NCQ2/CQ2

P P P P P P Rc1/8 NPT1/8 G1/8 P P P P P P Rc1/4 NPT1/4 G1/4 P P P P P P Rc1/4 NPT1/4 G1/4 P P P P P P Rc3/8 NPT3/8 G3/8 P P P P P P Rc3/8 NPT3/8 G3/8 P P P P Through-hole (Std.)

2/3 Port Valve

D, T S(1) S L, Z Refer to p.0-33 for Safety Instructions p.0-37 to 0-40 for common precautions.

High Vacuum Angle Valve

XLS-16XLS-16-P XLS-25XLS-25-P Description w y r e-1 e-2 XLS16-20G, C, T, D XLS16-20-P G XLS25-20G, C, T, D XLS25-20-P G Coil assembly Core assembly Armature assembly O-ring O-ring XLS16-30-1 XLS16-30-2 AS568-018V AS568-025V XLS25-30-1 XLS25-30-2 AS568-018V AS568-030V Note 1) In case of coil assembly, please enter voltage symbol in .

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

location, P/R port with One-touch fitting for 6 VZ1000-3A-1D r VZ1000-3A-1U t SUP/EXH block assembly VZ1000-2A-1M y Note) Block pin (2 pcs.) is attached for q, e, t, y.

CRB2/CRBU2/CRB1

T X Y Connecting port position Z RB1B 63 90 S E XC1C30 Without auto switch W C P RB1B 63 90 S T79L XC1C30 W E With auto switch CD P With solenoid valve (Refer to page 70.) Vane type Made to Order symbol Rotation Auto switch Size Shaft type Standard W Patterned sequence ordering J Refer to page 71.

Table of Contents

7 No. q w e r t y u i o !

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

7 No. q w e r t y u i o !

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

7 No. q w e r t y u i o !

Pin Clamp Cylinder Series C(L)KQG/C(L)KQP

G P G P t = 1 mm x 2 t = 0.5 mm x 2 (21) (6) 3 3 MK t = 1 mm x 2 t = 0.5 mm x 2 CKQ CLKQ (66) 330.05 330.05 CK1 38 With shims (Clamping height: HIGH type) With shims (Clamping height: LOW type) CLK2 33 33 (66) 72 120 38 C W W K 120 SR SR 65 (Guide tube O.D.)

Stability of suction position,

Pad Calculation W = P x S x 0.1 x 1 t W P S t : Lifting force [N] : Vacuum pressure [kPa] : Pad area [cm2] : Safety factor Horizontal lifting: 4 or more Vertical lifting: 8 or more ZP3 Horizontal lifting Vertical lifting ZP3E ZP3E This type of application should basically be avoided.

Vacuum Pad

Pad Calculation W P S t : Lifting force (N) : Vacuum pressure (kPa) : Pad area (cm 2) : Safety factor Horizontal lifting: 4 or more Vertical lifting: 8 or more W = P x S x 0.1 x 1 t Horizontal lifting Vertical lifting This type of application should basically be avoided.

Vacuum Pad

Pad Calculation W P S t : Lifting force (N) : Vacuum pressure (kPa) : Pad area (cm 2) : Safety factor Horizontal lifting: 4 or more Vertical lifting: 8 or more W = P x S x 0.1 x 1 t Horizontal lifting Vertical lifting This type of application should basically be avoided.

Vacuum Pad

Pad Calculation W P S t : Lifting force (N) : Vacuum pressure (kPa) : Pad area (cm 2) : Safety factor Horizontal lifting: 4 or more Vertical lifting: 8 or more W = P x S x 0.1 x 1 t Horizontal lifting Vertical lifting This type of application should basically be avoided.

Vacuum Pad

Pad Calculation W P S t : Lifting force (N) : Vacuum pressure (kPa) : Pad area (cm 2) : Safety factor Horizontal lifting: 4 or more Vertical lifting: 8 or more W = P x S x 0.1 x 1 t Horizontal lifting Vertical lifting This type of application should basically be avoided.

Fluoropolymer Piping Equipment

reducing LQ1E-T-R 3 4 5 P.905 6 2 Tubing extension union tee reducing LQ1T-T-R 3 4 5 P.906 6 Note) Basic size With reducer 868 Fluoropolymer Fittings Hyper Fittings Tubing O.D.

Modular Design with Uniform Body Style

1 q r e w t i y u o !0 !

VFR

0, Metal joint q, w, Terminal block i, O-ring e, r, t, y, u, Receptacle assembly Plug-in type 04 06 VFR5000-20-1AManifold block assembly !0 04 06 Manifold block !0, Metal joint q, w, O-ring e, r, t, y, u Non plug-in type End plate (U) !1, Metal joint q, w End plate (U) !1, Metal joint q, w End plate (D) !2, Metal joint q, w, O-ring e, r, t, y, u End plate (D) !

1.1

P. 195 Specified CFC P. 192 SV P. 196 T Temperature fuse P. 196 Thermal relay P. 198 Thermistor P. 196 Thermo couple P. 196 Thermoelectric device P. 193 Thermoelectric system P. 193 Thermo-module P. 193 Thermostat P. 196 Three-phase power supply P. 198 Time division proportional output P. 197 Turbine pump P. 194 U UL standards P. 199 V Vane pump P. 194 Vortex pump P. 194 W Water control

Compact Cylinder

P P Rc1/8 P P P P Rc1/8 P P Rc1/4 P P Rc1/4 P P Rc3/8 P P Rc3/8 P P P P Through-hole (Standard) Built-in magnet Pneumatic Air-hydro M5 x 0.8 M5 x 0.8 M5 x 0.8 M5 x 0.8 Piping Pipe thread NPT1/8 G1/8 P P P P NPT1/8 G1/8 P P P P NPT1/4 G1/4 P P P P NPT1/4 G1/4 P P P P NPT3/8 G3/8 P P P P NPT3/8 G3/8 P P P P 2.

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

fitting) C12 (12 One-touch fitting) P, EA, EB port Port size A, B port Manifold base weight W (g) n: Stations W = 66n + 246 Note 1) For more than 10 stations, supply pressure to P port on both sides and exhaust from EA/EB port on both sides.