Rated Vacuum Range: -101 to 0 kPa, Output Specification: P (PNP Open Collector 1 Output), Unit Specification: P (w/Unit Selection Function, Initial Value psi), Piping Specification: N01 (NPT 1/8), Option 1: w/o Lead Wire, Option 2: A1 (Bracket A, Vertical Mounting)

Rated Vacuum Range: F (-100 to 100 kPa), Output Specification: P (PNP Open Collector 1 Output), Unit Specification: P (w/Unit Selection Function, Initial Value psi), Piping Specification: N01 (NPT 1/8), Option 1: L (Lead Wire w/Connector, 2m), Option 2: A1 (Bracket A, Vertical Mounting), Option 3: K (Operation Manual, Calibration Certificate)

Rated Vacuum Range: -101 to 0 kPa, Output Specification: P (PNP Open Collector 1 Output), Unit Specification: P (w/Unit Selection Function, Initial Value psi), Piping Specification: N01 (NPT 1/8), Option 1: L (Lead Wire w/Connector, 2m), Option 2: A1 (Bracket A, Vertical Mounting), Option 3: K (Operation Manual, Calibration Certificate)

Output Specification: P (PNP Open Collector 1 Output), Unit Specification: P (w/Unit Selection Function, Initial Value psi), Piping Specification: N01 (NPT 1/8), Option 1: L (Lead Wire w/Connector, 2m), Option 2: A1 (Bracket A, Vertical Mounting)

Output Specification: P (PNP Open Collector 1 Output), Unit Specification: P (w/Unit Selection Function, Initial Value psi), Piping Specification: N01 (NPT 1/8), Option 1: L (Lead Wire w/Connector, 2m), Option 2: A1 (Bracket A, Vertical Mounting), Option 3: K (Operation Manual, Calibration Certificate)

Output Specification: P (PNP Open Collector 1 Output), Unit Specification: P (w/Unit Selection Function, Initial Value psi), Piping Specification: N01 (NPT 1/8), Option 1: w/o Lead Wire, Option 2: A1 (Bracket A, Vertical Mounting)

Output Specification: P (PNP Open Collector 1 Output), Unit Specification: P (w/Unit Selection Function, Initial Value psi), Piping Specification: N01 (NPT 1/8), Option 1: w/o Lead Wire, Option 2: A1 (Bracket A, Vertical Mounting), Option 3: K (Operation Manual, Calibration Certificate)

Output Specification: P (PNP Open Collector 1 Output), Unit Specification: P (w/Unit Selection Function, Initial Value psi), Piping Specification: N01 (NPT 1/8), Option 1: L (Lead Wire w/Connector, 2m), Option 2: A1 (Bracket A, Vertical Mounting), Option 3: T (w/o Operation Manual, Calibration Certificate)

MXS

Applicable Auto Switches /Refer to p.5.3-2 for further information on auto switch.

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

Calculate the load factor for each direction. x = Xc/Lx, y = Yc/Ly, z = Zc/Lz 5. Confirm the total of x, y, and z is 1 or less. x + y + z 1 When 1 is exceeded, please consider a reduction of acceleration and work load, or a change of the work load center position and series. Acceleration [mm/s2]: a Work load [kg]: m Work load center position [mm]: Xc/Yc/Zc z y 1. Horizontal 3.

Compact Type

3 y !1 e q !3 y !1 q @7 CXSJM20 to 32 CXSJL20 to 32 @5 i u !7 o !5 t !6 r !9 !8 @2 r !9 !8 @2 !6 o i u !7 !5 t #0 Rod cover Head cover Rod cover Head cover Parts List: Standard Piping No. Description Material No.

VM

-6-35 P . 5-6-48 P . 5-6-54 P . 5-6-32 P . 5-6-26 7 3 Balanced poppet 10.8 5 Rubber spool 18 5 Metal spool 9.9 5 Metal spool 18 5 Rubber spool 6 3 Balanced poppet Dual pressure is available only on external pilot. 5-6-3 Mechanical Valves Series VM Precautions Be sure to read before handling.

Regulator

AR-OMX0055-B PRODUCT NAME Regulator MODEL / Series / Product Number AR20(K)-(F,N)01(F,N)02(B,E,E1,E2,E3,E4,G,H,J,M)(-1,N,R,Y,Z,ZA)-D AR30(K)-(F,N)02(F,N)03(B,E,E1,E2,E3,E4,G,H,J,M)(-1,N,R,Y,Z,ZA)-D AR40(K)-(F,N)02(F,N)04(B,E,E1,E2,E3,E4,G,H,J,M)(-1,N,R,Y,Z,ZA)-D AR40(K)-(F,N)06(B,E,E1,E2,E3,E4,G,H,J,M)(-1,N,R,Y,Z,ZA)-D AR50(K)-(F,N)06(F,N)10(B,E,E1,E2,E3,E4,G,M)(-1,N,R,Y,Z,ZA)-D AR60(K)-(

LEC-OM07605CN

(1) LECSS2-T P+DP+CG3G4 G3G4 P+D P+D P P+ C C G3 D (3) (1) G4 5m 5 m (12) 1.

MRQ

F1 = X A1 X P . (1) F2 = X A2 X P . (2) 4 A1 = D2 . (3) 4 A2 = (D2 d2) . (4) F1 = Cylinder force generated on the extending side (N) F2 = Cylinder force generated on the retracting side (N) = Load rate A1 = Piston area on the extending side (mm2) A2 = Piston area on the retracting side (mm2) D = Tube bore size (mm) d = Piston rod diameter (mm) P = Operating pressure (MPa) While not

1

It is necessary to press down on the switch holder with your fingers to ensure that it does not move out of position. y Push the other clip of the switch holder into the square hole in the band, and fit these parts together.

CL

Single Knuckle Joint I-G02/G03 Material: Rolled steel I-G04 Material: Cast iron Y-G02/G03 Material: Rolled steel Y-G04 Material: Cast iron NDH10 (Hole dia.) NDH10 MM MM L L RR1 E1 E1 A1 U1 NX NZ NX L1 NZ A Applicable bore size (mm) A A1 E1 L1 MM U1 NX NZ L Applicable bore size (mm) Applicable pin part no. Part no. NDH10 Part no.

Clean Regulator/Fluororesin Type

t y r i r u i !

9.8

(ZSE/ISE30A) P Reduction in setting w Reduction in setting work ork P Pre Prevention of mistakes in setting vention of mistakes in setting P Reduction in setting work P Prevention of mistakes in setting Cop Copy Copy 1 switch Slave pressure switch Master pressure switch (source of copy) 2 switches 10 switches 3-step setting -step setting 3-step setting 1 2 3 Push Push Adjust to the set-value

5 Port Solenoid Valve Series SV1000/2000/3000/4000

P EtherCAT P P P EtherNet/IP P P P P P Open network Applicable valve series PROFIBUS DP P P P P P DeviceNet P P P P P P CC-Link P P P P P P P AS-Interface P CANopen P CompoNet SY (Plug-in connector connecting base) 3000 P P P P P P 5000 P P P P P P S0700 (Stacking base) 0700 P P P P P 1000 P P P P P P 2000 P P P P P P SV 3000 P P P P P P 4000 P 1000 P P P P P P VQC 2000 P P P P P P 4000 P