Space Saving Vacuum Ejector Series ZQ [Option] Note) CE compliant: For DC only.

Pilot valve symbol 200 AC 110 AC 220 AC 12 DC 100 AC 24 DC q K1 K1 K2 J1 J1 J2 Q1 Q2 N1 N2 Nil Y w e Nil r Nil Y t y Nil u Nil i Nil o Nil !0 Nil Combinations q to !

3 Port Solenoid Valve

Straight fitting (Metric size) C2: 2 one-touch fitting C4: 4 one-touch fitting (Inch size) N1: 1/8" one-touch fitting N3: 5/32" one-touch fitting Normally closed and normally open type cannot be mounted on the same manifold.

AC Servo Motor Driver (Pulse input type)

[PA05] = 0(Initial value) Initial value 0 correspond to "Number of command input pulses per revolution." 262144 [pulses/rev]. 1 [PA06] [Number of command input pulses per revolution]P = 1000 [PA07] [PA06] 1 [PA07] [Actuator lead L [mm] ] n1/n2 6 1 [P]10[m] P: Travel amount per 1 command pulse [m] n1/n2: Pulley ratio *1 Ex.)

AC Servo Motor Driver (CC-Link Type)

Symbol Name PA06 CMX Electronic gear numerator 1 0 to 65535 PA07 CDV Electronic gear denominator 1 1 to 65535 Set the values as follows. 1 [PA06] M = 1000 [PA07] Actuator lead (L) [mm] n1/n2 M : [Servo motor resolution : 262144(Pulse/rev)] n1/n2: Pulley ratio *1 EX.)

AC Servo Motor Driver (CC-Link Type)

Symbol Name PA06 CMX Electronic gear numerator 1 0 to 65535 PA07 CDV Electronic gear denominator 1 1 to 65535 Set the values as follows. 1 [PA06] M = 1000 [PA07] Actuator lead (L) [mm] n1/n2 M : [Servo motor resolution : 262144(Pulse/rev)] n1/n2: Pulley ratio *1 EX.)

AC Servo Motor Driver (MECHATROLINK-II type)

resolution is 1048576 [Pulse/rev] P Travel amount per 1 command pulse [m] n1/n2 Pulley ratio *1 Ex.)

AC Servo Motor Driver (MECHATROLINK-III type)

resolution is 1048576 [Pulse/rev] P Travel amount per 1 command pulse [m] n1/n2 Pulley ratio *1 Ex.)

Serial Transmission System Series EX250 Series EX500

Ports 1, 3, 5 Applicable series Ports 1, 3, 5 Applicable series Ports 2, 4 Symbol 3.2 One-touch fitting 4 One-touch fitting 6 One-touch fitting 4 One-touch fitting 6 One-touch fitting 8 One-touch fitting 6 One-touch fitting 8 One-touch fitting 10 One-touch fitting 8 One-touch fitting 10 One-touch fitting 12 One-touch fitting Rc 1/4 Rc 3/8 G 1/4 G 3/8 Ports 2, 4 mixed 8 One-touch fitting N1

Speed Controller with Indicator In-line Brass Stainless steel Electroless nickel plated In-line Type “Made to Order” “Made to Order” section has been added. Pages 3, 8 section has been added. ¡Lubricant: Vaseline -X12 The numerical indication of ¡Greas

. + L16 x 2 + L26 x (n1) pcs. L8 x n pcs. + L17 x 2 + L26 x (n1) pcs. L8 L8 x n pcs. + L25 x 2 + L26 x (n1) pcs. L27 + L8/2 Bonnet Mounting surface Refer to page 6 for L8. The figure above shows the manifold with speed controllers connected using two DIN rail mounting brackets, adapters and a threaded stud kit for manifold. Refer to page 4 for threaded stud kits for manifold.

