Aluminum One-touch Connection and Release High Vacuum Angle Valve Normally Closed/Bellows Seal XLAQ Series

P1 70W XGT Kalrez Q1 R1 R2 R3 S1 T1 4079 SS592 SS630 SSE38 1232-70 3310-75 To order something else Nil (standard), list the symbols starting with X, followed by each symbol for "body surface treatment", "seal material" and then changed parts at last. CYV Chemraz Example) XLAQ-25-M9NA-XAN1A VMQ FKM for Plasma ULTIC ARMOR U1 UA4640 Produced by Mitsubishi Cable Industries, Ltd.

KQ2-G

connection 001 Same diameter tubing Symbol Model Oval type Round type H Male connector v v S Hexagon socket head male connector v v F Female connector v v L Male elbow v v LU Branch male elbow v V Universal male elbow v v W Extended male elbow v v T Male branch tee v v Y Male run tee v v D Male delta union v v U Branch Y v UD Double branch Y v M5 M5 x 0.8 01 R1/8, Rc1/8 02 R1/4, Rc1/4 03 R3

VCHN

How to Order VCHN 06 3 Option Port size Nil None Symbol VCHN4 VCHN3 Port size F With freeze reduction 06 10 12 14 R3/4 Symbol R1 Body size R11/4 3 4 R11/2 608

XLA/XLAV Series Aluminum High Vacuum Angle Valve Normally Closed, Bellows Seal

Nil FKM 1349-80*1 N1 EPDM 2101-80*1 P1 Barrel Perfluoro 70W Q1 Kalrez 4079 R1 Chemraz SS592 R2 SS630 R3 SSE38 S1 VMQ 1232-70*1 T1 FKM for Plasma 3310-75*1 *1 Values at normal temperature, excluding gas permeation *2 Refer to Construction on page 5 for changed part. Number corresponds with the parts number on the construction drawing.

Stainless steel High Vacuum Angle/In-line Valve Normally Closed/Bellows Seal XMA, XYA Series

XSA Sealmaterial Part numbers indicating changed seal material and leakage XVD Compound No. 1349-80 2101-80 Symbol Leakage (Pam3/s or less) Note 1) Internal 1.3 x 10-10 (FKM) 1.3 x 10-8 Changed part Note 2) Seal material FKM EPDM Barrel Perfluoro Symbol External 1.3 x 10-11 (FKM) 1.3 x 10-9 Nil XGT w, e w e N1 Nil A B C P1 70W 1.3 x 10-11 (FKM) 1.3 x 10-9 1.3 x 10-8 CYV Kalrez Q1 R1 R2 R3

R3/8XR1/4 ZINC CHROMATE NIPPLE

Series: LEFS, Accuracy: Basic Type, Size: 32, Motor Mounting Position: R (Right Side Parallel), Motor Type: E (Battery-less absolute, 24VDC, Step), Lead: H (Size 25: 20mm, Size 32: 24mm, Size 40: 30mm), Stroke: 1000mm, Motor Option: w/o Option, Auto Switch Compatibility: None, Grease Application: With, Positioning Pin Hole: Housing B Bottom, Actuator Cable Type, Length: R3 (3m), Controller

Digital Flow Switch (Integrated display type)

710/725/750W-F1(-L) 86.2 13 14 18.2 2.8 depth 8.4 PF2M711/721W-01(-L) 88 13 17 20 2.8 depth 6.2 PF2M711/721W-N1(-L) 88 13 17 20 2.8 depth 6.2 PF2M711/721W-F1(-L) 88 17 21 20 2.8 depth 6.2 -106No.PF-OMW0007-E Panel cut-out dimensions Flow adjustment valve A 0.5 None 54 0 0.5 With flow adjustment valve 74 0 : Suitable for panel thickness of 1 to 3.2 mm. 1: If a bend (R) is used, limit it to R3

AS

Connection thread size NPT, R1/8 5.2 to 6.6 (7 to 9) NPT, R1/4 8.9 to 10.3 (12 to 14) NPT, R3/8 16.2 to 17.7 (22 to 24) 2. Chamfer dimension for female thread of the NPT, R1/2 20.7 to 22.1 (28 to 30) connection thread M5, 10-32 UNF 2.

