Magnetically Coupled Rodless Cylinder

Very low speed (7 to 50mm/s) specifications There is no sticking and slipping even at very low drive speeds of 7 to 50mm/s. Furthermore, there is no lurching at start up, allowing smooth drive through the entire stroke.

Vacuum System Peripherals:

/S (8 points output) R2 09 9 Can accommodate up to 16 solenoids.

5

S 1 pc. n n pcs.

Series VQ Metal Seal/Rubber Seal Body Ported

5m Speed controller: AS3000F-06 (S=6.5mm2) Cylinder stroke 100mm Fitting (One-touch fitting) Effective area (mm2)(Cv) Cylinder Speed (mm/s) Model AS3000F-06 (S=6.5mm2) Cylinder stroke 50mm 10 6 16 20 25 32 40 40 50 63 80 100 150 300 450 600 750 150 300 450 600 750 6 4.5 (0.25) VQ1000 (Metal seal) 6 6.3 (0.35) VQ1001 (Rubber seal) Series VQ2000 Cylinder bore size (mm) Series CJ2 Pressure

Model Selection 1

amount (10 6 Pam 3/s) of V, M options are values when differential pressure is 0.1 MPa.

Vacuum Filter AFJ Series

m AFJ20-02-40-S/AFJ30-03-40-S/AFJ40-04-40-S AFJ20-02-40-T/AFJ30-03-40-T/AFJ40-04-40-T 12 12 AFJ20-02-40-T AFJ30-03-40-T AFJ20-02-40-S AFJ30-03-40-S AFJ40-04-40-S 10 10 Pressure drop [kPa] Pressure drop [kPa] 8 8 AFJ40-04-40-T 6 6 4 4 2 2 Water drop removal type Nominal filtration rating: 40 m Large flow type Nominal filtration rating: 40 m 0 0 0 100 200 300 400 500 600 800 700 900 Flow rate

HRX-OM-M090

Configuration 1 master : 1 thermo-chiller 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-10 Connection of RS-232C 3.3 Installation HRS Series 3-16 HRX-OM-M090 Chapter 3 Transport and Setting Up 3.4 Piping Connect piping firmly.

HRX-OM-R016

Configuration 1 master : 1 thermo-chiller 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-10 Connection of RS-232C 3.3 Installation HRS Series 3-16 HRX-OM-R016 Chapter 3 Transport and Setting Up 3.4 Piping Connect piping firmly.

ALF400 to 900, ALT-5/-9

Tube size 100 O.D. 6 I.D. 4 14-13-10 Specialty Lubricators NALF Series Auto Feed Lubricators NALF400, 400-06, 500, 600, 800, 900 Lubricator NALF400 Tank NALT-5 s n o i t a c i f i c e p S F L A N e b u L d e e F o t u A 0 0 4 F L A N 6 0 N 0 0 4 F L A N 0 0 5 F L A N 0 0 6 F L A N 0 0 8 F L A N 0 0 9 F L A N ) a P M ( g i s p e r u s s e r p y l p p u s . x a M ) 5 . 1 ( 0 2 2 ) a P M ( g

Auto Feed Lube, Auto Feed Tank ALF400 to 900, ALT-5/-9

O.D. 6 I.D. 4 1051 Specialty Lubricators NALF Series Auto Feed Lubricators NALF400, 400-06, 500, 600, 800, 900 Lubricator NALF400 Tank NALT-5 s n o i t a c i f i c e p S F L A N e b u L d e e F o t u A 0 0 4 F L A N 6 0 N 0 0 4 F L A N 0 0 5 F L A N 0 0 6 F L A N 0 0 8 F L A N 0 0 9 F L A N ) a P M ( g i s p e r u s s e r p y l p p u s . x a M ) 5 . 1 ( 0 2 2 ) a P M ( g i s p e r u s s e

Magnetically Coupled Rodless Cylinder Series CY3B/CY3R

Very low speed (7 to 50mm/s) specifications There is no sticking and slipping even at very low drive speeds of 7 to 50mm/s. Furthermore, there is no lurching at start up, allowing smooth drive through the entire stroke.

NCA1

6.50 3/4 NPT .50 5.00 3.13 4.88 7.63 3.25 8.63 1.63 7.38 6.63 8 MS1 Foot style (L) XA+ Stroke A P + Stroke 2-EE KK MM B AH AT LF + Stroke WF S AB E AO SA + Stroke AO Bore Size (in) MM KK A AB AH AO AT B E EE LF+ P+ S SA+ WF XA+ 500 (5") 1.000 3/4-16 1.13 .63 2.75 .63 .19 1.500 5.50 1/2 NPT 4.50 2.88 4.25 7.88 1.38 7.25 600 (6") 1.375 1-14 1.63 .75 3.25 .63 .19 2.000 6.50 3/4 NPT 5.00 3.13

IP8101 Series

Fork lever-type fitting M P368010-24 Fork lever-type fitting S P368010-25 Example of side mounting using fork lever-type fitting M Example of back mounting using fork lever-type fitting S. Fig. 8 For side mounting, the mounting dimensions of fork lever-type fitting M can be adjusted to be interchangeable with IP610.

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

(increment of 0.1 s), 1 to 10 s (increment of 1 s), 20 s, 30 s, 40 s, 50 s, or 60 s.

Direct Operated, 2 Port Solenoid Valve, For Water, Oil, Steam, Air, Series VX

amount (10 6 Pam 3/s) of V, M options are values when differential pressure is 0.1 MPa.

Digital Pressure Switch ( compatible)

0.01 s step Hysteresis Hysteresis mode Variable from 0 2 Window comparator mode Short circuit protection Provided -92No.PS-OMX0002-A ZSE20C ZSE20CF ISE20C ISE20CH Product No.

Cylinder with Lock Series CLS

200 Maximum speed: V (mm/s) Maximum speed: V (mm/s) Graph 7 Graph 4 0.5 MPa P 0.5 MPa P 250 4000 3000 3000 200 2000 180 250 2000 160 140 200 1000 125 180 700 800 900 Load mass: m (kg) Load mass: m (kg) 1000 700 800 900 160 600 140 600 500 500 125 400 400 300 300 D200 200 -X Individual -X 100 100 100 500 400 300 200 100 500 400 300 200 Maximum speed: V (mm/s) Maximum speed: V (mm/s) 785

7

S CAC408 50 50A Flange R 230 VAC G N.O.

IP8001 Series

No.IP8S-OM09 38 The following can be performed: angle check for a feedback lever (AnGL), balance current adjustment (0AdJ), automatic calibration (CAL), input current adjustment (S-0) & (S-F), confirmation of balance current (bAL), span adjustment (SPn), and initialize of parameter (dFLt). (C10) Angle check Confirm rotation angle of the feedback lever.

Basic Type/Direct Mount Type

Direct mount type CY3R Series Basic type CY3B Series Series Variations Standard stroke (mm) Individual Made-to-Order products Bore size 1000 900 800 700 600 500 450 400 350 300 250 200 150 100 50 Series Heat resistant specifications (XB6) Low speed specifications (15 to 50 mm/s) (XB9) 6 10 Long stroke (XB11) 15 Low speed specifications (7 to 50 mm/s) (XB13) 20 CY3B Hydro specifications (X116