SZ3000

SZ3B60 [N.C. valve x 2 pcs.] 4(A) 2(B) r t !0 !1 i w w u 6 e 5(R) SOL.a SOL.b 3(R) 1(P) SZ3B60K/With back pressure check valve 4(A) 2(B) 5(R) SOL.a SOL.b 3(R) 1(P) o 5 (R) 1 (P) 3 (R) SZ3C60 [N.C. valve, N.O. valve 1 pc. each] SZ3C60 [N.C. valve, N.O. valve 1 pc. each] 4(A) 2(B) r u !0 !

5 Port Solenoid Valve

4(A), 2(B) port Bottom ported <P/R port side> 34.5 47.7 P 1 R 3 3 R X 12 P = 25 65.5 U side n PE B 2 A 4 3 SMC A B B 2 A 4 2 SMC A B A 4 B 2 1 SMC A B Stations PE P 1 D side 12 X 2n x 1/4" 4(A), 2(B) port Other dimensions are the same as the side ported type.

Series 10-SZ3000 5 Port Solenoid Valve Cassette Type Manifold

Fittings & Tubing Air Cylinders Rotary Actuators One-touch fitting [1(P), 3(R) port] Applicable tubing O.D.: 8, 5/16" [With External Pilot Specifications] 13.3 25 (Pitch) P = 10.5 25 13.3 16.2 16.2 17 36.7 34 34 B 2 B 2 PE B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 R 3 R 3 R 3 R 3 P 1 P 1 P 1 P 1 A 4 A 4 X A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 One-touch fitting (X, PE port) Applicable tubing O.D.: 6, 1/4"

Battery-less

/Belt Drive LEFB Series Battery-less Absolute (Step Motor 24 VDC) p. 12 Model Selection p. 13 How to Order p. 43 Specifications p. 45 Weight p. 45 Construction p. 46 Dimensions p. 47 Rod Type LEY Series Battery-less Absolute (Step Motor 24 VDC) p. 54 Model Selection p. 55 How to Order p. 61 Specifications p. 63 Weight p. 64 Construction p. 65 Dimensions p. 67 Guide Rod Type

AC

ITV VBA Simplified pilot circuit VE E-P HYREG VY R G Application examples Capable of performing multistage pressure control and stepless pressure control by varying the electrical signals.

Table of Contents

Port size Rc1/4, NPT1/4, G1/4(ISO1179) U P DOWN U P DOWN U P DOWN SET SET SET Model with initial display settings of PSI is also available as standard.

VFR

Piping port 3 8 03 04 06 1 2 3 4 3-5-79 80 Series VFR5000 Construction 2 position single 2 position double VFR520 VFR510 (B) (A) 4 2 (B) (A) 4 2 (EA)(P)(EB) 5 1 3 (EA)(P)(EB) 5 1 3 r u e t r u q o e !

Table of Contents

Dedicated Controller/LC1 P.73 Controller setup software P.80 Dedicated teaching box P.82 Options P.85 Dedicated Regenerative Absorption Unit/LC7R P.86 Non-standard Motor Compatible Drivers P.89 73 2 Series LC1 Controller Single Axis Type Built-in AC Servo Driver Series LTF: Standard Motor Compatible How to Order 2V LC1 F 1 H 1 L 3 Number of axes Mounting bracket 1 3 5 1 axis M3

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SZ3000

SZ3B60 [N.C. valve x 2pcs.] 4 (A) 2 (B) SOL.b 5 (R) SOL.a 3 (R) 1 (P) SZ3B60K/With back pressure check valve 4 (A) 2 (B) 5 (R) SOL.a SOL.b 3 (R) 1 (P) 5 (R) 1 (P) 3 (R) SZ3C60 [N.C valve, N.O. valve 1pc. each] SZ3C60 [N.C. valve, N.O. valve 1pc. each] 4 (A) 2 (B) SOL.b 5 (R) SOL.a 3 (R) 1 (P) SZ3C60K/With back pressure check valve 4 (A) 2 (B) SOL.b 5 (R) SOL.a 3 (R) 1 (P) 5 (R) 1 (P) 3 (R

ZP

Applicable pad 04U/06U/08U Applicable pad 10U/16U Applicable pad 25U/32U Applicable pad 40U/50U 4.9 30 R 30 R R 25 30 R R R R 10.5 9.5 2 8 9 25 R 2 0.5 6 7 7 8 R R R R R R 45 45 45 2.7 1 R R 2.5 4.5 5 6.6 R 2.5 3.8 4.9 3.5 5 6 7.9 R 4.5 8 9 11.7 11.7 Note) R part has to be smooth with no corners.

