o q !5 !1 Component Parts Description Material Note Description Material Note No. No.

Basic type / Direct mount type Series CY3B/CY3R

6@4 @6!0i q !4 !2 r CY3R6 @3 @7 o u y t @8 !8 !9 @2 CY3R10 2a 3a @0 !5 !6 @4 @9 @6 !0 i q !1 !4 !2 r @3 @7 @8 @5 o u y t @0 !8 !9 @2 CY3R15 to 63 !3 !0 !1 !4 !2 y r i q 2a 3a @0 @4 @9 @6 !5 !6 !9 !8 @2 @0 @3 @5 @8 @7 o u !7 t CY3R15, 20 CY3R15 No. Description Material Note Component Parts No.

VS7-6

VQC VS7-6-FHG--Q VS7-6-FJG--Q VS7-6-FPG--Q SQ VQ VQ4 VQ5 VQZ VQD VFS VS VS7 VQ7 ( ): In case of direct manual override style. 1.19-5 VS7-6 With Sub-plate/Dimensions VS7-6-FG-SPort size of sub-plate -Q VS7-6-FG-DPort size of sub-plate -Q VS7-6-FHGPort size of sub-plate -Q VS7-6-FJGPort size of sub-plate -Q VS7-6-FPGPort size of sub-plate -Q ( ): In case of direct manual override style. 1.19

New

q VXF2 A<6 VXFA2 A<6 t t y r r w w e e q q Component Parts Component Parts No.

15

FP (Mounting distance) Actuator Motor plate details q w FC Motor mounting surface FD FH FF FE 4 x FA, thread depth FB FG Dimensions [mm] Size Motor type FA FB FC FD FE FF FG FH M1 T1 M2 T2 PD FP 40 NY M3 x 0.5 6 45 30 3.5 6 99 49 M4 x 12 2.7 M2.5 x 10 0.65 8 12.5 NX M2.5 x 10 0.65 8 7 NY M4 x 0.7 6 70 50 3.5 6 123 68 M4 x 12 2.7 M4 x 12 2.7 11 18 NX M5 x 0.8 6 63 40 3.5 6 123 68 M4 x 12 2.7

1

spring pin 6-17-87 2 -XC30 Rod side trunnion 6-17-88 3 -XC34 Rod does not extend beyond non-rotating plate 6-17-90 4 -XC35 With coil scraper 6-17-91 5 -XC36 With boss in rod side 6-17-95 6 -XC37 Larger throttle diameter of connecting port 6-17-95 7 -XC38 Vacuum (Rod through-hole) 6-17-96 8 -XC42 Built-in shock absorber in head cover side 6-17-97 9 -XC51 With hose nipple 6-17-98 0 -

New

DIN terminal 1 + () 2 (+) q There is no polarity. Use compatible heavy duty cords with cable O.D. of 6 to 12 mm.

Modular F.R.L. Units

D Note 6) N.O.

Parallel Style Air Gripper/2 Finger, 3 Finger, 4 Finger Series MHS

5 3 3 3 5 5 33 33 33 (mm) NB 5h9 6h9 6h9 NA 8 10 12 K 4 5 6 J 10 12 14 G 25 27 28 FZ 3 3 5 FY 11 13 14.5 FX 12.5 14.5 17 CB 11 13 15 EC 5 6 7 EO 7 8 10 DC 15 18 21 DO 17 20 24 B 30 36 42 R 25 29 34 AA 35 38 40 AB 32 35 37 O 2 2.5 3 P M3 x 0.5 M5 x 0.8 M5 x 0.8 Q 6 7 8 Model MHS3-16D MHS3-20D MHS3-25D 0 -0.030 0 -0.030 0 -0.030 4 5 5 VA 2H9 2H9 3H9 UB 4.5 6 6 UA M3 x 0.5 M3 x 0.5 M4 x 0.7

7

suppressor) C 300 U E R B T A N IN OUT SMC 8 x 18 S Q D F U V E DIN terminal G1/2 Cable 6 to 12 C (44) 31.5 R T A SMC IN OUT N B 8 x 18 S Q D F (mm) Electrical entry Model Grommet (with surge voltage suppressor) DIN terminal Grommet Applicable flange A B C E F N Q R S D T T U U 90 (98) V T 76 (84) 179.5 (187.5) 90.5 (98.5) 98.5 (106.5) 85 (93) 192.5 (200.5) 96 (104) 104 (112) 90.5 (98.5

NCQ8

Q J E D-rod Dia.

Space Saving Vacuum Ejector/Vacuum Pump System Series ZQ

PE 20.3 29.4 P Exhaust part 8.4 17.7 0.8 107.5 Note 1) 10 (3.7) Circuit diagram 5 6 Q N 5 6 Q N Note 1) The above dimensions are for ZQ1 1U2 L-E G -00.

Air Cylinder

2) (n = 4, 6)4 MB D-A9V 5 10 10 + 15 (n 2) (n = 4, 6)4 MB1 D-M9 D-A9 10 (5)5 10 15 + 15 (n 2) (n = 4, 6)4 CA2 D-M9WV D-M9AV 10 15 15 + 15 (n 2) (n = 4, 6)4 D-M9W 15 (10)5 15 20 + 15 (n 2) (n = 4, 6)4 CS1 D-M9A 15 (10)5 20 (15)5 20 + 15 (n 2) (n = 4, 6)4 CS2 D-F7 D-J79 5 5 15 + 15 (n 2) (n = 4, 6)4 Rail mounting D-F7V D-J79C 5 5 10 + 10 (n 2) (n = 4, 6)4 D-F7W/J79W D-F7BA

Stopper Cylinder Series RSQ Series RSG (Fixed mounting (Adjustable height) mounting height)

6 i @7 @1 @9 @6 @4 #9 !0 !9 u #6 20 t #8 Single acting (TL, TM) Double acting spring type (BL, BM) q y $0 $1 #4 r !1 e #5 @2 #7 #7 !2 #7 #3 @5 @5 #1 32 w 50, 63, 80 @3 Double acting (DL, DM) !3 !5 #6 o @5 @4 i @1 @6 !0 @7 @9 !6 t u !7 !8 q #8 $1 Single acting spring extended (TL, TM) Double acting spring type (BL, BM) y r $0 !1 !

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

6 @4 @1 @8 MX MTS MY #0 #1 $1 w @9 i #2 !1 o q u r y e @6 @5 @3 @7 CY CY1L10 to 40 @2 $0 #9 @0$0 t !9 #5$2 #8 !2 !0 !6!7@4 @1 !8 !4 !

Electric Grippers

6 !8 !0 i !5 Step Motor (Servo/24 VDC) y !1 !2 !4 q u w e r t !7 Component Parts No.

Step Motor Controller

Mounting hole 2 x 6 Mounting hole 50 (Bearing surface thickness 5) CNP1 CNP1 CNP2 CNP2 130 120 130 120 CN1 CN1 CN3 CN3 CN2 CN2 6 6 5 5 6 5.5 LECSAm-S4 40 6 Mounting hole (Bearing surface thickness 4) 6 135 (170: LECSBm-S8) LECSBm 156 6 6 CN6 CN5 CNP1 CN3 CNP2 161 168 CN1 CNP3 CN2 CN4 6 Battery1 (14) 57 1 Battery included.