5 Port Solenoid Valve Note 2) As an optional specification, the maximum number of stations can be increased by special wiring specifications. 654 B VQC5000 Series S VQC5000 Kit (Serial transmission kit): For EX600 Integrated-type (I/O) Serial Transmission System IP67 compliant VV5QC51 S kit (Serial transmission kit: EX600) Power supply with M12 connector L2 L1 47n2 + 82.5 5.5 4.4 10 8 26 47 x n2 47 59.5 P = 41
)(Ar)(CO2) CO21/2 <> [F 3] [FLU] N2 [F 3] -28No.PF-OMJ0005CN-I [F 4] 20 1 atm() 0 1 atm() <> [F 4] [rEF] 0.927= [F 4] -29No.PF-OMJ0005CN-I [F 5] <> [F 5] [rES] [F 5] -30No.PF-OMJ0005CN-I [F 6] <> [F 6] [dSP] [F 6] 9 L3 3 1 "0" -31No.PF-OMJ0005CN-I [F 7] "0" [---] 0 30ms GND <> [F 7] [inP] [F 7] [F 1][F 2] -32No.PF-OMJ0005CN-I <> PFM710n_11.6H_10.4() ON/OFFONn_1 OFF(n
-2No.PF-OMO0004CN-E / 1 1.5 *3) 1 1 [] -3No.PF-OMO0004CN-E () () () N2 () -4No.PF-OMO0004CN-E () * UL UL1310 2 UL1585 2 ,30[Vrms]42.4[V ] 2 UL , 100 N2 050 () JISB 8392-1 1.1.21.6.2 -5No.PF-OMO0004CN-E * FG (49 N () ,IN () () -6No.PF-OMO0004CN-E * 6 33 () 30 m DC(-)() -7No.PF-OMO0004CN-E * () () CE 050 -8No.PF-OMO0004CN-E * 10 /23% 3 * OUT * 23 -9No.PF-OMO0004CN-E PFMB
-2No.PF-OMP0001CN-F / 1 1.5 *3) 1 1 [] -3No.PF-OMP0001CN-F () () () N2 () -4No.PF-OMP0001CN-F () * , 100 N2 050 () JISB 8392-1 1.1.21.6.2 -5No.PF-OMP0001CN-F * FG (49 N ,IN () () -6No.PF-OMP0001CN-F * 6 33 () 10 m DC(-)() -7No.PF-OMP0001CN-F * () () CE 050 -8No.PF-OMP0001CN-F * 1015 10 /23% 3 LCD * OUT -9No.PF-OMP0001CN-F / PFMB 7 7 A*8 *8 2 501 5500 L/min 102 101000
-2No.PF-OMS0001CN-A / 1 1.5 *3) 1 1 [] -3No.PF-OMS0001CN-A () () () N2 () -4No.PF-OMS0001CN-A () * * UL UL1310 2 UL1585 2 30[Vrms] 42.4[V ]2 UL , 100 N2 050 () JISB 8392-1 1.1.21.6.2 -5No.PF-OMS0001CN-A * FG (49 N 9022545 ,IN () () -6No.PF-OMS0001CN-A * () 6 33 () 10 m DC(-)() -7No.PF-OMS0001CN-A * () () CE 050 -8No.PF-OMS0001CN-A * 1015 10 /23% 3 LCD * OUT -9No.PF-OMS0001CN-A
(Limit to rewrite: 1,500,000 times) The applicable fluids for this product are dry air and N2. The operating fluid temperature range is 0 to 50 oC. Before designing piping confirm the pressure loss (Characteristic data) at the sensor from the pressure loss graph. Confirm pressure loss of the sensor from the characteristics data.
(Limit to rewrite: 1,500,000 times) The applicable fluids for this product are dry air and N2. The operating fluid temperature range is 0 to 50 oC. Before designing piping confirm the pressure loss (Characteristic data) at the sensor from the pressure loss graph. Confirm pressure loss of the sensor from the characteristics data.