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

Applicable shaft types: J, K, T a1 1.5 L1 CRB2 N1 CRBU2 (mm) N1 L1 a1 Size CRB1 0 0.025 0 0.025 20 6.8 10 2h9 30 9.2 14 3h9 MSU CRJ Double Shaft CRA1 Symbol: A39 Symbol: A40 Applicable to single vane type only Applicable to single vane type only CRQ2 Shaft with through-hole (Additional machining of K, T shaft) Applicable shaft types: K, T Equal dimensions are indicated by the same marker

Vacuum Unit

pressure exhaust port M3 1 82.9 (Ejector system) 87.9 (Vacuum pump system) Vacuum break flow adjusting needle Exhaust (EXH) port Metric size: 08 (8) Inch size: 09 (5/16) 26.4 54.8 2 x Common supply (PD) port4 2.6 PS and PD port dimensions1, 4 For high-noise reduction silencer exhaust 62 53 45.9 D 37.4 38 8.4 B 26.4 2 x Common exhaust (EXH) port2 33.8 10.5 n x Individual exhaust (EXH) port3 (n1

Table of Contents

Applicable shaft types: J, K, T a1 1.5 L1 CRB2 N1 CRBU2 (mm) N1 L1 a1 Size CRB1 0 0.025 0 0.025 20 6.8 10 2h9 30 9.2 14 3h9 MSU CRJ Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Double Shaft CRA1 Symbol: A39 Symbol: A40 Applicable to single vane type only Applicable

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

Applicable shaft types: J, K, T a1 1.5 L1 CRB2 N1 CRBU2 (mm) N1 L1 a1 Size CRB1 0 0.025 0 0.025 20 6.8 10 2h9 30 9.2 14 3h9 MSU CRJ Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Double Shaft CRA1 Symbol: A39 Symbol: A40 Applicable to single vane type only Applicable

Digital Flow Switch ( compatible)

Input of set values Setting of Setting of P1L/n1L Setting of P_1/n_1 P1H/n1H P1/n1 H_1 WH1 (page 44) (page 41) (page 43) 4. Delay time Setting of dtH1(ON) dtL1(OFF) (page 42) 5. Selection of display colour rED/Grn/1SoG/1Sor/2SoG/2Sor (page 45) 6.

Digital Flow Switch ( compatible)

Input of set values Setting of Setting of P1L/n1L Setting of P_1/n_1 P1H/n1H P1/n1 H_1 WH1 (page 40) (page 37) (page 39) 4. Delay time Setting of dtH1(ON) dtL1(OFF) (page 38) 5. Selection of display colour rED/Grn/1SoG/1Sor/2SoG/2Sor (page 41) 6.

PFxx-OMX0002

(When reversed output is selected, the main screen displays [n1]). Refer to the switch output modes list for the relationship between the set values and operation (page 35).

Digital Flow Monitor

(When reversed output is selected, the sub display (left) shows [n1/n2].)

Compact Vacuum Unit Ejector/ Vacuum Pump System

ZB-OM00201-B (10) Vacuum (V) port Note10) Note 11) C2 Straight type2 One-touch tube fitting Metric size C4 Straight type 4 One-touch tube fitting N1 Straight type 1/8 One-touch tube fitting Inch size N3 Straight type 5/32 One-touch tube fitting L2 Elbow type 2 One-touch tube fitting Metric size L4 Elbow type 4 One-touch tube fitting LN1 Elbow type 1/8 One-touch tube fitting Inch size

MQQ

A F MM F S + Stroke H ZZ + Stroke Bore size (mm) NN A P D MM F G1 G2 S ZZ I H J N1 N2 NA 10 M12 x 1 15 M5 x 0.8 4 M4 x 0.7 8 15 6 65 101 18.5 28 16 11 20 16 16 M14 x 1 15 M5 x 0.8 5 M5 x 0.8 10 15 6 74 114 22 30 22 12 21 19.5 20 M20 x 1.5 18 Rc 1/8 8 M8 x 1.25 13 25 8.5 97.5 151 31.5 40.5 28.5 20.5 33 29 25 M26 x 1.5 18 Rc 1/8 10 M10 x 1.25 13 30 8.5 102.5 160 34.5 44.5 32 20.5 38 32 For

MQQ

MM A F S + Stroke F H ZZ + Stroke (mm) Bore size (mm) A D NN F G1 P G2 MM S I ZZ H J N1 N2 NA M5 x 0.8 16 15 4 8 15 6 M12 x 1 M4 x 0.7 65 18.5 101 28 11 20 16 10 M5 x 0.8 22 15 5 10 15 6 M14 x 1 M5 x 0.8 74 22 114 30 12 21 19.5 16 Rc 1/8 28.5 18 8 13 25 8.5 M20 x 1.5 M8 x 1.25 97.5 31.5 151 40.5 20.5 33 29 20 Rc 1/8 32 18 10 13 30 8.5 M26 x 1.5 M10 x 1.25 102.5 34.5 160 44.5 20.5 38 32 25