Stability of suction position,

A B ZP3EA-PT1-B8 M8 x 1.25 9.5 ZP3EA-PT1-B10 M10 x 1.5 13 Part no. A B ZP3EA-PT2-B8 M8 x 1.25 9.5 ZP3EA-PT2-B10 M10 x 1.5 13 Applicable pad part no. ZP3E-50UM ZP3E-50BM Part no. ZP3EA-PT3-B12 [Weight: 48.6 g] ZP3EA-PT3-B18 [Weight: 38.5 g] Part no.

Table of Contents

acting c + Stroke 6 8 13() 21() 13() C + Stroke Single acting, Spring return CUJ Solid state switch D-F8 D-M9 A 10 Double acting 13.5(15) 22(24) 13(36) Female thread Male thread 8 a Single acting, Spring return Numbers in parentheses are the dimensions of SMC Series CU cylinders.

HRX-OM-X071

9.5.1 HRR050-A/W-20. 9-13 9.5.2 HRR050-A/W-40. 9-13 9.6 Pump capacity. 9-14 9.6.1 HRR050-A/W-20. 9-14 9.6.2 HRR050-A/W-40. 9-14 9.7 Required facility water flow (for water-cooled type) . 9-15 9.7.1 HRR050-W-20. 9-15 9.7.2 HRR050-W-40. 9-15 9.8 Types of Hazard Labels . 9-16 9.8.1 Locations of Hazard Labels . 9-16 9.9 Daily Check . 9-17 Chapter 10 Product Warranty . 10-1 HRR Series HRX-OM-X071

IDX-OM-W013

Specification for Option T 13 1 Safety instructions . 13 1 13 2 Specifications . 13 1 13 3 Remote operation . 13 1 13 4 How to connect the power and signal cable . 13 2 13 5 How to re-start the operation . 13 2 13 6 Electric circuit . 13 3 Chapter 14 Specification for Option V 14 1 Safety instructions . 14 1 14 2 Specifications . 14 2 14 3 How to perform maintenance . 14 2 14 4 Electric

SYJ300/500/700

Station n L1 L2 3 46 39 6 77.5 70.5 8 98.5 91.5 10 119.5 112.5 20 224.5 217.5 2 35.5 28.5 4 56.5 49.5 5 67 60 7 88 81 9 109 102 11 130 123 12 140.5 133.5 13 151 144 14 161.5 154.5 15 172 165 16 182.5 175.5 17 193 186 18 203.5 196.5 19 214 207 4-4-13 14 Series SYJ300 Type 41 Manifold: Side Ported/SS3YJ3-41Stations -M3 [ ] for AC Grommet (G) Type 41 Manifold: Side Ported (Pilot valve is on

5 Port Air Operated Valve Series SYA3000/5000/7000 1

Operating pressure (MPa) Flow Characteristics/Weight Flow characteristics 1 4/2 (P A/B) 4/2 5/3 (A/B EA/EB) Weight (kg) Port size Pilot port size (Nominal size) Function Valve model C [dm3/(sbar)] 14 14 14 14 13 13 14 (13) 14 (13) 13 13 C [dm3/(sbar)] b Cv b 0.28 0.30 0.26 0.30 0.25 0.29 0.32 (0.3) 0.32 (0.3) 0.28 0.28 Cv 3.4 3.8 3.4 3.7 3.0 3.4 3.6 (3.2) 3.6 (3.2) 3.1 3.3 VFRA4111-03

SYJ3000/5000/7000

SYJ7000-16-2 A Round head combination screw M3 x 47 Matt nickel plated (with spring washer) Gasket DXT199-21-13 ARBYJ7000-00-P Thread type SYJ7000-21-3A Round head combination screw M3 x 55 Matt nickel plated (with spring washer) Nil F N T Rc G NPT NPTF Round head combination screw M3 x 8 Matt nickel plated (with spring washer) A B Blanking plate SYJ7000-21-1 Gasket DXT199-21-13 Base mounted

