Modular Style Regulator with Built-in Pressure Gauge Series ARG

MPa MPa MPa P P P P K K K K C C C C U U U U O O O O S S S S H H H H L L L L to to to to Mounting angles other than 45, 135, 225 and 315 are available through the Made to Order (page 29).

Remote Type Pressure Sensors/Pressure Sensor Controllers Series PSE

kPa PS ISA Pressure Sensor Controllers/Series PSE200/300 PSE PSE200 PSE300 IS Input/Output specifications NPN 2 outputs + 15 V outputs NPN 2 outputs + 420 mA outputs NPN 2 outputs + auto-shift input PNP 2 outputs + 15 V outputs PNP 2 outputs + 420 mA outputs PNP 2 outputs + auto-shift input ISG Input/Output specifications ZSM NPN 5 outputs + auto-shift input PNP 5 outputs + auto-shift

Vacuum Unit Ejector / Vacuum Pump System

Replacement Parts for Single Unit/How to Order (Including single unit for manifold) (6) Valve assembly ZK2 VA A K 5 L A [1] [2] [3] [4] [1] Applicable system [2] Valve type A Ejector system K Supply valve: N.C., Release valve: N.C. R Supply valve: Self-holding release valve linked, Release valve: N.C.

LEH_C

51 (W) 9) 14 42 1) 1020 150 LEHZJ10,16:30(F.S.),LEHZJ20,25:25(F.S.) 2) () 3) 5m 5m 10%(15m 20%) 4) 5) () 6) () 7) () 452000Hz 1 () 8) () 9) 14 - 2.2.2 LEHZ 10 K 4 6N J 2 1 R 1 DIN 10 10 )DIN I/O (m) 16 16 2 0 2 0 25 25 1.5 1 1 L L 3 3 3 3 5 5 5 5 K K 2 LECP6 ( NPN NPN (mm) PNP PNP 10 LECP1 1 LECP1 ( 1 NPN NPN 1P 1P PNP PNP 4 4 10 (CR) AN LECPA ( AP AN LECPA 6 6 16

Thermo-chiller

input Contact input signal 1 4.7 k 3 1 k Internal circuit 10 Alarm status signal output Contact output signal 3 2 9 Remote status signal output Contact output signal 2 1 8 Contact output signal 1 Operation status signal output 0 The pin numbers and output signals can be set by user.

AC Servo Motor Driver

OPTIONS AND AUXILIARY EQUIPMENT (3) Outline drawing (a) EMC filter HF3010A-UN [Unit: mm] 3-M4 4-5.5 7 3-M4 M4 32 2 110 4 85 2 IN Approx.41 258 4 65 4 273 2 288 4 300 5 HF3030A-UN HF-3040A-UN 6-K 3-L 3-L G 1 F 2 E 1 D 2 M J 2 C 1 C 1 H 2 B 2 A 5 Dimensions [mm] Model A B C D E F G H J K L M HF3030A-UN 260 210 85 155 140 125 44 140 70 R3.25, M5 M4 length 8 HF3040A-UN 260 210 85 155 140 125

Fieldbus System

B: Locking type (Tool required) 2-position double (Metal) 4-position dual 3-port valve (B) 2(B) 4(A) K Note 2) High pressure type (1.0 MPa, 0.95 W) N Note 3) Negative common R Note 4) External pilot 2(B) (A)4 Note) B B A (R1)5 1 (P) 3(R2) 1(P) 5(R1) 3(R2) N.O. N.O. 2 Note 1) When multiple symbols are specified, indicate them alphabetically.

Compressed Air Cleaning Filter Series

Y300 2 pcs.

Secondary Batteries

Note 2) Assembly of a bracket and set nuts (90-AR30 and 90-AR40, 90-AR25(K) to 90-AR40(K)) Including 2 mounting screws for the 90-AR50(K) and 90-AR60(K). Note 3) The only difference from the standard specifications is the adjusting spring for the regulator. It does not restrict the setting of 0.2 MPa or more. Note 4) : For thread type: NPT.

15

Note 2) Refer to Best Pneumatics No. 2-1 for lead wire lengths.

MGP

P PB GB GA 2-P Q J K (Plug) PA + Stroke S G FA FB C + Stroke Refer to "Manufacture of Intermediate Strokes" on page 2 for intermediate strokes other than the standard strokes.

