Intrinsically Safe Valve

0.50 0.32 [0.44] 0.41 0.56 [0.44] 1.8 C8 8 Onetouch fitting Single 4position dual 3 port 53-SY9 20-C8 1.5 N.C.

Series VQ Metal Seal/Rubber Seal Body Ported

Manifold Specifications Series Porting specifications Applicable stations Port location Port size P, R A, B C3, C4, M5 C3, C4, C6, M5 C4, C6, C8 C6 C6 C8 VQ0 VQ1000 VQ2000 Side Side Side Max. 16 Max. 16 VV5Q14 Max. 16 Wiring Specifications/Negative COM (Option) Wiring Specifications/Positive COM The lead wires are connected to the valve as shown below.

Table of Contents

BBA3: For D-B5/B6/G5 BBA4: For D-C7/C8/H7 D-G5BAL and D-H7BAL switches are set on the cylinder with the stainless steel screws above when shipped.

CJ2

BBA4: For D-C7/C8/H7 D-H7BAL switch is set on the cylinder with the stainless steel screws above when shipped.

Table of Contents

BBA4: For D-C7/C8/H7 D-H7BAL switch is set on the cylinder with the stainless steel screws above when shipped.

5 Port Solenoid Valve Metal Seal/Rubber Seal Series SQ1000/2000 1

(mm) VQ4 SQ2000 VVQ1000-51A-C4 VVQ1000-51A-C6 VVQ1000-51A-C8 Built-in silencer direct exhaust (-S) SSQ1000-SE SSQ2000-SE 3.2 4 6 8 Part numbers above are for a set of ten elements.

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

/C10/02 C6, C8, C10, 02 C6: One-touch fitting for 6 C8: One-touch fitting for 8 75.5 300 (Lead wire length) C10: One-touch fitting for 10 60.5 2-4.5 mounting hole 02: Rc 1/4 41.8 22 23.4 mounting hole 28.5 20 A 4 13 18 SMC 38 2 Cover dia.1.6 Cross section 0.34 mm2 46.5 R3 28.6 7.1 Manual override (For C6, C8) M5 X 0.8 external pilot port 10.5 (Only external pilot style (R)) (For C10) (For

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

. *2 Excludes the PF2M725 *3 Made to order (Produced upon receipt of order) Flow ratio*2 100: 1 25 50 100 200 Flow range [L/min] Port size Smallest settable increment 0.1 0.01 0.05 0.02 0.3 0.5 1 2 3 5 10 0.01 1 0.001 PF2M701 0.02 2 C43, C6, 1/8 PF2M702 0.05 5 PF2M705 0.01 0.1 10 PF2M710 0.3 25 PF2M725 C6, N7, 1/8 0.5 50 PF2M750 0.1 1 100 PF2M711 C8, N7, 1/4 2 200 1 PF2M721 New New Compatible

3 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported VQZ100/200/300

Pg.7 Indicator light 3.5 to 7 : AC 61.5 54 M plug connector (M): VQZ2l2(R)-lMl-C4, C6, M5 36 (Lead wire) Cover dia 1.5 Cross section 0.23mm2 300 89 Indicator light 77 78 37.5 42.5 : AC 2.10-9 VQZ100/200/300 Body Ported Dimensions: VQZ300 Valve single unit C6, C8, C10, 02 Grommet (G): VQZ3l2(R)-lGl-C6, C8, C10, 02 C6: One-touch fittings for 6 C8: One-touch fittings for 8 300 (Lead wire) 75.5

CM2

BBA3: D-B5/B6/G5 BBA4: D-C7/C8/H7 "D-H7BAL" switch is set on the cylinder with the screws above when shipped.

A

/DC or less 50 None None IC Circuit, Relay, Sequence Controller Grommet D-C7 type D-C8 type D-C80L 48VAC/DC 40 None None IC Circuit, Relay, Sequence Controller Grommet D-C7 type D-C8 type D-C80L 100VAC/DC 20 None None IC Circuit, Relay, Sequence Controller Grommet D-C7 type D-C8 type D-C73CL 24VDC 5 ~ 40 None Sequence Controller Connector D-C7 type D-C8 type D-C80CL 24VAC/DC or less

SYA3000/5000/7000

2 position 0.21 0.45 0.57 2.3 0.29 1.9 C8 0.38 0.29 0.39 0.39 2.0 [1.5] 1.7 0.37 [0.40] 0.38 0.52 [0.43] 0.46 1.6 One-touch ( ) 3 position 79 1.4 2.2 [1.6] Exhaust center Pressure center fitting for 8 0.32 [0.44] 0.56 [0.44] 1.8 0.41 0.50 Note) [ ]: denotes normal position.