(Limit to rewrite: 1,500,000 times) The applicable fluids for this product are dry air and N2. The operating fluid temperature range is 0 to 50 oC. Before designing piping confirm the pressure loss (Characteristic data) at the sensor from the pressure loss graph. Confirm pressure loss of the sensor from the characteristics data.
C Fluid N2 add 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2022 SMC Corporation All Rights Reserved
B: Fluid N2 add Specifications: Note 3) add 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2022 SMC Corporation All Rights Reserved
If the error cannot be reset after the above measures are taken, then please contact SMC. -20No.PF-OMJ0016-J Specification Specifications Model PFM510 PFM525 PFM550 PFM511 Applicable fluid Dry air, N2, Ar, CO2 (air quality class to ISO8573-1 1.1.2 to 1.6.2) Dry air, N2, Ar 0.2 to 10 L/min 0.5 to 25 L/min 1 to 50 L/min 2 to 100 L/min Rated flow range CO2 0.2 to 5 L/min 0.5 to 12.5 L/min 1
Multiple units available with unit switching function Display units can be easily selected. mmHg kPa PSI kgf/cm bar Vacuum Positive Pressure MPa PSI kgf/cm bar Variety of switch output modes Sensors Measuring Instruments ON ON Hysteresis mode OFF OFF P2 P1 n2 n1 (Standard) (Inverted) Window comparator mode ON ON OFF OFF n1 n2 P1 P2 (Standard) (Inverted) Exact detection of atmospheric
OUT Standard specification Option Note) Water (Standard, up to 40C) Air (Standard, Dry) Turbine oil Vacuum (up to 1.3 x102 Pa) Carbon dioxide (CO2), Nitrogen gas (N2) Vacuum (up to 1.3 x101 Pa) (V, M) Non-leak (106 Pa m3/s or less) (V, M) IN N.O.
Flow control of N2 gas to detection camera shimmering for prevention of lead frame oxidation Flow rate control of high frequency electric power supply cooling water for wafer temperature regulation l/min is used as the flow rate indicator unit on this flow switch, and the mass flow is converted and notated under conditions of 0C and 1atm.
Applicable Fluids Standard Option (1) Water (Standard, Up to 40C) Air (Standard, dry), Turbine oil Vacuum (Up to 1 Torr) Carbon dioxide (CO2), Nitrogen gas(N2) Freon11, 113, 114 Vacuum (Up to 103 Torr) (V, M) Non-leak (105 atm cc/sec or less) (V, M) Symbol N.C.
kPa) inch (mm) FV4 MV4 TW4 760 0 2.78 (70.6) 700 -8 2.12 (53.8) Delivery pressure (mmHg abs) Derivery pressure (kPa) 600 -21 500 -35 400 -48 300 -61 200 -75 100 -88 0 -101 0 1 2 3 4 5 6 7 8 Flow rate (slpm, N2) Hastelloy is a registered trademark of Haynes International.
Pilot valve symbol 200 AC 110 AC 220 AC 12 DC 100 AC 24 DC q K1 K1 K2 J1 J1 J2 Q1 Q2 N1 N2 Nil Y w e Nil r Nil Y t y Nil u Nil i Nil o Nil !0 Nil Combinations q to !
[PA05] = 0(Initial value) Initial value 0 correspond to "Number of command input pulses per revolution." 262144 [pulses/rev]. 1 [PA06] [Number of command input pulses per revolution]P = 1000 [PA07] [PA06] 1 [PA07] [Actuator lead L [mm] ] n1/n2 6 1 [P]10[m] P: Travel amount per 1 command pulse [m] n1/n2: Pulley ratio *1 Ex.)
resolution is 1048576 [Pulse/rev] P Travel amount per 1 command pulse [m] n1/n2 Pulley ratio *1 Ex.)
resolution is 1048576 [Pulse/rev] P Travel amount per 1 command pulse [m] n1/n2 Pulley ratio *1 Ex.)