5 Port Pilot Operated Solenoid Valve VFS1000/2000/3000/4000/5000/6000 Series

RD SD LRUN PW VP4 9 B B B B B S0700 23 SMC SMC SMC SMC 42 VQ 63.5 VQ4 1 2 3 4 5 6 7 n Stations D side U side 1(P), 5(R3), 3(R1) 6 x Rc 1/2 VQ5 Manual override VQC SMC VQZ 150.5 141.00 SQ 115.5 A A A A A A A 91.5 74.00 VFS 58 18 14 B B B B B B B VFR 3 3 3 4(A), 2(B) port 2n x Rc 3/8, 1/2 30 43 62.5 VQ7 EX123: 2 x G 1/2 EX124: 4 x G 1/2 Use a dripproof plug assembly (AXT100B04A) for the unused

20

Port Wrench Tightening torque lbft Nm Male thread R1/4 8.9 to 10.3 (12 to 14) R3/8 16.2 to 17.7 (22 to 24) 5. Allow extra length when connecting a tube to accommodate changes in tube length due to pressure. 6. Confirm that no twisting, turning or tensile force or moment load is applied to the port or tube.

Digital Flow Switch (Integrated display type)

If using straight entry piping, the material and tubing need to be taken into consideration when deciding panel cut-out spacing. 2 If a bend (R) is used, limit it to R3 or less. 3: Suitable for panel thickness of 1 to 3.2 mm.

Information

(The power supply connector is provided.) 2 The conversion fitting (R3/8 male thread) is provided.

Air Cylinder

), 800 (8") Maximum stroke 36 in Minimum operating pressure 8 psi (0.06 Mpa) Maximum operating pressure 250 psi (1.75 Mpa) Operating temperature 40 ~ 140F (5 ~ 60C) XB6: 14 to 300F (-10 to 150C) XB7: 22 to 140F (-30 to 60C) Piston velocity 2 ~ 20 in/sec (50 ~ 500mm/sec) Cushion Standard, both ends Lubrication Not required Stroke length tolerance Industry specification ANSI/(NFPA) T3.6.7 R3

Rated Distance Range: G (0.02 to 0.15mm), Piping Specifications: C (Supply Side: Rc 1/8, Detection Side: ø6 One-touch Fitting or ø4 One-touch Fitting in case of Rated Distance Range 0.01 to 0.03 mm), Unit Specification: w/Unit Conversion Function, Stations: 2, Cable Option: T (Centralized Lead Wired, w/Bracket), Bracket Option: B (Bracket), Control Unit: R3 (w/Control Unit, Supply Port: Right

Direction on Flange Side), Temperature Specifications, Heater: H0 (5 to 150°C, w/o Heater), Auto Switch: w/o Auto Switch, w/o Built-in Magnet, Lead Wire: 0.5m (Or None in the Case of No Switch), Number of Switches, Mounting Position: w/o Auto Switch, X: X (Indicates a Change from Standard Product), Body Surface Treatment: External: Hard Anodized, Internal: Raw Material, Seal Material: R3

Series: LEKFS, Size: 40, Motor Mounting Position: L (Left Side Parallel), Motor Type: E (Battery-less absolute, 24VDC, Step), Lead: H (Size 25: 20mm, Size 32: 24mm, Size 40: 30mm), Stroke: 400, Motor Option: B (with Lock), Seal Band Stopper: Standard, Actuator Cable Type, Length: R3 (3), Controller: C91 (JXC91, EtherNet/IPâ„¢ Direct Input Type), Controller Mounting: 8 (DIN Rail Mounting)

Series: LEKFS, Size: 40, Motor Mounting Position: R (Right Side Parallel), Motor Type: E (Battery-less absolute, 24VDC, Step), Lead: H (Size 25: 20mm, Size 32: 24mm, Size 40: 30mm), Stroke: 400, Motor Option: B (with Lock), Seal Band Stopper: Standard, Actuator Cable Type, Length: R3 (3), Controller: C91 (JXC91, EtherNet/IPâ„¢ Direct Input Type), Controller Mounting: 8 (DIN Rail Mounting)

Series: LEKFS, Size: 25, Motor Mounting Position: In-line, Motor Type: E (Battery-less absolute, 24VDC, Step), Lead: A (Size 16: 10mm, Size 25: 12mm, Size 32: 16mm, Size 40: 20mm), Stroke: 200, Motor Option: w/o Option, Seal Band Stopper: Standard, Actuator Cable Type, Length: R3 (3), Controller: C91 (JXC91, EtherNet/IPâ„¢ Direct Input Type), Controller Mounting: 8 (DIN Rail Mounting)

Series: LEKFS, Size: 25, Motor Mounting Position: In-line, Motor Type: E (Battery-less absolute, 24VDC, Step), Lead: A (Size 16: 10mm, Size 25: 12mm, Size 32: 16mm, Size 40: 20mm), Stroke: 100, Motor Option: w/o Option, Seal Band Stopper: Standard, Actuator Cable Type, Length: R3 (3), Controller: C91 (JXC91, EtherNet/IPâ„¢ Direct Input Type), Controller Mounting: 8 (DIN Rail Mounting)