Compressed Air Preparation Filter

Inlet pressure 0.3 MPa 14 12 10 Inlet pressure 0.5 MPa 12 Inlet pressure 0.5 MPa 10 Inlet pressure 0.5 MPa 8 Pressure drop [kPa] Pressure drop [kPa] Pressure drop [kPa] 10 Max. flow capacity line 8 Max. flow capacity line Max. flow capacity line 8 6 6 6 4 4 4 2 2 Inlet pressure 0.7 MPa 2 Inlet pressure 0.7 MPa Inlet pressure 0.7 MPa 0 150 0 0 300 50 250 200 150 100 300 600 450 300 750 1200

Air Cylinder

I J 20 Up to 350 18 15.5 13 14 8 12.5 12 2 12 12 35 5 25.3 37 26 M4 x 0.7 depth 7 25 Up to 400 22 19.5 17 16.5 10 12.5 14 2 12 12 40 6 28.3 40 31 M5 x 0.8 depth 7.5 32 Up to 450 22 19.5 17 20 12 12 18 2 12 12 40 6 31.3 43 38 M5 x 0.8 depth 8 40 Up to 800 30 27 19 26 16 15 25 2 13 13 50 8 38.3 52.5 47 M6 x 1 depth 12 50 Up to 1200 35 32 27 32 20 16.5 30 2 14 14 58 11 44.5 58.5 58 M8 x 1.25

42

0 200 400 600 800 1000 1200 1400 VQ4l5l (Plug lead type) ARBQ4000-00-B-5 B ARBQ4000-00-P-5 P Flow rate [L/min(ANR)] ARBQ4000-00-P (P B) 0.7 Dimensions 0.6 Outlet pressure [MPa] 0.5 0.4 SMC 0.3 0.2 59 50 147 0.1 B 2 SMC 1400 0 0 200 400 600 800 1000 1200 12 1 P 5 3 R2 R1 Flow rate [L/min(ANR)] PE 4 A 55.5 Pressure Characteristics 25 218.5 Conditions Inlet pressure: 0.7 MPa Outlet pressure:

High Vacuum Angle Valve

Model XLm-100(-1)-X152 XLm-160(-1)-X152 Rated voltage for heater 90 to 240 VAC Heater assembly quantity 2 3 100 V 800/220 1200/350 H4 100C Heater assembly quantity used Heater power W (Nominal value) Inrush/Power consumption (Option symbol, Operating voltage) 200 V 3200/220 4800/350 Heater assembly quantity 3 4 100 V 1200/300 1600/400 H5 120C 200 V 4800/300 6400/400 The inrush current of

Dual Speed Controller with One-touch Fitting Series ASD

Flow Direction Symbols on Body Meter-out type Meter-in type Flow Rate and Effective Area Symbol JIS Symbol ASD230F ASD330F ASD430F ASD530F ASD630F Model 6 8 10, 12 10 12 Metric size 4, 6 8, 10 1/8" 5/32" 3/16" 1/4" 6 6, 8 1/4" 5/16" 3/8" Tubing O.D. 3/16" 1/4" 1/4" 5/16" 3/8" 3/8" Inch size Flow rate l/min (ANR) Controlled flow (Free flow) 500 600 700 1200 1300 175 295 350 75 {N R/min}

RSH/RS1H

REC RSH20, 32 Graph (1) Graph (2) 1.0 CX RSH20 RSH32 0.9 Bore size 50, 63, 80/ = 0 Bore size 50, 63, 80/ = 0.1 Operating pressure P [MPa] CY 0.8 1300 1300 80 0.7 1200 1200 MQQ M 0.6 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 1100 1100 0.5 RHC 1000 1000 0.4 900

1

D-X Shock absorber 20Data ZZ + Stroke S MH ZZ Bore (mm) 20 25 32 40 50 63 Stroke range Shock absorber 10 to 350 RBAC0806 77 23.5 135.5 10 to 400 RBAC1007 77 31 148 15 to 450 RBAC1412 55 79 174 15 to 800 RBAC2015 62.5 87 199.5 15 to 1200 RBAC2015 102 55.5 215.5 25 to 1200 RBAC2725 92.5 102 252.5 6-17-97 78 Made to Order Common Specifications: -XC51: With Hose Nipple -XC52: Mounting Nut with

