How to Order Series ZM Vacuum Ejector With Valve and Switch For details about certified products conforming to international standards, visit us at www.smcworld.com. 1

Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Construction Individual exhaust spacer Gasket Spacer E M2.5 x 36 (2 pcs.)

MB1

, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 100 1500 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 Note) Intermediate strokes are also available.

MHK2

For setting the gripping force to be at least 20 times the workpiece weight: Required gripping force = 0.17 kg x 20 x 9.8 m/s2 33 N 0 20 40 60 80 Gripping method: External gripping MHK Gripping point L (mm) Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com When MHKL2

3 Port Solenoid Valve Series VQ100 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Option VT External non-leak Latching Negative COM AC Normally open Vacuum VP VG VP S070 VQ VKF VQZ VZ VS VFN Copper-free The fluid contacting section is copper-free and the standard style can be used as it is.

5 Port Air Operated Valve Series SYA3000/5000/7000 1

(Value in the initial state) Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Caution For Safety Instructions and Solenoid Valve Precautions, refer to pages 5-11-2 to 5-11-6.

CY1

25 1200 100, 200, 300, 400, 500, 600, 800, 1000 25 2 axes 1500 32 Note) Contact SMC if the maximum stroke is exceeded.

3 Port Solenoid Valve Rubber Seal Series SY100 1

-9200-www.stevenengineering.com Not required Lubrication Unrestricted Mounting position 150/30 Impact/Vibration resistance (m/s2) (2) Body ported Dustproof Enclosure Note 1) Based on dynamic performance test, JIS B 8374-1981.

VP300/500/700

Non-locking push type Locking type (Slotted), Locking type (Manual) Manual override Mounting orientation Unrestricted 300/50 Shock/Vibration resistance (m/s2 )(2) Note 1) Based on dynamic performance test, JIS B 8374-1981.

MHL2

Example) For setting the gripping force to be at least 20 times the workpiece weight: Required gripping force = 0.3 kg x 20 x 9.8 m/s2 60 N 20 40 60 70 80 100 120 0 MHR Gripping point R (mm) MHK Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Selecting the MHL2-

VCA

Manifold body e Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com No. q w e r Part no.

Aluminum High Vacuum Angle Valve

Uniform baking temperature 108 154 10.6 300 138 200 18.5 800 Common to all series.

PA300/500/700

N.O. 101.2 kPa to 0.2 VPA344 544 744 Pilot pressure (MPa) Ambient and fluid temperature (C) Lubrication Mounting orientation Impact/Vibration resistance (m/s2) Note) Same as operating pressure (Min. 0.2 MPa) 10 to 50C (No freezing. Refer to page 5-11-4.) Not required (Use turbine oil Class 1 lSO VG32, if lubricated.)

Multistage Ejector Series ZL112/212 1

Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Operating Environment Caution 1. Avoid use exposed to direct sunlight. Solenoid Valves (Series ZL112/ZL212) Caution 1.

V100

(m/s2) Note 2) 150/30 Dustproof Enclosure Note 1) Based on dynamic performance test JIS B8374-1981 (Standard type: at coil temperature of 20C, with rated voltage, without surge voltage suppressor) Note 2) Impact resistance: No malfunction resulted in an impact test using a drop impact tester.

VCW

N.O. q q w w e e r r t y u t y u Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com IN IN Component Parts Component parts Description Material Description Material No. No.

ZMA

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com ZL ZY ZQ ZF ZP ZCU AMJ Misc.

VK300

Unrestricted 300/50 m/s2 SYJ Manual override Lubrication Mounting orientation Shock/Vibration resistance Enclosure VK (2) Dustproof VZ Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Note 1) Based on dynamic performance test, JIS B 8374-1981.

3 Port Direct Operated Poppet Solenoid Valve Series VKF300 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com VT Type 42 Type S42 1 (P) 3 (R) (Valve leakage: 0.03 cm3/s He or less) Can be used in vacuum/release circuits VP VG Universal porting Type 40 VP N.C.

Parallel Style Air Gripper/2 Finger, 3 Finger, 4 Finger Series MHS

1,200 0.4 MPa 0.4 MPa 1,000 1,000 MHK 800 0.3 MPa 0.3 MPa 800 600 0.2 MPa 0.2 MPa 600 MHS 400 400 0.1 MPa 0.1 MPa 200 200 MHC 0 0 20 20 100 100 40 40 60 60 120 120 Gripping point L (mm) Gripping point L (mm) 80 80 MHT MHY MHW -X MRHQ MA D557 Series MHS3 Dimensions MHS3-16D to 25D CB 7 P (Finger opening port) P (Finger closing port) WA depth 1.5 22.5 AA 6 x M3 x 0.5 thread depth TB Thread

VCL

Note 2) The weight is the value for the grommet type. 17-2-33 6 Series VCL Construction q w e r Component Parts t Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Description Material No.