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x 0.8 83 25 CC Up to 400 22 19.5 17 8 M5 x 0.8 9.5 18.5 10 17 3 18 12 40 6 33 M5 x 0.8 depth 8 5.5 8 3.5 M10 x 1.25 29 M5 x 0.8 83 32 Up to 450 22 19.5 17 8 M5 x 0.8 9.5 20 12 19 3 18 12 40 6 38 M5 x 0.8 depth 8 5.5 10 3.5 M10 x 1.25 35.5 Rc 1/8 85 40 RB Up to 800 30 27 19 10 M6 x 1.0 12 26 16 23 3 19 13 50 8 47 M6 x 1.0 depth 12 6 14 4 M14 x 1.5 44 Rc 1/8 93 50 Up to 1200 35 32 27 13 M8

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Bore size Standard stroke (mm) MM YY L X K W J V H GA GB TA TB U G T F S DA R C Z NN Q B ML P PW YL (mm) 12 16 20 25 18 50 13 5 16 40 58 5 7.5 5 36 29 56 8 22 6 48 29 12 14 39 7 10, 20, 30, 40, 50, 75, 100 M4 x 0.7 10 M4 x 0.7 M5 x 0.8 7 M4 x 0.7 11 22 54 15 7 18 42 64 2.5 8 5.5 38 33 62 8 25 8 52 33 13 16 43 8 10, 20, 30, 40, 50, 75, 100 M5 x 0.8 13 M5 x 0.8 M5 x 0.8 5 M5 x 0.8 11 20, 30

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Male thread Female thread 40 40 6 tube 06 50 50 8 tube 08 M5 x 0.8 A5 Pad type (Refer to Table (1) for applications.)

ZP

x 0.8 40 70 With four M5 bolts 81 Series ZP Buffer Assembly Part No.

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Mounting bolt Mounting bolt Spring Return Spring Extend CUJ Mounting bolt M3 x 35l x 40l M3 x 40l x 45l M5 x 40l x 45l M5 x 40l x 45l M5 x 40l x 45l M5 x 45l x 50l M6 x 55l x 60l Mounting bolt M3 x 40l x 45l M3 x 40l x 45l M5 x 40l x 45l M5 x 40l x 45l M5 x 40l x 45l M5 x 45l x 50l M6 x 55l x 65l C C D 35 40 40 45 40 45 40 45 40 45 45 50 55 60 D 40 45 40 45 40 45 40 45 40 45 45 50 55 65 Model

ZP

Vacuum Inlet Direction Lateral R Type/ZPR Connection Male thread Female thread Pad diameter 2 to 16 20 to 32 40, 50 2 to 81 10 to 16 20 to 32 40, 50 M5 x 0.8 M6 x 1 M8 x 1.25 Connection thread M5 x 0.8 M6 x 1 M6 x 1 M8 x 1 M4 x 0.7 M5 x 0.8 M5 x 0.8 M6 x 1 M6 x 1 M8 x 1.25 Vacuum inlet One-touch fitting 4, 6 4, 6, 8 6, 8 4, 6 4, 6, 8 6, 8 1 Refer to 2 to 8 for the thin flat type and thin

NCQ2/CQ2

D 40 45 40 45 40 45 40 45 40 45 45 50 55 65 x 65L (N)CDQ2B12-5SZ -10SZ (N)CDQ2B16-5SZ -10SZ (N)CDQ2B20-5SZ -10SZ (N)CDQ2B25-5SZ -10SZ (N)CDQ2B32-5SZ -10SZ (N)CDQ2B40-5SZ -10SZ (N)CDQ2B50-10SZ -20SZ (N) CQ-M3 x 35L x 40L CQ-M3 x 40L x 45L CQ-M5 x 40L x 45L CQ-M5 x 40L x 45L CQ-M5 x 40L x 45L CQ-M5 x 45L x 50L CQ-M6 x 55L x 65L 5.5 6.1 -10TZ (N) 8 8 -10TZ (N) 10.5 10.5 -10TZ (N) 9.5 9.5 -10TZ

Air Slide Table

40 40 40 40 40 Stroke 50 50 50 50 50 50 75 75 75 75 75 100 100 100 100 125 125 125 Page 11 150 150 Low thrust with high rigidity type MXQB 10 10 10 10 10 20 20 20 20 20 30 30 30 30 30 40 40 40 40 40 Stroke 50 50 50 50 50 75 75 75 75 75 100 100 100 100 125 125 125 Page 53 150 150 Single side-ported type MXQC 10 10 20 20 30 30 Stroke 40 40 50 50 75 75 Page 67 100 Height interchangeable type

CQ2

Spring return Spring extend C C D 35 40 40 45 40 45 40 45 40 45 45 50 55 60 D 40 45 40 45 40 45 40 45 40 45 45 50 55 65 Mounting bolt M3 X 35 l X 40 l M3 X 40 l X 45 l M5 X 40 l X 45 l M5 X 40 l X 45 l M5 X 40 l X 45 l M5 X 45 l X 50 l M6 X 55 l X 60 l Mounting bolt M3 X 40 l X 45 l M3 X 40 l X 45 l M5 X 40 l X 45 l M5 X 40 l X 45 l M5 X 40 l X 45 l M5 X 45 l X 50 l M6 X 55 l X 65 l Model

