20

VMG1-06-150-300 VMG1-06-200-300 VMG1-06-150-600 VMG1-06-200-600 VMG1-06-150-100 VMG1-06-200-100 VMG1-06-150-150 VMG1-06-200-150 VMG1-08-250-100 VMG1-08-300-100 VMG1-08-350-100 VMG1-08-250-150 VMG1-08-300-150 VMG1-08-350-150 VMG1-08-250-300 VMG1-08-300-300 VMG1-08-350-300 VMG1-08-250-600 VMG1-08-300-600 VMG1-08-350-600 Nozzle size Nozzle length 1.5 2 1.5 2 1.5 2 1.5 2 2.5 3 3.5 2.5 3 3.5 2.5

Valve Single Unit

/30 Dusttight SYJ Mounting orientation Impact/Vibration resistance (m/s2)Note) Enclosure SX Made to Order Specifications (For details, refer to pages 1-6-124 to 1-6-138.)

48

Cylinder stroke [mm] Bore size Standard stroke [mm] 12 (10 x 2) 16 (12 x 2) 10, 20, 30, 50, 100 20 (16 x 2) 25 (20 x 2) 20, 30, 50, 100, 150 Port thread type Nil M thread 12 to 32 Rc 32 (25 x 2) 40 (32 x 2) 50 (40 x 2) 63 (45 x 2) 80 (56 x 2) 100 (71 x 2) 40 to 100 TN NPT TF G 25, 50, 100, 150, 200 Refer to page 4 for intermediate strokes.

ø 40, ø 50, ø 63, ø 80, ø 100 Series CLA2 Fine Lock Cylinder Double Acting, Single Rod

Auto Switch Proper Mounting Height [mm] Auto switch model D-B5l D-B64 D-B59W D-G5l D-K59 D-G5NT D-G5lW D-K59W D-G5BA D-G59F D-Z7l D-Z80 D-Y59l D-Y7P D-Y7BA D-Y7lW D-M9l D-M9lW D-M9lA D-A9l D-A3l D-G39 D-K39 D-A44 D-A5l D-A6l D-A59W D-Y69l D-Y7PV D-Y7lWV D-P3DWA D-P4DW D-M9lV D-M9lWV D-M9lAV D-A9lV Bore size Hs Ht Hs Ht Hs Ht Hs Ht Hs Ht Hs Ht Hs Ht Hs Hs Hs Hs Ht 40 30 30 34 30 31 30 30 30

LEC-OM02904

(L) W E L d 11 30 11 11.8 (1) ACPWM 30cm 10{IglIgnIgaK(Ig2Igm)}[mA](11.1) K NV M NV-SP NV-SW NV-CP NV-CW NV-HW 1 Ig1 Iga Ig2 Igm Ign BV-C1 NFB 3 NV-L Igl (11.3) Ig2 (11.3) Ign (FR-BIF-(H) ()4.4mA) Iga(11.6) Igm (11.5) 120 120 100 100 80 80 60 60 40 40 [mA] [mA] [mA] [mA] 20 20 0 2 0 2 100 5.5 14 38 14 100 5.5 38 8 3.5 22 60 150 8 3.5 22 60 150 30 80 30 80 2] [mm 2] [mm [mm2] [mm2]

33

Cooling Capacity HRSE012-A-10-(T) [50 Hz] [60 Hz] 1600 1400 1600 Ambient temperature Ambient temperature 0 200 400 600 800 1000 1200 1400 25C Cooling capacity [W] Cooling capacity [W] 25C 600 800 1000 1200 HRS HRS 090 35C 35C 0 200 400 HRS 100/150 0 10 20 30 40 0 10 20 30 40 HRSH 090 Circulating fluid temperature [C] Circulating fluid temperature [C] HRSH HRSE018-A-10-(T) [50 Hz] [60 Hz]

MGQ

MGQ 12, 16 M L 10, 20, 30, 40, 50, 75, 100 2020, 30, 40, 50, 75, 100 125, 150, 175, 200 Data MGQ 20, 25 M L M L MGQ 32, 40 50, 63 80, 100 25, 50, 75, 100, 125 150, 175, 200 OUT (N) IN (N) Theoretical Output (N) Bore size (mm) Operating pressure (MPa) Rod size (mm) Operating direction Piston area (mm2) 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1.0 Made to Order Specifications (For details, refer to

G15/G27

Max. display pressure Unit Symbol 2 7 10 P2 Note) P10 Note) 0.2 MPa 0.7 MPa 1.0 MPa 0.2 MPa, 30 psi 1.0 MPa, 150 psi Connection thread Size Symbol Note) This symbol must be used with Option X30. 02 R 1 4 656

CG1

(162) 150 (162) 182 (196) 182 (196) 10 (12) 20 25 32 40 50 63 80 100 12 12 12 13 14 14 20 20 2 2 2 2 2 2 3 3 26 31 38 47 58 72 89 M8 X 1.25 M10 X 1.25 M10 X 1.25 M14 X 1.5 M18 X 1.5 M18 X 1.5 M22 X 1.5 M26 X 1.5 12 14 18 25 30 32 40 50 14 5 6 6 8 11 11 13 16 6 8 10 14 18 18 22 26 69 (77) 69 (77) 71 (79) 78 (87) 90 (102) 90 (102) 108 (122) 108 (122) 8 10 12 16 20 20 25 30 13 17 17 19 27 27

