90

No. 3 4 5 6 7 8 9 Note) When ordering a manifold ZZK2---A on page 3, q to e are delivered as a set.

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

9 q r !5 y i !8 o !6 e u @4 @0 @1 @2 w !4 !2 !0!1 !3 !

Thermo-chiller

1 CH1 Circulating fluid return port CH2 Circulating fluid return port e r u y t CH2 Circulating fluid outlet q DI filter CH1 Circulating fluid outlet i !5 r t !6 !2 x 4 !3 w Parts List (170) No.

Fieldbus system EtherNet/IP TM compatible SI Unit IO-Link Master Unit

2..3 Byte swap 0: direct, 1: 16 bit, 2: 32 bit, 3: all 4..7 Reserved 0 0: Clear / PD Out valid 1: Hold 2: Clear / PD Out invalid 0..1 Fault output (IO-Link) 0: Clear 1: Hold 2: Force ON 2..3 Fault output (DO) 3 0: Clear / PD Out valid 1: Hold 2: Clear / PD Out invalid 4..5 Idle output (IO-Link) 0: Clear 1: Hold 2: Force ON 6..7 Idle output (DO) 0: 2 / 2 / 2 / 2 1: 4 / 4 / 4 / 4 2: 8 / 8 /

Modular F.R.L. Unit

AC40D C D E G 1 2 3 6 8 C J N R W Z AC10A AC25C AC60 AC40A AC40C AC20A Float type auto drain (N.C.)

Electric Slide Tables

6 @8 @7 q !5 !7 w t !2 !4 !3 @9 @5 @6 Shipped together #0 Component Parts No. Description Material Note 1 2 3 4 5 6 7 8 9 10 11 12 No.

Pin Clamp Cylinders

position CK CLK CK CLK A Same as the port side B 90 from the port side C 180 from the port side D 270 from the port side 30 7.5 10.5 CKQ 2 x 6H7 Depth 10 D Clamp arm 4 x M8 x 1.25 Depth 12 Port side C A 2 x Rc1/8 B 45 49.5 Hole diameter of workpiece C D d K SR Q Model number Hole diameter of workpiece C D d K SR Q Model number Hole diameter of workpiece C D d K SR Q Model number 115 11.6

Stopper Cylinder

4 y q r e w @1 @2 !5 !6 t u i o !7 !9 !8 @0 u i !8 !9 !6 @0 o 20 32, 40, 50 w @2 @1 !5 !4 t i i u !8 !9 w @2 u !5 !4 y q !9 @0 @1 t e @0 !6 !6 !8 o y q e o Double acting with spring loaded (B) !0 20, 32, 40, 50 12, 16 !0 Single acting / spring extend (T) !1 !2 !0 12, 16 20, 32, 40, 50 !0 !3 Component Parts No.

Fieldbus System

B) port] One-touch fitting [4(A), 2(B) port] Applicable tube O.D.: 2 : 3.2, 1/8" : 4, 5/32" : 6, 1/4" Applicable tube O.D.: 4, 5/32" : 6, 1/4" : 8, 5/16" (Station 1) (Station n) 11.1 (SY3000) 14.1 (SY5000) (Slide locking manual override) BUS OUT 78.9 76.7 P 1 P 1 73.2 2 B 2 B B 2 B 2 B 2 BUS IN 56.6 12.4 (SY3000) (SY5000) 3/5 E 3/5 E 33.4 A 4 A 4 A 4 31.5 29.1 PWR A 4 A 4 8.7 (For DIN rail

Vacuum

:t ; : ; = '6;; 6 < EI 6 < EI d-z E < 8i E < ' 6 2 'dz 'Eiz 6 Z ,n2 < 2 6 V < 2 6 Y a z 6 Y d t d 2 45 90 PSI (3 ^ 6 kg cm'?) o.17 0.004/ 0,025/ o.17 ).00410.025 5 c/s 40 120"F (5 50.C) I I I (PV) . (PSePD) (PVe)PSePD) ' Provided as standard: l\Iounting bracket t See p 28 & 29 also.