Prevents Micro-Bubbles

VX2 VX How to Order Manifold Base Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com VX3 LLC 2 A 02 11 S VXA Tubing size for P port and R side connection Body class Tubing size for P port and L side connection VN Symbol 00 06 07 08 10 11 10 11 12 13 12 13 19 12 13 19

2-Color Display Digital Flow Switch Series PFM

Dimensions PFM -C4/C6/C8/N7--X693 7 5 PFM -C4/C6/C8/N7--X694 7 5 10.2 10.2 1 43 A 43 1 IN OUT (34.2) 3 (34.2) 13 3 13 A 18 OUT 2 x 3.4 18 IN B B 48 20 48 20 2 x 3.4 One-touch fitting Applicable tube O.D.

Round Type Low Pressure Hydraulic Cylinder Series CH
M

40 55 M8 x 1.25 13 26 19 15 15.5 25 to 800 22 17 32 12 16 12 8 46 6 8 32 5.5 7 28 121 5.5 40 55 M10 x 1.25 13 28 19 15 19.5 32 to 800 24 22 38 16 19 12 8 53 8 9 40 7.5 7 30 133 6 45 60 M14 x 1.5 13 36 19 15 21 40 to 800 24 24 41 18 21 14 11 54 10 11 48 7.5 9 35 158 6 55 75 M16 x 1.5 19 44 24 21 21 (mm) Foot bracket plate thickness is dimension LT + 1mm.

High Purity Chemical Valve

LVD LVQ How to Order Manifold Base LQ1 LLC 2 A 02 11 S LVN Tubing size for P port and R side connection Body class Tubing size for P port and L side connection TL/TIL Body class Symbol Nil 00 06 07 08 10 11 10 11 12 13 12 13 19 12 13 19 Tubing size Tubing size Plug Symbol 00 06 07 08 10 11 10 11 12 13 12 13 19 12 13 19 Body class Symbol 2 3 4 5 Body class 2 3 4 5 2 to 5 L side, R side same

CHKD/CHKG

15 17 18 21.5 23.5 31.5 B 19 20 21.5 23.5 27.5 31 40 49.5 B 16.5 18.5 22.5 26 35 44.5 B 15 16 17.5 19.5 27 36 45.5 B 16.5 18.5 22.5 26 35 44.5 A 10 12 13 16.5 18.5 26.5 A 8 9 11 13 17.5 19.5 27.5 A 10 12 13 16.5 18.5 26.5 20 25 32 40 50 63 80 100 Note 1) D-A9/A9V models cannot be mounted on 50.

CJ5-S

40 Up to 800 30 27 19 10 M6 x 1.0 12 26 16 23 3 19 13 50 8 47 M6 x 1.0 depth 12 6 14 4 M14 x 1.5 44 1/8 93 143 MK(2) 50 Up to 1200 35 32 27 13 M8 x 1.25 15.5 32 20 28 3 21 14 58 11 58 M8 x 1.25 depth 16 7 18 5.5 M18 x 1.5 55 1/4 109 167 63 Up to 1200 35 32 27 17 M10 x 1.5 19 38 20 28 3 21 14 58 11 72 M10 x 1.5 depth 16 7 18 7 M18 x 1.5 69 1/4 109 167 RS Q G 80 Up to 1400 40 37 32 17 M10

Rotary Actuator

30 80 50 5 192 40 100 60 5 232 45 Size D (g6) G H M N U UU L 30 8 6 13 10 8 53 63 7.8 50 15 11 27 20 15 89 109 14 63 17 13 29 22 17 105 127 16 80 20 15 38 25 20 130 155 19 100 25 19 44 30 25 156 186 24 Note) Dimension parts different from the standard conform to the general tolerance.