5 Port Air Operated Valve SYA3000/5000/7000 Series

0.21 0.45 2.3 0.29 1.9 0.57 C8 SYJA ( ) 0.38 0.29 0.39 0.39 2.0 [1.5] 1.7 0.37 [0.40] 0.38 0.52 [0.43] 0.46 1.6 One-touch 3 position 79 1.4 2.2 [1.6] Exhaust center Pressure center fitting for 8 0.32 [0.44] 0.56 [0.44] 1.8 0.41 0.50 VZA Note) [ ]: denotes normal position.

NVZ1000//3000/5000 4,5 Port Solenoid Valve/Rubber Seal Type

And How To Order Aoolicable valves N\|z3120-OOO-M5 N\r23220-OOO-M5 N\r23320-OOO-M5 Nllz3{20-ooo-M5 N\1z3520-OOO-U5 Ootions Blank plate ass'y: DXTl92-13-1A EXH Relocation Spacer ass'y: DXr192-21-'1A Applicable valves N\rz3r40-ooo N\rel2'lO-OOO l{ }340-ooo Nv4ttt40-coo N\rz9540-OOO Options Blank plate ass'y: DXTl9213-1A EXH Relocation Spacer ass'y: DXT192-21 -1A SUP Relocation Spacer ass'y:

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And How To Order Aoolicable valves N\|z3120-OOO-M5 N\r23220-OOO-M5 N\r23320-OOO-M5 Nllz3{20-ooo-M5 N\1z3520-OOO-U5 Ootions Blank plate ass'y: DXTl92-13-1A EXH Relocation Spacer ass'y: DXr192-21-'1A Applicable valves N\rz3r40-ooo N\rel2'lO-OOO l{ }340-ooo Nv4ttt40-coo N\rz9540-OOO Options Blank plate ass'y: DXTl9213-1A EXH Relocation Spacer ass'y: DXT192-21 -1A SUP Relocation Spacer ass'y:

Stopper Cylinder Adjustable Mounting Height Type Series RSG

U A 38.2 Auto switch mounting positions Auto switch mounting height (mm) D-C7 D-C8 D-H7 D-H7W D-H7F D-H7BAL U D-C7 D-C8 D-C73C D-C80 Auto switch model D-H7W D-H7F D-H7BAL D-H7 D-H7C D-C73C D-C80C D-H7C Bore size (mm) A B A B A B U U 40 22.0 26.0 21.0 25.0 19.5 23.5 35.0 38.0 37.5 50 30.0 18 29.0 17.0 27.5 15.5 40.5 43.5 43.0 26 Series RSDG Auto Switch Internal Circuits Lead wire colors inside

Rubber Seal 5 Port Solenoid Valve Series SY3000/5000

123 162.5 139 17 187.5 171 237.5 219 12.5 13.5 11.5 14.5 12.5 Stations L1 L2 L3 L4 13 14 15 16 11 298 12 323 348 373 310.5 300 283 360.5 350 331 287.5 267 312.5 299 12 337.5 315 362.5 347 13 15.5 13.5 16.5 14.5 49 5 Port Solenoid Valve Series SY3000/5000 Stations SS5Y5-45GDUC4 C6 C8 C4 C6 C8 C4 C6 C8 Note) L1 to L4 dimensions of SS5Y5-45GDStations Dare the same as SS5Y5-45GDStations U.

XL-OMY0002

XLD50-2-9-1A XLD40-2-9-1A ** XLD50-2-9-1A ** AS568-009V AS568-016V AS568-016V AS468-009 ** AS568-016 ** AS568-016 ** 63 80 100 160 AS568-043V AS568-045V AS568-050V AS568-167V AS568-043 ** AS568-045 ** AS568-050 ** AS568-167 ** AS568-233V B2401-V85V AS568-349V B2401-G155V AS568-233 ** B2401-V85 ** AS568-349 ** B2401-G155 ** S XLD63-2-9-1A XLD80-2-9-1A XLD100-2-9-1A XLD160-2-9-1A

NVJ100, NVJ300, NVJ3000 3,5 Port Solenoid Valve/Rubber Seal Type

-r a Stations fUfiotlo ihl drb rsft vJ3000-21-1A End cover srde of --Frqclsaqq!

LEC-OM07605CN

1A.1 (1) LECSS2T (2) (2) [Pr.