Support Guide/11-LEFG Series

500 500 500 500 0 0 0 0 10 20 30 40 50 0 0 2 4 6 8 10 12 14 16 0 4 8 12 16 20 24 0 10 20 30 40 50 60 Work load [kg] Work load [kg] Work load [kg] Work load [kg] 2000 2000 2000 2000 Mey 1500 1500 1500 1500 L5 [mm] L5 [mm] L5 [mm] L5 [mm] m 1000 1000 1000 1000 Wall L5 Y 500 500 500 500 0 0 0 0 4 8 12 16 20 24 0 10 20 30 40 50 0 0 2 4 6 8 10 12 14 16 0 10 20 30 40 50 60 Work load [kg] Work load

Electric Actuator / Low profile slider type

40 50 Stroke[mm] Origin 50mm Motor side End side 10 20 30 40 50 60 Stroke[mm] Origin 50mm Motor side End side -50 -40 -30 -20 -10 0 Stroke[mm] Origin 50mm Motor side End side -40 -30 -20 -10 0 10 Stroke[mm] Origin 50mm Motor side End side -60 -50 -40 -30 -20 -10 Stroke[mm] -29- 4.

CV/MVGQ

5 57.5 28 M8 x 1.25 15 24 M20 x 1.5 20 0 0.033 26 0 0.033 26 0 0.033 32 0 0.039 10 10 45 30 14 9 22 13 5.5 9 19.5 17 6 63.5 33.5 M10 x 1.25 15 30 M26 x 1.5 12 10 45 30 14 9 22 13 5.5 9 19.5 17 6 68 37.5 M10 x 1.25 15 34.5 M26 x 1.5 14 15 50 39 18 10 24 16 7 11 22 8 76 46.5 M14 x 1.5 21.5 42.5 M32 x 2 21 Dimensions by Stroke Single Acting/Spring Extend Stroke 1 to 50 51 to 100 101 to 150

Compressed Air Preparation Filter

27 22 5.4 8.4 60 2.3 28 159.6 AFF30-D/AM30-D/AMD30-D 1/4, 3/8 53 178.1 21.5 26.5 30 35 26.5 41 35 25 6.5 13 71 2.3 32 219.8 AFF40-D/AM40-D/AMD40-D 1/4, 3/8, 1/2 70 223.5 25.5 35.5 38.4 40 35.5 50 52 30 8.5 12.5 88 2.3 39 263.3 AFF50-D/AM50-D/AMD50-D 3/4, 1 90 237.7 32 45 30 45 70 66 40.5 11 13 113 3.2 52.5 259.2 AFF60-D/AM60-D/AMD60-D 1 90 314.8 32 45 30 45 70 66 40.5 11 13 113 3.2 52.5

ARM10/11

L 21 273 22 285.5 23 298 24 310.5 25 323 26 335.5 27 348 28 360.5 29 373 30 385.5 ITV NO.

ARM10/11

L 21 273 22 285.5 23 298 24 310.5 25 323 26 335.5 27 348 28 360.5 29 373 30 385.5 ITV NO.

Aluminum High Vacuum Angle Valve

-30-1-1 XLF80-30-1 XLF80A-30-1 XLF80-30-1H XLF80A-30-1H XLFV80-30-1 XLFV80A-30-1 XLD80-30-1 XLD80-30-1H XLDV80-30-1 XLG80-30-1-1 XLG80-30-1H-1 XLGV80-30-1 63 XLA63-30-1 XLA63A-30-1 XLA63-30-1H XLA63A-30-1H XLAV63-30-1 XLAV63A-30-1 XLC63-30-1-1 XLC63-30-1H-1 XLCV63-30-1-1 XLF63-30-1 XLF63A-30-1 XLF63-30-1H XLF63A-30-1H XLFV63-30-1 XLFV63A-30-1 XLD63-30-1 XLD63-30-1H XLDV63-30-1 XLG63-30-1

Water-cooledThermo-chiller

Breaker Operating Characteristics Common for all models 4 h 2 h 1 h 5 s 10 s 20 s 30 s 1 min 2 min 4 min 6 min 10 min 14 min 20 min 30 min Max.

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

400 400 400 200 200 200 0 0 0 0 10 20 30 40 50 60 70 0 10 20 30 40 50 0 5 10 15 20 25 30 35 Work load [kg] Work load [kg] Work load [kg] 1000 1000 1000 800 800 800 L4 [mm] L4 [mm] L4 [mm] 600 600 600 L4 X 400 400 400 200 200 200 0 0 0 0 10 20 30 40 50 0 10 20 30 40 50 60 70 0 5 10 15 20 25 30 35 Work load [kg] Work load [kg] Work load [kg] 1000 1000 1000 800 800 800 Mey L5 [mm] L5 [mm] L5

100

Specific Product Precautions 22 A ZL3/ZL6 Series Exhaust Characteristics (Representative value) ZL3H ZL3M 100 90 80 70 60 50 40 30 20 10 0 100 90 80 70 60 50 40 30 20 10 0 0.3 0.4 0.5 400 500 450 400 350 300 250 200 150 100 50 0 0.2 0.6 Vacuum pressure Suction flow rate [L/min(ANR)] Air consumption [L/min(ANR)] Suction flow rate [L/min(ANR)] Air consumption [L/min(ANR)] Vacuum pressure 350

Modular F.R.L. Units

of 6P (L, R, Z) is 0.2 to 0.6 MPa (30 to 90 psi). 2 For pipe thread type: NPT only.