MGG

M N C D 4-O T Q 2-P S U W E B K L AA A R X AB I AP Y + Stroke Z + Stroke J V 8-AF AC AD AE 100 piston rod end connection For standard strokes (mm) Bore size (mm) Stroke range (mm) AC G H AB AF AA AE AD F N M D L C K B J AP I A E 63 80 100 75, 100 125, 150 200, 250 300 15 20 depth 14.5 M16 x 2 depth 28 25 25 50 170 13.5 100 66 140 180 30 135 M12 x 1.75 depth 24 228 117 60 65 200 200 15 20

Air Cylinder: Standard/Non-rotating Rod Double Acting/Single Acting, Single Rod/Double Rod Series NCM ø3/4", ø7/8", ø1 1/16", ø1 1/4", ø1 1/2", ø2" 1

D-H7NF D-C73C 0.6 + 2(n 2 2 ) (n = 2, 4, 6) C-C80C 0.6 3.1 3.1 + 2(n 2) 0.4 D-H7C 0.8 + 2(n 2 2 ) (n = 2, 4, 6) D-H7LF 0.8 2.8 2.8 + 2(n 2) 0.4 0.6 + 2(n 2 2 ) (n = 2, 4, 6) D-B5 0.6 2.7 2.7 + 2.2(n 2) 0.4 D-B6 0.8 + 2(n 2 2 ) (n = 2, 4, 6) D-B59W 0.8 2.9 2.9 + 2.2(n 2) 0.6 0.6 + 2(n 2 2 ) (n = 2, 4, 6) D-G59 0.6 2.8 2.8 + 2(n 2) 0.4 D-K59 6-14-6 7 Series NCM Construction: Double

24

1 pc. 5 *1 5 2 pcs. 10 *1 10 D-A9V 1 pc. 5 2 pcs. 10 D-Z7 D-Z80 1 pc. 5 *1 5 2 pcs. 10 D-Y59 D-Y7P 1 pc. 5 *1 5 2 pcs. 10 D-Y69 D-Y7PV 1 pc. 5 2 pcs. 5 D-Y7W D-Y7WV 1 pc. 5 *2 2 pcs. 10 *2 D-Y7BA 1 pc. 5 *2 2 pcs. 10 *2 D-P3DWA 1 pc. 15 2 pcs. 15 D-P4DW 1 pc. 5 *2, 3 2 pcs.

MG

2 !0 r o @2 e !

MGP

2 !3 !

Series 10-, 21- AR-B Regulator, Series 10-, 21- ARK-B Regulator with Backflow Function

Note 2) Option B, G, H are not assembled and supplied loose at the time of shipment. Note 3) Assembly of a bracket and set nuts (10-/21-AR20(K)-B to AR40(K)-B) Including 2 mounting screws for the 10-/21-AR50(K)-B, AR60(K)-B Note 4) The only difference from the standard specifications is the adjusting spring for the regulator. It does not restrict the setting of 0.2 MPa or more.

HRS100/150

Contact input signal 2 Circuit diagram 4 1 k 11 Run/stop signal input Contact input signal 1 4.7 k 3 1 k Internal circuit 10 Alarm status signal output Contact output signal 3 2 9 Remote status signal output Contact output signal 2 1 8 Operation status signal output Contact output signal 1 0 * The pin numbers and output signals can be set by user.

Table of Contents

Note 2) indicates the control type (0 for meter-out and 1 for meter-in). JIS Symbol 15-9-19 2 Series AS How to Order 2 2 1 U02 06 K AS 1F Nil Option Body size 2 3 4 1/8, 1/4 standard 3/8 standard 1/2 standard None Hexagonal lock nut Electroless nickel plated K N If more than one option is required, write option part numbers in the order of K, N. Applicable tubing O.D.

Electric Actuator

PROFIBUS DP V1 9.6 k/19.2 k/45.45 k/ 93.75 k/187.5 k/500 k/ 1.5 M/3 M/6 M/12 M 156 k/625 k/2.5 M /5 M/10 M Communication speed [bps] 10 M/100 M 125 k/250 k/500 k Configuration file Note 2) GSD file EDS file EDS file Communication specifications Input 896 points 108 words 4 stations occupied (8 times setting) Input 57 words Output 57 words Input 256 bytes Output 256 bytes Input 200 bytes