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PSE200

release verification P2(n1) > P1(n2) P2(n2) P1(n1) 101.0 to 101.0kPa MPa kPa P2(n1) < P1(n2) P2(n2) P1(n1) 10.0 to 101.0kPa Adsorption verification OUT1 OUT2 Supply pressure verification Leak test P2(n1) > P1(n2) P2(n2) P1(n1) 10.0 to 101.0kPa CH Increases the set value 1 2 3 4 PRESSURE For normally closed P2(n1) > P1(n2) P2(n2) P1(n1) 0.1 to 1000.0MPa Decreases the set value SET P3(n3

Table of Contents

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com OUT2 CH Increases the set value Decreases the set value 1 2 3 4 n2 n1 n4 n3 High pressure:Compound pressure type Positive pressure type High vacuum: Vacuum type PRESSURE For normally closed ZSP SET ISA2 Note) If the hysteresis is set for less than 2 digits

PSE530/200

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com OUT2 CH Increases the set value Decreases the set value 1 2 3 4 n2 n1 n4 n3 High pressure:Compound pressure type Positive pressure type High vacuum: Vacuum type PRESSURE For normally closed ZSP SET ISA2 Note) If the hysteresis is set for less than 2 digits

Series SY3000/5000 Valve Replacement Parts 1 How to Order Port Block Assembly Mounting screw 0V 6A SY One-touch fitting Series Thread type 3 3000 Nil Rc 5 F 5000 G N NPT T NPTF Pilot type ∗ Except M5 Nil Internal pilot R External pilot A, B port size Thre

SY3000 SY5000 Port size 2 One-touch fitting 3.2 One-touch fitting 4 One-touch fitting 6 One-touch fitting 8 One-touch fitting 1/8" One-touch fitting 5/32" One-touch fitting 1/4" One-touch fitting 5/16" One-touch fitting VVQ1000-50A-C2 VVQ1000-50A-C3 VVQ1000-50A-C4 VVQ1000-50A-C6 VVQ1000-50A-N1 VVQ1000-50A-N3 VVQ1000-50A-N7 VVQ1000-51A-C4 VVQ1000-51A-C6 VVQ1000-51A-C8 VVQ1000-51A-N3 VVQ1000

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Dedicated Controller Series LC1 Uniaxial Type

Mounting bracket Ass'y Mounting screws Controller model M3 x 0.5 LC1-1-N3 LC1-1B-N3 M5 x 0.8 LC1-1-N5 LC1-1B-N5 M3 LC1-1-L3 LC1-1B-L3 M5 LC1-1-L5 LC1-1B-L5 Note) This controller comes with either the T-nuts or T-brackets as accessories.

Multi-Channel Controller Series PSE200, Pressure Sensor Series PSE530

release verification P2(n1) > P1(n2) P2(n2) P1(n1) 101.0 to 101.0kPa MPa kPa P2(n1) < P1(n2) P2(n2) P1(n1) 10.0 to 101.0kPa Adsorption verification OUT1 OUT2 Supply pressure verification Leak test P2(n1) > P1(n2) P2(n2) P1(n1) 10.0 to 101.0kPa CH Increases the set value 1 2 3 4 PRESSURE For normally closed P2(n1) > P1(n2) P2(n2) P1(n1) 0.1 to 1000.0MPa Decreases the set value SET P3(n3

5 Port Solenoid Valve Series SQ1000/2000

N1: 1/8 N3: 5/32 N7: 1/4 Top ports are indicated by LN.

Dedicated Controller

Controller model Mounting screw Mounting bracket assembly LC1-1H-N3 M3 x 0.5 LC1-1-N3 Power terminal: TB LC1-1H-N5 M5 x 0.8 LC1-1-N5 LC1-1H-L3 M3 LC1-1-L3 LC1-1H-L5 M5 LC1-1-L5 Communication connector: CN3 Motor power line connector: CN5 Mounting with T-nuts Regenerative absorption unit connector: CN6 Controller Command Setting List Actuator control commands Parameter value Classification

Intrinsically Safe Valve

(EA) 5 1 (P) 3 (EB) 8 One-touch fitting 10 One-touch fitting 53-SY9000 3-position exhaust center Warning 2 (B) (A) 4 Note) If a resin tubing is used, take precautions against static electricity. 12 One-touch fitting 4 Note 1) One-touch fitting (Inch size) Note) (EA) 5 1 (P) 3 (EB) Symbol Port size Applicable series 3-position pressure center N3 N7 N9 N9 N11 N9 N11 5/32" One-touch fitting

Compact Vacuum Unit Ejector/ Vacuum Pump System

ZB-OM00201-B (10) Vacuum (V) port Note10) Note 11) C2 Straight type2 One-touch tube fitting Metric size C4 Straight type 4 One-touch tube fitting N1 Straight type 1/8 One-touch tube fitting Inch size N3 Straight type 5/32 One-touch tube fitting L2 Elbow type 2 One-touch tube fitting Metric size L4 Elbow type 4 One-touch tube fitting LN1 Elbow type 1/8 One-touch tube fitting Inch size

SY3000/5000/7000/9000

5 32" SY3000 4 220 VAC [230 VAC] Made to Order 1 4" One-touch fitting for N7 3 position pressure center One-touch fitting for N3 5 32" Nil DC specifications of type D, Y, DO and YO is only available with 12 and 24 VDC.

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