Vacuum

:t ; : ; = '6;; 6 < EI 6 < EI d-z E < 8i E < ' 6 2 'dz 'Eiz 6 Z ,n2 < 2 6 V < 2 6 Y a z 6 Y d t d 2 45 90 PSI (3 ^ 6 kg cm'?) o.17 0.004/ 0,025/ o.17 ).00410.025 5 c/s 40 120"F (5 50.C) I I I (PV) . (PSePD) (PVe)PSePD) ' Provided as standard: l\Iounting bracket t See p 28 & 29 also.

Vacuum Pad

2.5 R 1 R 2 2 1.2 6 8 2 6.7 8.8 3 Applicable pad B06MU/B08MU/B10MU/B15MU ZP2-B10MU ZP2-B15MU 9 8 6 6 4 4 R 4 2 2 1.2 2 2 2 8 R 7 2 2 4 2 2 6 15 10 Note) R part has to be smooth with no corners.

Vacuum Pad

2.5 R 1 R 2 2 1.2 6 8 2 6.7 8.8 3 Applicable pad B06MU/B08MU/B10MU/B15MU ZP2-B10MU ZP2-B15MU 9 8 6 6 4 4 R 4 2 2 1.2 2 2 2 8 R 7 2 2 4 2 2 6 15 10 Note) R part has to be smooth with no corners.

Vacuum Pad

2.5 R 1 R 2 2 1.2 6 8 2 6.7 8.8 3 Applicable pad B06MU/B08MU/B10MU/B15MU ZP2-B10MU ZP2-B15MU 9 8 6 6 4 4 R 4 2 2 1.2 2 2 2 8 R 7 2 2 4 2 2 6 15 10 Note) R part has to be smooth with no corners.

Vacuum Pad

2.5 R 1 R 2 2 1.2 6 8 2 6.7 8.8 3 Applicable pad B06MU/B08MU/B10MU/B15MU ZP2-B10MU ZP2-B15MU 9 8 6 6 4 4 R 4 2 2 1.2 2 2 2 8 R 7 2 2 4 2 2 6 15 10 Note) R part has to be smooth with no corners.

JIS Standard Hydraulic Cylinder

Refer to Best Pneumatics No. 2-1 for details. 361 CH2E/CH2F/CH2G/CH2H Series Construction @7 q y i @8 !4 #1 @6 @1 u @0 #0 o w !5 !8 !9 !6 !7 @9 !2 @2 @4 t e !0 CH2G Series !3 @3 r @5 !

Aluminum High Vacuum Angle Valve

No. 1 2 2-1 3 4 5 6 7 8 8-1 8-2 9 10 O-ring Part No.

V

1.5 1/8 VX2110-01 2 0.17 3 Water 1.1 0.6 0.9 0.5 1 0.5 0.5 (6A) VX2120-01 3 0.33 6 0.45 0.2 0.4 0.2 0.45 0.2 0.15 VX2130-01 4.5 0.61 11 Oil 2 1.5 2 1.5 1 1.5 1.5 VX2110-02 2 0.17 3 1.1 0.6 0.9 0.5 1 0.5 0.5 VX2120-02 3 0.33 6 Air 5 2 1.5 1.7 1.5 1 1.2 1.2 VX2220-02 3 0.33 6 3 3 3 2.5 3 1.7 2 VX2320-02 3 0.33 6 0.45 0.2 0.4 0.2 0.45 0.2 0.15 VX2130-02 4.5 0.61 11 0.75 0.35 0.6 0.35 0.75

24

4 @7 @9 @9 @9 @8 @8 @6 !2 !1 o i y !6 t r q @5 e r r w @1 !9 u !0 !2 @4 63 or more 16 20 32 @0 @3@2 !5 16 to 25 25 stroke Cushion valve section 16 to 25 50 stroke or more 50 or more Component Parts Component Parts No.

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

location, P/R port with One-touch fitting for 6 VZ1000-3A-1D r VZ1000-3A-1U t SUP/EXH block assembly VZ1000-2A-1M y Note) Block pin (2 pcs.) is attached for q, e, t, y.