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

CX DSymbol Specifications 1200 -XB11 Long stroke (2001 mm and up) -X -XB13 Low speed specifications (7 to 50 mm/s) 1100 40 40 -X116 Hydro specifications 20-X132 Axial ports 1000 -X160 High speed specifications Data 900 -X168 Helical insert thread specifications -X206 Added mounting tap positions for slider Theoretical thrust (N) 800 -X210 Oil-free exterior specifications -X322 Outside of

A high rigidity, slider type electric actuator, series LEJ is available in both ball screw, LEJS, and belt drive, LEJB models.  The LEJ offers 2 types of motor cables, standard and robotic (flexible).  Seal bands, equipped as standard, cover the guide preventing grease from splashing, and external foreign matter from entering.  LEJS (ball screw drive) can be used for both horizontal and

Size: 63, Motor Type: T7 [AC Servo Motor (Absolute Encoder) 200W], Stroke: 2000mm, Motor Option: None, Cable Type: R (Robotic, Flexible), Cable Length: 5m

Size: 63, Motor Type: T7 [AC Servo Motor (Absolute Encoder) 200W], Stroke: 3000mm, Motor Option: None, Cable Type: R (Robotic, Flexible), Cable Length: A (10m), Driver Type: B2 (LECSB2, 200 to 230 Power Supply Voltage), I/O Connector: H (Connector)

Size: 63, Motor Type: T7 [AC Servo Motor (Absolute Encoder) 200W], Stroke: 2000mm, Motor Option: None, Cable Type: R (Robotic, Flexible), Cable Length: A (10m), Driver Type: B2 (LECSB2, 200 to 230 Power Supply Voltage), I/O Connector: H (Connector)

Size: 63, Motor Type: T7 [AC Servo Motor (Absolute Encoder) 200W], Stroke: 2000mm, Motor Option: B (Lock), Cable Type: S (Standard), Cable Length: A (10m), Driver Type: 92 (LECSN2-T-9, 200~240V, Absolute, EhterNet/IPâ„¢ Card), I/O Connector: 1 (1.5m)

Size: 63, Motor Type: T7 [AC Servo Motor (Absolute Encoder) 200W], Stroke: 600mm, Motor Option: B (Lock), Cable Type: R (Robotic, Flexible), Cable Length: 5m

Size: 63, Motor Type: T7 [AC Servo Motor (Absolute Encoder) 200W], Stroke: 1500mm, Motor Option: B (Lock), Cable Type: S (Standard), Cable Length: A (10m)

Size: 63, Motor Type: T7 [AC Servo Motor (Absolute Encoder) 200W], Stroke: 3000mm, Motor Option: B (Lock), Cable Type: R (Robotic, Flexible), Cable Length: 5m, Driver Type: S2 (LECSS2-T, 200~240V Absolute, SSCNETIII/H)

Size: 63, Motor Type: T7 [AC Servo Motor (Absolute Encoder) 200W], Stroke: 2000mm, Motor Option: B (Lock), Cable Type: S (Standard), Cable Length: 2m

Size: 63, Motor Type: T7 [AC Servo Motor (Absolute Encoder) 200W], Stroke: 2000mm, Motor Option: B (Lock), Cable Type: S (Standard), Cable Length: 2m, Driver Type: S2 (LECSS2-T, 200~240V Absolute, SSCNETIII/H), I/O Connector: H (Connector)

Size: 63, Motor Type: T7 [AC Servo Motor (Absolute Encoder) 200W], Stroke: 3000mm, Motor Option: None, Cable Type: S (Standard), Cable Length: 2m

Size: 63, Motor Type: T7 [AC Servo Motor (Absolute Encoder) 200W], Stroke: 300mm, Motor Option: None, Cable Type: S (Standard), Cable Length: 2m, Driver Type: S2 (LECSS2-T, 200~240V Absolute, SSCNETIII/H)