CJ5-S

M5 x 0.8 depth 8 5.5 8 3.5 M10 x 1.25 29 1/8 83 123 RHC 32 Up to 450 22 19.5 17 8 M5 x 0.8 9.5 20 12 19 3 18 12 40 6 38 M5 x 0.8 depth 8 5.5 10 3.5 M10 x 1.25 35.5 1/8 85 125 40 Up to 800 30 27 19 10 M6 x 1.0 12 26 16 23 3 19 13 50 8 47 M6 x 1.0 depth 12 6 14 4 M14 x 1.5 44 1/8 93 143 MK(2) 50 Up to 1200 35 32 27 13 M8 x 1.25 15.5 32 20 28 3 21 14 58 11 58 M8 x 1.25 depth 16 7 18 5.5 M18

IDX-OM-W016

Specification for Option V 13 1 Safety instructions . 13 1 13 2 Specifications . 13 2 13 3 How to perform maintenance . 13 2 13 4 Electric circuit . 13 2 Chapter 14 Service Record 14 1 Service Record . 14 1 IDFA Series Table of Contents 2 IDX-OM-W016 Air dryer i Safety Instructions i Safety Instructions Be sure to read and comprehend important cautionary notifications in this operation manual

CXS

Kit components CXSWM6-PS CXSWL6-PS CXSWM10-PS CXSWL10APS CXSWM15-PS CXSWL15APS CXSWM20-PS CXSWL20APS CXSWM25-PS CXSWL25APS CXSWM32-PS CXSWL32APS 6 10 15 Items 20 through 22 from the chart above. 20 25 32 35 Series CXSW Dimensions: 6, 10 ZZ CXSW6 SS 8 S 5.5 8 5.5 2-3.4 through 2-6.5 counterbore with depth 3.3 16 14 1 (13) 2-R 3.5 2.75 13 3 3 2-M3 x 0.5 x 5 (Hexagon socket head set screw) 12

3 Port Air Operated Valve Series SYJA300

Station n L1 L2 3 46 39 6 77.5 70.5 8 98.5 91.5 10 119.5 112.5 20 224.5 217.5 2 35.5 28.5 4 56.5 49.5 5 67 60 7 88 81 9 109 102 11 130 123 12 140.5 133.5 13 151 144 14 161.5 154.5 15 172 165 16 182.5 175.5 17 193 186 18 203.5 196.5 19 214 207 4-4-13 Series SYJ300 Type 41 Manifold: Side Ported/SS3YJ3-41Stations -M3 [ ] for AC Grommet (G) Type 41 Manifold: Side Ported (Pilot valve is on the

IDX-OM-W014

T 13 T 13-1 IEC 13-2 AC200V / 2A DC24V / 2A ( 20V / 5mA) 13-3 ON 3 () 5 /1 () IDU Series 13-1 13 1 IDX-OM-W014 13 T 13-4 PE 1 2 3 LN PE PE: LN: M3 6.5mm 1.25mm 2 () () IDU Series 13-4 13 2 IDX-OM-W014 13 T 13-5 IDU3E/4E-10-T IDU3E/4E/6E-20/23-T AC200 / 200,220V (50,60Hz) AC100/100,110V (50/60Hz) PE N L 1 2 or AC230V (50Hz) TB 3 PE N L 1 2 TB 3 TDR MC TDR MC TDR ILS TDR

Hydraulic Cylinder 7MPa Nominal Pressure Series CHN

38 16 14 19 11 13 13 8 10 10 53 8 9 40 7.5 21 25 to 500 40 24 24 41 18 16 21 12 17 17 11 16 16 54 10 11 48 7.5 21 25 to 500 (mm) Bore size (mm) LH LS LT LX LZ MM NA NB P S T V W X Y ZZ LD 20 25 121 5.5 40 55 M8 x 1.25 17 15 1/8 81 9.5 4.5 6.5 20 9 151 7 25 28 121 5.5 40 55 M10 x 1.25 17 15 1/8 81 11 3.5 5.5 20 9 156 7 32 30 133 6 45 60 M14 x 1.5 18 15 1/8 87 13 3 4 23 9 172 7 40 35 158 6