1.1 LINEAR ACTUATORS: AIR CYLINDERS SERIES NCJ2 SERIES NCJ2 BORE SIZES Ø6•10•16 Double Acting Single Rod / Double Rod Single Spring Return / Extend Compact and Lightweight Auto Switch Sensing Optional M A D E I N USA Non Rotating Piston Rod Optional High

N301 DETAILS OF YOUR LOCAL SALES OFFICE 1.12 LINEAR ACTUATORS: AIR CYLINDERS SERIES NCJ2 H O W T O O R D E R NCJ2 N O N-R O TAT I N G S I N G L E A C T I N G S P R I N G R E T U R N / S P R I N G E X T E N D C Y L I N D E R PART NUMBER OF MOUNTING BRACKETS Mounting Bracket Bore Size (mm) NC J2K 10 16 Foot NCJ-L010B NCJ-L016B NC J2K Flange NCJ-F010B NCJ-F016B A U T O S W I T C H C A P A B

VS 8-2/VS 8-4

P.3, 12 P.3, 12 D-sub connector D-sub connector 25 pins 26 pins Terminal block is compactly arranged on one side. ( ( ) ) ( ) ( ) ( ) Conforming to MIL D-sub connector P.3, 13 P.3, 13 F kit Flat ribbon cable Flat ribbon cable Conforming to MIL flat ribbon cable connector P.3, 15 P.3, 15 P kit Series VS 8-2/VS 8-4 S R S R Conforms to ISO 15407-2 Standard 5 Port Solenoid Valve/Plug-in Type

Proposals for Energy Saving

R 1/8 R 1/4 R 1/8 R 1/4 R 3/8 R 1/2 R 3/8 R 1/2 R 3/4 R 1/8 R 1/4 R 1/8 R 1/4 R 3/8 R 1/2 R 3/8 R 1/2 R 3/4 KK3S-01MS -02MS KK4S-01MS -02MS -03MS -04MS KK6S-03MS -04MS -06MS KK3P-01MS -02MS KK4P-01MS -02MS -03MS -04MS KK6P-03MS -04MS -06MS 1/8 1/8 1/4 1/4 1/2 1/2 Female thread type Female thread type Body size Port size Part no. Body size Port size Part no.

ZP3

ZP3 T 015 U N A3 With adapter From p. 137 p. 160 From p. 162 ZP3 T 015 U N J 3 B3 With buffer From p. 140 p. 161 p. 164 q w e r t y u Flat type q Vacuum inlet direction w Pad diameter e Material Nil Pad unit T Vertical Y Lateral 015 1.5 02 2 035 3.5 N NBR S Silicone rubber1 U Urethane rubber F FKM GN Conductive NBR GS Conductive silicone rubber r Buffer specification t Buffer stroke J Rotating

Mechanically Jointed Rodless Cylinder Series MY1

MY1B16 to 100 MY1M16 to 63 MY1C16 to 63 MY1H16 to 40 L L R L L L L R R R R R L R R L Note 2) Note 2) R R L L O-ring L R Slide table operating direction Piping tube Note 2) For bottom piping, refer to the figure above.

7.5

0 o t r e w y (B) (A) 2 4 (B) (A) 2 4 4(A) 3 5 1 3 5 1 (EB) (P) (EA) (EB) (P) (EA) 2(B) i 5(EA)/3(EB) 1(P) 2 position double 2 position double 2 position double with back pressure check valve t r e w y q !1 u !

VQ7-6/7-8

1 (P) 5 (R1) 3 (R2) (A) 4 (B) 2 Side port Rc3/8 Bottom port Rc1/4 FHG Bottom port Rc3/8 1 (P) 5 (R1) 3 (R2) Port R is Rc3/8 (A) 4 (B) 2 Seal type FJG Nil R Metal seal Rubber seal 1 (P) 5 (R1) 3 (R2) (A) 4 (B) 2 Options FPG Nil N None Indicator light Indicator light with surge voltage suppressor Individual pilot exhaust 1 (P) 5 (R1) 3 (R2) (A) 4 (B) 2 Z FIG V 5 (R1) 3 (R2) 1 (P) Optional

VFS

Manifold Option Parts Interface regulator: ARBF2000-00-P-1 (Plug-in type) ARBF2000-00-P-2 (Non plug-in type) Individual SUP spacer: VVFS2000-P-01 02-1 (Plug-in type) VVFS2000-P-01 02-2 (Non plug-in type) Individual SUP spacer Interface regulator SUP port Individual EXH spacer: VVFS2000-R-01 02-1 (Plug-in type) VVFS2000-R-01 02-2 (Non plug-in type) Air shutoff valve spacer: VVFS2000-21A-1

VZ100/300/500

of P port and exhaust air from both sides of R port. 40R-2 Applicable solenoid valve VZ314RVZ324RApplicable blanking plate assembly DXT200-8-3A How to Order VV3Z3 40R 05 2 01 X port R port Stations P/R port Thread type P port A port side 2 stations 02 P port Nil Rc G NPT NPTF M5 01 M5 x 0.8 1/8 A port F N T 20 stations 20 R port Note) For more than 9 stations, supply air to both sides

Modular F.R.L. Units

High pressure 2.0 MPa (-X425) P.53 P.77 P.107 Low temperature 30 to 60C (-X430) P.53 P.77 P.106 High temperature 5 to 80C (-X440) P.53 P.77 P.106 Clean series (10-) P.54 P.63 P.80 P.80 P.111 P.111 Copper, fluorine and silicone-free + Low particle generation (21-) P.54 P.63 P.80 P.80 P.111 P.111 Related Product Modular adapter Example) Air filter + 3 port valve Easy modular connections for