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Spring Return Spring Extend Mounting bolt M3 x 35l x 40l M3 x 40l x 45l M5 x 40l x 45l M5 x 40l x 45l M5 x 40l x 45l M5 x 45l x 50l M6 x 55l x 60l Mounting bolt M3 x 40l x 45l M3 x 40l x 45l M5 x 40l x 45l M5 x 40l x 45l M5 x 40l x 45l M5 x 45l x 50l M6 x 55l x 65l C C D 35 40 40 45 40 45 40 45 40 45 45 50 55 60 D 40 45 40 45 40 45 40 45 40 45 45 50 55 65 Model CDQP2B12-5S -10S CDQP2B16-5S

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M5 (18) M5 (10) 5.5 (16.5) 0 0.043 0.005 0.014 8 16 50 40 13 22 5 2 8 12 1.0 43 M5 11-2-15 15 Series CRB2 Dimensions: 40 Single vane type/Double vane type CRB2BW40-S/D M5 x 0.8 depth 10 3-M5 x 0.8 depth 10 56 3-M5 x 0.8 depth 16 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local

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x 0.8 (Port) XX XX VV VV 2-M5 x 0.8 (Hexagon socket head plug) 2-M5 x 0.8 (Hexagon socket head plug) MY1MG MY1MG (mm) A B C G GA GB H K J LD L LH LL LW MM N Model M NH NC NE NW PA 80 6 3.5 13.5 8.5 16.2 40 10 M5 x 0.8 3.6 80 22.5 40 54 M4 x 0.7 20 MY1M16 14 28 56 40 6 27.7 100 7.5 4.5 12.5 12.5 20 46 12 M6 x 1 4.8 100 23 50 58 M5 x 0.8 25 MY1M20 7.5 33.7 17 34 60 50 Detailed Dimensions of

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

M5 (18) M5 (10) 5.5 (16.5) 0.005 0.014 0 0.043 8 16 50 40 13 22 5 2 8 12 1.0 43 M5 11-2-15 15 Series CRB2 Dimensions: 40 Single vane type/Double vane type CRB2BW40-S/D M5 x 0.8 depth 10 3-M5 x 0.8 depth 10 56 3-M5 x 0.8 depth 16 25 25 M5 x 0.8 depth 16 5.5 depth A port B port 11.5 10 g6 -0.005 -0.014 2 20 0 -0.030 4 6.5 10 30 45 Body B (mm) (90) h Keyway

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

M5 (18) M5 (10) 5.5 (16.5) 0 0.043 0.005 0.014 8 16 50 40 13 22 5 2 8 12 1.0 43 M5 11-2-15 15 Series CRB2 Dimensions: 40 Single vane type/Double vane type CRB2BW40-S/D M5 x 0.8 depth 10 3-M5 x 0.8 depth 10 56 3-M5 x 0.8 depth 16 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local

CRB2/CRBU2/CRB1

M5 (18) M5 (10) 5.5 (16.5) 0.005 0.014 0 0.043 8 16 50 40 13 22 5 2 8 12 1.0 43 M5 11 Series CRB2 Dimensions: 40 Single vane/Double vane type M5 x 0.8 with depth 10 CRB2BW40-S, D 3-M5 x 0.8 with depth 10 56 3-M5 x 0.8 with depth 16 25 25 A port B port 5.5 with depth M5 x 0.8 with depth 16 11.5 10g6 0.005 0.014 2 20 0 0.030 4 Vane type 6.5 10 30 45 Single

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(mm) (2) <M5, M6> Connection thread R <M5, M6> (1) A Weight (g) Model D P M L Nylon Urethane 2-applicable tubing D KQ2U23-M5 38 34.5 2.2 2.2 9 M5 x 0.8 10 1 8 KQ2U23-01S KQ2U23-02S 9.6 41 44 9.6 15.5 37 38 14 3.4 2.9 3.2 11 14 1 4 KQ2U04-M5 39.5 M5 x 0.8 M6 x 1.0 4 2.2 2.2 KQ2U04-M6 40 36 10 11 4 10.4 16 10.4 1 8 KQ2U04-01S 42 38 11 4.2 4.2 D 1 4 KQ2U04-02S 46 40 20 14 KQ2U06-M5 42.5 M5 x

4/5 Port Solenoid Valve

22 3 2.5 Manual override B A 11 A B 37.5 [39.7] G: Approx. 300 H: Approx. 600 (Lead wire length) 91.7 [96.1] (Light/surge voltage suppressor) 41.5 [48.5] + 35.6 26.1 R1 P R2 13 5 10 10 10 M5 x 0.8 (P, R1, R2 port) 17.5 14 28 L plug connector (L): SYJ3 40-L-M5 M plug connector (M): SYJ3 40-M-M5 M8 connector (WO): SYJ3 40(R)-WO-M5 3 4 5 3 4 5 3 4 5 Approx. 300 (Lead wire length) 41.5 [48.5

Vacuum Pad

x 0.8 40 70 With four M5 bolts 81 Series ZP Buffer Assembly Part No.

Vacuum Pad

x 0.8 40 70 With four M5 bolts 81 Series ZP Buffer Assembly Part No.

Vacuum Pad

x 0.8 40 70 With four M5 bolts 81 Series ZP Buffer Assembly Part No.